|
Chillers/Cryogenics Systems and Heaters for Vacuum Processing Applications
Compiled by Terrence Thompson, Contributing Editor
This product showcase describes heaters, chillers and other cryogenic/thermal control products/systems used with vacuum processing, pumps/systems and instrumentation for a wide variety of vacuum-centric process applications.
Vacuum process manufacturing operations need more than just the specified pressure, they typically need precise heating and/or cooling to meet production requirements. Having the precise process temperature in the vacuum chamber and the lines feeding the process may be the difference between high yields or an overflowing rejects bin.
Temperature control is achieved by heating and/or cooling process consumables, the vacuum chamber itself, work surfaces, or supply lines to the process. Preferably, once a determined temperature is established, automatic temperature control is maintained. Temperature control systems are typically used to maintain wafer temperature setpoints in sputtering and plasma etch applications for real-time, dynamic, independent temperature control of the cathode, anode and/or chamber walls.
Proper maintenance is key to trouble-free operation. Therefore, it is important that equipment owners maintain their heater and chiller systems per manufacturer's specifications.
Cryogenic Society of America
The Cryogenic Society of America companies make up a varied cross-section of the cryogenic industry. The CSA is a non-profit technical society serving all those interested in any phase of cryogenics. For specific information about CSA, visit.
Product Descriptions
In the following product descriptions, vendors make distinctions to focus on specific intended applications, therefore, direct comparisons may be difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements. Product descriptions are based upon information provide to Vacuum Technology & Coating magazine and verified on their websites.
Pump Line Jacket Heaters, 120 and 208 VAC
A&N Corp. pump line jacket heaters provide uniform  heating to all pump line components (including flanges, fittings, valves, and tubing) resulting in increased process yields and a reduction in unscheduled downtime. Components include: bellows, clamps, elbows, and tees. Raw fitting sections include: straight tubes and conical reducers. A&N heater jackets come standard in 120 or 208 VAC input power configurations and have a maximum operating temperature of 200°C (392°F). Gas and Pump Line Heaters are available with Pump Line Jacket Heaters, 120 VAC; Bellows Sections; Clamp Sections; Conical Reducer Sections; Elbow Sections, 45°; Elbow Sections, 45°, with Tangent; Elbow Sections, 90°; Elbow Sections, 90°, w/ Tangent; Straight Tube Sections; Straight Tube Sections, Trimmable; and Tee Sections.
A&N Corporation
Williston, FL
www.ancorp.com
Contact: Paul Donovan, Vice President, Sales & Marketing
Tel: 1-352-528-4100, Toll Free 1-800-352-6431
E-mail: pdonovan@ancorp.com
ATC Family of Recirculating Chillers
Applied Thermal Control Ltd. (ATC), manufactures recirculating  chillers and heat exchangers for cooling instrumentation, e.g., analytical instruments, electron microscopes, semiconductor process tools, lasers, e-beam and magnetron deposition systems, ion-beam etchers, high vacuum plant, UV, X-ray and plasma sources, etc.ATC works with a broad range of equipment manufacturers to provide optimized thermal control systems for their products. ATC offers chillers designed to optimize performance and reliability. ATC recirculating chillers cover a range of cooling capacities from 500 W to 9 kW. All chillers have reliability, compactness, versatility and accuracy built in. A wide range of optional accessories and voltage variants ensure that the requirements of the application are met with minimal effort.
Applied Thermal Control Ltd.
