WDPI: July 2009
Digital Edition
Gas Delivery & Diagnostics
June. '08 Digital Edition
Gas Delivery & Diagnostics
Mar. '08 Digital Edition
Gas Delivery & Diagnostics
Nov. '07 Digital Edition
Gas Delivery & Diagnostics
Sep '07 Digital Edition
|
|
|
Article
|
Vacuum Component Literature Compiled by Terrence Thompson, Contributing Editor
This Vacuum Technology & Coating product showcase covers descriptive literature on some of the many “vacuum components” used in diverse applications. In January 2010, included full-line catalogs descriptions from many key vendors.
Indeed, “components” is a very broad term in the vacuum products industry where quality and precision are expected — and provided — by world-class vendors.
Applications Everywhere
Vacuum components are used in thousands of manufacturing operations. Since a component is simply part of something larger, anything from fittings to vacuum pumps and systems that is an integral part of a manufacturing facility’s equipment is fair game.
Product Descriptions
When in doubt, go to Vacuum Technology & Coating magazine’s home page at www.vactechmag.com and click on the advertiser for additional details or telephone numbers for calling to discuss your specific application requirements. Or, go to the websites listed for each manufacturer. As of press time, some 2010 literature was not available. Please contact the manufacturers for the latest versions.
Advanced Energy Cesar® RF Power Supplies Offer Customized Performance for Demanding Plasma Applications
The versatile Advanced Energy Cesar® platform offers exceptionally consistent RF power-delivery performance, as well as a diverse selection of models, each with a unique set  of features and capabilities (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW; with a variety of user interfaces and input options). This enables you to choose a unit suited specifically to your application — without lengthy custom-generator lead times. Standard platform packaging makes it easy and inexpensive to replace one Cesar unit with another when your power requirements change. This also minimizes training costs and simplifies design and setup for systems with multiple RF power supplies.
Advanced Energy HFV® Variable-Frequency (~2 MHz) Generators for PVD, CVD, and Etch Applications
Advanced Energy’s HFV® series of generators offers 2 MHz, digitally synthesized, variable frequency with output power levels of 3 kW, 5 kW, and 8 kW.  The HFV, designed for 200 and 300 mm semiconductor applications, provides flexibility though digitally synthesized, variable-frequency output and microprocessor control. The output frequency range is 1.765 MHz to 2.165 MHz. Frequency tuning parameters that reside in firmware may be customized to ensure reliable operation with a wide variety of chamber configurations and process recipes. Its self-diagnostics provide an operating history and test for 14 different types of internal supply failures.
Advanced Energy Ovation™ Very-High Frequency (VHF) Power Delivery System
The Advanced Energy Ovation™ fully-integrated, power delivery system enables faster,  higher-precision processes, such as those required for demanding narrow-linewidth, dielectric etch processes through implementation of a unique power delivery scheme. It is the first to accurately deliver power into a non-50-ohm environment without an external sensor, reacting faster than traditional power supplies. The use of 60 MHz reduces voltage potential across the plasma sheath, minimizing ion etch damage, thus improving film quality and yields. Its embedded measurement tech- nology enables previously un- available insight into chamber plasma parameters and performance.
Advanced Energy PEII/RAS Low-Frequency
for Dual Magnetron Reactive Sputtering
The Advanced Energy low-frequency PEII series provides 40 kHz pulse width modulation (PMW) from 5 to 60 kW  and features enhanced arc control and internal load matching — with no external combining hardware such as transformers. It provides minimal stored energy, and its superior arc control enables higher-quality film deposition over other AC products. The PEII power supply is easily expandable (to up to 60 kW) in 10 kW increments. When paired with the RAS accessory, it enables cost-effective, single–cathode, dual-anode, reactive-sputtering processes and resolves the disappearing anode phenomenon common to reactive processes.
Advanced Energy Pinnacle® Plus+ Pulsed-DC
Power Supply for Critical Reactive Processes
The Advanced Energy Pinnacle® Plus+ product line enables higher film quality for reactive sputtering, bias, and high-quality metal sputtering applications. Available in single- and dual-output 5 kW  and single-output 10 kW models, this product line is ideal for extending the performance of existing processes as well as for expanding the possibilities for developing new, previously unachievable DC processes. The Pinnacle Plus+ line provides individually controllable, dual-output, pulsed-DC power from a single unit; increased process flexibility (up to 350 kHz pulsing, wide tap range, variable duty cycle up of a minimum of 55% on time or a maximum of 45% reverse time), active front panel; and CE compliance.
Advanced Energy Pulsar™ High-Power
DC Pulsing Accessory
When straight DC sputtering proves inadequate, AE® ’s Pulsar DC Pulsing Accessory provides improved process quality, uniformity,  as well as increased throughput and yield. Featuring 40 kW, 40/40 kW, and 80 kW pulsing functions, the Pulsar accessory goes beyond handling arcs when they occur; it manages charges to prevent arcing from occurring at all. Thus, the Pulsar accessory reduces contanimation, splattering, and crazing in such varied applications as residential and architectural glass coating, flat panel display manufacturing, roll-to-roll coating, and headlight metallizing. The Pulsar single, add-on solution is designed to retrofit to old and new systems alike, without the need to add new power supplies or change established control schemes.
Advanced Energy Industries, Inc.
