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Vacuum Pump Equipment Suppliers
Compiled by Terrence Thompson, Contributing Editor
This Vacuum Technology & Coating vacuum pump product showcase covers the wide variety of roughing pumps, high-vacuum pumps, very-high-vacuum pumps as well as vacuum pumps used in R&D applications.
The most cost-effective and practical means of achieving the desired vacuum, in most applications, is achieved by doing it in stages. Roughing/backing pumps provide that crucial first stage in a wide range of configurations. This is followed by using high-vacuum, veryhigh-vacuum or ultra-high vacuum pumps to achieve the end result low-pressure environment. Although this sounds straightforward, getting there involves many options and choices. Current generation pumps now span much wider ranges than those of recent years ago.
Vacuum pumps remove undesired specific gases, liquids and other contaminants, from a chamber in which a very low pressure exists, i.e., a vacuum. A vacuum could be simply defined as a volume of space that contains fewer atoms than a similar volume under normal atmospheric pressure. As you will see when perusing the product descriptions, pump manufacturers have some clever options that will make you look more closely at what is available and at what price to match your intended application.
Product Descriptions
In the following product descriptions, vendors make subtle but significant distinctions to focus on specific intended applications so direct comparisons may be difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at www.vactechmag.com and click on the Advertiser or Buyer’s Guide links for additional details or telephone numbers for calling to discuss your specific application requirements.
ATP Series Turbomolecular Pumps
The Adixen brand ATP turbomolecular vacuum pump line is a well-established product known for its reliability. The ATP turbomolecular series of pumps incorporate a robust machined rotor and stator, large conductance for faster pump down time, grease  lubricated bearings - allowing the pumps to be operated in any orientation, low rotational speed - providing increased resistance to air inrush and are field maintainable! Pumps are available in pumping speeds ranging from 80 to 900 liters/second for nitrogen, standard, corrosive and high-pressure corrosive versions.www.adixen.com
Maglev Hybrid Turbomolecular Pumps
The Adixen brands ATH-M series of Alcatel vacuum pumps are magnetically levitated. There is no mechanical contact; no friction and no wear resulting in no scheduled bearing  maintenance and reduced cost of ownership. The pumps are actively controlled, real time, in five axes through an automatic balancing system. Additionally, the pumps are designed for high throughput at high inlet pressure, are resistant against powder and provide a purge to prevent deposition build-up inside the pumps. No external batteries are required for these pumps because the rotor acts as a generator in the event of a power failure. Pumps are available in pumping speeds ranging from 500 to 3200 liters/second in heated or non-heated versions. Controller options include rack or pump mounted versions with discrete I/0, RS232/485, Profibus DP or DeviceNet communication.www.adixen.com
Maglev Turbomolecular Pump
The new Adixen brand Alcatel ATP2300M vacuum pump is magnetically levitated. There is no
mechanical contact; no friction and no wear resulting in no scheduled bearing maintenance and reduced cost of ownership. The pump is actively controlled, real time, in five axes through an automatic balancing system. Additionally, the pump is designed for optimal light gas efficiency with a pumping speed of 1,850 liters/second for Helium, is resistant against powder and provides a purge option to prevent deposition build-up inside the pumps. An external battery is not required for this pump because the rotor acts as a generator in the event of a power failure. Controller options include rack or pump mounted versions with discrete I/O, RS232/485, Profibus DP or DeviceNet communication.
Alcatel Vacuum Products, Inc.
Hingham,MA
www.adixen.com
Tel: 1-781-331-4200
E-mail: inquiry@adixen-usa.com
Cobra Dry Screw Vacuum Pumps
The Busch COBRA single stage, direct driven rotary screw dry vacuum pumps are designed for difficult applications in the pharmaceutical and chemical processing industries. The COBRA NC series, B version vacuum pumps incorporate a unique, monoblock, variable pitch screw design. The variable pitch design operates more efficiently, has a higher CFM to horsepower ratio, and lower operating temperatures than traditional dry screw vacuum pumps. The COBRA NC series, B version vacuum pumps provide vacuum down to .0075 torr, and pumping speeds up to 225 ACFM. They will operate at any pressure from atmospheric down to ultimate pressure. Direct cooled and closed loop radiator cooled models are available. For higher pumping speeds and lower ultimate pressure, Busch offers COBRA/booster systems along with many other custom designed vacuum systems. Standard Equipment includes NEMA C-face motor, explosion proof Class I, Groups C&D, Division 1, Service factor 1.15; cooling water flow control system (for direct cooled models); cooling water temperature switch and gauge; exhaust gas temperature switch; stainless steel exhaust silencer; exhaust check valve; stainless steel inlet flange; oil lubricated, mechanical shaft seals on the inlet shaft end; oil lubricated, mechanical shaft seals with piston ring labyrinth seals on the discharge shaft end; and purge regulator for discharge end labyrinth seals.
Busch Vacuum Pumps and Systems
Virginia Beach,VA
www.buschusa.com
Contact: Sam Buckles, Business DevelopmentManager
Tel: 1-757-463-7800
E-mail: sbuckles@buschusa.comW
New and Remanufactured Vacuum Pumps
Duniway Stockroom Corporation provides high-quality ion, mechanical, diffusion and turbo vacuum pumps, both new and used, at reasonable prices. We take pride in providing comprehensive information about our products and their applications for our customers. This business model has supported growth since our company was founded. Our knowledgeable customer service representatives provide informed assistance to help you meet your requirements. We have a large stock of new vacuum pumps, and in most cases, items are shipped the same day as ordered. Our wide access to used vacuum equipment and rebuilding services provides an additional excellent resource for low-cost solutions.
Duniway Stockroom Corp.
