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Vacuum Pump Equipment Suppliers
Compiled by Terrence Thompson, Contributing Editor
This Vacuum Technology & Coating vacuum pump product showcase covers the wide variety of roughing pumps, high-vacuum pumps, very-high-vacuum pumps as well as vacuum pumps used in R&D applications.
The most cost-effective and practical means of achieving the desired vacuum, in most applications, is achieved by doing it in stages. Roughing/backing pumps provide that crucial first stage in a wide range of configurations. This initial vacuum pumpdown is followed by using highvacuum, very-high-vacuum or ultra-high vacuum pumps to achieve the end result low-pressure environment. Although this sounds straightforward, getting there involves many options and choices. Current generation pumps now span much wider ranges than those of recent years ago.
Vacuum pumps remove undesired specific gases, liquids and other contaminants, from a chamber in which a very low pressure exists, i.e., a vacuum. A vacuum could be simply defined as a volume of space that contains fewer atoms than a similar volume under normal atmospheric pressure. As you will see when perusing the product descriptions, pump manufacturers have some clever options that will make you look more closely at what is available and at what price to match your intended application.
Vacuum Pump Product Descriptions
In the following product descriptions, vendors make subtle but significant distinctions to focus on specific intended applications so direct comparisons may be difficult. When in doubt, go toVacuum Technology & Coating magazine’s home page at www.vactechmag.com and click on the Advertiser or Buyer’s Guide links for additional details or telephone numbers for calling to discuss your specific application requirements.
Turbomolecular Pumping Systems
The Adixen by Pfeiffer Vacuum brand turbomolecular pumping system product offering has been expanded to provide a flexible design with a wide range of configurations. Systems are designed  for installation on a workbench or below a vacuum chamber and offer optional casters to allow for easy movement. Turbopumps are available in pumping speeds ranging from 80 to 400 liters/second; backing pumps are available wet from 5 to 21 m3 /hr or dry from 15 to 40 m3 /hr. Plus, numerous vacuum options such as turbopump vent valves, rotary vane pump isolation valves and integrated gauges with single or multi-channel graphing function controllers are available.
Compact, Dry Pumping Systems
The Adixen by Pfeiffer Vacuum brand Drytel series dry pumping system provides a compact, portable, reliable dry vacuum design. Systems offer one switch operation from atmosphere to 10-8 mbar. The secondary pumps are available in 7.5 or 30 liter/second pumping speeds, diaphragm-backing pumps  in 1 or 4 m3 /hr. Options include an interface board for remote start/stop, automatic gas ballast to improve the pumping of light gases and reduction of condensation, an exhaust connection and chemical versions. The unique, modern, open design allows for easy maintenance when replacing the membranes that have a 10,000+ hour Mean Time Between Preventive Maintenance.
ATH Series Hybrid Turbomolecular Pumps
The Adixen by Pfeiffer Vacuum brand ATH Series hybrid turbomolecular pumps incorporate grease lubricated ceramic ball bearings making them mountable in any orientation, low rotational speed providing increased resistance to air inrush and pumping speeds of  200 – 300 l/s. Outstanding compression ratios enable these pumps to reach 10-10 mbar ultimate pressure or foreline tolerances up to 10 mbar. These pumps are available in standard, interstage port and corrosive versions, with water or air cooling, as well as nude versions that may be inserted directly into your instrument - improving performance, decreasing the system size and providing cost savings.
Molecular Drag Pumps
The extremely reliable Adixen by Pfeiffer Vacuum brand MDP Series molecular drag pump incorporates grease lubricated ceramic ball bearings making them mountable in any orientation. These pumps offer an ideal pumping solution between turbo and roots pumps with 7.5 l/s pumping  speed, an ultimate pressure of 10-5 mbar and a maximum continuous flow rate of 400 sccm. Additionally, the pump molecular drag stages allow an exhaust pressure up to 40 mbar, making them ideal for use with low-cost membrane backing pumps. Low rotational speeds and the mechanical design make this pump robust against accidental air in-rush, shock venting and gyroscopic effects. The MDP is available in standard and corrosive versions.
Adixen by Pfeiffer Vacuum —
Two strong brands consolidated for your success
Hingham, MA
www.adixen.com
Tel. 1-781-331-4200
E-mail: inquiry@adixen-usa.com
COBRA BOB BA/BC Model Vacuum Pumps
The Busch COBRA BOB singlestage vacuum pumps use dry screw technology to maximize product uptime and reduce energy consumption. COBRA BOB vacuum pumps have fewer moving parts, longer service intervals and lower nitrogen consumption in comparison to multi-stage pumps. COBRA BOB  pumps provide vacuum down to .00075 Torr and pumping speeds up to 529 ACFM. They will operate at any pressure from atmospheric down to ultimate pressure. Air-cooled and canned water-cooled models are available. For higher pumping speeds and lower ultimate pressure, Busch offers COBRA/booster systems along with many other custom designed vacuum systems. Standard Equipment on most models includes full PLC control, tool interface box, full enclosure with casters, exhaust pressure switch, nitrogen regulating valve, body temperature sensor, SS discharge silencer and inlet flange adapter, and more.