Fort Collins, CO
www.aei.com
Tel: 1- 970.221.0108
E-mail: sales.support@aei.com
AJA International, Inc. Nautilus Series
“Rotating” Magnetron Sputtering Sources
The AJA International Nautilus Series “rotating” magnetron sputtering sources have been designed to meet  the most challenging application requirements in today’s thin film deposition markets. Sleek and compact, the Nautilus Series features a gearless direct-drive design with a minimum of moving parts and almost silent operation. Features and capabilities include: Unique “open architecture” Magnet Array; Tunable uniformity and target utilization; Rugged, compact design/construction; Custom versions available; and Service friendly and virtually maintenance free for long term operation.
AJA International, Inc. Stiletto Series
Magnetron Sputtering Sources
The AJA International Stiletto Series magnetron sputtering sources have been designed to meet the most challenging needs of the HV thin film research community. Stiletto Series magnetrons are offered in 1 to 4 inches diameter as well as numerous rectangular target sizes. Features and capabilities include: Rugged HV construction; Unique Modular Magnet Array; In-situ or Manual tilt for optimum uniformity; Magnetic material sputtering/easy removal of large magnetic targets; and 0.5 to 700 mTorr operating pressure.
AJA International’s STXL Series:
Large Magnetron Sputtering Sources
AJA International, Inc.’s STXL Series of large magnetron sputter sources has a versatile modular magnet system. Circular target models range from 6 to 12 inch diameters. Rectangular versions in 3, 4 or 6-inch widths are offered up to 40" long. Both internal mount (via flex hose or solid tube) and external flange mount designs are available. High strength rare earth magnets are located outside the cooling water and are easily accessed for magnet modification. Sources can accommodate target materials bonded to a backing plate or one-piece targets. Backing plates are directly water cooled for maximum cooling efficiency. Also, 7/16 DIN coaxial cable powered DC sources and RF versions with close-coupled matchboxes are offered for high power.
AJA International, Inc.’s
ATC Orion Series Sputtering System:
Compact, Powerful UHV Tool
 AJA International, Inc.’s introduces the highly versatile, compact, ATC ORION Series Sputtering System that inherits many design features from the popular, highly evolved ATC Series Sputtering tools and offer some unique features designed to optimize deposition uniformity. 3, 4 and 5 gun versions have been delivered with load-locks, high temperature substrate heaters and computer control. Economical HV versions are also available.
AJA International, Inc.’s Hybrid Systems:
UHV Sputtering & Evaporation
AJA International Inc. has delivered numerous multi-chamber “HYBRID” deposition systems.  This dual chamber UHV system contains (4) A320-XP 2" sputter sources with in-situ tilt in the sputter chamber and (2) K cells plus (1) 4-pocket e-beam source in the evaporation chamber. Each chamber is fitted with an 850°C rotating substrate heater. A single load-lock introduces the substrate and magnetic arms transfer it between chambers.
AJA International, Inc.
N. Scituate, MA
www.ajaint.com
Contact: William Hale, President
Tel: 1-781-545-7365
E-mail: topgun@ajaint.com
Adixen Brand Maglev Hybrid Turbomolecular Pumps
The Adixen brand ATH-M series of Alcatel vacuum pumps are magnetically levitated.  There is no mechanical contact, no friction and no wear resulting in no scheduled bearing maintenance and reduced cost of ownership. The pumps are actively controlled, real time, in five axis through an automatic balancing system. Additionally, the pumps are designed for high throughput at high inlet pressure, are resistant against powder and provide a purge option to prevent deposition build-up inside the pumps. No external batteries are required for these pumps because the rotor acts as a generator in the event of a power failure. Pumps are available in pumping speeds ranging from 500 to 3200 liters/second in heated or non-heated versions. Controller options include rack or pump mounted versions with discrete I/O, RS232/485, Profibus DP or DeviceNet communication.
Adixen Brand Maglev
Turbomolecular Pump
The new Adixen brand Alcatel ATP2300M vacuum pump is magnetically levitated.  There is no mechanical contact, no friction and no wear resulting in no scheduled bearing maintenance and reduced cost of ownership. The pump is actively controlled, real time, in five-axis through an automatic balancing sys- tem. Additionally, the pump is designed for optimal light gas efficiency with a pumping speed of 1,850 liters/second for Helium, is resistant against powder and provides a purge option to prevent deposition build-up inside the pumps. An external battery is not required for this pump because the rotor acts as a generator in the event of a power failure. Controller options include rack or pump mounted versions with discrete I/0, RS232/485, Profibus DP or DeviceNet communication.
Adixen Brand Turbomolecular
Pumping Systems
The Adixen brand turbomolecular pumping system offering has been expanded to provide a flexible design offering a wide range of  configurations. Systems are designed for installation on a workbench or below a vacuum chamber and offer optional casters to allow for easy movement. Turbopumps are available in pumping speeds ranging from 80 to 400 liters/second; backing pumps are available wet from 5 to 21 m3 /hr or dry from 15 to 40 m3 /hr. Plus, numerous vacuum options such as turbopump vent valves, rotary vane pump isolation valves and integrated gauges with single or multichannel graphing function controllers are available.