Mountain View, CA
www.duniway.com
Tel: 1-650-969-8811
E-mail: info@duniway.com
New EV-S Series Dry Vacuum Pumps
EBARA Technologies Inc., Components Division, announces the new EV-S Series Dry Vacuum Pump products. The EV-S Series pumps line compliments EBARA’s existing offering of Dry Vacuum pump systems. The EV-S Series pumps are an extreme power and footprint savings solution to your light duty pumping needs. EBARA’s EV-S Series Dry Vacuum pumps offer four models, the EV-S20, EV-S50, EV-S100 and EV-S200. These  Engery Savings Vacuum pumps provide pumping speeds from 58 CFM to 710 CFM. A pump idle mode allows the tool to send a remotely controlled signal to the save extra power. EBARA offers options on all EV-S pumps. A Nitrogen purging option dilutes hazardous gases to safe levels and a Niresist (Nickel alloy) option helps prevent corrosion. EBARA has responded to the market place demand for greater energy savings while decreasing the pump footprint and weight.www.ebaratech.com
New PDV Series Dry Vacuum Pumps
EBARA Technologies Inc., Components Division, announces the new PDV Series Dry Vacuum Pump products. The Portable Dry Vacuum (PDV) Series pumps line compliments EBARAs existing offering of Dry Vacuum pump systems. The PDV Series are a highly efficient cost effective solution to your clean gas pumping needs. EBARAs PDV Series Dry Vacuum pumps offer two models, the PDV250 and PDV500. These Portable Dry Vacuum pumps provide a maximum pumping speed of 8 CFM or 18 CFM while maintaining an ultimate pressure of 3 mtorr. EBARA has responded to the market place demand for greater reliability for small vacuum pumps. EBARA has responded to the demand for higher reliability for small dry vacuum pumps with the introduction of the PDV series. The PDV pumps are compact and durable pumps that are a perfect replacement for the maintenance intensive scroll and oil pumps. The PDV pumps require no costly preventative maintenance like tip seal replacement or oil changes.
EBARA Technologies, Inc.
Sacramento, CA
www.ebaratech.com
Tel: 1-916-920-5451
E-mail: jmakin@ebaratech.com
Scroll Pumps
Scroll pumps are a driving  force in the growing popularity of oil free pumping solutions and the Kurt J. Lesker Company has an extensive offering of scroll pumps from Edwards, ULVAC, Varian, as well as a Lesker-branded horizontal scroll pump. The Kurt J. Lesker Company offers single-stage  (industrial versions for greater continuous inlet pressures and improved vapor handling) and two-stage (for improved ultimate pressures) models with pumping speeds from 3.8 CFM to 25 CFM and ultimate pressures as low as 7.5 milliTorr. We have many pumps in stock and ready for same day shipment.www.lesker.com
Diaphragm Pumps
The Kurt J. Lesker Company offers an extensive line of dry diaphragm pumping solutions. Models range from tiny OEM models designed for integration into a manufactured tool or system, to large industrial models perfect for vacuum chuck, packaging equipment, and other manufacturing and medical solutions. The minimal maintenance, high reliability, excellent ultimate vacuum, and impressive pumping speeds make our diaphragm pumps the choice solution for many dry pumping applications. Our anti-corrosive Teflon series are perfect for corrosive or organic solvent applications and are often used to back turbomolecular pumps. With pumping speeds from 0.18 CFM up to 14 CFM and ultimate pressures as low as 2 Torr, we have a dry pump solution for you.www.lesker.com
Rotary Vane Pumps
With a large selection of rotary vane pumps, the Kurt J. Lesker Company can help you fill almost any need. While the trend towards dry pumps continues, oil sealed rotary vane pumps still remain the true workhorses of the industry in the rough and medium vacuum ranges. With many pumps and pump parts in stock and ready for same day shipment, the  Kurt J. Lesker Company can meet the need for single or dual stage rotary vane pumps ranging from 0.5 CFM to over 700 CFM. We also offer chemical series pumps and mechanical booster systems for dif- ficult applications and we carry all the major brands including Adixen, Edwards, Pfeiffer, Varian, Leybold, Welch, and ULVAC.www.lesker.com
LION™Series Ion Pumps
The Kurt J. Lesker Company LION™Series Ion Pumps are one of the most extensive ion pump offerings in the industry. Twenty-three standard models range in size from 0.2 L/s through 1200 L/s and include tall and low profile versions able to fit into just about any footprint. The standard Diode, Noble Diode, and Triode elements are offered by KJLC. Three controllers complete the offering with the ability to control up to four pumps simultaneously at no additional cost. The KJLC pumps and controllers can even be configured to be compatible with Varian ion pump equipment.www.lesker.com
Magnetically Levitated Turbomolecular Pumps
The Kurt J. Lesker Company offers a full line of magnetically levitated turbomolecular pumps from Shimadzu. Magnetic bearing turbo pumps are ideal for many situations and are used widely in both industry and R&D, from semiconductor to SEMs. Shimadzu's unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 1011for N2; and for some versions extends the fore-vacuum tolerance up to 30 Torr. Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry. Plus, they can be surprisingly affordable, even when compared to standard bearing turbo pumps.www.lesker.com
Vacuum Services Division
The Kurt J. Lesker Company Vacuum Services Division can help make servicing your current pumps quick and easy. The Kurt J. Lesker Company has knowledgeable OEM trained technicians, an expansive spare parts inventory, and turnaround times of less than a week for most pumps. KJLC can service a wide variety of pumps including rotary vanes, rotary piston, roots blowers, turbo pumps, diffusion pumps, and diaphragm pumps. We can even make shipping easy by coordinating pump pick up and providing you with special crates for most pumps under 25 CFM. We also offer a large inventory of remanufactured pumps that have been fully serviced and come with a full 12-month warranty. Please visit our website for an up-to-date listing of all our remanufactured pumps.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact:Walt See, ProductManager
Tel: 1-412.387.9035 or 1-800-245-1656
E-mail: walts@lesker.com
High Vacuum Diffusion Vacuum Pumps
Oerlikon Leybold Vacuum DIP Diffusion Pumps are the successors to the high-reliability DI Diffusion Pump line. Available in pumping speeds ranging from 3,000 to 50,000 L/sec with possible end vacuum to 0.75 × 10-8Torr, these diffusion pumps have been successfully installed in applications such as heat treatment / metallurgy, industrial coating and space simulations. When combined with our fore-vacuum pumps, boosters, gauging, hardware, valves and electrical controls, Oerlikon Leybold Vacuum can provide a total high vacuum system solution.www.oerlikon.com
Dry Compressing Screw Vacuum Pumps
The new DRYVAC®series dry-compression vacuum pumps by Oerlikon Leybold Vacuum have been designed to meet the special needs of applications in Industrial Coatings, Photovoltaic Production, Heat Treatments and Metallurgy and other Process Industry applications. DRYVAC has evolved from one design platform comprised of models 650 S, 650 S-i and 5000 RS-i. Multiple  pumping system combinations are also possible for gaining increased pumping speeds and vacuum levels by incorporating the RUVAC®line of vacuum boosters. DRYVAC features include improvements in leak tightness, energy efficiency and physical stature over competitive brands. Single pumps can achieve 7.5 × 10-Torr vacuum and over 2,900 CFM nominal displacement. The DRYVAC line is an environmentally friendly alternative to oil-sealed rotary piston and vane pump style vacuum pumps. With no lubricating oils contained in the pumps’ compression stage, DRYVAC offers an improved operating environment with no oil emissions, reduced maintenance, with less down-time and disposal steps resulting in lower operating costs for our customers.www.oerlikon.com
Turbomolecular Pumps - MAG
Oerlikon Leybold Vacuum’s line of turbomolecular pumps, with magnetically levitated rotors, are known as the MAG line. The line provides superior vacuum performance with models ranging in pumping speed from 830 L/sec to 3200 L/sec. The MAG line has been optimized to meet the vigorous requirements of the semiconductor industry, but is also commonly used in analytical, R&D, industrial coating and any UHV application where pressures from 10-1to 10-9Torr is required. The main features are 5-years of maintenance-free continuous operation, very low vibration, high strength rotors in two versions (classic turbine or compound design), corrosion proof coating on the rotors, automatic balancing, integrated temperature management system, purge gas valves and many more innovative features. The rugged design built into the MAG line with can withstand typical accidents and events that can occur in industrial environments such as shock venting, emergency shut-downs and other external shocks. All MAG pumps are operated from one fully programmable MAG digital controller.
