Vacuum Gauges

 

 Compiled by Terrence Thompson, Contributing Editor

 

 This annual Vacuum Technology & Coating product showcase highlights vacuum gauges used in vacuum-based production, R&D and other applications. When you absolutely depend upon vacuum processes, knowing the precise pressure is essential.

 

 Vacuum gauges determine precisely what vacuum pressure exists in specific applications. The many manufacturers and distributors of vacuum gauges, as well as the technical societies and trade associations addressing vacuum technologies, provide very comprehensive reference materials for potential buyers. There are many excellent books on vacuum topics although few are recent since the fundamentals are well understood by the vacuum gauge suppliers and many of their customers. We encourage you to indulge in the detailed technology descriptions that are available, many free direct from the manufacturers.

 

 Many Choices

 

 Why are there so many types and models of vacuum gauges? Because gauge manufacturers comprehensively respond to market demands. The representative models shown here all are commercially viable instruments, each with solid reasons for being used in appropriate applications. Prices vary, of course, since the intended applications impact the ruggedness required and therefore the cost to build it as well as the selling price. Selecting a vacuum gauge is more challenging than some might think.

 

 Visit any vacuum gauge company’s website and you will find either a wealth of information to peruse instantly, download or have sent to you if you prefer hard copy references. And it’s well worth registering at the sites since some of the product and vacuum technology information that is mailed to you will be worth keeping in a prominent place on your bookshelf for years.

 

 

 Product Descriptions

 

 In the following product descriptions, vendors make legitimate distinctions to focus on specific intended applications so direct comparisons may be difficult. Visit Vacuum Technology & Coating magazine’shome page at  and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.

 

 

 

 ACS 2000 Single Channel Controller

and ACM 2000 3 Channel Controller

 

 Alcatel’s ACS2000 single channel gauge controller and ACM2000 3 channel gauge controllers are extremely easy to specify and use. Either controller can be used with any of the Adixen 2000 series gauges, the controller will automatically recognize the gauge and display the proper pressure. There is no complicated part number to configure as they come standard with all popular features: Torr, mBar or Pascal units, RS-232 interface, 2 set points per channel, 0 to 10 V output per channel, and can be powered by 220 or 110VAC. In addition, all gauges use the same type of cable, a straight through DB-9, so there is no complicated array of cables to wade through. These controllers can even be used with the Adixen 1000 series gauges (or visa versa) with a simple adapter, all at an affordable price. The 3-channel controller is very advanced. It can display any combination of Adixen 2000 series gauges, including capacitance gauges, in combination with ion or Pirani gauges, and can also display a graphical trend of the pressure signal over time, a very valuable feature for monitoring system performance, pump down times or troubleshooting leaks or out gassing. www.adixen-usa.com  AP 2004 Pirani Gauge  Alcatel Vacuum Products, Inc. has the AP 2004 Pirani vacuum gauge. This new gauge determines pressure by measuring the heat loss from a heated filament. When the gas pressure decreases, there are fewer gas molecules, resulting in a less convective heat transfer from the filament, which then gives a very accurate pressure measurement. The AP2004 uses a very long filament which results in a much more accurate gauge, the repeatability of this gauge is ± 2% over the range from 0.02 to 50 mbar. The AP2004 also has a very low internal volume for a very fast response time. The AP2004 gauge is easy to use with a push button span and zero adjustment so there are no potentiometers to ‘tweak’. It can be used standalone, just supply it with 15 to 30VDC and get a 0 to 10 V output signal or RS-485 digital communication. Two set points are available on the gauge head. Or if you prefer, you can use the gauge with an Adixen ACS2000 single gauge or ACM2000 threegauge controller to display the pressure. The Adixen Pirani gauge provides an excellent level of accuracy from 5 x 10-4 Torr to ATM. www.adixen-usa.com  ASD 2000 Capacitance Diaphragm Vacuum Gauge  Alcatel Vacuum Products, Inc. has the ASD 2000 series of capacitance diaphragm vacuum gauges covering the range of 0.1mTorr toATM in 4 ranges with ±0.5% accuracy. These gauges use a micro-machined silicon diaphragm which results in a very stable signal and low zero drift in spite of fluctuating temperatures and vibration. The ASD2000 series gauge is easy to use with a push button zero adjustment so there are no potentiometers to ‘tweak’. They can be used standalone, just supply with 15 to 30VDC and get a 0 to 10 V output signal. If you prefer, use these gauges with an Adixen ACS2000 single gauge or ACM2000 three-gauge controller to display the pressure. With theACM2000 controller, you can display capacitance manometer readings on the same display with ion or Pirani gauges, it is as simple as just plugging them in.

 

