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Leak Detectors
Compiled by Terrence Thompson, Contributing Editor
This Vacuum Technology & Coating magazine product showcase roundup includes representative leak detectors and calibrated leaks from leading manufacturers that are used in a wide variety of vacuum-related process applications.
Absolutely airtight vacuum process equipment is virtually impossible. The pragmatic goal is making certain that the leak rate is comparatively small and that it does not hinder the required working pressure, neither on the confined gas contents nor in the receptacle final pressure. It then can be stated that the airtightness condition of the equipment must be the minimum necessary required by the established work pressure. The leak rate is the amount of gas that flows into a vacuum system.
Choosing The Right Leak Detector
The leak detectors and calibrated leaks described here all have applications in appropriate markets. Prices vary, of course, since the intended application determines the configuration and features required and the cost to manufacture it as well as the selling price. Selecting a leak detector is more challenging than some might think.
Leak detectors are widely used including verifying implantable medical device integrity to make certain that implants are protected from bodily fluids while protecting patients from possible contamination from leaking batteries and other materials. The automobile industry uses helium leak detection for items such as air bag initiators, radiators and air conditioning units. The semiconductor industry uses many leak detectors for wafer fabrication process equipment.
Calibrated leaks are used to verify or calibrate leak detectors on a regular basis to assure accuracy.
Product Descriptions
In the following product descriptions, vendors make legitimate distinctions to focus on specific intended applications so direct comparisons may be difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
ASM 310 — The Featherweight Champ with the Performance of a Heavyweight Leak Detector
Weighing in at 46 pounds with a very small  foot print (less than 140 sq inches), the Adixen ASM 310 can be easily moved while in operation thanks to its unique low rotational speed hybrid turbo pump (ATH 31+). With huge compression ratios for nitrogen (1011) and for helium (2.107) the ATH31+ delivers high cross over (15 mbar) as well as fast helium recovery. This is crucial when leak testing large systems and being able to locate both large and small leaks. The extremely low base pressure (< 5E-10 mbar) at the analyzer cell guarantees a very low helium background. The combination of low base pressure and the yttrium coated iridium filament technology results in a very low maintenance requirement (3 years maintenance free analyzer cell). High sensitivity (5E-12 Atm.cc/sec) and high helium stability make the ASM 310 a solid maintenance tool that can be used with all different types of pumping systems, dry or wet, for any application. Due to its light weight, and universal voltage of 100 to 240 volts, 50 or 60 Hz, the ASM 310 can be easily transported and/or shipped worldwide (using the optional dedicated shipping container) without concern for shipping damage or voltage supply line issues at the destination. Thanks to its oil free and clean dry pumping system, the ASM 310 is the perfect choice for the leak test maintenance of dry systems that cannot tolerate any contamination (semiconductor process chambers, solar panel manufacturing process chamber, medical process chambers are just a few of numerous applications). Its Bluetooth compatibility for wireless remote control and its recording graph capabilities add to its flexibility and efficiency of use. A two-person job can now be performed by a single operator. The ASM 310 has a unique, very bright, large (3.5 × 4.5”) Color Touch Screen Panel Display (TFT technology) with over 1” tall helium signal display characters that can be seen over 50 feet away at any angle. Equipped with strong magnets, the display can be placed on a metal support freeing the operator’s hands. This unique display may be customized allowing technicians and operators to see only what they need to see for their specific tasks. Further, the ASM 310 offers 8 different languages allowing use just about anywhere in the world. Its voice synthesizer is a much-appreciated feature for user friendliness. It is password protected to prevent operators from tampering with the settings of the unit. New technologies mean that the ASM 310 does not require any maintenance for the first 10,000 hours offering a very low cost of ownership. This featherweight helium leak detector delivers performance is surprising. Fully loaded with unique features, rugged, powerful and requiring low maintenance. The ASM 310 works for your maintenance program. www.adixen-usa.com