Oerlikon Leybold Vacuum
Export, PA
www.oerlikon.com
Contact:MarioVitale,
RegionalMarketManager • Process Industry
Tel: 1-724-325-6565
E-mail: mario.vitale@oerlikon.com
HiPace™M Magnetically Levitated Turbopumps
The Pfeiffer Vacuum HiPace M series of high performance magnetically levitated turbopumps (300 l/s, 700 l/s and 800 l/s) achieve high pumping speeds and high compression ratios for all gases. These pumps are optimized to run in all orientations with a low vibration signature. An intrinsically low dynamic magnetic field does not interfere with even the most sensitive equipment, making them ideal for use in lab applications. An advanced rotor design provides unlimited rotor service life and dependable operation. HiPace M turbopumps are rated Protection Class IP54 for use in harsh industrial environments. Applications include analytical, industrial coatings, semiconductor fabrication, as well as a variety of uses in R&D and industry.www.pfeiffer-vacuum.com
Large HiPace™Turbopumps for High Performance and Reliability
Pfeiffer Vacuum HiPace™turbopumps are available in pumping
speeds from 1000 to 2000 l/s. They feature a new rotor design that reduces run-up time by 50% and provides high gas throughput for light (H2, He) and heavy gases (Ar, CF4). The use of aluminum housing and innovative materials makes this turbopump 40% lighter in weight and doubles the service life to five years between bearing changes. Integrated drive electronics reduces the need for bulky and costly cabling. The advanced rotor design and precise sensor technology of HiPace™turbopumps offer the highest level of safety in the market, including IP54 and SEMI S2protection classes. HiPace™is available in both standard and corrosive models, making them ideal for use in semiconductor applications where particulate contamination, high gas loads and corrosive gases are common. In addition, HiPace™is suitable for photovoltaic coating, industrial applications such as brazing furnaces, general sputter coating, and coating of architectural glass and ophthalmic lenses.www.pfeiffer-vacuum.com
HiPace•Fast Turbopumps from 10 to 700 l/s HiPace•turbopumps feature a new rotor design, providing reduced run-up time, higher gas throughput and exceptional compression for light gases. A variety of drive versions, including Profibus and DeviceNet, are available without an increase in package size. The compact HiPace•has integrated drive electronics, which reduces bulky and costly cabling. Innovative materials have doubled drive service life, while a proven Pfeiffer Vacuum bearing design ensures reliability, even in harsh applications. Available in pumping speeds from 10 to 700 l/s, HiPace•can be installed in any orientation.www.pfeiffer-vacuum.com
PentaLine•—The New Shape In Rotary Vane Pumps
Pfeiffer Vacuum PentaLine•rotary vanepumps, with a new optimized drive system, provides cost effective, environmentally friendly vacuum, for a wide range of applications in the low and medium vacuum range down to 10- 3mbar. Available in pumping speeds up to 35 m3/h, PentaLine•is hermetically sealed for leak-free vacuum, and provides compatible voltage for worldwide use. It’s standby operating mode provides a power savings that can reduce operating costs up to 50% and assures a longer service life. PentaLine•rotary vane pumps run noiselessly with minimum vibration assuring a cooler, quieter work environment.www.pfeiffer-vacuum.com
CombiLine•Roots Pumping Stations
Pfeiffer Vacuum CombiLine•pumping stations are a combination of a Roots pump or pumps and the following major components: rotary vane, turbo, dry,  liquid ring, cryo and/or diffusion pumps. It can also include gauges, analytical equipment and control systems, depending on application. Pfeiffer Vacuum has over 40 years of experience in building standard and customer-specific pumping stations.
Standard CombiLine•pumping stations include: CombiLine•Roots pumping stations with the single-stage or two-stage rotary vane pumps are designed for applications that require ultimate pressure of up to 3 × 10-4mbar such as metallurgy, helium leak detection and electron beam welding; CombiLine•Roots pumping station with the dry vacuum pumping are ideal for applications that require ultimate pressure of up to 5 × 10-
3mbar including coating, metallurgy, degassing plastics and vacuum drying. This series of pumping stations are dry and oil-free for contamination-sensitive processes. Pfeiffer Vacuum builds customer-specific pumping stations for applications that necessitate high pumping speeds and/or ultimate pressures of < 10-3mbar.www.pfeiffer-vacuum.com
Rotary Vane Pumps.