Adixen Brand Compact, Dry Pumping Systems
The Adixen brand Drytel series dry pumping system provides a compact, portable,  reliable dry vacuum design. Systems provide one switch operation from atmosphere to 10-8 mBar. The secondary pumps are available in 7.5 or 30 liter/second pumping speeds, diaphragm-backing pumps in 1 or 4 m3 /hr. Options include an interface board allowing remote start/stop, automatic gas ballast to improve the pumping of light gases and reduction of condensation, an exhaust connection and chemical versions. The unique, modern, open design allows for easy maintenance when replacing the membranes that have a 10,000+ hour Mean Time Between Preventive Maintenance.
Adixen Brand ATH Series
Hybrid Turbomolecular Pumps
The Adixen brand ATH Series hybrid turbomolecular pumps incorporate grease lubricated ceramic ball bearings making them mountable in any orientation, low rotational speed providing increased resistance  to air inrush and pumping speeds from 30 to 300 l/s. Outstanding compression ratios enable these pumps to reach 10-10 mbar ultimate pressure or foreline tolerances up to 45 mBar. These pumps are available in standard, interstage port and corrosive versions, with water or air cooling, as well as nude versions that may be inserted directly into your instrument - improving performance, decreasing the system size and providing cost savings.
Adixen Brand MDP Series Molecular Drag Pumps
The extremely reliable Adixen brand MDP Series molecular drag pump incorporates grease lubricated ceramic ball bearings making them mountable in any orientation. These pumps offer an ideal pumping solution between turbo and roots pumps with 7.5 l/s pumping speed, an ultimate pressure of 10-5 mbar and a maximum continuous flow rate of 400 sccm. Additionally, the pump molecular drag stages allow an exhaust pressure up to 40 mBar! Low rotational speeds and the mechanical design make this pump robust against accidental air in-rush, shock venting and gyroscopic effects. The MDP is available in standard and corrosive versions.
Adixen Brand Rotary Vane Pumps
The Adixen brand PASCAL series rotary vane pumps can meet the requirements of your specific application, from 2 to 100 m3 /h (1.4 to 85 cfm), by offering a wide range of dedicated series: “I” series Analytical instrumentation;  “SD” series Standard non-corrosive; “C1” series High resistance to corrosion; “C2” series Most corrosive/Semiconductor; and the “H1” series Hermetic, high tightness level.
Adixen Brand ACP 120 series
General Purpose Dry Pumps
Successfully installed worldwide in the Semiconductor industry for over ten years,  the Adixen multi-roots technology is now available for other market segments. ACP 120 series offer an attractive combination of pumping speed and ultimate pressure for many R&D and industrial applications still using oil sealed pumps. The pumps bring the benefits of clean and dry vacuum whenever particulate or oil contamination is an issue. ACP 120 standard version is for non-corrosive applications and the ACP 120 G version is suitable for pumping traces of corrosive gases or condensable vapors.
Alcatel Vacuum Products, Inc.
Hingham, MA
www.adixen-usa.com
Tel: 1-781-331-4200
E-mail: inquiry@adixen-usa.com
New CeramTec Micro D Connector
(MIL-DTL-83513)
Micro D Connectors are rugged and lightweight hermetic connectors designed to meet MIL-DTL-83513 specifications. Contacts are on 0.050 [1.27 mm] centers, which provides a significant space and weight savings over other traditional Mil Spec connectors. Standard configurations include 9, 15, 25 and 51 gold-plated pin/socket contacts, which are available as a weldable unit or in a ConFlat® or ISO flange. CeramTec uses a proprietary glass-ceramic sealing process to individually seal and electrically insulate each pin from the stainless steel housing. This allows for a very high pin/lead density and the extremely robust hermetic seal. These hermetic connectors are built for the most demanding environments and offer a much higher level of durability and reliability than any glass or elastomer sealed connector. Mating air side cable assemblies with standard color coded 6-inch flying leads are offered for ease of installation. Custom PEEK thermoplastic plugs are offered for easy connectivity on the vacuum side of the connector. These PEEK plugs are fitted with gold plated 0.020 female crimp contacts, which mate to the male pins on the vacuum side of the Micro D connector and can be used with #26 through 30 AWG Kapton® wire.
CeramTec 40 & 50 kV Feedthroughs
The 40 & 50 kV feedthroughs with mating air side cable assemblies  offerings include a 40 kV feedthrough and a 50 kV feedthrough, which each have a 10 amp current carrying capacity. These high voltage feedthroughs offer a much smaller solution to fluted high voltage feedthrough designs and have the added safety of the air side cable assembly, which has a threaded connection. The standard offering includes weldable, ConFlat® and ISO flange mounted installation configurations. The corona resistant high voltage cable assembly, which is required to achieve the 40 or 50 kV rating, utilizes a molded silicone body and silicone insulated cable. The standard length for these cable assemblies is 8 feet but custom lengths are available. The use of silicone insulating grease is recommended for the air side cable assembly to feedthrough interface to help assure air exclusion. High voltage conditioning is also recommended for these feedthroughs. Like all of CeramTec’s Ceramaseal® products these new high voltage feedthroughs are built for use in extreme conditions. The feedthrough has a temperature capability of -269°C to 450°C and is guaranteed to be leak tight to a leak rate < 1 × 10-10 atm-cc/sec (He).