Whitwick, Leicestershire, UK
Tel: +44 (0) 1530 83 99 98
CryoPlex™ Cryogenic Vacuum Pump Systems
Austin Scientific, an Oxford Instruments company, has  complete cryogenic vacuum pump solutions with options for full regeneration management and control. CryoPlex Cryogenic Vacuum Pumps are available in 8-, 10- and 16-inch models with standard flange options. The latest helium scroll technology is available in our M400 & M600 compressors, significantly increasing planned life with only standard preventative maintenance required. Complete regeneration management is available in the rack mounted M2200 Regeneration Controller providing complete cold-to-cold cryogenic regeneration management, independent or fully integrated to your system. In addition to our 2200 Regeneration Controller, temperature monitors with active feedback allow users the flexibility to manage regeneration manually or integrated into the larger chamber management systems. Oxford Instruments is a global supplier of high technology tools and systems for research, industrial and semiconductor customers. Austin Scientific specializes in Cryogenic Vacuum and Cryogenic Coldheads with 25 years of experience backed by the world wide expertise of Oxford Instruments’ 60 years of delivering customer focused solutions. www.oxinstdirect.com/austindirect
M400 Helium Compressor
The Oxford Instruments’ Austin Scientific M Series Helium Compressors  available as either Air or Water-cooled in high or low voltage versions with CE certification. This compact rack mountable compressor is available with standard cryopump drive circuit compatible with CTI CryoTorr™ pumps and standard ½" Aeroquip connectors for plug and play simplicity. OnBoard™ compatible drive circuits are available. The M600 is for 60 SCFM powering either four 8", two 10" or one 16" cryopumps. The M400 is for 40 SCFM powering either two 8" or one 10" cryopumps. Helium compressors are at the heart of the cryogenic pumping system, and provide ultra-high purity helium to single or multiple pumps. Based on proven helium scroll compressor technology the M600/M400 helium compressors are highly robust with an anticipated life between major overhauls of 8+ years. www.oxinstdirect.com/austindirect
E500 Dual Channel Remote Cryogenic Temperature Controller
The Oxford Instruments’Austin Scientific E500 provides active  temperature feedback and hi/lo temperature driven set point triggers. The E500 is a usable interface for those users and system designers managing their regeneration manually or through a PLC. Available with options from $900 - $1,500, you can monitor two channels for the cost of one. Visual and remote temperature monitoring for two cryogenic temperature sensors or one dual diode cold head or cryopump with temperature outputs available as either analog (0 to 10 VDC) or RS232. Select from the most common Austin, CTI or Lakeshore diode curves or input a custom curve with 0.1K resolution. Two user programmable hi/low set points per channel trigger dry contacts for control and monitoring. Each dry contact provides a normally open, normally closed and common contact to control external equipment or relays. Temperature performance to set points are displayed visually on the front panel as both LCD status and LED color in addition to status via the RS232. Compact design with bright LCD display, universal power input with solid state electronics available as either desktop or rack mount configuration (2U × ½ 19" rack). www.oxinstdirect.com/austindirect
E350 Single Channel Visual Cryogenic Temperature Controller
The Oxford Instruments’ Austin Scientific E350 is a  compact desk top temperature display for monitoring cryogenic temperatures, configured to read the most common diode temperature curves: Austin Scientific (ASC) Diode; CTI Cryogenics Diode; DT-470 Silicon Diode; or DT-670 Silicon Diode. Visual temperature monitoring to 0.1K resolution with standard hi/lo set point indicators. Select from the most common Austin, CTI or Lakeshore diode curves. Temperature performance to set points is displayed visually on the front panel as both an LCD status and LED color. Compact design with bright LCD display, universal power input with solid state electronics available as desktop standard 2U × 1 /3 19" rack size.
Austin Scientific
Austin, TX
www.oxinstdirect.com/austindirect
T: 1-512-44-6893
E-mail: cryo-sales@oxinst.com
Long Shaft Cryogenic Pumps
Barber-Nichols, Inc. (BNI) has designed and manufactured  cryogenic pumps since 1974. Long Shaft Cryogenic Pumps separate the impeller (cold end) from the motor (warm end) with a long, thinwalled shaft. This shaft minimizes heat leaking from the motor and atmosphere into the cryogenic fluid. Long Shaft Cryogenic Pumps can either be bolted or welded to a variety of Dewars and cryostats. Additionally, they are well suited for use with extremely cold cryogens (i.e. helium and hydrogen). BNI's cryogenic pumps provide quiet, reliable performance at low NPSH and nearly all utilize a hermetic design to eliminate shaft seals and cryogen leakage. Special features include: hermetically sealed equipment that is necessary for hard vacuum operating conditions; dry lubricated and low vapor pressure grease packed bearings that will not contaminate process fluids; and Variable Frequency Drives (VFD) that optimize pump efficiency and allow it to operate across a wide range of conditions. Some typical applications for these pumps include the circulation of: liquid nitrogen for the cooling of high temperature superconducting cables; liquid and supercritical helium for the cooling of super- conducting magnets; and liquid nitrogen for the cooling of synchrotron beam line crystals.
Barber-Nichols Inc.
Arvada, CO
Tel: 1-303-421-8111
Qdrive Acoustic Coolers
CFIC Qdrive offers a full range of  cryo-condensers for coldtrapping service and gas condensation, including the 2s241K shown here. All Qdrive coolers use the acoustic Stirling cycle. These robust, near-silent condensers provide cooling to below 50 K, with capacities from a few watts to hundreds of watts at 77K rating temperature. Zero Scheduled Maintenance is achieved by no cold moving parts and no oil anywhere. Operation is by a single on/off switch, with multiple process safeties built in. The Qdrive model 2s241K-LXDE shown here can condense up to 1.5 liquid liter per hour of oxygen, or operate at low gas flow to as low as 45 K. This mobile unit operates from 220 VAC, 3-phase, drawing less than 5 kW. Custom packages and interfaces are available. CFIC-Qdrive is currently offering the 2s241K with 200 W capacity at 77 K in close-coupled form. A FAR (remote coldhead) option will be offered soon. The 2s102K is rated at 8 to 10 W @ 77 K; the 2s132K is rated 25 W @ 77 K; and the 2s241K is rated 200 W @ 77K.
