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Visitors to the VT&C web site who use the extremely valuable Product Showcases need to be aware that
some browsers DO NOT show the photos of the products.
This problem has been traced to Internet Explorer versions
8 and 9. I have version 6 on several pcs and the pics
show up nicely. We recommend that readers using PCs
download (FREE) Mozilla Firefox, Opera, or Google Chrome. They all DO WORK, as do Safari in Mac
computers. Those Product Showcases are well worth
a few minutes of time loading down an extra browser,
especially when they don't cost anything.
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Addendum to October 2010: Leak Detectors
This Addendum updates the VT&C October 2010
Leak Detectors Product Showcase. The following products from Pfeifer Vacuum Inc. and Ulvac Technologies, Inc. were inadvertently omitted.
We apologize for the oversight.
ISmartTest Helium Leak Detector with Wireless Remote
The Pfeiffer Vacuum SmartTest portable helium leak detector is simple to operate with one button LCD operation and its rugged, proven design ensures the lowest cost of ownership in the industry. The SmartTest is available  with a user selectable backing pump for the optimum solution for any application. A 3.5" color touch screen wireless remote is available which can operate multiple SmartTest units at distances of up to 300 feet. The SmartTest features a Pfeiffer Vacuum SplitFlow™ HiPace 80 turbopump, which has a pumping speed of 2.5 l/s for helium and the highest compression ratio, providing superior filament protection, signal stability and sensitivity. The SmartTest provides the lowest detectable leak rate for helium: 5 × 10-
12 mbar l/s and a high inlet pressure of 25 mbar. Vacuum and sniffer modes come standard plus an integrated test leak for self-calibration. The SmartTest is the solution for quality helium leak detection for a wide range of applications including aerospace, solar, semiconductor, automotive, vacuum systems and components, refrigeration and air conditioning, pharmaceutical and any other application where fast, simple, accurate and precise leak checking is required.
The Only Leak Detector In The World That Pumps Helium As Efficiently As Air
The modular SmartTest Dry Helium Leak Detector is available on a cart with a dry  pump for applications requiring contaminationfree, clean room operation. The SmartTest is completely oilfree and features the Pfeiffer Vacuum XtraDry™ pump for higher reliability and reduced particulate generation. The XtraDry makes the SmartTest the only leak detector in the world that is able to pump helium at the same speed as air with near 100% efficiency. The Pfeiffer Vacuum SmartTest helium leak detector is simple to operate, rugged, and has a low cost of ownership. Vacuum and sniffer modes come standard and the SmartTest provides the smallest detectable leak rate for helium: 5 × 10-
12 mbar l/s and the highest possible inlet pressure of 25 mbar. It’s designed with an integrated test leak for self-calibration and a simple two-button control interface. The SmartTest provides quality helium leak detection for a wide range of applications including aerospace, solar, semiconductor, automotive, vacuum systems and components, refrigeration and air conditioning, pharmaceutical and any other application where fast, simple, accurate and precise leak checking is required.
Pfeiffer Vacuum Inc.
Nashua, NH
Tel: 1-603-578-6500
E-mail: gauges@pfeiffer-vacuum.com
Leak Detection Made Easy— Heliot 710 series
Building upon the reputation of the ULVAC’s popular Heliot 700 series,  the Heliot 710 series leak detectors have new features that make it even easier to use. With the same familiar large color touch screen interface and improved easy-to-use ATM-like menus, the Heliot 710 offers six different onboard language selections with audible voice prompts. Both Helium and Hydrogen leak detection capabilities and 5 different programmable leak test configurations help simplify leak test operations. Internal monitoring of error and alarm conditions detects problems before they can damage the instrument. Eco-friendly design is RoHS compliant, and construction makes use of recycled plastic materials. An intelligent power management function switches the forepump on and off as required during idle periods for maximum energy savings. The Heliot 710 series features a multiple valve design for the highest sensitivity: 10-
12 Torr-l/s. This new leak detector is ideal for ap- plications in the automotive, air conditioning/refrigeration, electronics, semiconductor and pharmaceutical industries. Contact E-mail: heliot@us.ulvac.com for more details.
Low Cost RGA
The ULVAC Qulee BGM quadrupole mass spectrometer is your answer to cost effective leak detection, RGA and process gas monitoring in vacuum systems. It features integrated measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Torr, mbar, or Pascal of He, H2O, N2, O2, O2/N2 ratio with a mass range of 1 to 100 and 200 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. Qulee BGM features built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software. The minimum detectable partial pressure is 1 × 10-
14 Torr. Optional differential pumping is available for applications that require it.
Quadrupole Mass Spectrometer
The compact ULVAC Qulee quadrupole mass spectrometer features  integrated measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Pascal, Torr or mbar of He, H2O, N2, O2, O2/N2 ratio, and a user selectable channel from mass ranges of 1 to 50 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. The built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software enable Qulee to be used for leak detection, RGA and process gas monitoring in PVD systems. A maximum operating pressure of 15 mTorr can eliminate the need for differential pumping, and the minimum detectable partial pressure is 1 × 10-
12 Torr.
ULVAC Technologies, Inc.
Methuen, MA
Tel: 1-978-686-7550
E-mail: sales@ulvac.com
AIMCAL Changes Its Name to Reflect Its International Scope
Fort Mill, SC…The Association of Industrial Metallizers, Coaters and Laminators officially changes its name to the Association of International Metallizers, Coaters and Laminators (AIMCAL) on January 1, 2011. The replacement of “Industrial” with “International” reflects the increasingly global presence of the group, which represents converters of metallized, coated or laminated flexible substrates and their suppliers.
With members from more than 15 countries, “AIMCAL truly has become the global leader for the converting industry,” says Liz Josephson, sales manager for Web Coating Products at Applied Materials, Inc., Fairfield, California, who serves as president of the association, “For the past several years, our presence at international forums has been growing,” she notes, adding, “We have organized pavilions at international trade shows and presented Converting School courses in Europe and India, as well as in the United States.” The global converting community also benefits from a wide array of Internet-based offerings including educational webinars and other technical resources (www.AIMCALjobs.com), job board (www.AIMCALjobs.com), and the newly redesigned AIMCAL website (www.aimcal.org) itself.