CeramTec .154 & .250 Power Plug Feedthroughs
These Power Plug products are a high power extension of CeramTec’s standard 10 kV and 20 kV Power Plug product line. The new .154 Power Plug offers a 10 kV rating and a current carrying capacity of 75 amps when mated with the air side cable assembly. The 0.250" Power Plug feedthrough is rated for 25 kV and 100 amps when mated with the air side cable assembly. Both are built for simple and safe high power connectivity. Both the 0.154" and the 0.250" Power Plug feedthroughs are standard with a nickel or copper conductor for high current applications. The standard offering includes weldable, ConFlat® , ISO flange or NPT fitting mounted installation configurations of 1 to 4 pins. The high voltage cable assembly, which is required to achieve the 10 or 25 kV ratings, utilizes a custom plug or boot to mate to the CeramTec feedthrough and an 8 AWG (.154 Power Plug) or 6 AWG (.250 Power Plug) tin plated copper conductor cable with silicone insulation.
CeramTec North America
Hermetic Products
Laurens, SC
www2.ceramtec.com
Tel: 1-864-682-315
E-mail: sales@ceramtec.com
Comdel, Inc. RF and DC
Power Supplies Literature
Comdel, Inc. designs and manufactures RF and DC power supplies and process instruments used in semiconductor vacuum and flat panel process tools, solar cell and photovoltaic systems, wafer processing, industrial heating systems, medical sterilization, optical,  drying and other induction and dielectric heating applications. Products include RF generators, automatch impedance monitors, multi-channel synthesizers and electrostatic chuck power supplies that are in use worldwide by the industry’s major equipment and IC fabrication manufacturers. The full line of RF power supplies operates at frequencies from 20 kHz to 80 MHz with selected topographies up to 150 MHz. Our generators include power levels ranging from 100 to 100,000 watts. Comdel’s patented STechnology, used in high frequency RF plasma generators, optimizes amplifier performance reducing power gain changes due to plasma impedance fluctuations. This increased stability reduces process development time and improves process repeatability. Comdel’s products are compliant with CE, Semi F47, and the ETL product safety mark. Configurations include custom packaging for high frequency, low frequency, dual frequency, DC or dual combinations of RF and DC power in one unique package. With flexible power delivery solutions, the broadest frequency ranges available, rapid prototyping, product certification and safety compliance, this Gloucester-based, ISO 9001:2000 company provides responsive support and product solutions from its offices in the US, UK, Asia, and Japan.
Comdel, Inc.
Gloucester, MA
www.comdel.com
Contact: MaryBeth Masterson, Marketing Manager
Tel: 1-978-282-0620 Ext. 102
E-mail: marybeth_masterson@comdel.com
HORIBA Jobin Yvon MM-16:
Affordable Spectroscopic Ellipsometer for
Advanced Thin Film Characterisation
HORIBA Jobin Yvon’s MM-16 is a highly accurate, sensitive and affordable spectroscopic ellipsometer that extends the capabilities of classical ellipsometry. Along with measurements of thin film thickness and optical constants, the MM-16 delivers in 2 seconds, the complete 16 elements of the Mueller Matrix in the visible-NIR spectral range (420 nm - 850 nm). Combined with the embedded analysis software -DeltaPsi2- this additional capability allows simple and easy characterization of anisotropy, birefringence and degree of depolarization. These complex materials properties are widely used in optical coatings, display, biotechnology, packaging and semiconductor applications. With the addition of options such as automatic variable angle of incidence and X-Y mapping stage, the MM-16 is the ideal spectroscopic ellipsometer for simple, fast and accurate measurements of your multilayer stack film thickness and optical constants. Attached to your process chamber for in-situ applications, the MM-16 will deliver real time film thickness and optical constants for process optimization.
HORIBA Jobin Yvon Inc.
Edison, NJ
www.horiba.com
Tel: 1-732-494-8660
E-mail: info@jobinyvon.com
Kurt J. Lesker Company Torus HV Round Magnetron
Sputtering Cathodes Brochure
The Kurt J. Lesker Company has been manufacturing magnetron sputtering sources for nearly three decades under the Torus® Trademark. The Torus family of high vacuum capable round magnetron sputtering sources find application in a vast array of research and production applications. The Torus® HV sources utilize simple, clamped, disk shaped targets, are RF, DC and pulsed DC compatible, and are available in balanced and unbalanced versions. They are used to sputter metallic, magnetic, and insulating targets and can be supplied with numerous options including: direct gas injection, deposition chimneys, tilt, and cluster configurations. State of the art magnet arrays allow Torus HV sources to achieve outstanding deposition rates, film uniformity and material utilization for a wide variety of materials. All Torus® HV sources are compatible with vacuum levels to as low as 3 × 10-9 torr. Torus® HV round sources are available in sizes ranging from 1" to 12" diameter and are available with numerous mounting options.
Kurt J. Lesker Company UHV Products Brochure
Our Kurt J. Lesker Company UHV Products flyer features our lines of:  Rotary/Linear Power-Probes; SET (Sample Exchange Technique) sample transfer components; SMC Series stepper motor controllers; MagiDrive magnetically-coupled rotary feedthroughs; LSM linear shift mechanisms; MultiBase XY and MultiStage XYZ Stages; and the EpiCentre 100 heating and rotation stage.
