Vacuum Research Company Profile
Vacuum Research started building vacuum valves in 1953, and vacuum valves are still an important part of the business. In 1988, Vacuum Research began developing our vacuum gauge product line, which now includes Pirani, thermocouple, and diaphragm instruments. In 1998, rotary vane vacuum pumps were added, with an ultimate pressure of 5 x 10-4 Torr, with capacities from 1.8 to 64 CFM; and from 3 to 108 m3/hr. The pumps are well suited for both roughing and foreline applications.