EXTRIMA® Hydrogen Leak Detector for Hazardous Environments
The Adixen EXTRIMA® from Alcatel Vacuum Products, Inc. .  is an intrinsically safe leak detector. The equipment meets the ATEX directive for leak testing in explosive environments, such as aircraft fuel systems. The Extrima® is intended for leak detection with diluted hydrogen as trace gas in explosive environments, where the safety requirements are extremely high. The detector is intrinsically safe which means that it under no circumstances can ignite the explosive gas. Extrima has the European EEx ia IIC T4 classification equivalent to US Class 1, Div 1, groups A, B, C, D, which means that it meets the requirements for use in zone 0 according to the ATEX directive (ATmosphere EXplosible) of the European Commission. This detector can therefore be applied in the chemical and petrochemical industry as well as in the aviation and oil processing industries. A typical application is leak detection during maintenance of aircraft fuel systems. Since there is always some fuel left in the system, the equipment must meet specific requirements. Extrima quickly detects and locates the smallest possible fluid fuel leaks thereby ensuring 100% integrity of the test object. The Extrima has a unique Auto-Ranging function, which automatically tunes the instrument’s sensitivity for precise leak location. After a leak is located and the search for additional leaks continues, the sensitivity automatically readjusts to the highest level. With seven hours of continuous operation from rechargeable batteries and an IP67 waterproof rating, the Extrima meets all the requirements of the aviation, chemical, petrochemical and oil process industries for leak detection. www.adixen-usa.com
ASI 20 MD Modular Leak Detector
The Adixen ASI 20 MD from Alcatel Vacuum Products, Inc. is an industrial  leak detector with applications in automotive, refrigeration and air-conditioning, electrical, mechanical, packaging and food processing. It is easily integrated into any leak detection system, including hard vacuum and sniffing tests. The ASI 20 MD is composed of three separate modules for maximum flexibility of integration, all 19-inch rack compatible. This product has unique features such as high sensitivity (5 × 10-11 mbar.l/s) with an analyzer cell equipped with dual filaments and a patented electron multiplier amplification system; pure counterflow test mode with high cross over pressure (20 mbar) for faster gross leak detection; semi-counterflow test mode for better protection against helium build up inside the backing pump; high cross over pressure in fine leak mode (2 mbar) to eliminate effect of moisture on cycle time; fieldproven molecular drag pump with intermediate port and the low rotational speed (27,000 rpm) for higher reliability; autocalibration system with a built-in temperature compensated calibrated leak; advanced flat remote control panel with multiple displays (up to 150 meters away from the main unit); and mechanical design which permits multiple integration possibilities (multiposition bracket) to optimize accessibility and reduce the distance between the leak detector and the test point. www.adixen-usa.com
ASM 102S Portable, Dry, Versatile Sniffing Leak Detector
When sensitivity, stability, measuring range,  response time, and clean up time are required, the Adixen ASM 102S from Alcatel Vacuum Products, Inc. is the unit. The ASM 102S can now detect and easily pinpoint very small leaks, the ones that could not be seen before which impacted process applications. The ASM 102S is a dry leak detector for applications where the unit may have to be placed on its side, or at an angle, or carried around frequently. Applications include control and maintenance of any part or installation used under pressure (outboard testing); underground cables and tubes; valves and manifolds; underground or external storage tanks; reactors, heat exchangers, vapor generators; maintenance for air conditioning systems; leak testing tanks (wings and fuselage) after assembly; maintenance of airplanes: wings and fuselage; off shore test of gas installations; leak test liquid propane gas and oil tankers; test of gas line installations in semiconductor fabs and aeronautic and aerospace applications; and hydrogen gas supply lines. www.adixen-usa.com
ASM 142 Universal Leak Detector