Pfeiffer Vacuum HenaLine™oil-sealed rotary vane pumps provide pumping speeds between 25 and 1,000 m3/h and are suitable for industrial and R&D applications.  These safe and reliable pumps feature an integrated oil mist separator, oil return system and safety valves, preventing contamination of the ambient air and safeguarding both the pump and the process system. A gas ballast valve assures pump-down of steam and other process vapors. HenaLine has a low operating temperature increasing the service life of the oil and eliminating the need for water cooling. These rotary vane pumps can be employed as either a stand-alone pump or as a backing pump. Used as a backing pump in Pfeiffer Vacuum CombiLine™Roots pumping stations, HenaLine pumps are ideal for applications in metallurgy, helium leak detection or vacuum drying and degassing.www.pfeiffer-vacuum.com
Dry Screw Pumps
Pfeiffer Vacuum HeptaDry™dry vacuum pumps are designed for low to medium industrial and coating applications where oilfree vacuum is required. Rugged, dependable and with low operating costs, HeptaDry offers pumping speeds from 100 to 600 m3/h. Coated, single-piece, variable-pitch rotors ensure the efficient internal compression of gases to reduce energy cost requirements and enable thermally sensitive gases to be pumped as well. Direct gas flow in the pump prevents deposits, while high-quality axial face seals between the bearing and suction chamber make for  increased reliability. These low-noise, cool running pumps are water cooled with a thermostatic valve. HeptaDry pumps are suitable for use as a stand-alone pump for processes up to 10-1mbar. They can be used in combination with Pfeiffer Vacuum Roots pumps, for an ultimate pressure of up to 5 × 10-3mbar in metallurgical, freeze-drying, load-locks, E-beam welding, vacuum filling and gas separation applications.www.pfeiffer-vacuum.com
Dry Turbo Pumping Station
The Pfeiffer Vacuum HiCube Eco is a complete dry turbomolecular vacuum pump station. This plug and play vacuum sta- tion includes a HiPace™80 turbopump,  a 1.1 m3/hr dry diaphragm pump and are available with a full range gauge and a choice of DN63ISO, KF40 and DN63CF flanges. It delivers a pumping speed of 67 l/s for N2 and an ultimate pressure of <10-8mbar. The DCU permits control and diagnostics of the HiCube™Eco and gauge integration. The bench top HiCube Eco is ideal for vacuum applications that require hydrocarbon-free vacuum. For details, e-mail: hicube@pfeiffer-vacuum.com
Pfeiffer Vacuum, Inc.
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-800-248-8254
E-mail: contact@pfeiffer-vacuum.com
Marathon®CP Cryopumps
The Sumitomo (SHI) Cryogenics Marathon®CP Cryopumps are an expanding product line available in multiple flange styles, sizes and configurations. With a powerful refrigerator, Marathon CP typically out-performs other cryopumps of the same physical size. Its innovative design assures that users achieve the highest performance possible, while keeping it competitively priced. The CP-20 can be driven by the high-efficiency F-70 compressor. Like all Freedom®series compressors, the F-70 provides refined oil and gas management to the cryopump and offers a unique 30,000-hour service interval. Additionally, the optional Marathon Cryopump Controller (MCC) enables fully automatic operation of the cryopump using commands from a host computer using standard cryopump protocol. The result is greatly reduced downtime between production cycles, improved process times and better overall efficiency of the user’s process. The CP-20’s compact and robust design fits easily onto and existing systems. It can be readily maintained without breaking vacuum or removing the cryopump from the chamber for return or replacement. Like all SHI Cryogenics Group products, it is supported by a worldwide sales and support network. Its easy serviceability maximizes production uptime and lowers the total cost of ownership.www.shicryogenics.com
SICERA™Cryopump
At only 0.9 kW per pump, Sumitomo (SHI) Cryogenics recently introduced the SICERA™cryopump boasts extremely low energy consumption compared with other vacuum products currently available for semiconductor, flat panel display and related processing. The breakthrough multipump system allows up to six 8-inch pumps to run on a single compressor without performance degradation, making it ideal for high-volume semiconductor wafer manufacturing. The complete SICERA cryopump system includes a compressor and remote controller, which have been thoroughly tested to withstand the most demanding vacuum applications. Through continuous control of both the cryocooler and compressor, SHI Cryogenics Group is able to offer a reliable cryopump system with solid performance and temperature and vacuum stability.
Sumitomo (SHI) Cryogenics of America, Inc.
Allentown, PA
www.shicryogenics.com
Contact: Fran Brennen,
Tel: 1-610-791-6700
E-mail: sales@shicryogenics.com
Large Cryo Pumps
Since 1981, ULVAC Cryogenics Inc., through a joint venture with Helix Technologies, has been manufacturing cryogenic pumping systems in Japan for theAsian markets. These pumps are now being made available in the North America with support from ULVAC’s network of service locations throughout the U.S., Europe and Asia. The large cryopumps are available in 20, 22 and 30-inch models. ULVAC cryo pumps deliver high reliability, high capacity, high refrigeration power and quick regeneration making them well suited for ion implant, sputtering, evaporation and industrial coatings. For demanding applications, ULVAC offers specialty cryopumps that include UHV, low vibration, corrosion resistant, “flat tops” and “Super Trap”, a high-speed water vapor model.www.ulvac.com
VD Series Dual Stage Rotary Vane Pumps
ULVAC’s VD Series of  dual stage, oil rotary vacuum pumps with directdrive motors are designed for use in a broad range of applications including leak detection, helium recovery, fluid fill and vacuum coatings. These lightweight compact pumps feature low noise with minimal vibration levels. The unique design permits pump head replacement without disconnecting the fore line. The VD series is available in pumping speeds from 600 l/min [36 m3/hr] to 800 l/min [48 m3/hr] with an ultimate pressure of 0.67 Pa (5 × 10-3Torr).www.ulvac.com
VS Series Single Stage Rotary Vane Pumps
ULVAC’s VS Series of single stage, oil rotary vacuum pump with direct-drive motors are designed for use in a broad  range of applications including leak detection, furnace and solar cell production. These lightweight compact pumps feature low noise with minimal vibration levels. The VS series is available in pumping speeds from 3000 l/min [180 m3/hr] to 4800 l/min [288 m3/hr] with an ultimate pressure of 5.3 Pa (4 × 10-2Torr).www.ulvac.com
PKS Series Large Rotary Piston Vacuum Pumps