Qdrive™ Resonant Acoustic Cryocoolers
CFIC develops sealed and non-lubricated, wear-free,  regenerative energy conversion systems. The Qdrive™ resonant acoustic cryocoolers, with STAR™ linear motor drives in five frame sizes, have rated cooling capacities from a few watts to over a kilowatt (77 K nominal) from inputs of 200 to 20,000 W. Customizable standard designs at all sizes are available from CFICQdrive for motors, acoustic drives and complete cooler-liquefiers. Most multi-unit OEM orders for machines over 1kW rated input can also be sourced directly from their alliance partner, Praxair. Applications include liquefaction of process gas, natural gas and air components (for medical use), as well as low-maintenance cooling for signal and power electronics, including high-temperature superconductors. CFIC conducts ongoing development of these products and related systems for customers that have included HTS companies, major international refrigeration manufacturers, NASA, DOE, DOD, U.S. national laboratories and university researchers around the world.
CFIC Inc.
Troy, NY
Tel: 1-518-272-3565
1000 K Cryocooler Interface (patent pending)
ColdEdge Technologies provides < 2 K to 1000 K temperature  range cryostats for materials research, spectroscopy, superconductor studies, UHV, device testing, astronomy, cryogenic detector cooling, magnetic properties, chemistry, bio, electrical experiments and many other applications. Liquid Helium free closed cycle systems with sample in vacuum or cold vapor available. Interface customization are our specialty. Cryocoolers bottom out temperature to 1000 K. Wide sample temperature range testing without having to disturb sample by moving it to another heating source is advantageous. The robust design mounts on the cooler’s cold tip and will not be damaged during typical sample change activities. Many standard mount configurations available - customization is available to fit your cold tip and/or sample holder mount configuration. It can be used with many different closed and open cycle cryocooler. High temperature instrumentation and temperature controllers are also available.
ColdEdge Technologies Inc.
Allentown, PA 18103
Tel: 1-610-628-6363
Cold Box
Cryo Technologies is a worldwide supplier of  custom engineered cryogenic process equipment including large cold boxes, with a focus on helium systems. Products include cryogenic helium extraction systems for producing crude helium from pipeline natural gas, cryogenic purifiers for producing pure helium from crude helium, helium refrigerators and liquefiers covering a full range of sizes and applications, nitrogen liquefiers, cryogenic and non-cryogenic gas purification and recycle systems for all gases, and low heat leak vacuum insulated piping and distribution systems. Cryo Technologies’ staff has extensive experience designing and supplying custom engineered cryogenic helium systems to the gas industry and scientific community.
Cryo Technologies
Allentown, PA
Tel: 1-610-530-7288
Cryorefrigerators (Cryocoolers)
Cryomech, Inc. manufactures single and two  stage cryorefrigerators based on both the Pulse Tube and the Gifford-McMahon Cycles. This provides low temperatures to < 2.7K and capacities as high as >300 W at 77K. Also available is a closedcycle dilution refrigerator offering 0.050 K. Pulse Tube Cryorefrigerators (PTR) come in single and two stage models. All PTRs reach cryogenic temperatures without the displacers that cause vibrations. This reduction of the cold moving parts increases the mean time between maintenance, while decreasing noise and vibration. The PT405, a two stage PTR, obtains a low temperature of < 2.7K, in both 50 and 60 Hz power versions. We also offer the PT805 which cools to < 8K. The PT60 is a single stage PTR which cools to < 30K, has 60 watts of capacity at 77K for an input power of 3 kW. Cryomech’s Gifford-McMahon Cycle Cryorefrigerators come in single or two stage models. The single stage G-M’s, the AL Series, reach a low temperature of either 10K or 25K in 20 minutes and are maximized for price and capacity from 10-80K. The two stage G-M’s, the GB Series, cool down to 6.5K on the second stage with the first stage supplying cooling from 40-80K. When cooling devices to below 20K with the second stage a GB Series Cryorefrigerator, the first stage supplies the power to intercept heat at a higher temperature, therefore shielding the second stage from unnecessary heat.
Cryomech, Inc.
Syracuse, NY
Tel: 1-315-455-2555
C5000 Liquid Helium Cryogenic Valves
DLH Industries Inc. CryoComp’s cryogenic  valves are available in ½-inch tube and in 1 /2-inch tube and 1-inch tube pipe size weld ends. The valves are also available in different body configurations as well as manual and actuated configurations. The model C1041-M1 is a 1 /2-inch tube O.D. tube size cryogenic valve for manual operation with a vacuum jacketed globe style body.