To expand services to the global converting community, AIMCAL will launch Converting Quarterly magazine in February 2011 and is already emailing its weekly companion, Converting Quarterly ENews. A related website (www.convertingquarterly.com) and social media sites, including six blogs -- Converting Curmudgeon, Vacuum Web Coating, Web Coating, Web Handling and Converting, Substrate Secrets and Drives for Web Handling -- will provide access to technical information 24/7.
AIMCAL members voted overwhelmingly in favor of replacing the word Industrial with International in March 2010 during the group’s Management Meeting in La Jolla, California.
“There always was some confusion about what was meant by ‘industrial,’” explains Craig Sheppard, executive director of AIMCAL, which celebrated its 40th birthday in 2010. “This is a name that will serve us well for the next 40 years,” he concludes.
AIMCAL represents converters of metallized, coated or laminated flexible substrates and their suppliers. The international, nonprofit trade association also includes a CEMA Division focused on the interests of converting equipment manufacturers. The group is headquartered in Fort Mill, South Carolina, USA. Membership information is available online at www.aimcal.org.
AIMCAL
www.aimcal.org
Vacuum Feedthroughs and Seals
Compiled by Terrence Thompson, Contributing Editor
This product showcase describes selected vacuum feedthroughs and seals used in a wide variety of vacuum-centric process applications.
Feedthroughs, and their seals, are used in many vacuum processes. If one needs to introduce a linear or rotary motion with manual, pneumatic or motorized actuation, fluid and electric feedthroughs from a source outside the vacuum chamber, specialized feedthroughs are used to accomplish the task. Often, instrumentation sensors within a vacuum chamber are necessary and electrical feedthroughs accomplish this task. Linear and rotary motions are used to move work pieces, targets, etc.
Electrical feedthroughs are available in a wide variety of terminations, maximum voltages and current carrying capacities on standard vacuum mounting flanges. Instrumentation feedthroughs are available for signal passthrough using standard coaxial configurations and a variety of multipin variations. Thermocouple feedthroughs are available for temperature measurement in all standard ANSI codes in both single-ended & double-ended configurations. Military specification versions of the thermocouple feedthroughs are also available, as well as thermocouple feedthroughs with integral power leads.
So Many Decisions
Check with the manufacturers since there are an incredible number of potential combinations for a given application. Your choices may be narrowed if it is a retrofit application for a system that performed well when new. If upgrading, then examine the newer technologies to see if there is a comparable or upgrade ‘fit.
The AVEM [www.avem.org] lists feedthrough collars as well as electrical, high current, fluid, linear motion, optical, radio frequency, rotary motion and fluid feedthrough plus related tubing, flanges, fittings, bellows and seals. Sealing options range from elastomer seals to ferrofluidic technology with each type working well in specific applications. The AVS [www.avs.org] lists members that provide vacuum feedthroughs, collars and other related vacuum components.
Product Descriptions
In the following product descriptions, vendors make distinctions to focus on specific intended applications, rendering direct comparisons difficult. When in doubt, go to Vacuum Technology & Coating magazine’shome page at www.vactechmag.com click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
Ferro-Sealed Rotary-Motion Feedthroughs
A&N Corporation’s line of vacuum feedthroughs offers many models for reliable motion, fluid and electrical applications. Each of these  products is designed to enable a vacuum user to bridge the barrier between your vacuum environment and atmosphere without compromising the vacuum integrity of your system. A&N Corporation's Ferro-Sealed Rotary-Motion Feedthroughs are hermetically sealed with ferrofluid allowing for a vacuum rating of 1 × 10-8 Torr (UHV option rated to 1×10-9 Torr). It is rated for up to 5000 rpm performance with very low stray magnetic fields and it has no magnets in the vacuum environment. The feedthrough has high torque capacity with a 2- 1 /2 atmosphere pressure differential tolerance. Multiple connection options (threaded nose, baseplate, CF, ISO or customized) are available. The Ferro-Sealed feedthroughs are a direct replacement for traditional elastomer and bellows sealed feedthroughs and also offer an increased service life and a higher torque capacity with no leak rate fluctuation during rotation.
A&N Corporation
Williston, FL
www.ancorp.com
Tel: 1-800-FLANGE1
E-mail: sales@ancorp.com
Subminiature-C Multipin Hermetic Feedthroughs
The Accu-Glass Products, Inc. Subminiature-C multipin hermetic feedthroughs are designed for applications where space is limited or where Subminiature-D connections will not fit. The compact  design allows installation into 1.33-inch CF metal seal and ISONW16KF elastomer seal flanges. Nine gold-plated pins are in a straight through pin-to-pin design and are hermetically sealed and electrically insulated in a stainless steel shell using the latest in glass-ceramic bonding technology. Subminiature-C feedthroughs and cables are sold individually or as kits, where each kit contains a feedthrough and both vacuum and air-side cable assemblies. Air and vacuum side connectors are fitted with captured stainless steel socket head screws that provide a means of securely locking them to their mating feedthroughs. On the vacuum side, Kapton® insulated cable assemblies fitted with PEEK connectors are available to meet the demands of ultrahigh vacuum environments. In-vacuum connector screws are vented where required and the feedthrough’s screwboss functions as a locating key. Air to vacuum pin position is identified with a permanent surface mark, which clearly locates pin assignments.
Circular Hermetic Instrumentation Feedthroughs
The Accu-Glass Products, Inc. circular hermetic instrumentation feedthroughs are constructed with pin arrangements designed to meet Mil-C-26482 specifications. 19 gold-plated pins are in a straight through pin-to-pin design and are hermetically  sealed and electrically insulated in a stainless steel shell using the latest in glass-ceramic technology. Mil-C-26482 feedthroughs are sold individually or as kits, where each kit contains one feedthrough and one each of the vacuum and air side cable assemblies. Ultrahigh vacuum cable assemblies with PEEK connectors and Kapton® insulated ribbon cables are available to meet the demands of ultrahigh vacuum environments. Vacuum side cable assemblies and other accessories may be found on our website. Air-service cable assemblies use standard Mil-C-26482 connectors. Custom in-vacuum and air-service cable assemblies are available on request.
