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Article
Vacuum Pump Equipment Supplier
This vacuum pump product showcase covers the wide variety of roughing pumps, high-vacuum pumps, very-high-vacuum pumps as well as vacuum pumps used in R&D applications.
Compiled by Terrence Thompson, Contributing Editor
This vacuum pump product showcase covers the wide variety of roughing pumps, high-vacuum pumps, very-high-vacuum pumps as well as vacuum pumps used in R&D applications.
The most cost-effective and practical means of achieving the desired vacuum, in most applications, is achieved by doing it in stages. Roughing/backing pumps provide that crucial first stage in a wide range of configurations. This is followed by using high-vacuum, very-high-vacuum or ultra-high vacuum pumps to achieve the end result low-pressure environment. Although this sounds straightforward, getting there involves many options and choices. Current generation pumps now span much wider ranges than those of recent years ago.
Vacuum pumps remove undesired specific gases, liquids and other contaminants, from a chamber in which a very low pressure exists, i.e., a vacuum. A vacuum could be simply defined as a volume of space that contains fewer atoms than a similar volume under normal atmospheric pressure. As you will see when perusing the product descriptions, pump manufacturers have some clever options that will make you look more closely at what is available and at what price to match your intended application.
Product Descriptions
The following product descriptions, vendors make subtle but significant distinctions to focus on specific intended applications so direct comparisons may be difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
ATP Series Turbomolecular Pumps (Very High Vacuum Pumps and R&D Applications)
The Alcatel ATP turbomolecular pump line is a well-established product known for its reliability. The ATP turbomolecular series of pumps incorporate a robust machined rotor and stator, large conductance for faster pumpdown time, grease lubricated bearings — allowing the pumps to be operated in any orientation, low rotational speed – providing increased resistance to air inrush and are field maintainable! Pumps are available in pumping speeds ranging from 80 to 900 L/s and standard, corrosive and high-pressure corrosive versions. www.adixen-usa.com
Maglev Hybrid Turbomolecular Pumps (High Vacuum Pumps)
The ATH-M series of Alcatel pumps are magnetically levitated.  There is no mechanical contact, no friction and no wear resulting in no scheduled bearing maintenance and reduced cost of ownership. The pumps are actively controlled, real time, in five axes through an automatic balancing system. The pumps are designed for high throughput at high inlet pressure, are resistant against powder and provide a built-in purge to prevent deposition build-up inside the pumps. Additionally, no batteries are required because the motor acts as a generator in the event of a power failure. Pumps are available in pumping speeds ranging from 400 to 2100 L/s and heated or non-heated versions. www.adixen-usa.com
Turbomolecular Pumping Systems for Very High Vacuum Pumps and R&D Applications
The Alcatel turbomolecular pumping systems provide a flexible design providing a wide range of configurations. Systems are designed for installation on a workbench or below a vacuum chamber and offer optional casters to allow for easy movement. Turbopumps are available in pumping speeds ranging from 80 to 400 L/s, backing pumps are available wet from 5 to 21 m3 /hour or a 34 m3 /hour dry pump. Plus, numerous vacuum options such as turbopump vent valves, rotary vane pump isolation valves and integrated gauges are available. www.adixen-usa.com
Drytel Dry Pumping Systems for High Vacuum Pumps and R&D Applications
The Alcatel Drytel series dry pumping systems provide a compact, portable, reliable dry design.  Systems provide one switch operation from atmosphere to 10-8 mbar. The secondary pumps are available in 7.5 or 30 L/s pumping speeds, diaphragm backing pumps are available in 1 or 4 m3 /hr. Options include an interface board allowing remote start/stop, automatic gas ballast to improve the pumping of light gases and reduction of condensation, an exhaust connection and chemical versions. The unique, modern, open design allows for easy maintenance when replacing the membranes that have a 10,000 hour MTBPM. www.adixen-usa.com
ATH Series Hybrid Turbomolecular Pumps for Very High Vacuum Pumps and R&D Applications
The Alcatel ATH Series hybrid turbomolecular pumps incorporate grease lubricated ceramic ball bearings making  them mountable in any orientation, low rotational speed providing increased resistance to air inrush and range in pumping speeds from 30 to 300 L/s. Outstanding compression ratios enable these pumps to reach 10-10 mbar ultimate pressure with backing pressures up to 45 mbar. These pumps are available in standard, interstage port and corrosive versions, with either water or air cooling, as well as nude versions that may be inserted directly into your instrument — improving performance, decreasing the system size and providing cost savings. www.adixen-usa.com
Molecular Drag Pumps for High Vacuum Pumps and R&D Applications
The extremely reliable Alcatel  MDP Series molecular drag pump incorporates grease lubricated ceramic ball bearings making them mountable in any orientation. These pumps offer an ideal pumping solution between turbo and roots pumps with 7.5 L/s pumping speed, an ultimate pressure of 10-5 mbar and a maximum flow rate of 400 sccm. The pump molecular drag stages allow an exhaust pressure up to 40 mbar! Low rotational speeds and the mechanical design make this pump robust against accidental air in-rush, shock venting and gyroscopic effects. The MDP is available in standard and corrosive versions.