DLH Industries Inc.
San Luis Obispo, CA
Tel: 1-805-781-3565
Integrated Cryo Chamber Treatment
Integrated Cryogenic Systems Inc. is a deep cryogenic treatment  company which provides deep-cycle cryogenic material tempering to -300°F. It is affiliated with Integrated Metallurgical Services Ltd., specializing in post weld heat treatment. The company uses a deep cryogenic treating chamber, interior dimensions 96 inches L × 36 inches W × 36 inches D with multi point N2 injection, stainless steel constructed, capable of maximum load mass of 10,000 lb. The cryogenic processing control is a PC-based OPTO 22 system with a PID ramp cycle control, ± 0.25°F/min., multiple thermocouple data acquisition and auxiliary instrumentation penetrations for resistivity, conductivity and optical pyrometry instrumentation.
Integrated Cryogenic Systems Inc.
Calgary, Alberta, Canada
Tel: 1-403-279-2666
4 K Closed Cycle Refrigerator with Two-Axis Optical Alignment
Janis Research Company announced rotation and positioning  stages for our 4 K closed cycle sample in vacuum cryostat systems. Rotation about the cryostat access has •0.5° resolution and a range of ±360° about the cryostat axis and rotation is only limited by the helium flexlines and electrical cables. Rotation off the cryostat access has a resolution of < 0.2° and a full range of ±90° of motion. The system comes with four radiation shield windows and reaches a sample base temperature of •4K. This system is ideal when fine optical alignment is required for experimental samples. Click on the photos below for a larger view. Janis combines over 40 years of manufacturing experience with extensive engineering capabilities to provide cryogenic systems for all research applications. Application specific products include cryostats for optical microscopy, FTIR, and Mössbauer spectroscopy, continuous flow and Helium-3 cryostats, 4 K and 10 K closed-cycle refrigerators, dilution refrigerators, superconducting magnet systems, and micromanipulated probe stations.
Janis Research Co. Inc.
Wilmington, MA
Tel: 1-978-657-8750
UHV Heater Modules
In addition to the complete sample heating solutions  offered within the EpiCentre product family, Lesker has a range of individual heater modules for end users to incorporate within their own heater stage designs. The range provides end users with a cost-effective solution to sample heating, while benefiting from a proven heater technology. The heater module product range is available for sample sizes from 25mm OD to 300mm OD with two different element materials. Heating elements are constructed from high quality, high-density graphite, coated with pyrolytic graphite or pyrolytic boron nitride. By virtue of the exceptional thermal coupling of the heat to the substrate and the large radiating surface area (an effect of the high element surface to gap ratio), these elements run at considerably lower temperatures than conventional metal heaters. The typical ratio of element surface to meander gap is 5:1 resulting in excellent substrate heating uniformity, even without rotation. These heater modules are used in vacuum applications for radiantly heating semiconductor wafers, holder supported samples or various other substrates to high temperatures. The modules have CVD processed heating elements packaged in refractory metal cases. The immediate hot zone holding the element is constructed from refractory metals such as molybdenum and tantalum and does not include any ceramics or other materials to compromise performance at high temperature. These modules are therefore particularly suitable for ultra high vacuum applications. The heater modules provide: High uniformity heating to 1000°C (1200°C for certain applications) and a refractory metal hot zone. Heater modules are available with type ‘C’or ‘K’ thermocouples and can be supplied with semiconductor grade ‘quartz guards’ to protect the heater element. There are high performance Pg or PBN coated graphite elements and a quartz guard option for element protection. www.lesker.com
Heater Tape
The Lesker Tape Heaters are metal resistance filaments woven into a  flexible glass fiber ‘tape’ that can be wound around ports, tubes, and parts of a chamber. Duo-Tape® heaters have a unique dual ‘sine-wave’ element — convenient since, unlike other tape heaters, both power leads emerge from one end of the tape. The 2-foot power leads are multi stranded ‘A’ nickel covered with two layers of AMOX® yarn and impregnated with a high temperature binder. The element is multi stranded resistance wire (35 to 40 standard wire gauge) covered with a minimum of two layers of braided AMOX yarn. The tape’s heavy braided outer cover provides good abrasion resistance and insulation for the elements. Duo-Tapes may be wrapped around conducting metal tubes or glass/ceramic surfaces. The tapes have a maximum temperature of 760ºC and maximum power density of 8.67 W/in2 . Since this temperature exceeds those used in normal bakeout, we suggest the tape heater be connected to a power outlet via a Variac or other variable transformers. Close winding (side-by-side turns) is not often physically possible over the whole chamber. In addition tapes must not be overlapped. Obtaining a uniform chamber temperature is, therefore, rarely possible with tape heaters. However, as local area heaters — particularly for ports attached to an internally heated chamber — tape heaters are convenient, inexpensive, and easily installed. www.lesker.com