COBRA DS B/E Model Vacuum Pumps
The Busch COBRA DS single-stage vacuum pumps use dry screw technology to maximize product uptime and reduce energy consumption. COBRA DS vacuum pumps have fewer moving parts, longer service intervals and lower nitrogen consumption in comparison to multi-stage pumps. COBRA DS pumps  provide vacuum down to .00075 Torr and pumping speeds up to 1711 ACFM. DS series pumps use an indirect cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket. COBRA DS pumps are capable of advanced monitoring and interfacing between the pump and process tool. The interface unit allows for monitoring f various parameters such as water flow, nitrogen flow, motor current, etc. For higher pumping speeds and lower ultimate pressure, Busch offers COBRA/booster systems along with many other custom designed vacuum systems. Standard Equipment on most models includes full PLC control, tool interface box, full enclosures, canned water-cooled motors, labyrinth seals on A and B sides, indirect cooling with thermostatic valve, SS discharge silencer and inlet flange adapter, and more.
Fossa Scroll Vacuum Pumps
The Busch Fossa vacuum pumps feature a non-contacting scroll design that reaches high vacuum and suction capacity with lower power consumption requirements. With an oil-free, simple design, Fossa pumps are reliable, efficient and relatively maintenance free. Fossa scroll pumps provide  vacuum down to .01 Torr and pumping speeds up to 21 CFM. In this simple scroll design, a volume of gas is trapped between the walls and moving from the periphery of the spiral to the center while reducing in volume. The exhaust port of the scroll pump is located in the center of the spiral. Busch Fossa15 is the newest model of the series and boasts additional advantages such as increased suction capacity at lowered power consumption, completely dry design which eliminates contamination risk, tip seal change is fast and easy and transportation is easy due to the light weight and compact design.
Busch Vacuum Pumps and Systems
Virginia Beach, VA
www.buschusa.com
Tel: 1-800-USA-PUMP
E-mail: marketing@buschusa.com
Turbo-60G Oil-Free Pump Package
The DRIVAC, Inc. Turbo 60G is a compact, air-cooled, portable turbopump package. This fully integrated 35lb. package includes a 60 L/sec. hybrid turbomolecular pump, an oil-free backing pump, automatic valving, and a control module. Operation is automatic and interlocked, and the TURBO  60E is not adversely affected by operator error or power failure. Vacuum in the user's system remains undisturbed in power failure situations. The footprint is 8" × 11". Modular construction permits direct mounting of the turbopump to the system flange, and remote mounting of the control module. The rugged, industrial-grade oil-free backing pump has a mean-time-between-failure rating of 25,000 hours for the rotating mechanisms. A wide selection of standard inlet flanges is available.The hybrid turbopump can be directly mounted onto the user's system flange. This results in substantially increasing the net high vacuum pumping speed at the system inlet. The exhaust pressure of the hybrid pump is in the viscous flow range. This permits remote mounting of the backing pump without increasing pumpdown time. The oil-free backing pump used in all Hovac packages eliminates the requirement of venting the turbopump in power-fail situations. When the power goes off, the normally-closed solenoid valve isolates the turbopump from the backing pump. When power resumes, a time-delay relay keeps this valve closed until vacuum is re-established in the foreline. The Vacuum Monitor sensor and circuit incorporated into the TURBO 60 package automatically controls operation of the hybrid turbopump. This prevents extended operation of the turbopump at high pressures. This helps to maintain a lower operating temperature of the turbopump thereby enhancing long-term reliability.
DRIVAC, Inc.
Furlong, PA
Tel: 1-215-345-7044
New and Remanufactured Vacuum Pumps
Duniway Stockroom Corporation provides high-quality ion, mechanical, diffusion and turbo vacuum pumps, both new and used, at reasonable prices. We take pride in providing comprehensive information about our products and their applications for our customers. This business model has supported growth since our company was founded. Our knowledgeable customer service representatives provide informed assistance to help you meet your requirements. We have a large stock of new vacuum pumps, and in most cases, items are shipped the same day as ordered. Our wide access to used vacuum equipment and rebuilding services provides an additional excellent resource for low-cost solutions.
Duniway Stockroom Corp.