The Adixen ASM 142 from Alcatel Vacuum Products, Inc. delivers  impressive features for an entry-level unit such as a roughing capacity of 10 m3/h (7 cfm) with a usable helium sensitivity in the 10-11 atm.cc/s range. In addition, its user-friendly flat panel display’s advanced features are available at your fingertips. Its versatility allows many creative possibilities: maintenance applications of complete systems such as vacuum furnaces (research and development, cryogenic, aerospace industry, industries which use vacuum process); production or quality control of components (instrumentation (sensors), mechanical industry (seals, valves, various small pieces); and outboard testing of pressurized parts (refrigeration, air-conditioning). The ASM 142 entry-level unit has a 10 m3/h (7 cfm) roughing pump capacity will deliver fast cycle time; a unique “floating” background suppression device will deliver and guarantee a sensitivity in the 10-11 atm.cc/sec range (vacuum mode) and in the 10-7 atm.cc/s range (sniffing mode). High helium pumping speed at the inlet port delivers fast response time in spraying mode. This unit allows simple operation in any conditions. It takes no more than a few a minutes for the user to get familiar with its operation. The ASM 142 has a simple operator interface with two distinct areas (one for the operator, the other for entering the parameters); dynamic bar graph; audio alarm with variable pitch; and vocal synthesizer. The ASM 142 is for heavy usage under very harsh industrial environments. It requires little maintenance and its internal layout allows easy access to all the components. The rotary vane pump is equipped with an oil change device to speed-up the process. www.adixen-usa.com
ASM 142D Dedicated Dry Unit, An Oil-Free Roughing Pump Package
The Adixen ASM 142D from Alcatel Vacuum Products, Inc. has all  the features and advantages of the ASM 142 with an improved oil-free roughing pump package. This 100% hydrocarbon-free leak detector not only guarantees cleanliness during the leak test of systems and components but also provides advantages like simplicity of use and maintenance. Alcatel uses the pump combination for the Drytel Series. The Adixen AMD1 Diaphragm pump and Molecular Drag pump from Alcatel guarantee a roughing system from 1 m3/h to 23 m3/h.The roughing pump package of the ASM 142D has 10,000 maintenance-free hours. The ASM 142D is engineered to meet service, maintenance and production tests. It meets the following requirements: semiconductor maintenance applications (process chambers, load-lock chambers, gas panels); R&D applications (particle accelerators and beam lines, cryogenic lines and vessels); quality control of equipment in the instrumentation sector; pharmaceutical and medical applications; and some dedicated industrial tests for small parts. The ASM 142D is a multi-purpose dry unit which has many possibilities (inboard and outboard methods) for systems or components to be leak tested. www.adixen-usa.com
ASM 182 & ASM 192 Series High Performance Leak Setectors
The powerful leak detectors for demanding applications are the  Adixen ASM 182 series and ASM 192 series from Alcatel Vacuum Products, Inc. They are unique helium leak detection concepts, delivering high performance in either compact or console versions. The ASM 182/192 series deliver a perfect combination of performance with unique features and userfriendliness: high sensitivity cell with dual filaments; and the latest electronic generation operator interface. The ASM 182/192 series provides flexible solutions to meet all your leak detection needs for a wide range of applications. It is easily integrated into a production line to leak test parts 24 hours a day. It can detecting leaks as small as 10-11 atm.cc/s range. Leak testing of volumes over 1,000 liters is possible without any auxiliary pumping system. Also, leak testing parts of various volumes with a stand alone leak detector is possible. It can pinpoint very small leaks in large installations and has the convenience of a work surface (ASM 192 series). Access to a powerful pumping package to pump down large chambers is made possible by the ASM 192 series. www.adixen-usa.com
ASM 182T, ASM192T and ASM 192T2 High Performance Conventional Leak Detectors