Stab-In Heaters
The Lesker Stab-In (also known as Insertion) bakeout heaters  are mounted on 2.75-inch OD ConFlat flanges and work as outgassing units for stainless steel chambers. They heat a vacuum system efficiently from the inside, a method which produces a faster heating response than that produced by external heaters, resulting in a low heating effect outside the chamber. The bulb and thermocouple extend into the chamber about 5- 1 /8 inches. The bulb produces 1000W of power and is available in both 115V or 220V versions. The atmosphere side connection is made via a Mil-Spec connector. www.lesker.com
Quartz Lamp Heaters
The Lesker Quartz Lamp Heaters act as both bakeout heaters and  sample heaters. Able to operate safely in an oxygen backfill, they mount inside a vacuum chamber to raise the temperature of substrates. Because they produce both infrared radiation and ultraviolet light, they clean nearly all molecules adhering to the substrate’s surface through electron excitation and molecular vibration. Used in place of blanket heaters or panel ovens, lamp heaters save both time and power since the heat radiates directly to the critical surfaces. Lesker offers single lamp assemblies, approximately 4 inches in length, each using a 500W lamp mounted in an electro-polished stainless steel ‘V’ reflector with a high-temperature, fabric-covered power cable. The 500W quartz lamp’s ‘color temperature’ is 3000K, with its maximum energy emission at a wavelength of •900nm. Arrays of multiple lamps are also available in triangular and other configurations. Power supplies up to 4 kW are available. The average lamp life is 2000 hours. www.lesker.com
Button Heaters
The Lesker Button heaters work as thermionic  cathodes to deliver temperatures of up to 1,200ºC to samples in UHV conditions. For non-specific and quick turnaround applications, we offer a simple package design consisting of an all molybdenum can with a resistive heater ‘potted’ into it. For cathode applications, a porous tungsten matrix, making up the top, holds the oxides that allow thermionic emission. Some applications benefit from thin molybdenum or molyrhenium sleeves into which the button heater fits. The sleeves provide thermal isolation as well as thermal shielding. Sleeves of any length with or without holes and/or slots are available. When the application demands, Lesker can mount sleeves onto base flanges including mounting holes or weld flanges. Also offered is a cathode, called a spiral heater, for ion lasers. Available in any size, number of turns and leg configuration, spiral heaters offer high-emission currents at a low cost where beam focusing is not critical. www.lesker.com
Epicentre Heater Stages
The Lesker EpiCentre is a combined wafer  heater and rotational stage designed for critical thin film deposition, wafer processing, substrate modification, surface science and MBE processes. The modular construction lets the user combine exactly the components to match the desired requirements for: substrate rotation, automatic substrate removal, axial positioning of the substrate, and substrate temperature. EpiCentres, bakeable to 250ºC, can accept substrate biasing. Their minimum outgassing qualities make them compatible for UHV, high vacuum and reactive gas environments. The standard heater element for each EpiCentre is made from pyrolytic graphite (pyrolytic silicon carbide, or pyrolytic boron-nitride coated graphite available on request). It has a meander design with slotted resistive material (along chords of a circle) to give a long, uniform cross-section track. This efficient, black-bodied heater rests in a refractory metal reflector assembly giving consistent high-temperature heating with exceptional temperature uniformity across the wafer or substrate. The excellent thermal coupling between the heater element and the wafer, positioned close to the element surface in its support cradle, allows the element to run at considerably lower surface temperatures than a metal heater while able to raise the wafer temperature to 1,200ºC. The refractory metal enclosure and insulator-free mounting of the heater module make this design exceptionally clean with little particle generation. Heater modules of various sizes accommodate diameters from 25mm to 300mm.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contacts: Steve Cheesman or Mark Mattis
E-mail: Sales@lesker.com
Tel: 1-412-387-9200 or 1-800-245-1656
NesLab® M-75 Recirculating Chillers
Lake Shore Cryotronics offers the NesLab® M-75 (Lake Shore Model RC-EM4) and M-150 (Lake Shore Model RCEM7) recirculating chillers in order to provide a complete laboratory solution. The NesLab chillers feature a CDC-free refrigeration system. The refrigeration system utilizes a hermetically sealed compressor and hot gas bypass system of temperature control. This system eliminates on/off cycling and premature wear of the compressor. Strong pumps provide continuous flow even through cooling lines with small IDs. FC-free refrigeration system
Sealable fluid reservoir allows for circulation to an open tank A fully hermetic compressor provides trouble-free, long life performance Specifically designed for 24 hour, continuous duty circulation Compact design minimizes use of limited floor space
Lake Shore Cryotronics Inc.