New Line of Ferro Magnetic Fluid Rotary Drives
from Kurt J. Lesker Company
Kurt J. Lesker Company introduces a new line of Ferro Magnetic Fluid Rotary Drives.  The drive shaft is housed inside the stationary body and the gap between them filled with a low vapor pressure fluid containing a suspension of magnetic particles. The ferrofluid forms a series of liquid orings that form a vacuum-seal under the influence of magnets in the drive’s body. Such drives are used in vacuum applications requiring rotary motion, including: sample stages, barrel coaters, platens, planetaries, and roll/web coaters. The new line includes both solid- and hollow-shaft drives with an assortment of vacuum chamber mountings: ConFlat® flanges, o-ring seal flanges, baseplate mounts, and threaded mounts. For drawings, details, and pricing visit .
Kurt J. Lesker Company
Branded Gate And Angle Valves
The Kurt J. Lesker Company is proud to introduce their own Lesker-branded line of gate and angle valves. These reliable and economical general purpose valves are excellent choices for HV and  UHV applications requiring cleanliness and corrosion resistance. The gate valves are available in 6" and 8" models with either CF or ISO flange mountings. They are suitable for pressure ranges from 1×10-8 to atm. Lesker angle valves are constructed of stainless steel and come in a variety of mountings with manual or pneumatic operation. Request more information at www.lesker.com.
Kurt J. Lesker Company
Atomic Layer Deposition (ALD)
Kurt J. Lesker Company offers stand-alone ALD  tools for basic research, or completely integrated deposition systems for complex R&D applications. All tools feature high-speed ALD valves and integrated pumping, pressure measurement, and gas delivery packages optimized for any specific process.
Kurt J. Lesker Company
Fluid Reclaim Service
The Kurt J Lesker Company is dedicated to providing our customers with quality products and services to enhance and protect their process. For over 20 years, the Kurt J. Lesker Company has been reclaiming inert PFPE and silicone fluids. Our reclaim service provides a significant savings over the cost of new fluid and helps protect our environment by drastically reducing the amount of waste contributed to the waste stream.
Kurt J. Lesker Company Lesker Materials
As new technologies evolve and emerge our customers demand new materials, larger sizes, higher volumes, and higher quality standards. To support  these new requirements investments have been made towards larger production equipment, facilities upgrades, and more stringent quality standards. We offer virtually every configuration of sputtering target and evaporation source. Our offering includes well over 1,000 different metals, alloys, and ceramics totaling over 100,000 inventoried items in locations around the world.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Bill Zinn, Marketing Spec.
Tel: 1-412-387-9200
E-mail: sales@lesker.com or international@lesker.com
MV Multi-Trap
The new MV Multi-Trap used to protect liquid ring vacuum pump on Davis-Standard® extruder. Positive results have been obtained by  installing the MV Multi-Trap on a Davis-Standard® extruder. Prior to the trap installation the Kinney liquid ring vacuum pump failed once a month due to the solvent from the ABS extruder vent. Since the Multi-Trap installation the liquid ring vacuum pump has run trouble free and been in operation for over a year. The trap can be customized to remove liquid, particulate, and heavy condensables on plastic and rubber extrusion lines. (® Davis-Standard is a registered trademark of Davis-Standard LLC.)
Mass-Vac, Inc.
North Billerica, MA
www.massvac.com
Tel: 1-978-667-2393
E-mail: sales@massvac.com
MKS Instruments, Inc. - HPS Products ISO-Universal
Component Line Literature
The Vacuum Products Group of MKS Instruments has expanded its HPS™ Series 76 line of  ISO-Universal vacuum components. Drawings of all components are available for downloading from the MKS website. The HPS™ Series 76 line of ISO-Universal vacuum components range in size from 2½ to 25 inches in diameter. The flanges are sealed with symmetrical centering ring, then held together with clamps or bolts. The selection of over 275 parts are manufactured to international standard for rapid assembly, disassembly, and interchangeability. In addition to the flanges, crosses, elbows, tees, tubing and bellows are additional sizes and styles of reducers and adapters as well as flange protectors. The full line of HPS™ Series 76 components is available in *.DWG and *.DXF format on the MKS website. The drawings can speed system design using HPS™ Series 31 components.
HPS Single Stage and Multiple Stage Vacuum Valves and Leak Check and Specialty Valves Literature
The HPS line of single and two-stage valves includes standard, low profile,  and metal-sealed styles in angle and inline configurations. In port sizes ranging from NW 16 to NW 160 for single stage, and NW 25 to NW 100 for multiple stage, these valves reduce particle contamination and damage due to sudden pressure changes. MKS has developed compact vacuum valves for gauge isolation and leak checking. The Cv valve is ideal for isolating sensors or closing off leak check ports. The IDA valve enables in-situ calibration of MKS Baratron® manometers on a vacuum system. MKS also offers specialty safety valves. The patented Vacuum Sentry® valve protects the system in the event of power failure to the pump. The AUTOSOFT® valve protects the vacuum system from particle contamination and prevents product damage in the event of a sudden change in the system.
MKS Stainless Steel Fittings Literature
MKS offers a wide variety of fittings and components such as tees, crosses, elbows, tubes,  flanges, end caps, reducers, and seals in standard sizes and configurations. These fittings are offered in the Series 23 Buttweld, Series 31 ISO-KF, Series 76 ISO Universal, and the Series 88 CF components. For more information, call 1-800-345-1967 or visit www.mksinst.com. .