Multipin Hermetic Subminiature-D Instrumentation Feedthroughs
The Accu-Glass Products, Inc. multipin hermetic Subminiature-D instrumentation feedthroughs are constructed with pin arrangements designed to meet MIL-C-24308 specifications. The 9, 15, 25 or 50 gold-plated pins are in a straight through pin-to-pin design  and are hermetically sealed and electrically insulated in a stainless steel shell using the latest in glass-ceramic bonding technology. Ultrahigh vacuum cable assemblies with PEEK connectors and Kapton® insulated ribbon cables are available to meet the demands of ultrahigh vacuum environments. Vacuum side cable assemblies, individual connectors and other accessories may be found on our website. Subminiature-D multipin assemblies with up to 250 pin configurations are frequently fabricated. For unique requirements, flanges with over 1,000 pins have been engineered and fabricated. Accu-Glass Products offers both CF and ISO “Conical Reducers” that are suited for use where larger flange sizes are needed to accommodate multiple feedthroughs but where the port to be used has a smaller flange size, such as 50 conductors on a 4.50-inch CF flange through a 2.75-inch CF port.
Fiber Optic Feedthroughs
The Accu-Glass Products, Inc. Fiber Optic feedthroughs are constructed with 100, 200, 400, 600, and 1000 micron UV/VIS fibers. They are designed for vacuum applications requiring Fiber Optic connections from inside a vacuum system to external equipment. The fiber is hermetically  sealed into a stainless steel shell, using the latest in glass bonding technology, and terminates on the vacuum and air side with standard SMA 905 terminations. FC and ST connections are also available. Ultrahigh vacuum polyimide buffered optical fibers are available to meet the demands of ultrahigh vacuum environments. All Accu-Glass optical fiber is constructed as a coreand-cladding composite. The core, or the filament that guides the light, consists of a thin strand of high-transmission fused silica. The cladding consists of an outer layer of doped, lower-refractive-index fused silica. This two-layer design tightly confines the light to the central core of the fiber that in turn delivers a maximum amount of light at the far end. We also closely control the fiber diameter during the drawing process, allowing the fiber to center well in connectors with a low loss rate.
Precision HTL Series Linear Motion Feedthroughs
The Accu-Glass Products, Inc. precision HTL series linear motion feedthroughs are designed to operate at temperatures as high as 250°C. Linear movement  is measured in 0.001 inch increments on the rotary barrel scale and 0.025 inch increments on the linear body scale, which are laser etched into the black anodized aluminum finish. They are constructed of aluminum and stainless steel, where only stainless steel surfaces are exposed to the vacuum environment. In-vacuum bearings are film lubricated with a UHV compatible Krytox® lubricant, while air side bearings are lubricated with high-temperature Krytox® lubricant. The linear shaft is sealed with an AM-350 edge-welded bellows. Feedthroughs are available on Conflat® style CF metal seal or ISO-KF style elastomer seal flanges.
High-Torque HTR Series Rotary Motion Feedthroughs
The Accu-Glass Products, Inc. high-torque HTR series rotary motion feedthroughs are designed to operate at temperatures as high as 250°C and rotational torque up to 250 in-oz. They are constructed of black-anodized aluminum and stainless steel,  where only stainless steel surfaces are exposed to the vacuum environment. In vacuum bearings are dry-film lubricated with tungsten-disulfide, while air side bearings are lubricated with high-temperature Krytox® lubricant. The rotation shaft is sealed with an AM-350 edge-welded bellows. Feedthrough rotation can be monitored via a 360°/5° increment laser-etched scale found on the manual actuator knob. Rotary feedthroughs are available on Conflat® style CF metal seal or ISOKF style elastomer seal flanges.
Accu-Glass Products, Inc.
San Fernando, CA
www.accuglassproducts.com
Tel: 1-818-365-4215
E-mail: sales@accuglassproducts.com
CeramTite® High-Pressure Feedthrough
CeramTec, a leader in ultra-high vacuum seal technologies, has a new CeramTite® high-pressure feedthrough built for extreme down hole environments. This high-pressure feedthrough (HPF) is rated for pressures up to 25,000 psig and temperatures up to 250°C. These designs are successfully tested to 50,000 psig but assembly pressure rating is limited by both the O-ring and housing materials. Custom designs eliminating the need for O-rings may improve the pressure rating. CeramTec is an ISO 9001:2000 technical ceramic and hermetic company that manufacturers a wide range of custom vacuum components including connectors, isolators, feedthroughs, viewports and high voltage bushings.
Vacuum Feedthroughs
CeramTec North America’s Ceramaseal® product offering is a most complete line of hermetically sealed feedthroughs built to support vacuum technology. A feedthrough is an insulated, electrical lead assembly that provides for the transfer of electrical power, gases or fluids from outside a hermetic chamber to the inside. Ceramaseal® feedthroughs address applications requiring hermeticity  and electrical isolation. Our feedthroughs are built to endure extreme conditions, whether it be an ultra-high vacuum (UHV) environment, temperatures ranging from cryogenic (4K) to 450º C, pressures in excess of 25,000 psig, corrosive or caustic environments, while maintaining an impressive level of reliability and performance. The science of ceramic-to-metal sealing technology and glass-ceramic sealing technologies allow CeramTec to manufacture feedthroughs with capabilities that go far beyond that of any glass or elastomer sealed feedthrough. A feedthrough is basically defined by the requirements for installation, insulation, and conductor material. CeramTec’s Product Guide for Ceramaseal® Products includes thousands of standard feedthroughs with weldable, ISO KF flange, ConFlat® flange, NPT, and baseplate installation mountings. Most feedthroughs are available with a choice of 304 Stn. Stl., Nickel, Molybdenum or Copper conductors to suit your specific application. When the standard approach won’t do, CeramTec’s engineers can custom design a solution for the application.