ULVAC’s PKS Series of large oil rotary piston vacuum pumps are extremely durable with very stable
 pumping characteristics. They are used in industrial applications ranging from braising furnaces and automotive assembly to chemical, pharmaceutical and food industries. These single stage pumps are designed with high-grade metal castings that provide excellent corrosion and abrasion resistance. The PKS Series is available in pumping speeds from 96 to 420 m3/h with a final pressure of 2.7 Pa (2 × 10-2Torr). Disassembly and reassembly for maintenance and exhaust valve inspection is simple.www.ulvac.com
GLD Rotary Vane Pumps
ULVAC’s GLD Series of compact oil rotary vacuum pumps with direct-drive, wide range motors are designed for use in a  broad range of applications including production processes, laboratory experiments and R&D. These pumps feature a forced oil circulation system that provides stable evacuation speeds over a wide vacuum range with low noise and vibration levels for sensitive work environments. The GLD series is available in pumping speeds from 40 to 335 l/min with an ultimate pressure of 0.67 Pa (2 × 10-3Torr).www.ulvac.com
Turbo Molecular Pumps
ULVAC’s Magnetic Levitation and Digital Control Turbo Pump Series are designed for a broad range of applications including solar cell, PVD, OLED, as well as R&D and laboratory environments. The turbo molecular  pump series features high speed, high reliability, energy saving performance and improved compression ratio for hydrogen. The UTM-FW series are ideal pumps for middle to hard processes with high gas loads. The UTM-FH series are ideal pumps for light to middle processes. The UTM-FW/FH Series is available in pumping speeds from 350 l/sec to 6300 l/sec.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@us.ulvac.com
Variable Speed OEM vacuum pump
VACUUBRAND®VARIO-SP™diaphragm vacuum pumps are ideal for continuous, oil-free pumping of non-aggressive gases with excellent ultimate vacuum. The variable-speed drive system offers great OEM design flexibility compared with fixed speed pumps. The maintenance-free, brushless 24V DC motor enables easy integration of the pump into other equipment, and operation independent of line voltage. The pump design is virtually silent in operation, with ultra-low vibration, and high flow rates even near ultimate vacuum. Long service intervals and oil-free, dustless operation contribute to the reliability of your OEM equipment. Well-suited to continuous, oil-free evacuation of non-aggressive gases in physics and analytical applications, the motor speed can either be fixed or adjusted externally via analog or digital electronic control signals for adaptation to process requirements. This permits fast pumpdown, with lower pumping speeds to maintain vacuum. These compact pumps handle medium to high gas loads, and can be mounted and operated in any position, making them ideal for built-in system pumps. Models available with vacuum to 1 mbar (0.75 Torr) and flow rates to 3.8 m3/hr (63 lpm). Customized versions are available on request.www.vacuubrand.net
Compact Rotary Vane Vacuum Pumps
VACUUBRAND®XS-series rotary vane vacuum pumps are extremely compact and light weight, with a footprint one-third that of common belt-drive vacuum pump designs, and half that of competitive direct-drive pumps. The result is a pump that occupies much less bench space in crowded labs, or machine space in OEM applications.Yet these pumps offer comparable vacuum capacity (2 × 10-3mbar) and higher pumping speed than older designs, making them ideal for those applications that need vacuum performance that is beyond the reach of oil-free pumps. The XS-series vacuum pumps have very low power consumption and generate low levels of waste heat compared with competitive models. They run quiet with low vibration, and deliver high flow rates even at vacuum levels approaching ultimate vacuum. Internal pump surfaces are nitrogen plasma treated for chemical resistance and mechanical hardness, and internal components have been designed to reduce wearing forces, enhance performance and simplify maintenance. Innovative lubrication system extends oil change and service intervals, and protects the pumps at start-up. Pumps are vacuum-tight at switch-off, protecting your application form undesired venting and oil back flow.
Vacuubrand, Inc.
Essex, CT
www.vacuubrand.net
Contacts: Peter G. Coffey,Vice President Sales &Marketing
Tel: 1-860-767-5341 or Toll Free: 1-888-882-6730
E-mail: pcoffey@vacuubrand.net
Dry Vacuum Pumps
The Vacuum Research Corporation long-life dry vacuum pumps can operate more than two years without maintenance or adjustment. These easy to rebuild pumps have been in production for 20 years and have proven their reliability in 24/7 operations around the world. Ultimate pressure is 20 milliTorr (2.6 Pa) and several models are available with capacities from 6 CFM to 16 CFM (10 to 28 m3/hour). Single stage pumps are available for vacuum drying and solvent  removal. Ultimate pressure for single stage is 700 mTorr (90 Pa). When used with turbo pumps customers often select the optional VRL Soft Start & Speed Control. This low cost option automatically slows the pump when gas loads are small and immediately increases speed if the pressure starts to rise. Other options such as explosion proof motors, and complete vacuum instrumentation and controls may be ordered.www.vacuumresearch.com
Smart Dry Pumps
Vacuum Research Corporation’s Smart Dry Pump™ for roughing of ion or cryo pumps and backing of turbo pumps. Because the Smart Pump™switches piston operation from parallel for roughing to series operation for high vacuum; this pump provides the proven reliability of our piston style pumps at 30 % lower cost per cubic foot of pumping speed and a 30% smaller footprint. Like all VRL Dry  Pumps, the Smart Dry Pump™needs no cooling water or purge gas, and of course, there is absolutely no oil or pump fluid to monitor or dispose of. The high capacity and low ultimate pressure of the smart pump is accomplished by operating the pistons in parallel from atmosphere to 1 Torr and then automatically switching them to series operation to give the 20 mTorr ultimate pressure. The crossover is controlled with a VRL Pirani gauge vacuum switch and even more savings can be accomplished with the VRL Soft Start & Speed Control added to your Smart Dry Pump.™Smart Dry Pump™is a trademark of Vacuum Research Ltd.
Vacuum Research Corporation
Pittsburgh, PA
www.vacuumresearch.com
Contact: John Hartnett
Tel: 1-800-426-9340 or 1-412-261-7630
E-mail: VRL@vacuumresearch.com
Thin-Film Thickness, Flatness and Hardness Metrology Equipment Supplier
Compiled by Terrence Thompson, Contributing Editor
This annual Vacuum Technology & Coating product showcase includes many of instruments and equipment used to quantify thin film thickness, flatness and hardness of most deposited materials.