MKS Series 900 Vacuum Transducers Literature
The MKS Series 900 vacuum transducers are a complete suite of microprocessor-based, standalone gauges,  offering a wide pressure measurement range from above atmosphere to ultra high vacuum. Designed for system integration, the transducers offer both analog and digital communication (RS485 and RS232). Digital transducers allow for all adjustments and monitoring to be delivered realtime, via a host computer. The transducers incorporate MEMS (Micro Electro-Mechanical Systems) based technologies, including MicroPirani™ and piezo sensors, combined with Mini Ion BA technology resulting in a broad product offering for a wide variety of customer applications
MKS Instruments, Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS HPS Applications Engineering
Tel: 1-800-227-8766 (USA) or 1-978-284-4000 worldwide
E-mail: mks@mksinst.com
Nor-Cal Products NW Flanges Literature
Nor-Cal NW flanges are designed to ISO 2681 specifications for standard USA tube sizes from 3 /8 to 2 inches OD.   They are compatible with other manufacturers’ ISO-KF style flanges. NW flanges utilize an aluminum clamp with a single wing nut fastener or a lock-over-center clamp allowing frequent disassembly without tools. The mating flange surfaces compress a Viton O-ring held in place by a centering ring. The resultant seal can be used in vacuum applications of up to 10-8 Torr and baked to 204ºC. NW flanges allow components to be rotated before assembly for ease of component alignment. NW flanges are available on virtually all Nor-Cal components and fittings. Nor-Cal manufactures a full line of NW adapters so you can add to or build an entire system with NW components. NW flanges can also be used with EVAC chain clamps and aluminum seals to obtain a UHV seal bakeable to 150ºC.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Contact: Jacquie Daniel
Tel: 1-530-841-9153 direct
E-mail: jacquiedaniel@n-c.com
Leybold Optics SYRUSpro
CFM High Performance Coatings for Digital Optics
Optical thin film coatings are a key enabling technology for digital optics. Constantly increasing demands on image resolution, contrast, color definition, and brightness place exacting requirements on the optical filter performance. The Leybold Optics SYRUSpro CFM is an innovative and cost-effective thin film coating solution for high performance optical filters, tailored to fulfill current and future requirements in digital  optics. The APSpro ensures shift-free UV/IR cut filters (top), and excellent filter performance with high transmission and low ripple (bottom). Outstanding uniformity and reproducibility is demonstrated by the data of five substrate positions distributed over the calotte radius, and 6 consecutive production runs. Note: Measurement without backside AR coating. Today’s filters meet a growing range of performance parameters and must be produced within ever-shorter deadlines. This is why excellent quality is the basis for modern digital optics production. A cost-effective thin film deposition system must also deliver increased productivity through consistently high throughput and high yields. Higher product requirements combined with lower cost of ownership demands all add up to an increasingly challenging business environment for the filter manufacturer. Innovative production technology from Leybold Optics provides mass production solutions with outstanding performance, productivity and reliability.
Oerlikon Leybold Vacuum USA
Export, PA
www.oerlikon.com/leybold
Contact; Mario Vitale Tel: 1-800-764-5369
E-mail: mario.vitale@oerlikon.com
HiPace• Eco Dry Turbo Pumping Station
The Pfeiffer Vacuum HiPace Eco is a complete dry vacuum pump station. The plug-and-play vacuum station includes a turbomolecular and dry diaphragm pump and is available with 63 CF or 63 ISO flange sizes. The HiPace Eco is ideal for R&D and vacuum applications that require hydrocarbon-free vacuum. Pfeiffer Vacuum’s bench-top HiPace Eco has a high pumping speed of 60 l/s and an ultimate pressure of < 10-8 mbar. This dry vacuum unit is easy to service with a DCU that allows control and diagnostics of the pumping station. HiPace Eco is always in stock. For more information, e-mail: hicube@pfeiffer-vacuum.com
PentaLine• Rotary Vane Pumps
Pfeiffer Vacuum PentaLine• rotary vane pumps, with optimized drive system, provides cost-effective, environmentally friendly vacuum, for a wide range of applications in the low and medium vacuum range down to 10-3 mbar. Applications include: vacuum coatings, photovoltaic, freeze drying, metallurgy, vacuum degassing, analytical instrumentation and R&D. Available in pumping speeds up to 35 m3/h, PentaLine™ is hermetically sealed for leak-free vacuum, and provides compatible voltage for worldwide use. It’s standby operating mode provides a power savings that can reduce operating costs up to 50% and assures a longer service life. PentaLine™ rotary vane pumps run noiselessly with minimum vibration assuring a cooler, quieter work environment. E-mail: pentaline@pfeiffer-vac-uum.com
Pfeiffer Vacuum Solutions for
Coating Applications
Pfeiffer Vacuum offers a comprehensive product portfolio of components for coatings that generate, control and measure vacuum. The company supplies individual components as well as pumping stations that are custom-tailored to produce the optimum vacuum solution for reflection and wear protection, ophthalmics, storage media, flat panel displays, photovoltaic and glass coatings. Pfeiffer Vacuum rotary vane, roots and turbopumps offer minimal operating costs through better performance, longer service operation and simple and reduced maintenance. The Roots and rotary vane pumps are available in low maintenance, magnetically couple versions, while the turbopumps feature proven bearing design with the longest Mean Time to Failure. For more specific coating application information, E-mail: combiline@pfeiffer-vacuum.com
CMR Capacitive Transmitters
Pfeiffer Vacuum CMR capacitive transmitters are ideal for applications that require highly accurate total pressure measurements that are independent of gas type. The CRM transmitters are designed for applications from 1,100 to 1·10-5 mbar, and are characterized by their long service life, minimum zero drift and outstanding temperature stability. They are non-wearing, resistant to corrosive gases, insensitive to atmospheric pressure and do not require an additional shutoff valve. They are available in temperature regulated and temperature compensated models. The temperature regulated version heats the entire sensor to a temperature that is higher than the ambient temperature. This completely eliminates temperature-related effects, which provides the utmost in measurement accuracy. The temperature compensated transmitter model provides highly accurate, temperature compensated pressure measurement, without the need for warm-up. Email: gauges@pfeiffer-vacuum.com
Pfeiffer Vacuum
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-603-578-6500
E-mail: contact@pfeiffer-vacuum.com
Telemark E-Beam Sources
Telemark offers the broadest range of multi-pocket rotatable, single pocket UHV, and linear UHV electron beam sources. Options for arc-suppression sources, reduced beam curl magnetics sources, self-sealing cover plates, large inventory sources and crucibleless sources are available on specific models. Rugged, reliable construction; designed for ease of use and maintainability; side or bottom crucible rotation drive; plug-in emitter assembly for easy filament replacement; all components are maintained in stock.