Multipin Connectors
The CeramTec multipin connector category of products describes hermetic feedthroughs of two or more conducting pins that are fitted with plugs on the air side. In many cases, these multipin connectors also accept vacuum-side plugs. Ceramaseal® product variations include our Micro D Type (MIL-DTL-83513) connectors, as well as Sub D Type (MIL-C-24308) connectors and circular connector types  MIL-C-26482 and MIL-C-5015. Multipin connectors are used primarily to provide instrumentation signals, voltage and/or current into a high-vacuum or ultra-high vacuum environment, with an in-line connection to outside instrumentation. Designs adapt a CeramTec feedthrough (receptacle) with an industry-standard plug. The connector assembly is characterized by the MIL Spec designation, installation method, and number of pins. In situations where voltage and current requirements are moderate, CeramTec is able to achieve a very high pin/lead density (up to 51 pins) using glass-ceramic sealing technology. Designs include both single-ended and double-ended connector assemblies.
Thermocouple Feedthroughs
Thermocouples are widely used to measure the temperature inside a vacuum or pressure chamber. CeramTec’s thermocouple feedthroughs, manufactured with thermocouple materials or extension material, transmit  through the wall of the chamber the electromotive force (emf) generated by the application of heat to the thermocouple bead without introducing error. External instrumentation can then evaluate the strength of the emf that is proportional to the temperature at the thermocouple bead thus yielding a temperature measurement. The Ceramaseal® thermocouple feedthroughs provide the necessary electrical isolation and a hermetic seal. Typical thermocouple feedthrough types include loop type (ANSI Type R/S & T), spade type (ANSI Type K & C) and MIL-C-5015 type (ANSI Type K). For refractory and noble metal thermocouples CeramTec uses compensating wires. The joints between the compensating material and the true thermocouple conductor material must be thermally shielded and not exceed 260°C.
CeramTec North America Corporation
Laurens Operations
www.instrutechinc.com
Tel: 1-864-682-3215 or 1-800-752-SEAL (in the U.S.)
E-mail: sales@ceramtec.com
In-line Drive Motorized Feedthroughs
With Ferrotec’s motor-integrated feedthroughs, they simplify integration challenges and eliminate potential failure points. FerroDrive motorized spindles from  Ferrotec combine a hermetic Ferrofluidic® vacuum feedthrough with a high precision motor and controller to offer a compact and high performance integrated sealing and rotation system. Ferrotec's motor-integrated feedthroughs eliminate integration challenges and the potential mechanical failure points associated with coupling discrete components. In addition motor-integrated feedthroughs offer significant benefits. Reduced size with an inline motorized feedthrough is compact in comparison to an offset or shaft-coupled drive. Integrated components with in-line motorized feedthroughs that have a brushless servomotor and matching amplifier with power supply and sinusoidal commutation. Application appropriate feedback devices and command loops are incorporated. Improved performance is available as the feedthrough has the motor fully integrated around the shaft rather than coupled to it, it provides optimum drive-to-load torque efficiency with no backlash over the life of the product. Flexible configurations include direct drive feedthroughs available with either solid or hollow shafts. Reduced implementation time is possible since units are supplied ready to install, saving time and effort in choosing and integrating components.
Ferrotec (USA) Corporation
Bedford, NH
Tel: 1-603-472-6800
Sensor Head Hardware Including Single and Dual Feedthroughs, Single and Dual Sensor Heads and Sputter Heads
Fil-Tech has a complete line of sensor head hardware including single and dual feedthroughs, single and dual sensor heads, and sputter heads. Fil-Tech single and dual feedthroughs can be mounted on a 1" bolt or 2 3 /4" conflat flange. Fil-Tech, Inc. also supplies complete electron beam emitter assemblies and replacement parts for Temescal and  Telemark electron beam guns. Fil-Tech supplies individual emitter parts including filaments, insulators, beam formers, anodes, electromagnetic coils, and OFHC copper crucibles and covers from stock. In addition, Fil-Tech supplies graphite, molybdenum and titanium crucible liners. Fil-Tech also supplies replacement parts for Veeco Commonwealth and Veeco Ion Tech, and Satisloh Ion Sources. Fil-Tech supplies tungsten filaments, insulators, gas distributors in graphite, stainless steel and titanium, anodes, and cathode tips. Fil-Tech also supplies all Mark I and II ion source replacement parts. Fil-Tech manufactures Quality Crystals® in 6MHz and 5MHz styles with Gold, Longer Life Gold® , Stress Relieving Alloy® , and introducing Advanced Adhesion Alloy(tm) coatings. Choose the electrode material that best fits your deposition process. Gold offers low contact resistance and high chemical stability. Longer Life Gold offers low contact resistance and stress relieving qualities of alloy. Stress Relieving Alloy dissipates the stress from deposited dielectric materials to offer longer and steadier, jump free oscillation. Advanced Adhesion Alloy promotes greater film adhesion of deposited material on the crystal surface and works with alloy to dissipate stresses from dielectric materials.
Fil-Tech, Inc.
Boston, MA
www.filtech.com
Contact: Paul Becker
Tel: 1-617-227-1133 or toll free 1-800-743-1743
E-mail: paul@filtech.com
Sensors and Feedthroughs
INFICON sensors and feedthroughs offer proven quality and durability. Our standard, compact, dual, CrystalSix, and Crystal 12 sensors are assembled mechanically rather than soldered together, so you can replace their parts conveniently in the field if necessary. Our sensors employ the “cool drawer” crystal holder allowing insertion of the monitor crystal from the sensor side or sensors that allow insertion of the monitor crystal in a front-loading orientation. System installations require a feedthrough package that conforms to specific customer requirements. INFICON offers both 1" bolt and 2- 3 /4" ConFlat flange. Each package has been designed for maximum customer flexibility. Contact us, and we'll help you choose precisely the right sensor or feedthrough for your process.
INFICON
Two Technology Place
East Syracuse, NY 13057
www.inficon.com
Tel: 1-315-434-1234
E-mail: reachus@inficon.com
Multipin Electrical Feedthroughs
Insulator Seal’s Multipin instrumentation feedthroughs contain more than one conductor path or pin and are also fitted with a fastening air-side connector. These feedthroughs are used for the transmission of signal voltages and currents. They are commonly referred to as instrumentation feedthroughs because of their use in instrumentation control applications such as electron microscopes, electron-beam evaporation, electron microscopy, surface-science analysis and semiconductor process controls.