The Adixen ASM 182T, ASM192T and ASM 192T2 range of products from  Alcatel Vacuum Products Inc. are extremely flexible and easy to operate. They provide automatic operation throughout the range from atmospheric sniffer tests, test of long gas line or tubing, large gross leak mode and ultra sensitive vacuum fine leak mode. They can be used for the test of components, systems or complete installations. TheASM 182T,ASM192T and ASM 192T2 are high performance units that easily integrate into production lines with compactness (ASM 182T compact version) and versatility. The powerful roughing capacity (20 m3/h or 15 cfm to 40 m3/h or 30 cfm) has a fast cycle time. Compact version ASM 182T products are self-contained units, which can be installed on a cart for easier maneuverability. Console version ASM 192T/192T2 products are comfortable stainless steel workstations that has enhanced pumpdown capability. The ASM 182T, ASM192T and ASM 192T2 have all the advantages of the generation of Alcatel Helium Leak Detectors: a high-sensitivity analyzer cell with dual filaments; the latest electronic generation operator interface; and an auto zero function. www.adixen-usa.com
ASM 1002 Leak Detector for Production Environments
The Adixen ASM 1002 from Alcatel Vacuum Products, Inc. is an  appropriate standard leak detector for testing leaks in small components within a mass production environment. It delivers high performance for either sealed or open packages. First is the Sealed Packages Leak Test software program. The ASM 1002 achieves 1 × 10-9 mbar.l/s, leak testing sealed packages in less than 4 seconds (single or batch testing), which makes it the fastest unit of its category on the market. This unit is fully automated. As soon as the test chamber is closed, the cycle starts automatically. The powerful pumping package evacuates the test chamber and allows the unit to perform the leak tests fast and accurately. At the end of the test, the ASM 1002 will display a Pass/Fail (Green/Red indicators) response to the operator. For a good part, the test chamber will vent back to atmosphere and will open automatically, optimizing the operator time. For a leaking part, the Red (Fail) indicator will go off. The test chamber will remain under vacuum requesting the operator intervention to vent it back to atmosphere via a push button. This removes any interpretation out of the operator and guarantees the capture of all leaking parts. Secondly is the Open Packages Leak Test software program. This software will keep the unit in test mode as long as needed to allow the operator to perform the leak test. The operator will trigger the end of the test. The test chamber is easily removed and any fixture can then be installed to facilitate the leak test of any size hybrid circuits. www.adixen-usa.com
ASM Graph Series Multipurpose Helium Leak Detector
The Adixen ASM Graph Series from Alcatel Vacuum Products, Inc. has a  touch screen graphic display with colorful screens and graphs. Visualize and record the evolution of the helium signal, the inlet pressure and set points via color graphs. The touch panel permits quicker parameter settings, checking the pressure inside the mass spectrometer or following the status of the leak detector main components with the dynamic vacuum diagram. Features include basic and advanced modes; measurement functions; zoom functions; screen copy; dynamic vacuum diagram; recording capability; and an ASM downloader. Applications include maintenance applications of vacuum systems; research and development; cryogenic; aerospace industry; industries which use vacuum process; quality control of components; instrumentation (sensors); mechanical industry (seals, valves, various small pieces); outboard testing of pressurized parts (sniffing test mode); and refrigeration. www.adixen-usa.com
ASM 122D Portable Helium Leak Detector
To meet the increasing need for a portable leak detector with high helium  pumping speed and sensitivity at low pressure to efficiently detect leaks, Alcatel Vacuum Products, Inc. has the Adixen ASM 122D. This portable unit has reduced dimensions; high helium pumping speed (4 l/s); high air pumping speed at low pressure with a hybrid pump used as roughing pump; high sensitivity (5 × 10-12 mbar. l/s in helium according AVS 2.1 and ISO 3530); high inlet test pressure (up to 20 mbar); and high helium clean up capacities enabled by huge high vacuum pump helium compression ratios. The ASM 122D has an advanced userfriendly design with a specially designed cart mounted on large wheels. It includes an integrated power supply cable winder and a telescopic handle which can accommodate any operator height; remote control with a smart auto zero system and both bar graph and digital displays; comprehensive auto-start system including auto calibration, and an LCD display has clear messages to make this unit easy to use for everybody. The ASM 122 D is appropriate for portable dry leak detecting to meet any maintenance needs for clean applications. It is recommended for a wide range of applications: leak testing vacuum systems in the semiconductor industry; leak testing components (valves, filters); maintenance of system chambers in the research and developments; laboratories (beam lines, vacuum systems, etc.); clean environment operation (aerospace industry, instrumentation, medical and pharmaceutical industry and food industry). The ASM 122D is useful when space is limited. www.adixen-usa.com