Alcatel Vacuum Products, Inc. Adixen Brand Name Hingham, MA www.adixen-usa.com Contact: PaulYoung Tel: 1- 781-331-4200 E-mail:  Paul.Young@adixen-usa.com  APG100 Series Active Pirani Vacuum Gauges  The Edwards range of Pirani vacuum gauges is the APG100 Series, designed for measurement of vacuum down to 10-4 mbar. The new gauge is lead-free, RoHS compliant and carries Canadian Safety Association approval. It is available in standard and corrosion-resistant versions. OEMs and system integrators will particularly like the APG100 for its compact size (41 × 83 × 30mm), linear output (one volt per decade) and replaceable sensor tube, all of which make it a cost-effective choice as a system component. Cable connections and the ‘calibrate’ and ‘set point’ push buttons are arranged close together at one end of the unit, so sideaccess is not required, giving greater flexibility in system design. There are NW16 and NW25 flange options as standard – other flange sizes can be supplied on request. The APG100 sensor tube is replaceable. If it should need to be changed, the tube is simply unclipped and replaced with a new one, with no need for special tools or training. With the electronics module removed, the sensor tube can be baked to a temperature of 150°C where this is needed for systems operating at very low pressures. The APG 100 is available in two versions; the APG100-XM is the standard version for measurement of vacuum to 10- 3 mbar. The APG100-XLC measures vacuum down to 10 -4 mbar and has a corrosion resistant filament for harsher environments. www.edwardsvacuum.com  TIC Instrument Controller with Six-Gauge and Capacitance Manometer Capability  The Edwards TIC instrument controller is a compact instrument controller with a large clear graphical display, an intuitive user interface and serial communications providing full remote control. It is supplied with a Windows™ PC program which provides a comprehensive data logging ability, and enables full setup and control from a PC using the RS232 interfaces as standard. The controller supports and automatically recognizes vacuum gauges from the Edwards range, with coverage from 2000 to 2 × 10-11 mbar. The TIC is available in three-channel, six-channel and sixchannel capacitance manometer capable versions. When combined with the optional external relay box that allows for control of six 250 VAC 5 amp changeover relays, the TIC instrument controller provides for flexible operation of a wide range of vacuum system measurement and control configurations.Additional features include: direct pressure readout of common gasses (N2, He, Ar, CO2, Kr & Ne) without conversion factors: up to six 0 to 10 V buffered analogue outputs; user-configurable display options including four-character alphanumeric name for each channel; option to display one, three, or six channels simultaneously; and ability to select gauge order when cycling through the display. www.edwardsvacuum.com  WRG—Wide Range Gauge  The Edwards WRG family offers the capability of single port pressure measurement in the range atmosphere to 10-9 mbar with a linear output. It’s a compact solution, halving the space and connectivity hardware requirement. The WRG has many features including push-button calibration and set point controls and comprehensive diagnostics. The WRG is a cost-effective vacuum management solution when used with an Edwards controller or directly integrated into the system controls. www.edwardsvacuum.com  AIGX Active Ion Gauge  The Edwards AIGX is a compact gauge with dual yttria coated iridium filaments, a wide measuring range from 5 × 10-2 to 5 × 10-10 Torr (6.6 × 10-2 to 6.6 × 10-10 mbar) and a 1 volt/decade linear output. The new AIGX gauge from Edwards incorporates all the benefits of the industry standard active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments. TheAIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.

 