Coaxial Feedthroughs
Insulator Seal’s Coaxial feedthroughs are those products constructed with two concentric conductor paths — one outer metal tube or shield path, concentric with, and enclosing, a cylindrical center conductor path. The inner and outer paths are separated and insulated with a high purity alumina ceramic. Coaxial components are offered for industry standard BNC, MHV, SHV, Type N, SMA, SMB, Triaxial, Microdot, Between Series and SHV Bakeable connector interfaces. Coaxial style feedthroughs for most any application, from instrumentation signals to 20 kV high voltage power are included.
Thermocouple Feedthroughs
Insulator Seal’s Thermocouple feedthroughs  are used in applications for in-vacuum temperature measurement. A thermocouple is a device that measures temperature as a function of the electromotive force induced when heat is applied to two dissimilar metal wires, which are joined at both ends. ISI thermocouple feedthroughs are not temperature sensing devices as such, but components used to conduct a thermocouple’s voltage (EMF) through the bulkhead of a chamber to external instrumentation.An air-to-vacuum environmental splice is in a thermocouple’s conductor path. ISI has base, refractory and noble metal compatible feedthroughs with various connector options including miniature, circular MS, push-on and screw-type connectors..
Power Feedthroughs Medium Current
Insulator Seal’s are used to transmit high voltage, high current or a combination of both. These can be used for a multitude of vacuum applications including vacuum furnaces, sample heating or biasing, in-vacuum coating applications such as electronbeam  evaporation, resistive heating evaporation, and DC plasma sputtering. Proven and time-tested designs are used to optimize the electrical performance of ISI power feedthroughs. Where space is not a limitation, ceramic surfaces are made as long as possible to maximize strike and creep distances. If space is limited, ceramics are convoluted in order to achieve increased surface distances with minimal impact on an insulator’s overall length. All air-side ceramic surfaces are glazed with a high temperature glass coating that reduces ceramic surface roughness and minimizes surface contamination. This glass coating enhances a ceramics’ electrical surface tracking characteristics. Some ISI power feedthroughs are fitted with tubular conductors that can be used to transmit both power and coolant simultaneously. These products are referred to as water-cooled feedthroughs. Water-cooled electrical components are typically used with grounded, closedloop cooling systems and nonconductive coolants such as deionized water or ethylene glycol. If using plain tap water, the cooling system must be grounded and lines must employ nonconductive materials such as polypropylene tubing. Properly grounded water lines will provide a safe dissipation path for any power conducted by the water. Current or power ratings are usually not given for water-cooled feedthroughs as the ratings are dependent on coolant flow rates and their heat dissipating capacity. Tap water temperatures can vary dramatically from one region to another, as will its heat dissipating capacity. Users are advised to establish safe and practical coolant flow rates based on the power requirements for their specific application and coolant heat dissipation capacity.
RF Power Feedthroughs
Insulator Seal’s RF Power feedthroughs are used to transmit either high voltage, high current or a combination of both. These can be used for a multitude of vacuum applications including vacuum furnaces, sample heating or biasing, in-vacuum coating applications such as electron-beam evaporation, resistive heating evaporation, and DC plasma sputtering. Proven and time tested designs.
Liquid and Water Feedthroughs
Insulator Seal’s Water and Liquid Feedthroughs are used to transfer coolant to processing equipment inside a vacuum. For example, electron beam evaporation sources must be in a high vacuum environment and generating a densely focused electron beam to produce enough heat to evaporate Alumina ceramics; water cooling is therefore required to prevent damage to evaporation crucibles and electromagnetic coils used respectively to contain the molten alumina and focus the electron beam. Liquid Nitrogen Feedthroughs are used for the same cooling purposes as Water Feedthroughs but offer lower temperature (-200°C) capabilities and therefore greater cooling rates. Liquid Nitrogen Feedthroughs are designed so as to minimize heat transfer between coolant lines and vacuum mounts. Ice build up can be detrimental to the sealing characteristics of a vacuum mount. Thermal insulation in liquid nitrogen lines is achieved through double wall coaxial construction. A 0.25 inch cooling line is inserted and welded to one end of a 1 /2 inch support tube. The opposite end of the 1 /2 inch support tube is welded to the vacuum mount which, when evacuated, creates a coaxial vacuum cavity between the two tubes. This cavity is an excellent thermal barrier, which prevents ice build up on the vacuum mount flange.
Methods of Sealing
Insulator Seal’s Del-Seal™ (Conflat® compatible) metal seal flanges have become America’s industry standard and the world’s leading choice for ultra high vacuum flanges. They are listed with both the American  standard size designations as well as the European DN CF standard. They are offered in 13 sizes from 1.33'' (DN16 CF) to 16.5'' (non-DN standard) diameters. Copper gaskets, Viton® elastomer gaskets and bolt kits are also detailed. ConTorr™ Gaskets are an ISI patented design offered in plain or gold-plated OFE-copper. What makes these gaskets unique from conventional copper gaskets is the revolutionary method by which they are installed, held in place and removed from metal seal flanges. Kwik-Flange™ (ISO NW compatible) elastomer seal flanges were specifically designed for high vacuum system connections requiring quick and frequent assembly and disassembly. They have been modeled after the globally established ISO NW flange format. ISI offers the Kwik-Flange™ system, including mounting accessories, in tube sizes from .750'' (DN16 KF) to 2.00'' (DN50 KF). Baseplate elastomer seal mounts are self-contained mounts, originally developed for the vacuum coating industry and designed for use with bell-jar systems or flat Baseplate vacuum chambers. These blank mounts fit through 1.00'' holes. As an added convenience, ISI blank Baseplate mounts are fitted with a female 3 /8-16 thread to support custom vacuum structures. National Pipe Thread (NPT) mounts are also offered as a line of standard blank mounts. These are made of 316 stainless steel material and used to blank-off unused NPT vacuum ports. These mounts are typically sealed using conventional plumber’s Teflon® tape and are suitable for rough vacuum applications.