ASM 182 TD+ and ASM 192 T2D+ Powerful Dry Leak Detectors
Alcatel Vacuum Products, Inc.’s powerful and sensitive  dry leak detectors meet leak test requirements for large test  chambers in the semiconductor market for the OEMs as well as end users. The Adixen ASM 192 T2D+ from Alcatel Vacuum Products, Inc. is the console version of the ASM 182/192 product range, the console version ASM 192T2D+ has extended pumping speed capability compared to the ASM 182TD+. This unit exists with 2 versions of roughing pump, one standard version and one enhanced dry roughing: 50 m3/h. Of course the ASM 192T2D+ includes all the latest evolution of Alcatel dry leak detectors such as: high sensitivity (5.12-12 mbar.l/s) thanks to a analyzer cell equipped with dual filament; fast response time in spaying mode thanks to its high helium pumping speed (20 l/s. the best unit from the competition) and qualitative and quantitative high pressure leak test (cross over pressure 200 and 30 mbar). The ASM 192 T2D+ is easy to operate. A simple operator interface with two distinct areas (one for the operator, the others for entering the parameters) allows the user to take no more than a few minutes to get familiar with its operation. The Adixen ASM 182 TD+ is the latest evolution of Alcatel dry leak detectors of which thousands are in successful daily operation throughout the world in various applications like quality control and maintenance of semiconductor process systems, quality control of vacuum components, test of blisters in the pharmaceutical industry. The ASM 182 TD+ has unique features such as: high sensitivity (5 × 10-12 mbar.l/s), thanks to a analyzer cell equipped with dual filaments; and fast response time in spraying mode thanks to its high helium pumping speed (4.4 l/s, 2.5 times the rate of the best unit from the competition). The ASM 182 TD+ is also extremely easy to operate. A simple operator interface with two distinct areas (one for the operator, the others for entering the parameters) allows the user to take no more than a few minutes to get familiar with its operation. In addition, the ASM 182 TD+ has an unique stainless steel frame and covers option to comply with highest clean room standard. The ASM 182 TD+ provides automatic operation throughout the range from atmospheric sniffer tests, test of long gas lines or tubing, large gross leak mode and ultra sensitive vacuum fine leak test mode. As a result, it can be used for the test of components, systems or complete installations.
Alcatel Vacuum Products, Inc.
Adixen brand name
Hingham, MA
www.adixen-usa.com
research@adixen-usa.com
Contact: Dave Morris, Director Sales, Helium Leak Detection
Tel: 1-781-331-4200
E-mail: Dave.Morris@adixen-usa.com
LD10 Replacement Filaments for Leak Detectors
Fil-Tech Inc. supplies replacement filaments for  Alcatel leak detectors, LD10’s. The Fil-Tech LD10 is drop in replacement for Alcatel’s original equipment part. The filament is welded to the slotted posts for greater reliability and longer life. Fil-Tech also has new Varian leak detector filaments and can rebuild your Varian filaments on a repair exchange basis. In addition, Fil-Tech supplies DC704 and FT704 silicone based fluids, and Santovac 5. For a complete listing of our parts, contact Fil-Tech at 1-800-743-1743.
Fil-Tech, Inc.
Boston, MA
www.filtech.com
Contact: G. Paul Becker
E-mail: paul@filtech.com
Tel: 1-617-227-1133
PICO® Ultra-Portable Vacuum Helium Leak Detectors
The PICO family of helium leak detectors is the most  compact, lightweight and portable series of mass spectrometer-based detection instruments available. Its compact size (7 × 15 × 10 inches) and weight (17 lb.) enable the operator to transport it without the use of bulky carts and it can be installed in tight quarters eliminating the need for long sampling lines. MKS Helium Leak Detectors include a robust, removable touch-screen remote display. An optional battery enables the leak detectors to operate for up to three hours before recharging. An RS-232 output option is available for both the vacuum and sniffer versions of MKS PICO Ultra-Portable Helium Leak Detectors.
MKS Instruments, Inc.