Mountain View, CA
www.duniway.com
Tel: 1-650-969-8811
E-mail: info@duniway.com
iXL120 Vacuum Pump for Semiconductor Processing
Edwards introduced the iXL120, expanding its range of dry pumps for use in semiconductor manufacturing processes. Designed for load lock and other clean applications, the new iXL120 provides the fastest pump down in its class and low energy consumption for high throughput and low cost of  ownership. With a peak pumping speed of 110 m3 /h, the iXL120 is 22 percent faster than any other pump in its class (20 liter chamber). The average energy consumption (power at 700T exhaust pressure) is only 550 W, one of the lowest in its class. The iXL120 is one of the smallest (450 mm L × 230 mm W × 280 mm H) and lightest (59 kg) pumps available for clean and loadlock applications. It is small and lightweight enough to be mounted on the process tool or within the fab’s waffle floor, helping to save valuable fab floor space. Unlike most competing dry pumps, the iXL120 incorporates oil lubricated precision bearings and timing gears. This reduces vibration during pump operation, which is especially important when the pump is mounted on the process tool. It is also more reliable and eliminates routine maintenance. The new iXL120 pump includes a zero nitrogen purge option for processes that do not use corrosive gases. The zero purge option eliminates the need to provide nitrogen to the pump, simplifying operation and reducing operating costs. The iXL120N includes a nitrogen purge for use where there is a risk of corrosive gas carryover.
EXT406PX Turbo Pump For Compact, Efficient Vacuum Systems
Edwards EXT406PX turbomolecular vacuum pump allows users to build cost-effective, compact vacuum systems, capable of withstanding high backing pressures even with continuous gas loads at the main inlet, and not just at ultimate vacuum. This pump has been developed for use in combination  with a backing pump of significantly smaller capacity, resulting in a vacuum system that consumes less power than comparable systems. This leads to a lower purchase cost, lower cost of ownership and reduced carbon footprint. This is said to be the first pump of its kind that combines turbomolecular and drag stages with an innovative fluid dynamic stage, allowing users to achieve the same gas flow using a smaller backing pump. It offers reliable, high-speed, low-pressure performance and is available in two ranges. The ISO and CF 160 have nitrogen (N2) pumping speeds of 400 l/s (N2) and the ISO and CF 100 have N2 pumping speeds of 310 l/s (340 l/s for He). It can sustain normal operation at a backing pressure of up to 17 mbar. The pump also features an optional inlet port, which, when correctly employed, can offer additional steady-state pumping speeds up to 24m3 /hr-1 at a pressure up to 4mbar.
Edwards Vacuum
Wilmington, MA
Tel: 1-800-848-9800
Scroll Pumps
Scroll pumps are a driving force in the growing popularity of oil free pumping solutions and the Kurt J. Lesker Company has an extensive offering of scroll pumps from Edwards, ULVAC and Varian. The Kurt J. Lesker Company offers single-stage (industrial versions for greater continuous  inlet pressures and improved vapor handling) and two-stage (for improved ultimate pressures) models with pumping speeds from 3.8 CFM to 25 CFM and ultimate pressures as low as 7.5 milliTorr. We have many pumps in stock and ready for same day shipment.
Diaphragm Pumps
The Kurt J. Lesker Company offers an extensive line of dry diaphragm pumping solutions. Models range from tiny OEM models designed for integration into a manufactured tool or system, to large industrial models perfect for vacuum chuck, packaging equipment, and other manufacturing and  medical solutions. The minimal maintenance, high reliability, excellent ultimate vacuum, and impressive pumping speeds make our diaphragm pumps the choice solution for many dry pumping applications. Our anti-corrosive Teflon series are perfect for corrosive or organic solvent applications and are often used to back turbomolecular pumps. With pumping speeds from 0.18 CFM up to 14 CFM and ultimate pressures as low as 2 Torr, we have a dry pump solution for you.
Rotary Vane Pumps
With a large selection of rotary vane pumps, the Kurt J. Lesker Company can help you fill almost any need. While the trend towards dry pumps continues, oil sealed rotary vane pumps still remain the true workhorses of the industry in the rough and medium vacuum ranges. With many pumps  and pump parts in stock and ready for same day shipment, the Kurt J. Lesker Company can meet the need for single or dual stage rotary vane pumps ranging from 0.5 CFM to over 700 CFM. We also offer chemical series pumps and mechanical booster systems for difficult applications and we carry all the major brands including Adixen, Edwards, Pfeiffer, Varian, Leybold, Welch, and ULVAC.
Ion Pumps
The Kurt J. Lesker Company offers a full line of ion pumps from Gamma Vacuum. Twenty-three standard models range in size from 0.2 L/s through 1200 L/s and include tall and low profile versions able to fit into just about any footprint. The standard Diode, Noble Diode, and Triode elements  are available. Three controllers complete the offering with the ability to control up to four pumps simultaneously at no additional cost. These pumps and controllers can even be configured to be compatible with other ion pump manufacturers’ equipment.
Magnetically Levitated Turbomolecular Pumps
The Kurt J. Lesker Company offers a full line of magnetically levitated turbomolecular pumps from Shimadzu. Magnetic bearing turbo pumps are ideal for many situations and are used widely in both industry and R&D, from semiconductor to SEMs. Shimadzu's unique line of turbo molecular  pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 1011 for N2; and for some versions extends the forevacuum tolerance up to 30 Torr. Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry. Plus, they can be surprisingly affordable, even when compared to standard bearing turbo pumps.