Edwards Vacuum Wilmington, MA www.edwardsvacuum.com Contact: Ona Blanchette Tel: 1-800-848-9800 E-mail:  Ona.Blanchette@edwardsvacuum.com  KJLC 392 Series Ion Gauge with Dual Convection  Kurt J. Lesker Company’s new KJLC392 series features a dual hot filament Ionization gauge transducer with integrated electronics capable of operating two Convection gauges simultaneously. This hot filament Bayard-Alpert Ionization gauge module is offered with a space-saving built-in controller and display. The KJLC392 Ionization gauge module can combine the vacuum measurement with one of the Convection gauges to provide full range measurements from 1 × 10-9 Torr to atmosphere, or simply operate the Ion gauge and the two Convection gauges as individual gauges. The KJLC392 provides the basic signal conditioning required to turn the gauge into a complete measuring instrument. The built-in Controller is offered with a standard 3-channel bright OLED display providing a convenient user interface for setup and operation of the vacuum gauge. www.lesker.com  Hot Filament Ion Gauge Tubes Kurt J. Lesker Company stocks a comprehensive selection of replacement ion gauge tubes in tubulated envelope and nude designs that match both our controllers and those sold by competitors. We have tubes: in Pyrex, Nonex, and 7052 glasses; a range of envelope sizes; single tungsten and single or double thoriated iridium filaments; terminated in glass or metal tubes; or with various CF or KF flanges. We can cross reference almost any standard ion gauge tube and can provide custom or modified ion gauge tubes when required. www.lesker.com  Wide Range Gauge Tubes & Controls for 1500 Torr to 10-3 Torr  The Kurt J. Lesker “Wide Range” vacuum gauge covers a dynamic range of over 10-6 in the higher end of the vacuum range by integrating two sensors into one housing: a fast response diaphragm manometer, for accurate measurements between 1500 and 2 Torr; and a low temperature (125°C) Pirani gauge, for pressures between 2 Torr and 1 mTorr. The controller automatically selects the appropriate sensor as the pressure crosses the boundary value. This gauge is built to CSA requirements and is ideal for backfill operations such as lamp manufacturing. All controllers and indicators are shipped with a 10-foot sensor cable and a 6-foot line cord. www.lesker.com  Pirani Gauge Tubes & Controls for 20 Torr to 10-3 Torr  The Kurt J. Lesker Pirani gauges have many operational advantages over thermocouple gauges and competitive Piranis. The platinum alloy element operates at approximately 100°C vs. 300°C of a thermocouple gauge’s filament, significantly reducing instabilities induced by carbonized oil vapors. The lower operating temperature increases the thermal stability, allowing the operator to use a unique temperature compensation circuit that reduces thermal drift to a very low level. The compensation circuit and factorymatched sensors/cables allow any gauge controller to operate any gauge tube without recalibration. Since gold is not used in the sensor, it is unaffected by hydrocarbon or mercury vapors. Response time is 0.3 seconds, or approximately 10 times faster than T/C gauges. Dynamic range approaches 10,000 for pressure measurement (compared to 1,000 for thermocouples). In fact, the pressure range covered by our Piranis is 20 Torr to 1 × 10-5 Torr, which is well beyond the capabilities of any T/C gauge. www.lesker.com  Hot Filament Ion Gauge Tubes & Controls (KJL6600) for ATM to 10-9 Torr  The Kurt J. Lesker model KJL6600 operates two Bayard-Alpert ion gauges and four convection gauges or four thermocouple gauges while providing 8 set-points and a RS-232 interface. The unit will display the two ion gauges simultaneously and the four convection or T/C gauges sequentially. Also, if the ion gauges are off, the unit will display convection or T/C gauges in their place. Standard features include two analog recorder outputs, adjustable emission and autocalibration of the convection gauges. The KJL6600 controller is shipped with a 6-foot cord, rack mounting ears and instruction manual. The tubes and cables must be ordered separately. www.lesker.com  KJLC BDG Series  The Kurt J. Lesker Company Bourdon gauges are liquid-filled industrial dial gauges suitable for pressures from atmosphere down to 1 Torr. Available in 3 different pressure models—Torr, mbar, or in Hg—they feature a corrosion and impact resistant, Zytel nylon case with removable bezel for easy calibration. The large dial face measures 2-½ inches across the dial and the clear glycerin fill provides stable readability in spite of vibration. The internal “breathing diaphragm” virtually eliminates the air bubble in the mid range of the gauge for improved readability, prevents freezing, clogging and corrosion and compensates for temperature fluctuations. www.lesker.com  KJLC™ Convectron® Equivalent Series  The Kurt J. Lesker Company Convectron Equivalent series of pressure transducers and sensors are direct “drop in” replacements for the Granville-Phillips Convectron gauges. All controllers, cables, and sensors are interchangeable PLUS they feature added benefits such as a more rugged design that is less prone to damage from mechanical shock or vibration and a faster response to pressure changes. RS232 and RS485 are standard ports on these controllers. www.lesker.com  KJLC™ DV-6M Equivalent Thermocouple Sensors  The Kurt J. Lesker Company KJL-6000 thermocouple tube is a “drop in” pin exact replacement for the Teledyne Hastings DV-6M. However, the KJL-6000 features an all-metal stainless steel body and pins that are weather and corrosion resistant. The superior internal thermocouple supports ensure a longer life. This rugged tube can withstand a drop of 6 feet without damage. The Kurt J. Lesker Company offers a 30-day money-back guarantee on this product, with no questions asked. www.lesker.com Kurt J. Lesker Company Clairton, PA www.lesker.com Contact: Aaron Bryan Tel: 1-800-245-1656 or 1-412-387-9200 E-mail:  pressure@lesker.com  Ethernet-enabled Pressure Manometer for Real-Time Diagnostics  For more than 10 years, the 600 Series Baratron® Capacitance Manometers have been a leader in long-term performance, accuracy, reliability, and worldwide installed base. The new Ethernet-enabled e-Baratron Types 627C and 628C now adds the ability to network with Ethernet hubs and other devices for local or network diagnostics without disassembly or removal from the host system. Like other MKS Ethernet-equipped products, the 600C Series manometer includes embedded Internet browser software that allows it to communicate with any Windows® -based PC. Since the Ethernet port operates in parallel to the standard analog communications, the device can be diagnosed on a realtime basis during processing – a huge benefit for users who perform their own system analysis and troubleshooting. Even for users who do not use Ethernet networking, the Types 627C and 628C also have external LEDs to give a fast intuitive guide to the device’s status. The 627C and 628C models use MKS’standard capacitance sensor, while the E27C and E28C models are equipped with MKS’ patented Etch sensor that greatly reduces manometer drift in processes with condensable byproducts. www.mksinst.com  Series 901 Plus MicroPirani/Piezo Loadlock Transducer  Designed specifically for the loadlock environment, the HPS Series 901 Plus (901P) loadlock transducer (LLT) combines Piezo and MicroPirani sensor technologies. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. Functionality of three sensors in a single transducer provides space savings and a wide measurement range. Accurate absolute pressure measurement is from 1,000 to 10-5 Torr. Gas independent absolute pressure measurement is from 50 to 1,000 Torr. It has accurate atmospheric pressure reading, independent of gas type and barometric pressure changes. Fast, accurate and repeatable pressure measurements reduce process cycle times. Ease of operation is possible with analog output and digital communication. It is mountable in any position for easy installation. The MicroPirani solid state sensor is resistant to damage from air inrush or vibration and has three setpoints with fast response time for reliable process control. The 901P combines both absolute and differential pressure measurement technologies to provide superior performance and functionality. The 901P provides a patented, gas independent absolute pressure measurement from 50 to 1,000 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 901P can read pressures down to 10-5 Torr — two decades below a standard Pirani sensor. The design minimizes the effects of convection, therefore operation is possible in any position without compromising accuracy, for simplified installation. www.mksinst.com  Series 902 Absolute Piezo Transducer Compact Pressure Sensor  The MKS HPS® Low-cost sensor alternative Compact system design has integrated electronics and sensor in one unit. Reduced process cycle time is due to the sensors’fast, accurate and repeatable pressure measurements. Sensor is suitable for harsh processes due to clean, robust design and stainless steel construction Ease of operation with both analog output and digitalcommunication Process control from setpoint relay with fast response time CE marked, compliant with EMC Directive 89/336/EEC The Series 902 has a simple modular design, high reliability, and low cost, making it attractive for a number of industries. These sectors and processes include semiconductor manufacturing, thin film coatings, freeze drying, lamps and light bulb production, medical devices, automotive and aerospace. Functions for the Series 902 include atmospheric and vacuum sensing, measuring fore and roughing pressures, warning alarm, monitoring backfill and venting and a system control relay for multi-sensor systems or system remote the control computer. The HPS Series 902 Piezo transducer combines the pressure measurement technology of a Piezo sensor with an integrated electronic control circuit. The 902 Piezo is an absolute direct reading sensor, allowing the measurement to be gas independent. The sensor includes unique temperature compensation, allowing for high accuracy over a wide measurement range (10-1 to 1,000 Torr.) The robust sensor is constructed from stainless steel and aluminum, with only stainless steel exposed to the process. The construction materials and overpressure capability allow the Series 902 to be used in demanding environments. The digital communication allow for all adjustments and monitoring to be delivered real-time, via a host computer. The 902 includes RS485 communication as a standard feature. Analog output is also standard with a choice of 0 to 10 or 0 to 5 VDC linear output or logarithmic output. The analog output format is selectable via the digital communication lines. www.mksinst.com  Series 970 Cold Cathode Transducer Family  The MKS HPS® Series 970 Cold Cathode Transducers is a compact and reliable measurement solution for pressures ranging from atmospheric to 10-8 Torr. The low-cost Series 970 transducers may be mounted in any orientation, and include both analog and digital communication for ease of operation. The 970 Series transducers use up to four sensors, including cold cathode, MicroPirani™ and Piezo technologies. This provides for superior functionality over a wide measurement range, and eliminates the need for multiple gauges. The cold cathode design is user serviceable, decreasing downtime and outside costs. The MEMSbased Micro Pirani sensor allows low turn-on pressure for enhanced reliability. It is automatically zeroed during the pump down cycle for improved accuracy. The transducers can be used with the PDR900 controller for easy set up and use. Three independent relay set points provide process control; users can configure set point values, hysteresis and direction via digital communication. All adjustments and monitoring are delivered in real-time via a host computer. www.mksinst.com  Series 909 & 909A Digital and Analog Hot Cathode Transducer  The MKS HPS® Series 909 and 909A are hot cathode sensors with integrated electronics. The 909 features digital communications, and a setpoint for process control, while the 909A features analog controls. Features and benefits include: wide measurement range of 10-10 to 10-2 Torr for high vacuum process monitoring; pressure-controlled EB degas for automated degas without filament shut down; ease of operation with both analog and RS485 digital communication; reliable and repeatable pressure measurement for process stability; and CE marked, compliant with EMC Directive 89/336/EEC and Low Voltage Directive 73/23/EEC. The MKS HPS® Series 909 and 909A Mini Ion Transducers are the ideal measurement tools for high vacuum applications, including pressure measurement of high vacuum chambers and control or start-up of high vacuum systems. They can be used to measure base pressure, and the pressure of backfilled gases. Applications include semiconductor processing and analytical systems. www.mksinst.com  Series 910 DUALTRANS™ Micropirani/Absolute Piezo Transducer  The MKS HPS® Series 910 is a dual sensor transducer, combining the pressure measurement technology of Pirani and Piezo with an integrated electronic control circuit. The transducer measurement range is 10-5 to 1,500 Torr. The Piezo is a direct-reading absolute pressure sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range. The Piezo will measure from 10-1 to 1,500 Torr. The MicroPirani performs an autozero function to the Piezo when pressure is below 10-2 Torr. Unlike traditional Pirani gauges, the element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume.A traditional Pirani sensor has a measuring range from 10-3 to about 100 Torr, rapidly losing sensitivity above 10 Torr. Because the size of the sensing portion of the MicroPirani™ is so small, it has a range down to 10-5 Torr. The design minimizes the effects of convection, so operation is possible in any position without compromising accuracy, for simplified installation. The digital communication allows for all adjustments and monitoring to be delivered real-time, via a host computer. The 910 series includes RS485 or RS232 communication as a standard feature. www.mksinst.com  Series 925 MicroPirani™ Vacuum Transducer  The HPS® Series 925 MicroPirani™ transducer is a thermal conductivity gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) sensor. The 925 is used for vacuum pressure measurement and offers analog voltage output, digital interface and set point relays for process controlling. The 925 transducer offers a wide measurement range from 1 × 10-5 Torr to atmosphere, two decades beyond a standard Pirani. Like all thermal conductivity sensors, the 925 is sensitive to gas type. To compensate for gas dependency, the MicroPirani has a number of common gas calibrations that can be selected via the digital interface. This makes it a simple solution for locating medium to fine leaks in vacuum systems. The 925 has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 925 also has a analog output of 1 VDC/decade that can be interfaced to external analog equipment for pressure readout or controlling. Other analog outputs and curves can