For precise thin film thickness, flatness and hardness measurement instruments, there are numerous choices for measuring existing films. Metrology for coating thickness or thin-film measurements may involve ellipsometry and scanning spectrophotometry as well as non-contact surface roughness and surface profiling measurements. Surface profilers are very sophisticated instruments and can measure surface profiles and/or roughness with sub-micron resolutions.
Decisions, Decisions
After you determine exactly what needs to be measured, check the most logical technologies. There may be a trade-off between cost and performance. Simpler methodologies often do the job for less demanding applications while the more exotic instruments are needed for very demanding applications where tolerances are tight. If you are checking wafer fabricated ICs or MEMS devices, tolerances are very tight. With optical coatings, thickness and material uniformity are essential. Many solutions exist for measuring thin film properties and more than one will likely meet your requirements.
Product Descriptions
In the following product descriptions, vendors often distinctions to focus on specific intended applications so direct comparisons may be difficult. For more information, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
UV Optical Monitor Model 590-UV
The newest thin-film optical monitor from Dyn-Optics, the Model 590-UV, incorporates a deuterium lamp source and photomultiplier receiver along with the standard tungsten halogen  source and visible and IR receivers to extend operation down into the UV as low as 180 nm. The UV source is co-aligned with the VIS/NIR source and no re-alignment is necessary to switch between channels or wavelengths for fast, trouble-free setups. The Model 590-UV operates over a full spectrum range from 180 nm up to 2500 nm. With a solid, field-proven design, the 590-series has earned the reputation as being bullet proof and the workhorse of the coating industry. Through continuous, real-time measurements of reflectance and/or transmission of each layer during deposition the 590 Optical Monitor provides a more accurate measurement of each layer as its being deposited than conventional crystal monitoring. With improvements in coating tolerances as much as an order of magnitude, optical monitoring is essential for today’s advanced multi-layer coating designs. Dyn-Optics offers a full line of accessories to compliment the optical monitor including vacuum windows, gimbal mounts, and chip changers. In additional to our standard line, our engineers are available to support your custom and OEM requirements.
Dyn-Optics
Sparta, NJ
www.dyn-optics.com
Tel: 1-973-944-3996
E-mail: info@dyn-optics.com
Ionization, Thermocouple and Convection Gauge Tubes for Deposition Monitoring
Fil-Tech, Inc. supplies ionization, thermocouple and convection  gauge tubes for various deposition applications. Twin filament tungsten ion gauge tubes are generally used for ion implantation requirements, broad range ion gauge tubes are used for sputtering applications and burnout resistant thoria coated iridium filaments are used for general vacuum requirements. Thermocouple tubes are used for measuring mechanical pump vacuums in the range of 1000 to 1 micron. Convection tubes are used to measure vacuum from atmosphere to 10-3with high accuracy.www.filtech.com
SQM-180 Rate/Thickness Monitor
Fil-Tech, Inc.’s SQM-180 Rate/Thickness Monitor is a precision mass and film thickness measurement instrument for use in thin film deposition processes and other quartz crystal microbalance  applications. The SQM-180 has proven very tough and reliable. Thousands of durable units are providing stable monitoring of depositions. Easy to set up and use, the SQM-180 has a history that makes it the one to have for deposition monitoring Fil-Tech also supplies Quality Crystals®for thin film monitoring.
Fil-Tech, Inc.
Boston, MA
www.filtech.com
Contact: G. Paul Becker
Tel: 1-617-227-1133 or 1-800-743-1743
E-mail: paul@filtech.com
Auto SE™: Thin Film Analysis in One Push of a Button
HORIBA Jobin Yvon introduces the Auto SE™, a new and innovative thin film analysis tool  that allows characterization of single and multi layers thin films in one push of a button. Within a second, the Auto SE provides accurate film thicknesses and optical constants by acquiring hundreds of wavelengths over a spectral range of 440 nm to 850 nm. As soon as you press the START button, the Auto SE automatically adjusts the height of your sample, maps the entire surface of your wafer for uniformity check and displays the results in a simple way. With a spot size as small as 25 µm × 60 µm and its patented MyAutoView™color vision system, the Auto SE is the perfect thin film metrology tool for devices characterization and QC analysis of your thin films.
HORIBA Scientific
Edison, NJ
www.horiba.com
Tel: 1-732-494-8660
E-mail: info.sci@horiba.comor info@jobinyvon.net
Feature-Rich IC6 Provides the Best Measurement Precision Possible
The INFICON IC6 Thin Film Deposition Controller combines the proven performance of INFICON thin film controllers with several enhanced features for maximizing throughput in OLED and optical applications. The IC6 provides exceptional quality and performance, along with unique features to easily maximize deposition processes. The IC6, with the ModeLock measurement system, provides stable, high-resolution rate/thickness measurement and control at extremely low rates for optimum results in the production of flat panel displays. Optical processes, such as ophthalmic coatings, band-pass filter, reflective coatings, etc., benefit from high resolution and reliability along with the flexibility to accommodate 50 processes of 200 layers each. The IC6 has the ability to control up to six sources simultaneously for rate and thickness  control. Twelve analog outputs are assignable for source control or for rate or thickness recording. Additionally, the color TFT LCD display and menu-driven navigation make operating the IC6 easy and intuitive. Logic and process control capabilities include 100 programmable logic statements, 20 counters and 20 timers. I/O capabilities provide up to 24 relay outputs, 28 TTL inputs, and 14 TTL outputs. Logic statements can be used in cooperation with external inputs or outputs; allowing the IC6 to perform functions that otherwise would require a PLC or other extra equipment. Each logic statement can include up to five functions and can be linked using Boolean logic.www.inficon.com
Thin Film Deposition Controller For Maximum Throughput In OLED Applications
INFICON’s Cygnus™Thin Film Deposition Controller maximizes process capability and flexibility for OLED (Organic Light-Emitting Diode) applications in the production of flat panel displays. Cygnus Thin Film Deposition Controller is unique in its ability to precisely control the ratios of up to six materials independently, or in any combination, with a rate resolution of 0.01 Å per second. This accuracy, powered by ModeLock — the patented INFICON quartz crystal measurement technology, is critical to the low-density materials and low deposition rates associated with OLED processes. As substrates are cycled through the system, flexible deposition sequencing allows continuous rate control and saves valuable production time by eliminating the need to reheat source material with every substrate. Automatic Z-ratio determination, or Auto Z, increases the accuracy of thickness and rate control and eliminates the need for the  user to estimate the acoustic impedance (Z) ratio. This is especially important for maintaining thickness and rate accuracy for materials where the Z-ratio is not known. Extensive logic I/O features provide comprehensive process control integration. Cygnus also offers up to three digital to analog outputs per source — source power, rate, and thickness. The user can identify the true thickness deposited on the substrate from multiple sources through the Cygnus thickness-summing feature. Applications software provides complete programming of one or multiple Cygnus Controllers from a PC, using RS232 or IEEE interface.