Westerfield, OH
Tel: 1-614-891-2244
HPS Series 48 Heaters
The MKS Instruments HPS Products’ Series 46 heaters offer tighter  temperature control, enabled by a microprocessorcontrolled thermocouple. Reliability of the heater control system is improved by a no-arc relay circuit with an improved design of thermal fuse, eliminating failures that could be caused by transient thermal spikes. Enhanced heater safety means the outside temperature of heater (45-65°C), is safe to touch. The heaters are UL listed and CE tested and marked for both electrical and thermal safety and passes the SEMI S9-95 strain relief test of 35 pounds. Greater thermal performance results in reduced power consumption and improved temperature uniformity while preventing cold zones. The patented design retains heat and improves thermal safety. The heaters may be used in forelines or exhaust lines. LEDs are sued on the local controller to confirm that heater is operating properly. A low temperature alert (LTA) option provides remote warning when heater is cold. The series 46 heater jackets are for stainless steel tubing. The heater design provides improved temperature control and uniformity. The preset temperature setpoint is microprocessor controlled through an integral electronic controller within the power cord. This new control method allows users to heat longer sections of tubing with fewer heaters. www.mksinst.com
HPS Series 48 Heaters
The MKS Instruments-HPS Products’ Series 48 heaters are  designed for safety, flexibility, power conservation, and advanced communications. The new design provides greater temperature control, improved thermal uniformity, increased performance, and further decreases system downtime. The heaters are UL listed and CE marked for thermal and electrical safety. The heaters’molded shapes conform to the tubing, minimizing gaps and subsequent heat loss. Using a patented process, silicone foam insulation is bonded to the outside of a reinforced silicone heater mat, resulting in external temperatures that are safe for human contact and meet OSHA safety requirements. The Series 48 heaters feature an Integrated Temperature Controller that provides unsurpassed thermal control. The controller has three optional plug and play display and communications modules that provide a user-friendly interface for adjusting control parameters. The controller features two microprocessor controlled relays, a safety relay for over-temperature protection and a no-arc relay for power switching. The high-limit safety circuitry eliminates the need for a thermal fuse, thereby eliminating the need for heater replacement due to a single over-temperature event. This significantly reduces downtime potential and the need to stock replacement heaters.
MKS Instruments, Inc.
Andover, MA
www.mksinst.com
Contact: MKS HPS Applications Engineering
Tel: 1-800-227-8766 (USA) or 1-978-645-5500 (worldwide)
E-mail: mks@mksinst.com
Cryostats and Cryo Chambers
MTM provides cryogenic equipment in support of basic  energy research, high-energy physics and nuclear physics facilities that explore the fundamentals of matter. MTM also provides cryogenic equipment to OEM’s for industrial applications. Cryogenic products include custom cryogenic systems, cryostats, custom Dewars, helium refrigerator/liquefier equipment, coil wound and custom heat exchangers and cryogenic transfer lines. Custom designed to a performance specification or build-to-print, MTM will provide the cryogenic products to meet or exceed your needs. Products include custom cryostats and cryogenic storage Dewar’s, cold box fabrication, coil wound heat exchangers, vacuum chambers for all applications, including UHV, ASME pressure vessels, precision machining of parts and welded assemblies, as well as custom fabrication applications, and abrasive water jet cutting services.
Meyer Tool & Manufacturing, Inc.
Oak Lawn, IL
Tel: 1-708-425-9080
Models 3300 and 3500 Point-of-Use (POU) Thermoelectric Temperature Control for Plasma Etch Chiller
Two important considerations for selecting temperature control systems for  plasma etch are the ability to  respond to changes in wafer chuck temperatures in real time and low cost of ownership. Dynamic temperature control lets etch engineers control the temperature of the process fluid to the wafer chuck at a level of •0.1º C, which is essential at < 130 nm technology nodes. The ability to synchronize the process chamber cathode/ electrode/anode temperature in real time without temperature drift is essential to reducing first wafer effects and improving lotto lot CD uniformity. Noah Precision pioneered the first dynamic temperature control chillers by integrating thermoelectric devices into point-of-use chillers. The chillers have been qualified on Lam Research, TEL and Applied Materials etch tools giving Noah one of the largest installed base of chillers for semiconductor applications, incorporating thermoelectric devices. The POU 3300 (-15°C to 90°C) and POU 3500 (-20°C to 90°C) are available dynamic temperature control chillers. The Noah POU system achieves savings in power consumption, perfluorinated fluid usage, preventive maintenance and space. Other advantages include advanced temperature control features for direct chuck control and programmable temperature control that provides real-time temperature control without temperature drift and improves wafer-to-wafer and lot-to-lot CD bias uniformity. Reliable operation improves tool uptime and reduces productivity losses due to unscheduled down time and power consumption is reduced by up to 80% versus refrigerant chillers. It has smallest footprint in the industry enables sub-floor tile mount capability; multi-platform interfacing capability and uses only one gallon of perfluorinated coolant is required per loop.