be selected via the digital user interface. The 925 has up to three mechanical relays which can be used for process control. The 925 compact design reduces the amount of space occupied by a vacuum gauge. This is particularly appealing to system designers and allows for a more compact vacuum system. www.mksinst.com  Series 999 Quattro Multi-Sensor Transducer  The MKS HPS® Series 999 Quattro™ is the ultimate transducer solution, providing pressure measurement from 10-10 to 1,000 Torr, combined with atmospheric switching capabilities. The Quattro combines three of HPS’ key technologies into an integrated gauge solution, and has the functionality of four sensors in one compact package. The Quattro includes the miniaturized hot cathode ionization sensor, the MEMS-based MicroPirani™ sensor and a unique piezo sensor, offering both differential and absolute sensor functions. It features a wide measurement range of 10-10 to 1,000 Torr for high vacuum processes; accurate atmospheric pressure reading independent of gas type and barometric pressure changes; gas independent absolute measurement from 50 to 1,000 Torr (1% of reading above 50 Torr; 4-in-1 sensor eliminates complex manifold, wiring and control requirements; educed process cycle time due to sensor’s fast, accurate and repeatable pressure measurement; both analog and digital operation and communication; Piezo and MicroPirani are automatically calibrated during operation; MicroPirani technology allows for hot cathode filament control at lower pressures; improved hot cathode filament life; two yttria-coated iridium filaments, designed for extended life; includes a patented degas function; mountable in any position for easy installation; smoothed analog output (0.5 volts per decade); three user-configurable set point relays and a microprocessor-based digital technology for real-time data access. The Series 999 Quattro is ideal for measuring a wide vacuum range from atmosphere to UHV, with atmospheric switching capabilities. Typical applications include semiconductor, thin film coating, analytical instrumentation and high-energy physics. These applications require long term stability and accuracy and will benefit from the multi-sensor design and digital interface. The compact package is ideal for system integrators and equipment manufacturers. www.mksinst.com  Series 937A Digital Combination Vacuum Gauge System  The MKS HPS® Series 937A combination vacuum gauge system is part of the MKS HPS® family of vacuum gauges. It will operate as many as five sensors simultaneously, and every controller is configured to the user’s specifications regarding sensors, line voltage and frequency, units of measure and communication choice. The Series 937A combines the technologies of the cold cathode, standard Pirani, convection Pirani, thermocouple, capacitance manometer and absolute Piezo sensors to measure from ultra-high vacuum to above atmospheric pressure. Features include a simultaneous readout for a combination of up to five vacuum gauges; wide measurement range of 10-11 to 10+4 Torr; computer interface is RS232 or RS485; field upgradeable, modular design; repeatable measurements and five independent relay set points for improved process control; gas-type sensitivity allows sensors to be used for rough leak detection; rapid response to pump down; leak test function with bar graph display and audio alarm; cold cathode and standard Pirani sensors may be mounted in any position, increasing flexibility during installation; series 937A is fully CE compliant with EMC directive 89/336/EEC and Low Voltage directive 72/23/EEC; and models available that indicate pressure in Torr, millibar, Pascal, or microns. www.mksinst.com  Series 947 Digital Convection-Enhanced Pirani Vacuum Sensor System  The MKS HPS® Series 947 Convection-Enhanced Pirani Controller offers many standard features at a low price, yet is easy to use. An ana- log output signal proportional to pressure is standard and is accessible from the rear of the controller. Processes are controlled with two independent relay set points that are standard on this single-channel controller. The relays can be set to trip anywhere within the controller’s set point range.All of the operating controls are conveniently accessible from the front panel of the controller, including the power on-off switch. Adjust set points from the front panel while viewing the large, easy-to-read display. Set point activation is shown with red LED indicators. Set points can be checked at any time with no break in process control. With a wide measurement range of 10-3 to 10+3 Torr, the MKS HPS® Series 947 Convection-Enhanced Pirani Controller is ideal for rough to medium vacuum applications. This includes measurement of roughing and foreline pressures, activation of high vacuum sensors, or start-up of a system process with the standard relay set points. The Series 947 Controller is not only suitable for all vacuum industrial applications such as semiconductor or food processing, but also analytical applications and research. It is useful as either a small system controller or as a module in more sophisticated pressure control environments. www.mksinst.com  Series 959 Hot Cathode Combination Sensor System  The MKS HPS® Series 959 Controller is one of the smallest, full-featured Hot Cathode controllers on the market today. Complemented by the Mini Ion Gauge, the 959 is a perfect replacement for older ionization gauge controller systems, or as the cornerstone of a new vacuum system. An optional Pirani board can be added to control a standard or convection-enhanced Pirani sensor. The Series 959 Controller and sensors can be used in many applications such as semiconductor manufacturing, thin film deposition, high energy physics, ion implantation, or space simulation. The MKS HPS® Series 959 Hot Cathode Controller is a compact, economical, single-channel controller that is userfriendly and provides fast, reliable pressure measurement. All of the operating controls are conveniently accessible from the front panel of the controller, including the power on-off switch. The Series 959 is available as a hot cathode controller only, or as a hot cathode/Pirani controller when the Pirani option is added. If the Pirani option is chosen, the Series 959 automatically detects whether an MKS HPS® standard Pirani or convection-enhanced Pirani is used. The Pirani can control the hot cathode filament, protecting it from operating at pressures near atmosphere. Where the Pirani and hot cathode outputs overlap, a combination output and display can be selected. Two independently adjustable set points are standard on the Series 959. This allows for the automation of process related functions. The set point values are nonvolatile and remain unchanged after power down or power failure. They are easily viewed with the function select switch and adjusted with color-coordinated push buttons, with no break in process control. The 959 also includes an adjustable control that turns the hot cathode filament off at high pressures, prolonging the sensor’s life. www.mksinst.com  Series 943 Digital Cold Cathode Vacuum Gauge System  The MKS HPS® Series 943 Cold Cathode vacuum gauge system includes the Series 943 digital controller and two cold cathode sensors: the Series 421 sensor for UHV use, or a lower cost Series 423 I-Mag® sensor for OEM or industrial use. The Series 943 Cold Cathode vacuum gauge system is designed to be user-friendly and to provide fast, reliable pressure measurement from 10-10 to 10-2 Torr. The 943 Cold Cathode vacuum gauge system is well-suited for industrial, process and