Vacuum Services Division
The Kurt J. Lesker Company’s Vacuum Services Division can help make servicing your current pumps quick and easy. The Kurt J. Lesker Company has knowledgeable OEM trained technicians, an expansive spare parts inventory, and turnaround times of less than a week for most pumps. KJLC can  service a wide variety of pumps including rotary vanes, rotary piston, roots blowers, turbo pumps, diffusion pumps, and diaphragm pumps. We can even make shipping easy by coordinating pump pick up and providing you with special crates for most pumps under 25 CFM. We also offer a large inventory of remanufactured pumps that have been fully serviced and come with a full 12-month warranty. Please visit our website for an up-to-date listing of all our remanufactured pumps.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Brandon Fridley, Product Manager
Tel: 1-800.245.1656 or 1-412-387- 9101
E-mail: pumps@lesker.com or vacuumservices@lesker.com
New TURBOVAC MAGiNTEGRA® Turbo-Molecular Pump
The new TURBOVAC MAGiNTEGRA® turbo-molecular pump by Oerlikon Leybold Vacuum offers the highest pumping speeds and gas throughputs in their class, providing faster pump downs and improved cycle times. The extremely robust and reliable MAGiNTEGRA is maintenance-free  in most industrial processes such as display, solar, and coating as well as many R&D applications. MAGiNTEGRA pumps are resistant to process particles and deposits and feature a high degree of tolerance for process-induced “pressure shocks”. With up to 80,000 hours before any service is required, the MAGiNTEGRA can significantly reduce downtime. Safety features such as IP 54 class protection, self-control functionality, and over-speed protection are included with MAGiNTEGRA. In the case of power disruption, the intelligent controls automatically switch the pump over to a regenerative cycle where the rotor becomes a generator allowing the pump to slowly spin down until power is restored. The pump features a lighter rotor design for a reduction in rotational energy and overall energy consumption. The MAGiNTEGRA maglev design ensures the highest degree of protection against hydrocarbons since no oil or grease lubricated bearings are used.
Oerlikon Leybold Vacuum USA
Export, PA
www.oerlikon.com/leyboldvacuum
Contact: Brett Rock
Tel: 1-724-493-2654
E-mail: brett.rock@oerlikon.com
The New TURBOVAC MAGiNTEGRA® High Vacuum Diffusion Vacuum Pumps
Oerlikon Leybold Vacuum DIP Diffusion Pumps are the successors to the highreliability DI Diffusion Pump line. Available in pumping speeds ranging from 3,000 to 50,000 L/sec with possible end vacuum to 0.75 × 10-8 Torr, these diffusion pumps  have been successfully installed in applications such as heat treatment / metallurgy, industrial coating and space simulations. When combined with our fore-vacuum pumps, boosters, gauging, hardware, valves and electrical controls, Oerlikon Leybold Vacuum can provide a total high vacuum system solution.
Dry Compressing Screw Vacuum Pumps
The new DRYVAC® series dry-compression vacuum pumps by Oerlikon Leybold Vacuum have been designed to meet the special needs of applications in Industrial Coatings, Photovoltaic Production, Heat Treatments and Metallurgy and other Process Industry applications. DRYVAC  has evolved from one design platform comprised of models 650 S, 650 S-i and 5000 RS-i. Multiple pumping system combinations are also possible for gaining increased pumping speeds and vacuum levels by incorporating the RUVAC® line of vacuum boosters. DRYVAC features include improvements in leak tightness, energy efficiency and physical stature over competitive brands. Single pumps can achieve 7.5 × 10-3 Torr vacuum and over 2,900 CFM nominal displacement. The DRYVAC line is an environmentally friendly alternative to oil-sealed rotary piston and vane pump style vacuum pumps. With no lubricating oils contained in the pumps’compression stage, DRYVAC offers an improved operating environment with no oil emissions, reduced maintenance, with less down-time and disposal steps resulting in lower operating costs for our customers.
Turbomolecular Pumps - MAG
Oerlikon Leybold Vacuum‘s line of turbomolecular pumps, with magnetically levitated rotors, are known as the MAG line. The line provides superior vacuum performance with models ranging in pumping speed from 830 L/sec to 3200 L/sec. The MAG line has been optimized to meet the vigorous  requirements of the semiconductor industry, but is also commonly used in analytical, R&D, industrial coating and any UHV application where pressures from 10-1 to 10-9 Torr is required. The main features are 5-years of maintenance-free continuous operation, very low vibration, high strength rotors in two versions (classic turbine or compound design), corrosion proof coating on the rotors, automatic balancing, integrated temperature management system, purge gas valves and many more innovative features. The rugged design built into the MAG line with can withstand typical accidents and events that can occur in industrial environments such as shock venting, emergency shut-downs and other external shocks. All MAG pumps are operated from one fully programmable MAG digital controller.