Noah Precision, LLC
Vancouver, WA
Tel: 1-360-993-1395
Cryo Cooler To Cool Ge Detectors
Ricor Cryogenic & Vacuum Systems’ cryogenic product is specifically  designed for the application of Ge detector cooling in the homeland security market place. It uses the K535 Stirling Cryo Cooler derivative, specifically designed for harsh stationary outdoors operating condition. As countries awareness of the problem of illegal nuclear material trafficking is increasing, the need for a reliable “bullet proof” system is clear. Out of the available detection technologies, Ge detectors can detect nuclear material precisely, whether it is hidden or masked behind adsorbing materials. These detectors, in order to distinguish between the signal to noise (small band gap) need to be cooled to cryogenic temperature. The requirement for operation in outdoor condition dictates the utilization of long life and powerful cooler. Ricor K-535, being small compact and efficient, is targeted at this application. The cooler is available with cooling water or fans and fins that allow flexible system design. In a separate project targeting the exact same market, Ricor has utilized its rotary high power Stirling cooler, for nuclear material hand held detector. This type of detector, while maintaining the preciseness of the stationary unit, is compact and light and designed to be hand carried.
RICOR - Cryogenic & Vacuum Systems
En Harod Ihud, Israel
Tel: 972-4-6530800
ThermoCube 300 or 400-Watt Thermoelectric Recirculating Chiller
Solid State Cooling Systems’ ThermoCube 300 or 400-Watt thermoelectric  recirculating chillers are a compact 1 ft3 and can run at a whisper-quiet 49 dBA. Because electrons transfer heat, the ThermoCube responds instantaneously to changes in load. The digital PID temperature controller holds to ±0.05°C, even near ambient. ThermoCube is also energy-efficient, as it was designed to operate in the most energy-efficient range of the core thermoelectric modules. The variable voltage power supply only provides as much power to the modules as is required to meet a setpoint, so ThermoCube only draws as much power as needed. When equipped with the optional smooth-flow gear or centrifugal pumps, it is also virtually vibration-free. The ThermoCube chiller is used for cooling analytical and laboratory equipment, small condensers, mobile equipment, electron microscopes, and lasers. The ThermoCube will maintain • 0°C oil trap temperatures eliminating the need for liquid nitrogen cold traps for a variety of vacuum applications. Solid State Cooling Systems designs and manufactures compact, reliable, energy-saving temperature-control systems. The key product area is thermoelectric temperature control systems, including chillers and heat exchangers. Also available are patented cold plates and power supplies optimized to power the thermoelectric products.
Solid State Cooling Systems
Pleasant Valley, NY
Tel: 1-845-635-5500
Brayton-Cycle Cryocoolers
Technology Applications, Inc. (TAI) specializes in advanced  technology development of cryogenic and thermal management systems for DOD/NASA agencies, aerospace prime contractors, and commercial firms. Expertise and specialty products include cryocooler integration and interfaces involving vibration isolation, remote (distributed) cooling, high-conductance thermal straps; thermal management of electronic components and enclosures; lightweight insulation systems and highperformance Dewars; and vapor compression cycle refrigeration. TAI offers unique capabilities for prototype development and custom manufacturing. Currently, the company is developing products in the areas of microsphere insulation, thermal acoustic panels, gas liquefaction systems, and portable hydration cooler units.
TAI
Boulder, CO
Tel: 1-303-443-2262 Ext. 118
Single and Multi-Channel Cooling Systems
Tek-Temp Instruments’ recirculating chillers are quality products in the heat  transfer equipment field. The first models, the MM-1500 and MM-2500, were readily accepted as world-class recirculating chillers. Tek-Temp Inc. makes precision temperature control liquid chillers, water chillers and heating/cooling systems. Equipment manufacturing abilities include chillers for medical cooling, semiconductor coolers, process fluid, precision liquid cooling, recirculating air cooling, production coolers/chillers and industrial process systems. Additionally Tek-Temp manufactures laser chillers, fiber chillers, and optic refrigerated chillers. Tek-Temp specializes in heat exchangers, precision coolers, precision chillers, TCU, computerized advanced temperature control, heat exchangers, prototypes and OEM applications. Tek-Temp handles heating and cooling for medical, industrial, multi loop, independent and control, channel fab, plus; clean room, equipment, RS-232, GPIB, Plasma Etch, CVD, PVD, air, cooled, water, evaporator, condenser type exchangers and devices.