analytical applications including pressure measurement of high vacuum chambers and control of high vacuum systems. Areas of applications may include high energy physics, analytical instruments, laser production, ion implantation, mass spectrometry, or PVD. The 943 digital controller features two standard independent relay set points, which allows you to confidently control your process. Adjust the set points from the front panel while viewing the display. Red LEDs indicate set point activation status. Check the set point at any time with no break in process control. The Series 943 displays pressure from 10-10 to 10-2 Torr using a high visibility LED display. Two types of analog output are standard, for remote monitoring of pressure. The Series 943 has passed the requirements of the European Directives and is CE marked. MKS Instruments, Inc. Andover, MA www.mksinst.com Contact: MKS Applications Engineering Tel: 1-800-227-8766 (USA) or 1-978-284-4000 (Worldwide) E-mail:  mks@mksinst.com  IGM-402 “Hornet” Miniature Ionization Vacuum Gauge with Dual Convection  InstruTech’s new miniature Ionization vacuum gauge module, the IGM402, is capable of operating two convection gauges simultaneously. Dubbed the “Hornet,” the IGM-402 is said to be the first modular Ionization gauge of its kind with an on-board Controller capable of operating two convection gauges at the same time. The IGM-402 can combine the vacuum measurement from the Ionization gauge and one of the convection gauges to provide a full range vacuum measurement from 1 × 10- 9 to atmosphere, or simply operate the Ion gauge and two convection gauges as individual gauges. User has the choice to display all three measurements in one screen or auto cycle display from one gauge to the next. The IGM402 is a rugged metal Ionization gauge with Dual Fila- ments. It incorporates numerous design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings are not subject to temperature drift. The IGM-402 is offered with an extremely bright yellow, crisp OLED display, three log-linear analog outputs, three setpoint relays and an RS485 interface. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. The user can turn on/off the filaments, Degas and change emission current using three different modes of operation, including front panel push buttons, Digital inputs or RS-485 commands. www.instrutechinc.com  “Hornet” Miniature Ionization Vacuum Gauge Module InstruTech’s new miniature hot filament Ionization vacuum gauge module the IGM401, dubbed the “Hornet” for measuring pressures from 1 × 10-9 to 5 × 10-2 Torr. The IGM401 is a rugged metal Ionization gauge with Dual Filaments. It incorporates numerous design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings are not subject to temperature drift. The IGM-401 is offered with a extremely bright, crisp OLED display, one log-linear analog output, one setpoint relay and an RS485 interface. The display menu provides the user the choice to select from 16 common gases without having to apply manual correction factors. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. In addition to high vacuum measurements, a new option now available with the Hornet allows for connection of two convection vacuum gauges to the Hornet. The Hornet will operate and provide measurements from two external convection gauges without the need of another controller. The IGM gauge is also the first direct drop-in plug-compatible replacement for the Granville-Phillips Micro-Ion® gauge, which has been in widespread use for many years Micro-Ion® is a registered trademark of Brooks Automation/Granville Phillips. www.instrutechinc.com  “Stinger” Convection Vacuum Gauge Module  InstruTech’s CVM-211 series vacuum gauge module with onboard electronics/controller, dubbed the “Stinger,” is based on the convection vacuum gauge principle, and measures pressures from 1000 to 10- 4 Torr. Requiring minimal installation space this miniature convection vacuum gauge module offers one of the smallest form-fit designs available in a vacuum gauge. The Stinger is powered by 11-30VDC and provides a non-linear analog output as well as one process setpoint relay for controlling vacuum system pumpdown and venting. The Stinger module also includes an extremely simple user interface with a built-in 3-digit LED display, for readout of pressure, and for setup, calibration, and operation of the unit. The Stinger module is also a drop-in plug-compatible replacement for the Granville-Phillips Mini-Convectron® gauge modules. Mini-Convectron® is a registered trademark of BrooksAutomation/ Granville Phillips. www.instrutechinc.com  VGC-301 Convection Vacuum Gauge Controller  The InstruTech VGC-301 vacuum gauge controller is a convenient and inexpensive readout and power supply instrument for use with InstruTech’s “Worker Bee” convection vacuum gauge. This space saving 1/8-DIN housing can be used as a bench top or mounted in a cutout in an instrument panel. The VGC-301 measures pressure pressures from 1000 to 10-4 Torr. It is powered by 12-30 VDC, or by its selfcontained universal 100-240VAC supply. It provides a non-linear S-curve, user-scalable linear, or log-linear analog output, as well as RS232 and RS485 interfaces. Two process setpoint relays are included for controlling vacuum system pumpdown and venting. The VGC-301 module also includes a very easy and intuitive user-friendly interface with built-in 4-digit LCD display, for readout of pressure, and for setup, calibration, and operation of the unit. www.instrutechinc.com  “Worker Bee” Convection Vacuum Gauge.  InstruTech’s CVG-101 series Convection Enhanced Pirani vacuum gauge, dubbed the “Worker Bee,” is for measuring pressures from 1000 to 10-4 Torr. The Worker Bee gauge is the first direct drop-in plug-compatible replacement for the Granville-Phillips Convectron® gauge. (Convectron® is a registered trademark of Brooks Automation/ /Granville Phillips Company.) InstruTech has completely redesigned its new gauge for significantly lower cost, without sacrificing quality or performance. The internal surface area has been decreased by almost 75%, improving the response time of the gauge to lower pressures. Temperature compensation has been moved to the external environment to improve response time to temperature changes. Designed for reliability, the Worker Bee provides significant cost savings in total cost of ownership. InstruTech, Inc. Longmont, CO www.instrutechinc.com Tel: 1-303-651-0551 E-mail:  info@instrutechinc.com  GTC-395 Thermocouple Vacuum Gauge  The MyersVacuum GTC-395 ThermocoupleVacuum Gauge is a single station microprocessor controller, with easy to read display, housed in a DIN-style case. Usable as Panel mount or beach top. It uses the industry standard GTC-036 Thermocouple sensor. Pressure range is 1 mTorr to 3000 mTorr with an at atmosphere indication. The gauge features two independent relays, with front panel status indicators, that can be set within the range of the gauge. Other features of the GT 430 include Two (2) adjustable independent relay outputs, RS 232 serial interface, and Analogue output for remote display/monitoring. www.myers-vacuum.com  Explosion Proof Enclosure for Thermocouple & Thermistor Sensors  Myers Vacuum has developed an enclosure for explosion proof /resistance applications. This lightweight explosion proof housing can be easily used with standard thermocouple or thermistor sensors. The foot print is ~8” tall by 5.5” wide. It meets requirements for NEMA 4X, FM standard 3615 Class I, groups B, C and D and Class II, Groups E, F, G, CSA Standard C22.2 No. 30 CLASS III and UL Standard 1203.