Telemark Water Vapor Cryotraps
Telemark Cryogenics supplies improved water vapor cryotraps in capacities from 1000 watts to 3500 watts of heat load and 50,000 to 220,000 liters  per second of vapor trapping. Fully digitized for easy integration into a broad range of system masters/controllers. Wide array of user adjustable controls built in as standard. Available in single and dual circuit models and CE mark options. CFC-free blends to comply with all international environmental standards. Smaller footprint and improved access/usability.
Telemark Moretec Magnetic Fluid Feedthroughs
Telemark offers a broad range of high quality magnetic fluid feedthroughs from Moretec. Standard varieties include: solid or hollow shaft; flange, nut, or through hollow mounting; inert or reactive gas environment; air cooled, water cooled, clamp or clamp with water cooled; normal, cantilever, or heavy duty seal structures all with a wide variety of shaft diameters and load/torques. Modified/semi-custom and full custom feedthroughs also available. Repair and rework service available. Competitive pricing with aggressive delivery lead times.
Telemark
Hayward, CA
www.telemark.com
Contact: Russ Schroy
Tel: 1-415-883-1004
E-mail: russ@telemark.com
Qulee Quadrupole Mass Spectrometer
The compact ULVAC Qulee quadrupole mass spectrometer features integrated measurement display and control electronics,
eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Pascal, Torr or mbar of He, H2O, N2, O2, O2/N2 ratio, and a user selectable channel from mass ranges of 1-50 amu. The built-in set points with serial I/O remote control, RS232C and 485 outputs, as well as easy-to-use software enable Qulee to be used for leak detection, RGA and process gas monitoring in PVD systems. A maximum operating pressure of 15 mTorr can eliminate the need for differential pumping, and the minimum detectable partial pressure is 1 × 10-12 Torr. At prices starting at $4000 the Qulee BGM quadrupole mass spectrometer is your answer to cost effective leak detection, RGA and process gas monitoring in vacuum systems. For R&D and other vacuum system process monitoring, the Qulee HGM achieves the highest sensitivity among all Ulvac models at 2.5×10-6 A/Pa. In addition, it offers revolutionary simplicity and usability in a highend research model.
Heliot Leak Detectors
Building upon the reputation of ULVAC’s popular Heliot 700 series, the Heliot 710 series leak detectors are even easier to use.  With the same familiar large color touch-screen interface and improved easy-touse ATM-like menus, the Heliot 710 offers six different onboard language selections with audible voice prompts. Both Helium and Hydrogen leak detection capabilities and 5 different programmable leak test configurations help simplify leak test operations. Internal monitoring of error and alarm conditions detects problems before they can damage the instrument. Eco-friendly design is RoHS compliant, and construction makes use of recycled plastic materials. An intelligent power management function switches the forepump on and off as required during idle periods for maximum energy savings. The Heliot 710 series features a multiple valve design for the highest sensitivity – 10-12 Torr-l/s. This new leak detector is ideal for applications in the automotive, air conditioning/refrigeration, electronics, semiconductor and pharmaceutical industries. Pricing starts at under $20,000.
ULVAC Tabletop Furnaces
ULVAC tabletop vacuum furnaces consist of an infrared gold image furnace, high accuracy programmable digital
temperature controller, quartz glass chamber and a gas controller. Samples are mounted in a clean, atmosphere-controlled quartz vacuum chamber and heated by focusing reflected infrared rays. The IR lamps provide energy densities that are significantly higher than conventional heating elements. This permits very rapid heating and cooling experiments to be performed. Operating temperatures can reach as high as 1800°C, depending on the model. The furnace body is water and gas cooled for maximum accuracy and thermal response time. Semiconductor and material science experiments such as annealing, gas quenching, thermal cycling, sintering and melting point determination under precisely controlled gas or vacuum atmospheric conditions can be performed with this instrument. These furnaces are available in a variety of configurations and temperature ranges.