Tek-Temp Instruments, Inc.
Croydon, PA
Tel: 1-215-788-5528
Marathon® CP Series Cryopumps
Marathon® CP Series Cryopumps  from SHI Cryogenics Group are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools. Manufacturers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and a wide variety of coating and thermal vacuum systems appreciate the efficiency, reliability and robustness of Marathon CP Cryopumps. A variety of standard and low profile enclosures, ANSI, ISO and CF flanges, as well as manual and fully automatic features, ensure that users have modularity and flexibility when designing their systems. The full line ranges from 8 in. (200 mm) to 20 in. (500 mm). All cryopumps are driven by highly-efficient and reliable helium compressors, which boast an industry leading 30,000 hour maintenance interval. In addition, the optional Marathon Cryopump Controller enables fully automatic operation of the cryopump. The result is greatly reduced downtime between production cycles, improved process times and better overall efficiency of the user’s process. All Marathon CP Series Cryopumps are supported by a worldwide sales and support network. They can be readily maintained without breaking vacuum or removing the cryopump from the chamber for return or replacement. As a result, serviceability maximizes production uptime and lowers the total cost of ownership.
Sumitomo (SHI) Cryogenics of America, Inc.
Allentown, PA
www.shicryogenics.com
Tel: +1 610-791-6700
E-mail: sales@shicryogenics.com
Improved Water Vapor Cryotraps
Telemark Cryogenics supplies improved  water vapor cryotraps in capacities from 1000 to 3500 watts of heat load and 50,000 to 220,000 liters per second of vapor trapping. Fully digitized for easy integration into a broad range of system masters/controllers.A wide array of user adjustable controls are built in as standard. It is available in single and dual circuit models and CE mark options. CFC-free blends are used to comply with all international environmental standards. It has a smaller footprint and improved access and usability.
Telemark Cryogenics
Novato, CA
www.telemark.com
Tel: 1-415-883-1004
E-mail: sales@telemark.com
4K Cryo-cooler
Ulvac Technologies, Inc, has launched a new closed cycle, cryo-cooler that can replace the  need for liquid helium, for many laboratory samples and superconducting magnet cooling applications. This closedcycle system offers cooling powers of: 0.3W @ 4.2K on the 2nd stage, and 9W@65K on the 1st stage; while drawing only 1.7kW of mains power at 60Hz. Since 1981, ULVAC has been making highly reliable Gifford-McMahon, cryo-coolers for use in their cryo-pump product line. That wealth of experience has been leveraged to develop this hightly reliable, high performance UR4K03 4K cryo-cooler. This compact unit features excellent thermal stability, good refrigeration output power, and low input power consumption.
Ulvac Technologies, Inc.
Methuen, MA
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@ulvac.com
NEW PRODUCTS
MKS Announces Microvision 2, e-Vision 2 series of RGAs
Highly flexible, web-enabled RGAs with improved stability, accuracy and speed
Andover, MA … MKS Instruments, Inc., a global provider of technologies that enable advanced processes and improve productivity, has introduced Microvision 2 and e-Vision 2, web-enabled residual gas analyzers (RGA) for greater stability and reliability in e-diagnostic, process monitoring and general vacuum trouble-shooting applications. The enhanced technology allows for web-based access to faster data acquisition with a wider dynamic range of measurement.
Microvision 2 and e-Vision 2 build on the strong performance and reputation of the Microvision Plus, e-Vision and Vision 1000 product lines. The enhanced electronics platform uses robust proprietary technology for data acquisition, and has industry standard technology for communication and control, providing for increased flexibility in process applications. These systems capture a greater number of process excursions due to improved I/O capacities, higher data quality and enhanced speed and accuracy. This in turn enables more accurate alarm decisions with fewer false positives. Ethernet connectivity enables users to access the data from anywhere on the TCP-IP network, providing a more cost-effective, flexible and functional solution to wide-scale multi-RGA installations.
Microvision 2 and e-Vision 2 are available for new or established installs alongside other instruments in the MKS range of process RGAs and gauges. The RGAs are available with a range of software control systems, from the built-in web application, through the flexible, recipe driven Process Eye Professional, to the process tool compatible, fully integrated TOOLweb RGA — all backed by reliable MKS service and application support.
MKS Instruments, Inc.
www.mksinst.com
| |
Vacuum Technology & Coating