Single Stage Rotary Vane Vacuum Pumps
The Oerlikon Leybold Vacuum Sogevac® series rotary vane vacuum pumps meet the requirements of general industrial vacuum applications where pumping speeds of between 11 CFM to 677 CFM and ultimate pressures up to 6 × 10-2 Torr  are sufficient. Typical application areas include: central vacuum for industrial plants, industrial coating, heat treatments, leak detection, packaging and other general degassing applications. Sogevac features include continuous duty operation with an automatic oil re-circulation system/integral exhaust separation, multi-voltage dual-frequency motors, air cooling, standard anti-suckback protection valve to protect against oil migration, low vibration and simplified maintenance.
Dual Stage Rotary Vane Vacuum Pumps
Oerlikon Leybold Vacuum TRIVAC® series two-stage vacuum pumps consists of six basic models (D4/8/16/25/40/65B) which provide pumping speeds from 3 CFM to 53 CFM, with inlet pressures from atmospheric to an ultimate pressure of 0.75 × 10-4 Torr.  A forced-feed oil system lubricates and seals the vanes and internal parts. Direct drive motors provide quiet and smooth operation. KF inlet and outlet ports can be quickly changed between vertical and horizontal orientations. All seals are Viton. An internal anti-suckback valve seals the pump inlet when the pump stops, thus protecting the customer process. The TRIVAC line of fore-vacuum pumps is considered the industrial standard providing years of continuous duty operation in many diverse applications.
Cryogenic Vacuum Pumps
Oerlikon Leybold Vacuum Coolvac® Cryogenic Vacuum Pumps are available in models ranging 800 to 60,000 L/sec pumping speeds and from 0.75 × 10-3 to 0.75 × 10-11 Torr vacuum. These gas entrapment  vacuum pumps offer hydrocarbon-free vacuum pumping for use in R&D applications, Industrial Coating, Space Simulations and other applications where largevolume evacuation into the ultra-high vacuum range is desired. Combined with our fore-vacuum pumps, boosters, gauging, hardware, valves and electrical controls, Oerlikon Leybold Vacuum can provide a total ultra-high vacuum system solution.
TURBOLAB 80 Turbo Pumping System
The Oerlikon Leybold Vacuum TURBOLAB 80 turbo-molecular pump stations are fully assembled and ready-to-operate high vacuum systems designed as table top units for use in lab experiments. Rated for 65 l/sec for N2 and 0.75 × 10-7 mbar, TURBOLAB 80  consists of TURBOVAC SL 80 wide range turbomolecular pump with integrated frequency converter, power supply TURBOPOWER 300 for 24 V DC supplement of the frequency converter and dualstage/oil-free DIVAC 0.8 T diaphragm vacuum pump. All required connection and sealing components are located within the pump station assembly. TURBOLAB 80 is prepared for installation of further components such as vacuum gauge sensors and venting valve. Features include oil-free design, air-cooled, high pumping speed, compact, simple operation and a maintenancefriendly. TURBOLAB 80 is available in two versions including: the basic version with manual control and optional pressure measurement through and ITR 90 high vacuum gauge or the full-featured version with pressure indication, manual or automatic operation, operation parameter indication and storage, connection of PTR 90 and TTR 90 gauge sensors possible, menu navigation in different languages, RS232 interface for operation parameter readout via PC and optional venting.
Standard and Customized Vacuum Pumping Systems
Oerlikon Leybold Vacuum standard and customized turn-key vacuum pumping systems are designed and built in accord with customer special requirements and are used in Industrial Coating, Photovoltaic, Heat-Treatment/Metallurgy and R&D type applications. Our vacuum pump systems can support rough, medium, high and ultra-high vacuum requirements. We  can achieve pumping speeds to several thousand CFM and ultimate vacuums to 0.75 × 10-11 Torr.
Oerlikon Leybold Vacuum
Export, PA
www.oerlikon.com
Contact: Mario Vitale, Regional Market Manager – Process Industry Tel: 1-724-325-6565
E-mail: mario.vitale@oerlikon.com
HiPace™ M Magnetically Levitated Turbopumps
The Pfeiffer Vacuum HiPace M series of high performance magnetically levitated turbopumps (300 l/s, 700 l/s and 800 l/s) achieve high pumping speeds and high compression ratios for all gases. These pumps are optimized to run in all orientations with a low vibration signature. An intrinsically low dynamic magnetic field does not interfere with even  the most sensitive equipment, making them ideal for use in lab applications. An advanced rotor design provides unlimited rotor service life and dependable operation. HiPace M turbopumps are rated Protection Class IP54 for use in harsh industrial environments. Applications include: analytical, industrial coatings, semiconductor fabrication, as well as a variety of uses in R&D and industry.