INFICON
East Syracuse, NY
www.inficon.com
Tel: 1-315-434-1100
E-mail: reachus@inficon.com
RC2®spectroscopic ellipsometer
The RC2®spectroscopic ellipsometer design builds on over 20 years of experience. It combines the best features of previous Woollam ellipsometer models with innovative new technology: dual rotating compensators, achromatic compensator design, advanced light source and next-generation spectrometer design. The RC2®is a near-universal solution for the diverse applications of spectroscopic ellipsometry. It has DUAL Rotating Compensators for synchronous rotation of two compensators provides high-accuracy, high-speed, and complete Mueller-matrix measurements. The Achromatic Design (patent pending) and new  achromatic compensator design has optimized performance over a wide spectral range. The wide spectral range collects over a thousand wavelengths across the ultraviolet, visible, and near infrared spectrum. Its high-speed synchronous operation of both compensators provides accurate spectral data in less than a second. The advanced “dual” light source provides extended spectral range with computer control of beam intensity. It automatically optimizes signals on any sample (low or high reflection).
J.A.WoollamCo., Inc.
Lincoln, NE
www.jawoollam.com
Contact:Veronica Cockerill,Marketing Coordinator
Tel: 1-402-477-7501 Ext. 101
E-mail: vcockerill@jawoollam.com
MetriX 100™Provides Production Line Monitoring of Film Composition and Thickness Measurements
KLA-Tencor’s MetriX 100™is an inline, non-contact metal films metrology system to provide independent measurements of film composition and thickness on product wafers. With film composition becoming as critical as film thickness in determining the functionality and reliability of advanced ICs, MetriX 100’s  ability to measure both parameters makes it an ideal tool for production line monitoring at the 90-nm node and process devel- opment for the 65-nm and below nodes. MetriX 100 uses a versatile electron-beam technology, coupled with proprietary high-resolution x-ray detectors and software algorithms, to provide industry-leading precision and repeatability (to within one percent, one sigma). This unique combination allows the tool to be used for a wide range of applications — from process development and characterization of ultra-thin atomic layer deposition (ALD) barrier films to routine production monitoring of copper barrier/seed and other yield-limiting critical layers such as silicon oxynitride (SiON) gate dielectrics. MetriX 100 is currently undergoing beta testing at multiple leading-edge IC manufacturing facilities.
KLA-Tencor
San Jose, CA
Tel: 1-408-875-9733
Layer Thickness Measurement Package
The m·u·t GmbH’s Layer  Thickness Measurement Package consists of the TRISTAN®spectrometer, a special reading head and our new Software. The system is able to measure transparent layers with a thickness of 0.1 µm to 20 µm under the pre-condition where the base material is transparent or intense reflective. Then it is also able to detect up to three different layers on one sample. The reading head can be adopted to special customer needs (e.g. shape, handling, etc.). A special table for desktop measurements of layer thicknesses is available.
mut GmbH
Wedel, Germany
Tel.: +49-0-4103-9308-0
1500-D Analyzer Accurately Measures Thickness of Diamond-Like Coatings (DLC) On Perpendicular Recording Media for Next Generation Disk Drives
n&k Technology, Inc. has a software module that adds the capability to the n&k 1500-D Analyzer of characterizing DLC on perpendicular recording media. The software package enables the 1500-D user to effectively characterize the latest magnetic  media that are substantially more complex than older generation media and allow much higher recording densities. The data storage industry is rapidly moving to significantly higher recording densities in response to competition from FLASH memory and an increased penetration of the consumer market with such products as game boxes, DVR, incar navigation, and various music and video players. Combined with the n&k 1500-D Analyzer that is used to characterize the latest giant magnetoresistive (GMR) heads for next generation disk drive metrology.
n&k Technology, Inc.
San Jose, CA
Tel: 1-408-513-3800
Deposition Monitors
Nor-Cal Products’deposition monitors measure film thickness or rate using crystals as the sensor device. Independent channels monitor different films or average different sensors together to provide a more uniform deposition measurement. The CM-2 model will monitor one or two sensor inputs, while the CM-6 will monitor up to six sensor inputs. Equipment CE approved. Included  are a RS-232 cable and Windows software. This software will allow you to change the monitor’s parameters, save process readings in Excel formatted files, and operate the monitor remotely. Mounting brackets are included and rack-mount extenders are available on request. Nor-Cal also provides crystal sensors, feedthroughs, cables, oscillators and replacement crystals to round out the product offering. Our complete product line includes vacuum chambers, isolation and pressure control valves and other components for the thin film deposition market.www.n-c.com
Crystal Sensors and Feedthroughs
Nor-Cal Products offers the thin film coating market crystal sensors and feedthroughs, along with vacuum chambers, isolation  and pressure control valves and other components. Sensors are either single, with or without water cooling, or dual with a pneumatically actuated shutter and water cooling. Single sensors are also available with an integrated 2.75 CF feedthrough flange or separate feedthroughs are available with 1 inch bolt, 1.33 CF or 2.75 CF flanges sizes. Nor-Cal also provides deposition monitors for up to six sensors to round out the product offering.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Contact: Jacquie Daniel
Tel: 1-530-841-9153
E-mail: jacquiedaniel@n-c.com
S3000A Thin Film Metrology System
The S3000A™production-worthy metrology system from Rudolph Technologies delivers superior measurement accuracy, These monitors are Class 1 repeatability and tool-to-tool  matching — all on a versatile platform. For next-generation processes, transparent thin films will demand tighter process control limits. The system features a combination of multi-wavelength ellipsometry and DUV reflectometry to meet the challenges of 90nm, 65nm, and 45nm technology nodes. The S3000A also provides high-throughput process control measurements for next-generation high-k gate films, including the ability to measure an ultra-thin sub-10Å nitride oxide interfacial layer under a thin high-k dielectric. Based on years of continuous transparent film measurement development, the S3000A is the industry’s smallest-spot, highest throughput, highest repeatability production ellipsometer/reflectometer.