 

Myers Vacuum Repair Services, Inc. Kittanning, PA www.myers-vacuum.com Contact: Dean Myers Tel: 1-724-545-8331 E-mail:  dmyers@myers-vacuum.com  ActiveLine™ Analog Vacuum Gauges  Pfeiffer Vacuum, Inc. offers an extensive line of analog vacuum gauges to meet the most demanding pressure measurement and process control requirements. TheActiveLine™ gauges contain integrated electronics and feature an easy to use interface that allows for operation with or without a controller. TheActiveLine™ gauge transducers are also designed so that they can be controlled directly through other PfeifferVacuum products such as leak detectors and turbo pump controllers. By combining rough and high vacuum gauge technologies into single, compact packages, Pfeiffer Vacuum offers the unique ability to easily measure a wide range of pressures from atmosphere to 5E-10 mbar with a single transducer. For additional control flexibility, Pfeiffer Vacuum offers a line of controllers, providing an analog output voltage representing pressure, plus control relays, simple calibration, and a digital readout of the vacuum level. ActiveLine is available in Piezo, Capacitance Diaphragm, Pirani, Cold Cathode, Process Ion, Full Range Cold Cathode and Full Range BA gauges. www.pfeiffer-vacuum.com  Radioactive and Electromagnetic Compatible Vacuum Gauges  Pfeiffer Vacuum, Inc.’s ModulLine vacuum gauges are tolerant of electromagnetic fields and radioactivity making them ideal for use in accelerators, UHV, high temperature and areas with radiation. They feature a rugged, proven design with automatic switchover from Pirani to cold cathode sensor. ModulLine is available with metal-sealed sensors for UHV applications. Designed for exceptional interface and control flexibility, ModulLine™ permits operation with remote electronics from the gauge head and has four different interface options including RS232, RS485, and Profibus. Pfeiffer Vacuum Inc. Nashua, NH www.pfeiffer-vacuum.com Tel: 1-603-578-6500 E-mail:  gauges@pfeiffer-vacuum.com  Extremely High Vacuum Gauge  The ULVAC AxTRAN is an extremely high vacuum gauge (XHV) that uses an energy analyzer to completely separate the ion source and ion collector. This structure permits AxTRAN to separate and measure noise current generated inside/outside the gauge, and gas ion current dependent on the pressure generated in the ion source. It enables highly quantifiable pressure measurements in a wide pressure range (10-2 to 10-11 Pa). The AxTRAN can be used for pressure measurements for high-energy accelerators, ultra-high and extremely high vacuum systems. Features include two independent set points, an easy-to-read LED with 3-digit mantissa display and a wide pressure range. ULVAC Technologies, Inc. Methuen, MA www.ulvac.com Tel: 1-978-686-7550 E-mail:  sales@ulvac.com  CVC3000 Absolute Pressure Vacuum Controller  The VACUUBRAND® CVC3000 is a unified controller for the rough vacuum range. It controls process vacuum, cooling water, and venting as required. Used in conjunction with a single speed vacuum pump and solenoid valve, it can maintain two-point control of vacuum levels, or execute multi-step programs. When used in conjunction with a VARIO™ NT chemistry pump, it can automatically find and follow boiling point curves for evaporations up to 30% faster than two-point control with minimal supervision.A special ‘turbo’mode is included for backing of turbomolecular pumps. An integrated vent valve is included. The VACUU•BUS™ interface allows automatic recognition and configuration of solenoid vacuum valves, vent valves, cooling water values, transducer peripherals and VARIO™ NT vacuum pumps. The bi-directional RS232 port allows process validation, or command of multistep processes via computer. The CVC3000 has an integrated capacitive transducer made of alumina ceramic with outstanding corrosion resistance and superior long-term stability producing a recommended controller for all delicate processes. VACUUBRAND, Inc. Essex, CT www.vacuubrand.com and http://www.vacuubrand.com/en-pageID509.php?locale=us Contact: Robert Freeman Tel: 1-860-767-5341 ×127 E-mail:  rfreeman@vacuubrand.net  XGS-600 Vacuum Gauge Controller  Varian’s new XGS-600 makes the complex task of vacuum measurement simple for you. The high-performance, high-capacity rack controller provides cost effective monitoring and control of multiple roughing, high vacuum and ultra high vacuum gauges in a standard halfrack package. The XGS-600 replaces Varian’s current controllers, the MultiGauge and SenTorr and requires from 50 to 75% less rack space than other controllers. For systems and enduses that require measurement and tracking of pressure, the XGS-600 provides power to, and records signals from multiple vacuum gauges. In addition, the XGS-600 can also communicate pressure readings to other elements of a system to indicate a change in status triggered by set points, or to activate other elements, such as a high-vacuum pumps or valves. Using stateof-the-art signal processing electronics, the XGS-600 features fast signal response of less than 20msec while still allowing users to simultaneously operate up to twelve convection type gauges, or up to four hot filament or cold cathode gauges combined with four convection gauges in one unit. A programmable dot matrix LCD displays up to 8 gauges at one time and can be configured to a font viewable from 20 feet. Simple screen organization and