Custom Engineering Seals
At Insulator Seal, we know that many of tomorrow’s standard components will evolve from the special fabrications produced today and to this end we listen all the more carefully to our customer’s individual requirements.  The custom engineering of ceramicto-metal seals is a central part of our manufacturing activity. Our Research and Development personnel are always available to discuss technical issues and we pride ourselves on the speed with which we can evaluate a particular application and propose the most cost-effective solution to the customer. Insulator Seal (ISO-9001:2000 certified) is a key provider and world leader in the manufacture of electrical and optical, ceramic-to-metal components for the vacuum science and technology community. ISI has features the industry’s most comprehensive line of hermetically sealed electrical and optical ceramic-to-metal components. ISI scientists, engineers and technicians have been perfecting the science and art of ceramic-to-metal bonding for over thirty years. Using time tested proprietary vacuum bonding techniques and advanced vacuum brazing systems ISI provides the scientific and industrial vacuum community with ceramic-to-metal products of unsurpassed quality and performance. Insulator Seal’s product line includes a complete line of thermocouple feedthroughs, single and double-ended multipin instrumentation feedthroughs, an extensive selection of industry standard coaxial instrumentation and power feedthroughs, high frequency RF power feedthroughs with patented cooling geometry, as well as custom engineered products for exotic or demanding applications.
Insulator Seal, A division of MDC Vacuum Products, LLC
Sarasota, FL
www.insulatorseal.com
Tel: 1-941-751-2880 and Toll-Free 1-800-548-9509
E-Mail: sales@insulatorseal.com
CF® Flange Gaskets from ¼ Hard OFHC Copper, Plated Versions Available
Kurt J. Lesker Company manufactures CF® Flange gaskets from ¼ hard OFHC copper, then cleans and finishes them to a scratch- and burr-free condition. These premium gaskets are individually packaged  to maintain cleanliness, and are available from stock for flange sizes 1.33'' OD through 18'' OD. KJLC even stocks the hard-to-find 14.25'' OD and 14.5'' OD CF® flange gaskets. For the most demanding high temperature applications, Kurt J. Lesker Company’s proprietary plating process produces the shiniest Silver-Plated CF® flange gasket available. Meticulous 100% visual inspection guarantees the high quality these gaskets deliver. For applications where frequent disassembly prohibits the use of a metal gasket, the Kurt J. Lesker Company offers two varieties of Viton® gaskets specifically designed for CF® flanges. These products are: an Econo version; and the premium VZVIT series, which provides simple assembly. The unique VZVIT design “holds” the gasket in place, even when the flange mating surfaces are perpendicular to the floor. Annealed OFHC copper, gold-plated OFHC copper, and aluminum CF® flange gaskets are also available from stock.
Electrical Feedthroughs
The Kurt J. Lesker Co. manufactures over 1,200 different electrical feedthroughs in a wide variety of terminations, max voltages, and current  carrying capacities, including three distinct ranges: Power Feedthroughs, Instrumentation Feedthroughs, and Thermocouple Feedthroughs. Power Feedthroughs are available in voltages to 100kV, current capacity up to 600A, and on all standard vacuum mounting flanges. Various conductor materials are available, including (but not limited to) copper, nickel, stainless steel, and Kovar. Instrumentation Feedthroughs are available for signal passthrough in all standard coaxial configurations (BNC, MHV, SHV, Type N, SMA, and SMB) as well as a variety of multipin variations (Mil-Spec, Circular, Type D). Thermocouple Feedthroughs are available for temperature measurement in all standard ANSI codes (Type K, J, C, T, E, R, & S) in both single-ended & double-ended configurations. Mil-Spec versions of the thermocouple feed-throughs are available, as well as thermocouple feedthroughs with integral power leads.
Ferro Magnetic Fluid Rotary Drives
Kurt J. Lesker Company introduces a new line of Ferro Magnetic Fluid Rotary Drives. On these unique drives, the rotating shaft is mounted inside the  stationary body and the gap between them filled with a low vapor pressure fluid containing a colloidal suspension of magnetic particles. Under the influence of magnets in the drive’s body, the ferrofluid forms a series of liquid o-rings that vacuum-seal the shaft. Such drives are used in vacuum applications requiring rotary motion, including sample stages, barrel coaters, platens, planetaries, and roll/web coaters. The line includes both solid- and hollow-shaft drives with an assortment of vacuum chamber mountings including ConFlat® flanges, o-ring seal flanges, baseplate mounts, and threaded mounts. For drawings, details and pricing call 1-800-245-1656 or visit lesker.com.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Tel: 1-412-387-9200
Contact: Paul Brown
E-mail: paulb@lesker.com
Series 31 Seals and Components
HPS® Series 31 is a line of ISO-KF standard vacuum components. The ISO-KF system refers to the family of small vacuum components (up to 2"), including flanges, elbows, tees and crosses. The International Standards Organization (ISO) has defined the interface dimensions, allowing the interchanging of components that conform to  the standard’s dimensions. Applications ISO-KF fittings can be used in a wide variety of applications including: roughing and foreline plumbing; small systems a well as systems requiring frequent cleaning or modification. Also used in research and teaching laboratories. ISO-KF components are primarily designed for use at sub atmospheric pressure. Because of the large number of elastomer seals used, typical limiting pressure without baking is about 10-
7 Torr. Baked systems using Viton® seals can be used to two decades lower. Standard components can be used to slight overpressure. If the ISO-KF system contains significant overpressure, i.e., 5 to 100 psig, then use the HPS® overpressure rings. The ISO-KF system is a modular, building block method of creating a piping system. There are several advantages in the use of ISO components. Since the flanges are “sexless” and the seal is symmetrical, so that the components are rotatable. By using ISO components, system assembly is quick and cost effective. See the online catalog for the ISO dimensions of flange sizes 10, 16, 25, 40 and 50. These dimensions apply to ISO-KF flanges of these nominal diameters throughout this catalog. The Series 31 component line also includes a few components in NW 80 (3") and NW 100 (4") sizes. There is no international standard for these sizes in the KF style. MKS has designed the flanging using series consistencies and customer requirements.