Large HiPace™ Turbopumps for High Performance and Reliability
Pfeiffer Vacuum HiPace™ turbopumps are available in pumping speeds from 1000 to 2000 l/s. They feature a new rotor design that reduces run-up time by 50% and provides high gas throughput for light (H2, He) and heavy gases (Ar, CF4). The use of aluminum housing and innovative materials makes this turbopump 40% lighter in  weight and doubles the service life to five years between bearing changes. Integrated drive electronics reduces the need for bulky and costly cabling. The advanced rotor design and precise sensor technology of HiPace™ turbopumps offer the highest level of safety in the market, including IP54 and SEMI S2 protection classes. HiPace™ is available in both standard and corrosive models, making them ideal for use in semiconductor applications where particulate contamination, high gas loads and corrosive gases are common. In addition, HiPace™ is suitable for photovoltaic coating, industrial applications such as brazing furnaces, general sputter coating, and coating of architectural glass and ophthalmic lenses.
HiPace Fast Turbopumps from 10 to 700 l/s
Pfeiffer Vacuum HiPace• turbopumps feature a new rotor design, providing reduced run-up time, higher gas throughput and exceptional compression for light gases. A variety of drive versions, including Profibus and DeviceNet, are available without an increase in package size. The compact HiPace• has  integrated drive electronics, which reduces bulky and costly cabling. Innovative materials have doubled drive service life, while a proven Pfeiffer Vacuum bearing design ensures reliability, even in harsh applications. Available in pumping speeds from 10 to 700 l/s, HiPace• can be installed in any orientation. Contact: hipace@pfeiffer-vacuum.com
PentaLine The New Shape In Rotary Vane Pumps
Pfeiffer Vacuum PentaLine rotary vane pumps, with a new optimized drive system, provides cost effective, environmentally friendly vacuum, for a wide range of applications in the low and medium vacuum range down to 10-3 mbar. Available in pumping speeds up to 35 m3 /h, PentaLine  is hermetically sealed for leak-free vacuum, and provides compatible voltage for worldwide use. It’s standby operating mode provides a power savings that can reduce operating costs up to 50% and assures a longer service life. PentaLine rotary vane pumps run noiselessly with minimum vibration assuring a cooler, quieter work environment. Contact: pentaline@pfeiffer-vacuum.com
CombiLine Roots Pumping Stations
CombiLine pumping stations are a combination of a Roots pump or pumps and the following major components: rotary vane, turbo, dry, liquid ring, cryo and/or diffusion pumps. It can also include gauges, analytical equipment and control systems, depending on application. Pfeiffer Vacuum has over 40 years of experience in building standard and customer-specific pumping stations. Standard Combi-Line• pumping stations include CombiLine• Roots pumping stations with the single-stage or twostage rotary vane pumps are designed for applications that require ultimate pressure of up to 3 × 10-4 mbar such as metallurgy, helium leak detection and electron-beam welding. CombiLine• Roots pumping station with the dry vacuum pumping are ideal for applications that require ultimate pressure of up to 5 × 10-3 mbar including coating, metallurgy, degassing plastics and vacuum drying. This series of pumping stations are dry and oil-free for contamination-sensitive processes. Pfeiffer Vacuum builds customer-specific pumping stations for applications that necessitate high pumping speeds and/or ultimate pressures of <10-3 mbar. Contact: combiline@pfeiffer-vacuum.com
Rotary Vane Pumps.
Pfeiffer Vacuum HenaLine™ diast. oil-sealed rotary vane pumps provide pumping speeds between 25 and 1,000 m3 /h and are suitable for industrial and R&D applications. These safe and reliable pumps feature an integrated oil mist separator, oil return system and safety valves, preventing contamination of  the ambient air and safeguarding both the pump and the process system. A gas ballast valve assures pump-down of steam and other process vapors. HenaLine has a low operating temperature increasing the service life of the oil and eliminating the need for water cooling. These rotary vane pumps can be employed as either a stand-alone pump or as a backing pump. Used as a backing pump in Pfeiffer Vacuum CombiLine™ Roots pumping stations, HenaLine pumps are ideal for applications in metallurgy, helium leak detection or vacuum drying and degassing.
Dry Screw Pumps
Pfeiffer Vacuum HeptaDry™ dry vacuum pumps are designed for low to medium industrial and coating applications where oilfree vacuum is required. Rugged, dependable and with low operating costs, HeptaDry offers pumping speeds from 100 to 600 m3 /h. Coated, single-piece, variable-pitch rotors ensure the  efficient internal compression of gases to reduce energy cost requirements and enable thermally sensitive gases to be pumped as well. Direct gas flow in the pump prevents deposits, while highquality axial face seals between the bearing and suction chamber make for increased reliability. These low-noise, cool running pumps are water cooled with a thermostatic valve. HeptaDry pumps are suitable for use as a stand-alone pump for processes up to 10-1 mbar. They can be used in combination with Pfeiffer Vacuum Roots pumps, for an ultimate pressure of up to 5 × 10-3 mbar in metallurgical, freeze-drying, load-locks, E-beam welding, vacuum filling and gas separation applications. HeptaDry is supported by Pfeiffer Vacuum worldwide service and support.