Andover, MA
www.mksinst.com
Tel: 1-800-227-8766 (USA) or 1-978-645-5500 (worldwide)
E-mail: mks@mksinst.com
PhoeniXL 300 Helium Leak Detector
The PhoeniXL 300 Helium Leak Detector  offered by Oerlikon Leybold Vacuum is a mobile helium leak detector suited for use in quality control labs, series production and service. The PhoeniXL 300 is qualified in industry and research applications where high vacuum engineering leak testing including clean-room compatibility is required. An optional sniffer probe allows for PhoeniXL 300 to be used as a sniffer leak detector. PhoeniXL 300 is available with oil-sealed or oilfree vacuum pumps. Customer may also use their existing external backing pumps. The PhoeniXL 300 is easy to handle offering reliable measurement results, quick readiness for operation, fast response time and automatic calibration. The available LCD Display shows a trend mode, bar mode, universal display, vacuum diagrams and status information. Primary features include: lowest detectable leak rate for helium is < 5 × 10–12 mbar L/Sec; ready for operation in < 3 minutes after start-up; Helium pumping speed is 2.5 liters/second; counter flow design principle extends the service life for cathodes; normal operation at 15 mbar vacuum inlet pressure; ability to detect hydrogen in addition to helium and our exclusive 36 month warranty for the ion source.
The PhoeniXL 300 offers an ergonomic and compact design that is maintenance-friendly.
Oerlikon Leybold Vacuum USA, Inc.
Export, PA
www.oerlikon.com
Contact: Mike Ridenour
Tel; 1-800-764-5369
E-mail: mike.ridenour@oerlikon.com
SmartTest Rugged and Simple to Operate Helium Leak Detector
The Pfeiffer Vacuum SmartTest portable helium leak detector is simple to  operate, rugged, and features the lowest cost of ownership in the industry. The SmartTest is available in a range of configurations – rotary vane pump for general leak detection, dry pump for oil-free leak detection, or a user selectable backing pump for the optimum solution for any application. The SmartTest features a Pfeiffer Vacuum SplitFlow™ turbopump, which has a pumping speed of 2.5 l/s for helium and the highest compression ratio, providing superior filament protection, signal stability and sensitivity. The SmartTest provides the lowest detectable leak rate for helium: 5 × 10-12 mbar l/s and a high inlet pressure of 25 mbar. Combined, they permit testing sooner after startup and enable the user to find leaks that are invisible to other models. Vacuum and sniffer modes come standard and the SmartTest is designed with an integrated test leak for self-calibration and a simple two-button control interface. The SmartTest provides quality helium leak detection for a wide range of applications including aerospace, solar, semiconductor, automotive, vacuum systems and components, refrigeration and air conditioning, pharmaceutical and any other application where fast, simple, accurate and precise leak checking is required. www.pfeiffer-vacuum.com
The Only Leak Detector In The World That Pumps Helium As Efficiently As Air
The new modular SmartTest Dry Helium Leak Detector is available on a  cart with a dry pump for applications requiring contamination-free, clean room operation. The SmartTest is completely oil-free and features the Pfeiffer Vacuum XtraDry™ pump for higher reliability and reduced particulate generation. The XtraDry makes the SmartTest the only leak detector in the world that is able to pump helium at the same speed as air with near 100% efficiency. The Pfeiffer Vacuum SmartTest helium leak detector is simple to operate, rugged, and has a low cost of ownership. Vacuum and sniffer modes come standard and the SmartTest provides the smallest detectable leak rate for helium: 5 × 10-12 mbar l/s and the highest possible inlet pressure of 25 mbar. It’s designed with an integrated test leak for self-calibration and a simple two-button control interface. The SmartTest provides quality helium leak detection for a wide range of applications including aerospace, solar, semiconductor, automo3tive, vacuum systems and components, refrigeration and air conditioning, pharmaceutical and any other application where fast, simple, accurate and precise leak checking is required.
Pfeiffer Vacuum, Inc.