Series 76 ISO-Universal Flange and Seal Components
The HPS Series 76 series ISO-universal component system is used in a variety of industries from process manufacturing to semiconductor fabrication to thin film deposition. Some uses in vacuum systems are roughing and foreline plumbing for large vacuum systems; high vacuum, high conductance, interconnections; modular systems which will be modified frequently; and Experimental systems in research laboratories ISO-Universal flange components using elastomer seals are primarily designed for use at sub atmospheric pressure. When elastomer seals are used without baking, typical limiting pressures may be around 10-
6 Torr. Baked systems using Viton can be used to 10-
8 Torr. Standard components can be used to a slight over pressure. MF flanges may be used at a maximum pressure of 30 psig if the metal spacer ring is used and the flange damps are firmly retained. ISO-Universal flanges and components in this catalog are made of type 304 stainless steel. Centering ring and seal assemblies are offered with an aluminum centering ring and spacer ring, or with a stainless centering ring and an aluminum spacer ring. Rotatable bolt rings and damps are made of aluminum alloy. Retaining rings are made of steel. Flange seal surfaces are carefully machined and inspected for defects. Assembled components are leak checked for high vacuum use. They are cleaned and packaged to remain clean and protected in shipping. The user should observe precaution as required to prevent seal surface harm. This is especially important for used components returned to storage.
Series 88 Line of CF-style fittings
The HPS Series 88 is a line of CF-style fittings. CF flanges are the standard for ultrahigh vacuum applications. They use a flat gasket placed between two knife edges to provide the vacuum tight seal. Mating flanges have identical profiles, i.e., they are sexless, eliminating the need to store two types or worry about compatibility. Made with very high purity stainless steel and meticulous cleaning procedures, the HPS CF components are suitable for use in the ultrahigh vacuum regime to below 10-
13 Torr and in temperatures from -196 to +500°C. The material characteristics of the flanges, seals, screws, and nuts are selected to provide high  performance throughout a wide temperature range. Rotatable and non-rotatable flanges in sizes from mini 1- 1 /3 to 10 inches (34 to 254 mm) are available with several bore sizes to fit a range of tube diameters. MKS uses the latest automated equipment to provide the highest quality and consistency. Very high purity type304 stainless steel is selected to have few inclusions. Combined with MKS’ surface treatment and cleaning procedures, this minimizes outgassing, permeability, and leakage. Proper hardness is maintained to prevent the knife edge from deteriorating. HPS CF flanges suit applications requiring a very clean environment, ultrahigh vacuum conditions, high temperature, or where critical or dangerous materials must be contained or excluded. These include difficult applications with corrosive, radioactive, toxic or air sensitive materials; materials creation and processing such as molecular-beam epitaxy; analytical instrumentation including Auger electron spectrometers, mass spectrometers, and electron microscopes and high energy physics installation such as accelerators and fusion devices.
MKS Instruments, Inc.
Andover, MA
www.mksinst.com
Contact: MKS Applications Engineering
Tel: 1-800-227-8766 (USA only) or 1-978-284-4000 (Worldwide)
E-mail: mks@mksinst.com
DC, RF and Thermocouple Feedthroughs for Solar Manufacturing
MPF manufactures electrical feedthroughs for vacuum applications using ceramic-to-metal sealing technology. These hermetic feedthroughs provide the highest reliability available for the transmission of electrical power and instrumentation signals into vacuum process systems. Many solar (photovoltaic or PV) manufacturers rely on MPF products to provide process and control to their vacuum coating equipment. DC and RF feedthroughs are used for high levels of electrical power to drive deposition processes that are critical to solar manufacturing. The thermocouple feedthroughs are also critical for monitoring and controlling vacuum deposition and crystal growth.
Sub-D and Sub-C Miniature Feedthroughs
MPF Products has a full line of Sub-miniature-D and C feedthroughs. The subminiature-D instrumentation feedthroughs are designed to meet MIL-C-24308 specifications. Standard configurations include 9, 15, 25 or 50 gold plated pins in a straight through pin-to-pin design. Ultra  high vacuum cable assemblies with PEEK connectors and Kapton® insulated ribbon cables are available for a turnkey solution. High current (up to 5 Amps per pin), coaxial, thermocouple and combined solutions are also readily available in the Sub-D arrangement. For space-limited designs, MPF Products also offers Subminiature-C feedthroughs. The compact design allows for 9 gold plated pins to fit on either a CF16 (1.33") or NW16KF (1.18"). Ultra high vacuum cable assemblies with PEEK connectors and Kapton® insulated ribbon cables are available for turnkey solutions. Custom configurations of both subminiature D and C feedthroughs are available.
UHV Electrical and Optical Vacuum Components
MPF Products, Inc. design and manufactures a full-line of electrical feedthroughs including, multi-pin, Sub-miniature D & C, power, thermocouple, coaxial, fiber-optic, liquid, gas, RF power, breaks and envelopes along with all accessories required for your application. Hermetically sealed feedthroughs are available in weldable, flanged or baseplate configurations. MPF has a staff of engineers capable of designing the most intricate feedthroughs in the market. We can modify standard products or design a custom feedthrough for your specific application. MPF provides quality, hermetic products with the quick deliveries at low prices. Most catalog items are either in stock or can be shipped within 1 week.
MPF Products, Inc.
Gray Court, SC
Tel: 1-864-876-9853
Electrical Feedthroughs
Nor-Cal’s extensive line of electrical feedthroughs are manufactured from ultra-high vacuum grade materials such as high alumina ceramic insulators, OFHC® copper and nickel conductors, and 304 stainless steel flanges. These robust ceramic to metal feedthroughs have electrical ratings for operation with one side in dry atmosphere while the opposite end is in a stable vacuum. They are used in ultra high vacuum systems with CF flanges or high vacuum systems with NW flanges. CF feedthroughs can be baked to NWs to 204°C with maximum system pressure Torr. Our product line consists of the most commonly 450°C and of 1 × 10-
4 required feedthroughs for general vacuum applications. Customs designs or modified standards can readily be supplied.