Dry Turbo Pumping Station
The Pfeiffer Vacuum HiCube Eco is a complete dry turbomolecular vacuum pump station for a low price. This plug and play vacuum station includes a HiPace™ 80 turbopump, a 1.1 m3 /hr dry diaphragm pump and are available with a full range gauge and a choice of DN63ISO, KF40 and DN63CF flanges. It  delivers a pumping speed of 67 l/s for N2 and an ultimate pressure of <10-8 mbar. The DCU permits control and diagnostics of the HiCube™ Eco and gauge integration. The bench top HiCube Eco is ideal for vacuum applications that require hydrocarbon-free vacuum. American Express, Visa and MasterCard accepted. Contact: hicube@pfeiffer-vacuum.com
Pfeiffer Vacuum, Inc.
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-978-686-7550
E-mail: contact@pfeiffer-vacuum.com
Marathon® CP Cryopumps
The Sumitomo (SHI) Cryogenics Marathon® CP Cryopumps are an expanding product line available in multiple flange styles, sizes and configurations. With a powerful refrigerator, Marathon CP typically outperforms other cryopumps of the same physical size. Its innovative design assures that users achieve the highest performance possible, while keeping it competitively priced. The CP-20 can be driven by the high-efficiency F-70 compressor. Like all Freedom® series compressors, the F-70 provides refined oil and gas management to the cryopump and offers a unique 30,000-hour service interval. Additionally, the optional Marathon Cryopump Controller (MCC) enables fully automatic operation of the cryopump using commands from a host computer using standard cryopump protocol. The result is greatly reduced downtime between production cycles, improved process times and better overall efficiency of the user’s process. The CP-20’s compact and robust design fits easily onto and existing systems. It can be readily maintained without breaking vacuum or removing the cryopump from the chamber for return or replacement. Like all SHI Cryogenics Group products, it is supported by a worldwide sales and support network. Its easy serviceability maximizes production uptime and lowers the total cost of ownership.
SICERA™ Cryopump
At only 0.9 kW per pump, Sumitomo (SHI) Cryogenics recently introduced the SICERA™ cryopump boasts extremely low energy consumption compared with other vacuum products currently available for semiconductor, flat panel display and related processing. The breakthrough multipump system allows up to six 8-inch pumps to run on a single compressor without performance degradation, making it ideal for high-volume semiconductor wafer manufacturing. The complete SICERA cryopump system includes a compressor and remote controller, which have been thoroughly tested to withstand the most demanding vacuum applications. Through continuous control of both the cryocooler and compressor, SHI Cryogenics Group is able to offer a reliable cryopump system with solid performance and temperature and vacuum stability.
Sumitomo (SHI) Cryogenics of America, Inc.
Allentown, PA
www.shicryogenics.com
Tel: 1-610-791-6700
E-mail: sales@shicryogenics.com
Large Cryo Pumps
Since 1981, ULVAC Cryogenics Inc., through a joint venture with Helix Technologies, has been manufacturing cryogenic pumping systems in Japan for theAsian markets. These pumps are now being made available in the North America with support from ULVAC’s network of service locations throughout the U.S., Europe and Asia. The large cryopumps are  available in 20, 22 and 30-inch models. ULVAC cryo pumps deliver high reliability, high capacity, high refrigeration power and quick regeneration making them well suited for ion implant, sputtering, evaporation and industrial coatings. For demanding applications, ULVAC offers specialty cryopumps that include UHV, low vibration, corrosion resistant, “flat tops” and “Super Trap”, a high-speed water vapor model.
VD Series Dual Stage Rotary Vane Pumps
ULVAC’s VD Series of dual stage, oil rotary vacuum pumps with direct-drive motors are designed for use in a broad range of applications including leak detection, helium recovery, fluid fill and vacuum coatings. These lightweight compact pumps feature low noise with minimal vibration levels. The unique design permits pump head replacement  without disconnecting the fore line. The VD series is available in pumping speeds from 600 l/min [36 m3 /hr] to 800 l/min [48 m3 /hr] with an ultimate pressure of 0.67 Pa (5 × 10-3 Torr).
VS Series Single Stage Rotary Vane Pumps
ULVAC’s VS Series of single stage, oil rotary vacuum pump with direct-drive motors are designed for use in a broad range of applications including leak detection, furavailable in pumping speeds from 3000 l/min [180 m3 /hr] to 4800 l/min [288 m3 /hr] with an ultimate pressure of 5.3  Pa (4 × 10-2 Torr).
PKS Series Large Rotary Piston Vacuum Pumps
ULVAC’s PKS Series of large oil rotary piston vacuum pumps are extremely durable with very stable pumping characteristics. They are used in industrial applications ranging from braising furnaces and automotive assembly to chemical, pharmaceutical and food industries. These single stage pumps are designed with high-grade metal castings that  provide excellent corrosion and abrasion resistance. The PKS Series is available in pumping speeds from 96 to 420 m3 /h with a final pressure of 2.7 Pa (2 × 10-2 Torr). Disassembly and reassembly for maintenance and exhaust valve inspection is simple.