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-603-578-6500
E-mail: smarttest@pfeiffer-vacuum.com
Leak Detection Made Easy— Heliot 710 series
Building upon the reputation of the ULVAC’s popular Heliot 700  series, the Heliot 710 series leak detectors have new features that make it even easier to use. With the same familiar large color touch screen interface and improved easy-to-use ATM-like menus, the Heliot 710 offers six different onboard language selections with audible voice prompts. Both Helium and Hydrogen leak detection capabilities and 5 different programmable leak test configurations help simplify leak test operations. Internal monitoring of error and alarm conditions detects problems before they can damage the instrument. Eco-friendly design is RoHS compliant, and construction makes use of recycled plastic materials.An intelligent power management function switches the forepump on and off as required during idle periods for maximum energy savings. The Heliot 710 series features a multiple valve design for the highest sensitivity: 10-12 Torr-l/s. This new leak detector is ideal for applications in the automotive, air conditioning/refrigeration, electronics, semiconductor and pharmaceutical industries. Pricing starts at under $20,000. Contact for more details. www.ulvac.com
Low Cost RGA
At prices starting at $4000 the ULVAC Qulee  BGM quadrupole mass spectrometer is your answer to cost effective leak detection, RGA and process gas monitoring in vacuum systems. It features integrated measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Torr, mbar, or Pascal of He, H2O, N2, O2, O2/N2 ratio with a mass range of 1 to 100 and 200 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. Qulee BGM features built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software. The minimum detectable partial pressure is 1 × 10-14 Torr. Optional differential pumping is available for applications that require it. www.ulvac.com
Quadrupole Mass Spectrometer
The compact ULVAC Qulee quadrupole mass spectrometer features integrated  measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Pascal, Torr or mbar of He, H2O, N2, O2, O2/N2 ratio, and a user selectable channel from mass ranges of 1 to 50 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. The built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software enable Qulee to be used for leak detection, RGA and process gas monitoring in PVD systems. A maximum operating pressure of 15 mTorr can eliminate the need for differential pumping, and the minimum detectable partial pressure is 1 × 10-12 Torr.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com.
Tel: 1-978-686-7550
E-mail: sales@ulvac.com
VS Series Helium Mass Spectrometer Leak Detectors Provide Advanced System Intelligence at the Push of a Button
Varian’s VS Series leak detectors combine the simplicity  of two-button operation with advanced system intelligence. Start and Vent push buttons permit extremely simple day-to-day operation. Running very userfriendly software, VS Series instruments provide intuitive navigation, allowing easy access to vast system capabilities. Programmable test sequences simplify daily operation, minimize operator error, and maximize production efficiency. The TFT style touch screen display is high definition and high brightness with wide viewing angles. An operator can select from a wide range of languages (English, French, German, Spanish, Korean, Japanese and Chinese) and units of measure for worldwide usage. VS Series Leak Detectors employ Varian’s primary (rotary vane or dry scroll) and high vacuum pumps which deliver high inlet pumping speed and high inlet pressure tolerance to minimize test cycle time, thereby maximizing production throughput. The state-of-the-art spectrometer and vacuum system design provides powerful capability, enabling a broad range of test methods for specific applications. The high efficiency ion source and beam optics optimize sensitivity and mass separation, giving the VS Series very high sensitivity to meet the most stringent leak test requirements. However, the units also enjoy high test port pressure tolerance which permits detection of large leaks. In addition, high helium pumping speed ensures fast system response and clean-up times. www.varianinc.com
VS Wireless Remote
Leaks in large systems often occur far from the leak  detector. Wired remote controls have sought to address this problem, but impedance and the cumbersome nature of long cables are often limiting factors. For many applications these traditional wired remotes provide little benefit. Varian’s wireless remote control is used for a helium mass spectrometer leak detector. By utilizing modern wireless technology, leak testing hard-to-reach locations is now much easier, and can be performed at much greater distances of up to 100 meters. Applications in large systems in which two technicians were previously required can now be performed by one technician, thereby reducing labor costs. All the major functions of the leak detector are now at your fingertips, providing a truly portable leak detection solution. In addition to the visual bar graph of the leak rate, the remote control has a speaker with a variable tone indicating the trend and relative size of the leak. The wireless remote can operate for a full 8-hour shift, or longer, on four AA batteries and conforms to ISM band, 2.4 GHz FHSS standards.
Varian, Inc.
Lexington, MA
www.varianinc.com
Contact: Walter Stevenson Palmer (Steve), Manager, Marketing and Merchandising, N.A. Vacuum Technologies
Tel: 1-781-860-5426
E-mail: RSano@steve.palmer@varianinc.com
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Vacuum Technology & Coating