ULVAC Dry Vacuum
Pump LR/HR Series
The ULVAC LR/HR Series of dry vacuum pumps is designed to reduce  maintenance and noise in semiconductor and flat panel display manufacturing processes. The LR series has uniformity in low temperature distribution making it ideal for the evacuation of load locks and PVD processes where reduction of exhaust time is important to throughput. The HR series has uniformity in high temperature distribution so that condensation is reduced in the pump. This permits particulates and other materials to exhaust in CVD and etching processes. These pumps are available in pumping speeds from 47 to 2048 cfm.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.comTel: 1-978-686-7550
E-mail: sales@ulvac.com
Varian IDP Series Scroll Pumps
Varian’s IDP Series Scroll Pumps are compact, high performance dry pumps that provide affordable oil-free vacuum and easy system integration, and are suitable for a wide variety of applications. The IDP Series employs an innovative hermetic design in which the motor and bearings are outside the vacuum space allowing full isolation of all pumped gases. In addition, the IDP dry pump technology is environmentally friendly, as it eliminates the need for oil disposal or the handling of contaminated oil in your laboratory. The uncomplicated dual scroll design offers many other benefits including lower noise and vibration levels, simple and infrequent maintenance requirements, and the elimination of catastrophic failure modes.
Varian XGS-600 Vacuum Gauge Controller
Varian’s XGS-600 Vacuum Gauge Controller provides unprecedented capacity, performance and flexibility in a cost effective, standard half-rack package.  A single controller can simultaneously operate up to four hot filament (or four cold cathode) gauges and four convection gauges, up to five ionization gauges, or up to twelve convection gauges. Expansion or re-configuration in the field is easy to do. Serial communications (RS-232 or RS-485), eight set points, and universal voltage compatibility are standard in all units. A programmable dot matrix LCD provides display flexibility, and simple screen organization and navigation makes the unit extremely easy to use. Drop down gauge selection automatically sets the emission current, sensitivity and overpressure. The screen displays up to eight gauges and pressures simultaneously, and permits the user to label each gauge. A large-font feature provides visibility from 20 feet.
Varian Inc.
Vacuum Technologies Lexington, MA
www.varianinc.com
Tel: 1-781-861-7200 or 1-800-882-7426
E-mail: jackie.bull@varianinc.com
Angle and Inline Valves Brochure
VAT offers the most comprehensive line of Angle and Inline Valves available on the market  today to accommodate all vacuum ranges and applications. This product line features modular design concepts for standard or integrated solutions while making customized solutions easy. VAT Angle and Inline valves are high quality, reliable and low in cost. Short delivery times and competitive pricing make VAT Angle and Inline valves a great value. VAT Angle and Inline valves are offered in sizes ranging from DN 16 to DN 160.
VAT Series 19 Large Gate Valves (16" – 50")
VAT Series 19 Large Gate Valves are designed for large pump isolation with shaft or bellows feedthrough for HV or  UHV applications. These valves are competitively priced and feature a very low locking shock. The high vacuum version in sizes 40" and 50" offer a split body design for a very short dismounting height for servicing. Overall sizes offered for the Series 19 range from 16" to 50" I.D. with all standard flanges available. Contact VAT for a technical brochure on this or other VAT valve products by visiting www.vatvalve.com.
VAT, Inc.
Woburn, MA
www.vatvalve.com
Contact: Joyce Mackiewicz, Marketing
Tel: 1-800-935-1446
E-mail: joycem@vatvalve.com
Veeco Mark II+
Ion Source Controller
Veeco’s Mark II+ Ion Source Controller is designed specifically  to match the plasma characteristics of end hall ion sources. It's a plug and play replacement for existing power supplies and the only controller that is field proven from a leader in ion beam technology.
3cm DC Ion Source
The Veeco 3cm DC (ITI) ion  source is a radiant cooled, compact, economical ion source that is ideal for smaller vacuum systems. With a high current density, a broad selection of grid sets and a purpose built power supply, this source is well suited for cleaning, etching, texturing, sputtering, or assisted deposition processes.
15cm DC Ion Source
Coupled with Veeco’s automated and integrated  ion beam source controllers, the 15cm DC ion beam source provides a wide range of stable operating conditions for medium sized substrate applications. In low voltage operation, the 15cm source is well suited for substrate pre-cleaning and assisted deposition processes. In high voltage operation, the 15cm source provides a high-energy collimated beam suitable for etching or sputter deposition.
6cm x 110cm RF Linear Ion Source
The Veeco 6 × 110 cm RF linear ion source is a filamentless, inductively coupled design, which allows for low maintenance operation on 100% argon, oxygen, and other reactive gasses. It offers efficient, uniform processing of flexible webs, flat panel displays, large substrates, or large arrays of small substrates. A patented 4-grid design results in a highly collimated beam. The beam current densities and uniformities are appropriate for pre-cleaning, etching, and ion beam assisted deposition (IBAD); it is especially suited for optical coatings and thin films involving metal oxides and other dielectric materials. It is ideal for processes requiring long, uninterrupted production runs.
Veeco Instruments Inc.
Woodbury, NY
www.veeco.com
Contact: Fran Brennen,
Senior Director of Marketing Communications
Tel: 1-516-677-0200 Ext. 1222
E-mail: fbrennen@veeco.com
|
|
|
Vacuum Technology & Coating