GLD Rotary Vane Pumps
ULVAC’s GLD Series of compact oil rotary vacuum pumps with direct-drive, wide range motors are designed for use in a broad range of applications including production processes, laboratory experiments and R&D. These pumps feature a forced oil circulation system that provides stable evacuation speeds over a wide vacuum range with low noise  and vibration levels for sensitive work environments. The GLD series is available in pumping speeds from 40 to 335 l/min with an ultimate pressure of 0.67 Pa (2 × 10-3 Torr).
Turbo Molecular Pumps
ULVAC’s Magnetic Levitation and Digital Control Turbo Pump Series are designed for a broad range of applications including solar cell, PVD, OLED, as well as R&D and laboratory environments. The turbo molecular pump series features high speed, high reliability, energy saving performance and improved compression ratio for hydrogen. The UTM-FW  series are ideal pumps for middle to hard processes with high gas loads. The UTM-FH series are ideal pumps for light to middle processes. The UTM-FW/FH Series is available in pumping speeds from 350 l/sec to 6300 l/sec.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@us.ulvac.com
Dry Vacuum Pumps
The Vacuum Research Corporation long-life dry vacuum pumps can operate more than two years without maintenance or adjustment. These easy to rebuild pumps have been in production for 20 years and have proven their reliability in 24/7 operations around the world. Ultimate pressure is 20 milliTorr (2.6 Pa) and several models are available with capacities  from 6 CFM to 16 CFM (10 to 28 m3 /hour). Single stage pumps are available for vacuum drying and solvent removal. Ultimate pressure for single stage is 700 mTorr (90 Pa). When used with turbo pumps customers often select the optional VRL Soft Start & Speed Control. This low cost option automatically slows the pump when gas loads are small and immediately increases speed if the pressure starts to rise. Other options such as explosion proof motors, and complete vacuum instrumentation and controls may be ordered.
Smart Dry Pumps
Vacuum Research Corporation’s Smart Dry Pump™ for roughing of ion or cryo pumps and backing of turbo pumps. Because the Smart Pump™ switches piston operation from parallel for nace and solar cell production. These lightweight compact pumps feature low noise with minimal vibration levels. The VS  series is roughing to series operation for high vacuum; this pump provides the proven reliability of our piston style pumps at 30 % lower cost per cubic foot of pumping speed and a 30% smaller footprint. Like all VRL Dry Pumps, the Smart Dry Pump™ needs no cooling water or purge gas, and of course, there is absolutely no oil or pump fluid to monitor or dispose of. The high capacity and low ultimate pressure of the smart pump is accomplished by operating the pistons in parallel from atmosphere to 1 Torr and then automatically switching them to series operation to give the 20 mTorr ultimate pressure. The crossover is controlled with a VRL Pirani gauge vacuum switch and even more savings can be accomplished with the VRL Soft Start & Speed Control added to your Smart Dry Pump.™ Smart Dry Pump™ is a trademark of Vacuum Research Ltd.
Vacuum Research Corporation
Pittsburgh, PA
www.vacuumresearch.com
Contact: Steve Palmer, Manager, Marketing and Merchandising, Vacuum Technologies, North America
Tel: 1-800-426-9340 or 1-412-261-7630
E-mail: vrc@vacuumresearch.com
DRYFAST® Collegiate Model 2014 Laboratory Vacuum Pump
The Welch-Ilmvac DRYFAST® Collegiate Model 2014 Laboratory Vacuum Pump is well suited for harsh chemical fume applications. It is a small, lightweight, oil-free and low maintenance pump with a precision vacuum adjustment feature. He chemical resistant Collegiate Model 2014 pump is perfect for MeCl2 and other volatile solvent rotary evaporations. Achieve precise vacuum control down to 40 torr using convenient adjustment knob. 25 lpm flow enables multi-user use for organic solvent filtrations and other routine chemistry lab operations – while enabling fume discharge to your hood. The modern, compact design weighs only 15 lbs. Applications include: rotary evaporations @ 35CC for volatile solvents; vacuum filtrations up to 3 funnels; and vacuum ovens up to 1 Cu. Ft.
Welch-Ilmvac
Niles, IL
Tel: 1-847-676-8800
CLB Series Low Frequency Power Supplies with Varying Output Frequency
Comdel’s announces the CLB Series with Varying Output Frequency. RF generators from the CLB product family provide varying output frequency in a superior low frequency design with a small, lightweight package. The CLB Series power supplies are available in power ranges from 2500 to 12,000 watts at a single frequency in the 20kHz to 2MHz band. The  Turbotune Technology within the unit allows frequency tuning by automatically varying its output frequency ±10% around its nominal frequency. The CLB is available with phase lock tuning or software algorithm. The unit provides forward or delivered power mode regulation, and the solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The CLB Series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
Comdel, Inc.
Gloucester, MA
www.comdel.com
Contact: MaryBeth Masterson, Marketing Manager
Tel: 1-978-282-0620 Ext. 102
E-mail: marybeth_masterson@comdel.com
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Vacuum Technology & Coating