navigation make the unit extremely easy to use. No manual is needed for operation. www.varianinc.com  CT-550 Active Vacuum Gauge  The Varian CT-550 Active Vacuum Gauge is a self-contained roughvacuum gauge that needs no separate controller. It integrates a Varian CT-550 transducer with controller electronics into one compact housing. This stand-alone package is ideal for applications requiring minimum use of space or direct integration with PLCs. The CT-550 technology produces a wider range of pressure measurement, 1 × 10-3 Torr to atmospheric pressure, with faster response than thermocouple gauges. A digital display of pressure and digital serial communications are options. The compact design results in savings on cost and space and it has remote calibration. The set point for process control is digitally adjusted. The pressure range: 1 × 10-3 Torr to atmospheric pressure and analog pressure output is 1 volt per decade, log-linear. Power input range is 20 VDC to 27 VDC. Electrical connection is through a 9-pin D-subminiature connector. The vacuum connection is either a NW16 or NW25 KF flange. On-board digital pressure readout is available as is RS-232/RS-485 digital communications. The power supply/signal breakout box is available separately. www.varianinc.com  CT-100 Active Vacuum Gauge  Varian’s CT-100 Active Vacuum Gauge delivers Pirani gauge performance, at lower cost, in a simple, durable design. Pirani-like rapid response time of 0.2 seconds makes the CT-100 ideal for high productivity applications where process steps are critically time-dependent. Rapid response time enables fast-acting valves to protect turbo pumps from sudden inrush of gas. Two user-defined set points per gauge can trigger multiple process steps, alarms, or other pressure-related conditions. A selectable pressure range offers accurate and repeatable readings precisely where it is most critical to the user. The CT-100 operates over the full rough pressure spectrum, 1 × 10-4 Torr up to 100 Torr or 20 mTorr to atmosphere. On-board LEDs give quick visual indication of vacuum status. The robust sensing element is three times thicker than typical gauges, minimizing sensitivity to process vibration, shock, and condensables, providing longer life and higher repeatability than traditional Pirani gauges. A single point calibration feature maintains gauge accuracy over time. The CT-100 is ideal for mass spectrometers and surface analysis equipment. For load locks, rapid 0.2-second response time and excellent repeatability make the CT-100 the ideal choice. Vacuum connection is a 1/8-inch NPT threaded pipe (KF adapter may be ordered separately) or a welded-on NW16 KF Flange. www.varianinc.com  IM-500 Active Vacuum Gauge  The Varian IM-500 Active Vacuum Gauge is based on the proven inverted magnetron gauge, providing reliable measurement of pressures from 1 × 10-3 Torr down to 1 × 10-9 Torr, even in corrosive or dirty environments. It is self-contained, needing no separate controller. The gauge tube may be easily cleaned or replaced if necessary. Like traditional cold-cathode gauges, the IM-500 Gauge has no hot filaments, which burn out over time. Unlike traditional coldcathode gauge designs, the Varian IM-500 Gauge features fast starting, even under high-vacuum conditions. The gauge can also be turned on or off remotely via a DC voltage signal. It has on-board LEDs to indicate the status of the gauge. On-board control electronics do not need an external controller. It has rugged, all stainless steel construction. No elastomers or O-rings are used in the gauge housing, which resists corrosion and dirt. The compact size saves on space and cost. Output signal is 0.5 to +8.5 VDC log-linear, 1 volt per decade. Electrical connection uses a 15-pin D-subminiature connector. Vacuum connection is either a NW16 or NW25 KF flange. www.varianinc.com  BA-550 Active Vacuum Gauge  The Varian BA-550ActiveVacuum Gauge is a self-contained Bayard-Alpert transducer that does not need a separate controller. This standalone package is ideal for applications requiring minimum use of space or direct integration with PLCs and digital communications. The measurement range of the BA-550 is 10 mTorr to 2 × 10-9 Torr, and the transducer can be operated remotely via analog or digital logic. The pressure reading is available from the optional on-board LED display, a one-voltper-decade analog signal, or digitally through the optional RS-232/RS-485 interface. In addition, two SPST set points may be used for process control and easy integration with a PLC. E-beam degas is a standard feature. The small footprint results in savings on cost and space. The LED display, with digital numeric display, is available, eliminates the need for panel-mounted electronics. Remote calibration through the digital interface is fast and operator-independent. Remotely operated degassing maintains sensor performance. Power input is 24 VDC nominal @ 0.5 amps with a filament choice of tungsten or thoria-coated iridium. Vacuum connection is either NW16 or NW25 KF flange. Electrical connection uses a 15-pin D-subminiature connector. The power supply/signal breakout box may be ordered separately. Varian, Inc., NorthAmerica Vacuum Technologies Lexington, MA www.varianinc.com Contact: Walter Stevenson Palmer (Steve), Manager, Marketing and Merchandising, North America Vacuum Technologies Tel: 1-781-860-5426 E-mail:  steve.palmer@varianinc.com