Liquid Feedthroughs
Nor-Cal’s product line of liquid and liquid nitrogen feedthroughs includes the most commonly required for general, high and ultrahigh vacuum applications. Tubing is 0.25 and 0.375 inch OD, type 304 stainless steel with CF or NW flanges. They are available without fittings or terminated with industry standard Swagelok® or Cajon® VCR tube fittings. Maximum bakeout with CF flanges is 450°C and 204°C with NWs. Vacuum ranges are 10-
11 Torr and 10-
8 , respectively. Water-cooled liquid feedthroughs are a cost-effective and reliable way to introduce water into a vacuum system. The 0.035-inch single wall tube construction is designed for the transmission of water as a cooling agent. Liquid nitrogen feedthroughs are  constructed with dual and coaxial tube geometries. This thermal barrier effectively reduces condensation and ice buildup on the atmosphere side of the feedthrough around the mounting flange interface, protecting the seal’s integrity. This is necessary because of the extreme thermal gradients encountered with liquid nitrogen. Swagelok® stainless steel tube compression fittings provide a leakproof, torque free vacuum seal by swaging the stainless steel tube to which they are mated. They require no gaskets. Cajon® VCR stainless steel tube compression fittings properly handle rapid makeup in tube, pipe and welded vacuum systems. These zero clearance fittings make them the perfect installation solution when space is a problem. Compression of a removable copper gasket creates a vacuum seal between air and process sides. A new catalog book contains everything for the vacuum user, from the semiconductor process engineer to the UHV researcher. Our new catalog contains specifications and drawings for over 4000 standard vacuum components, including: isolation and pressure control valves; foreline traps; flanges and fittings; deposition monitors, feed-throughs and sensors; viewports and shutters; liquid and electrical feedthroughs; motion and positioning devices; and heater jackets and controllers. Custom chamber and weldment capabilities are also described in detail, including a detailed guide on vacuum chamber design.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Contact: Jacquie Daniel or Denise Wilson
Tel: 1-800-824-4166 or 1-530-842-4457
E-mail: jacquiedaniel@n-c.com or denisewilson@n-c.com
Magnetic Fluid Feedthroughs
Telemark offers a variety of Magnetic Fluid Feedthroughs that include: solid or hollow shaft; flange, nut, or through hollow mounting; air or water cooling; normal,  cantilever or heavy duty seals; and models for inert or reactive gas environments. These feedthroughs utilize an improved base oil of magnetic fluid with extraordinary heat resistance but also extremely low volatility. This enhances performances in applications from deep vacuum to high quality audio speakers and results in superior performance. Engineered in Japan and manufactured in China by MoreTec Magnetic & Electronic, these Magnetic Fluid Feedthroughs adopt the most advanced technology and adheres to strict quality assurance systems in all areas of product design, development and manufacturing. Standard, modified, semi-custom or full custom designs are available.
Telemark Cryogenics
Novato, CA
www.telemark.com
Tel: 1-415-883-1004
E-mail: sales@telemark.com
Magnetically-Coupled Transporter for Vacuum Applications
Transfer Engineering and Manufacturing offers a family of Precision Magnetic Manipulators (PMMs) for use in high and ultra-high vacuum or controlled environments. Linear, rotary and linear/rotary motions are available with the independence of motion on the patented dual shaft models offering a wide range of secondary motions — operating clamping devices, vertical lift/lower mechanisms, securing locks as well as rotating stages. Widely used in research labs, the semiconductor industry and analytical laboratories, Precision Magnetic Manipulators can be incorporated into loadlock systems designed for sample/substrate/wafer introduction, positioning and removal. Each PMM can be customized to meet specific requirements. Examples of customization include shaft extensions, very high force PMMs with internal magnets for HV applications, choice of shaft material, ceramic bearings and hollow shafts for electrical feedthroughs. PMMs can be motorized and controlled by computer or remote joystick.
Small Footprint, SEMI-Compatible, Loadlock & Transfer System
The Transfer Engineering and Manufacturing TEAMMate™ is a compact, high-vacuum compatible, single-substrate loadlock system designed to load wafers or other substrates into a SEMI-standard or custom process module. This small footprint system can mimic the motions of a complex and costly robot but is more convenient to use and requires little or no engineering to integrate with a process module. Designed with care in selection of interfacing materials along with an integrated magnetically-coupled transfer device with moving parts located well below transfer height minimizes generation of particulates. The unique magnetically-coupled slide mechanism can be operated manually or motorized. The valve interface can be easily modified to mate to a wide variety of vacuum systems. Applications include sample delivery to modules for process development, as a manufacturing tool or for low-volume production.
Transfer Engineering and Manufacturing, Inc.
Fremont, CA
Tel: 1-510-651-3000
Electrical, Fluid and Rotary Feedthroughs
YTI Thin Film Products and Services offer a complete line of electrical, fluid, and rotary feedthroughs. All feedthroughs are leak tested to 1 × 10-
8 Torr for reliable performance in high vacuum systems. The unique “Yeagle Interchanger” allows quick and effortless changing of octal,  fluid, instrument and some electrical units. All feedthroughs are designed to fit a standard 1" port. Custom models are available for most high vacuum applications. Electrical feedthroughs are available in dual and single high voltage from 10 to 15 kV, 70Amps in SS, ceramic, Teflon and OFHC copper. A medium current model has a maximum rating of 220V, 60 amps in SS or ceramic. Octal feedthroughs are rated at 120V, 5 amps/Pin in SS with standard octal connections on both sides. Stainless steel fluid, gas and LN2 feedthroughs are available in many variations with tubing sizes from 0.125" to 0.250". Rotary feedthroughs are offered in brass, SS and Viton with 1 /4" shaft and maximum speed of 100 RPM. Models for instrumentation come in SS for dual 1 /4" water with coaxial electric.
YTI Thin Film Products and Services
Ashford, CT
Tel: 1-860-429-1908
E-mail: sales@ytionline.com
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Vacuum Technology & Coating