Rudolph Technologies, Inc.
Flanders, NJ
Tel: 1-952-259-1647
SGVacuus Optical Monitor
Scalar Technologies Ltd, a developer and manufacturer of non-contact, thin film thickness measurement instrumentation and systems, introduced the  SG Vacuus, the newest addition to the Scalar family of products. SG- Vacuus is an in situ broadband optical monitoring system that provides precise measurement and control capabilities for single and multilayer vacuum deposited coating applications.
Scalar Technologies Limited
Livingston,West Lothian, UK
Tel: +44 1506 414 806
FilmTek 2000 Fiber-Optic Spectrophotometer With Revolutionary Material Modeling Software
Scientific Computing International’s FilmTek 2000 is a breakthrough in thin film metrology technology. FilmTek 2000 combines a fiber-optic spectrophotometer with revolutionary material modeling software to provide an affordable and reliable tool for the simultaneous measurement of  film thickness, index of refraction (vs. wavelength), extinction coefficient (vs. wavelength), roughness, and energy bandgap. FilmTek 2000 provides unmatched accuracy, ease of use, and analytical power in a fully integrated package. It is available in manual and auto-stage formats for substrates at any size including large flat panel displays and solar panels. If requested, transmission capability can also be added to FilmTek 2000. This spectrophotometer is available as an in-line film thickness monitor.
Scientific Computing International
Carlsbad, CA
Contact: Kambiz Farnaam, , Ph.D.,V.P. ofMarketing
Tel: 1-510-301-6128
The STC-2002 Thin Film Controllers from Sycon Instruments are versatile and expandable to meet thin film deposition control requirements from the simple to the most complex. Whether depositing a single layer or a complex multi-layer film with simultaneous control of two materials, the STC-2002 meets your needs. It has the highest accuracy and best control achievable from a quartz crystal deposition monitor. The STC-2002 employs an advanced measurement technique, which allows high accuracy reading to be made 10 times a second. The high-resolution measurements, at a fast update, allow precise control of the deposition source to achieve the quality of films desired. It has a High Resolution/High Speed measurement Engine for precise deposition control. It provides 10 measurements per second with a  0.01Å/s rate resolution. Its RS232/RS485 interface provides serial communications. A large format numeric and graphic display includes a touch panel user interface. The controller is expandable up to 8 source/sensors. The multiprocessor design maintains performance. It is an expandable I/O with up to 32 inputs or outputs for use with programmable logic. Weighted averaging of up to 8 sensors is used for precise large area deposition. Four user- defined front panel buttons and user definable indicators are provided for use with I/O programs. Resolution is 0.03 Hz @ 10 measurements/s. The Crystal Sensor is industry standard 6 MHz. Thickness display is 0.000 to 999.9 kÅ and rate display is 0.00 to 999 Å/s. Inputs are 8 each 5 to 30 VAC-DC or contact closure, opto isolated. Outputs are 8 Form C relays 24 volts, 1 A with source outputs of ± 2.5, 5, 10 volts@10 mA.
Sycon Instruments, Inc.
East Syracuse, NY
Tel: 1-315-463-5297
Model 866 Deposition Controller
Telemark’s new Model 866 Deposition Controller has an IBM-compatible dual core processor operating at 2 GHz with 2 gigabytes of RAM and a 50 gigabyte  hard drive, The controller is capable of storing an almost infinite number of recipes and layers. It features 3 large LED displays that continuously display Power, Rate & Thickness. The displays are updated every 300 ms. The system also supports an external full color monitor, keyboard and mouse. The primary real-time operating parameters are graphically displayed on a 5•LCD display which also supports a full alphanumerical keyboard for real-time process and recipe modifications. Display capabilities include: real-time process modification, process and layer keyboard based editor, maintenance I/O status and control, power v/s time, rate v/s time, thickness v/s time and rate deviation v/s time. The 866 supports USB, RS232 and RJ45 communication hardware with appropriate protocols. It has two crystal sensor inputs, two isolated power supply analog output drivers, eight relay isolated outputs and eight optically isolated inputs (with option to upgrade to 16 each). There are 3 user-programmable front panel buttons for easy system control. All system files may be reviewed, modified and tested on an offline computer and downloaded tot the instrument for use. Power requirements are 115/230VAC at 50/60 Hz.
Telemark
Hayward, CA
www.telemark.com
Tel: 1-510-887-2225
E-mail: sales@tfi-telemark.com
Dektak 150 Surface Profiler: Industry-Best 4-Angstrom Step Height Measurement Repeatability
Veeco Instruments Inc.’s Dektak®150 Surface Profiler delivers increased resolution for measuring thin films to 10 nanometers and higher to meet the evolving requirements of today's deposition and etch applications. Veeco has been a leader in film process control for over 40 years  The Dektak is a superb tool to monitor thin films as well as critical surface roughness, which is key for optimal process control. The new robust design of the Dektak 150 incorporates a cast-aluminum frame and several vibration and noise reduction features to provide the lowest possible noise floor for measuring extremely thin films. In addition, the Dektak 150 is able to measure thin film stress with longer scan lengths up to 55 millimeters and a larger vertical range up to 1 millimeter. The thin film stress measurement software automatically calculates compressive or tensile stress. The Dektak 150 offers 3D imaging capabilities to map a user-defined surface area to perform in-depth analysis of surface defects and area roughness with Veeco’s exclusive Vision®3D analysis software.
Veeco Instruments Inc.
Woodbury, NY
www.veeco.com
Contact: Fran Brennen,
Senior Director ofMarketing Communications
Tel: 1-516-677-0200 Ext. 1222
E-mail: fbrennen@veeco.com
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Vacuum Technology & Coating