AdixenTM by Alcatel Vacuum Technology
Hingham, MA
www.adixen-usa.com
Tel: 1-781-331-4200
E-mail: inquiry@adixen-usa.com
EXT406PX Turbo Pump For Compact, Efficient Vacuum Systems Edwards
EXT406PX turbomolecular vacuum pump allows users to build cost-effective,  compact vacuum systems, capable of withstanding high backing pressures even with continuous gas loads at the main inlet, and not just at ultimate vacuum. This new pump has been developed for use in combination with a backing pump of significantly smaller capacity, resulting in a vacuum system that consumes less power than comparable systems. This leads to a lower purchase cost, lower cost of ownership and reduced carbon footprint. This is said to be the first pump of its kind that combines turbomolecular and drag stages with an innovative fluid dynamic stage, allowing users to achieve the same gas flow using a smaller backing pump. It offers reliable, highspeed, low-pressure performance and is available in two ranges. The ISO and CF 160 have Nitrogen (N2) pumping speeds of 400l/s (N2) and the ISO and CF 100 have N2 pumping speeds of 310l/s (340l/s for He). It can sustain normal operation at a backing pressure of up to 17mbar. The pump also features an optional inlet port, which, when correctly employed, can offer additional steady-state pumping speeds up to 24m3 /hr-1 at a pressure up to 4mbar. www.edwardsvacuum.com
Two Stage Rotary Vane Vacuum Pump
The Edwards RV range of dual mode vacuum pumps, are designed for applications that require either high throughputs or high ultimate vacuum. These pumps can be configured by the user to obtain optimum pumping performance without compromising the application, offering a high ultimate vacuum down to 2 × 10- 3 mbar in high vacuum mode and 3 × 10 -2 mbar in high throughput mode. Now available with ATEX approved (flame proof) motors, which have been developed in response to increasing customer demand, allowing operators to comply with the European ATEX Directive. These pumps can operate in a place in which an explosive atmosphere consisting of a mixture with air of dangerous substances in the form of gas, vapor or mist is not likely to occur in normal operation but, if it does occur, can do so occasionally. In high vacuum mode, the RV pumps are ideal for analytical instruments, electron microscopes, physics research, backing turbo pumps, TV tube pumping and leak detection applications. In the high throughput mode, they are suitable for distillation, laboratory furnaces, backing vapour pumps, solvent concentration, freeze drying and other drying applications. www.edwardsvacuum.com
CDX Chemical Dry Vacuum Pump
The Edwards chemical dry pump series are a cost competitive and simple solution, ideal for use in chemical and pharmaceutical applications. They are fullyATEX compliant and users can reliably pump a wide range of flammable vapors. They offer excellent pumping speeds from atmospheric pressure down to an ultimate pressure of less than 0.5 mbar. They are also available as pre-engineered pump and booster combinations with Edwards popular EH range of mechanical boosters to give a compact package with pumping speeds up to 2,700 m3 /hr and a low ultimate pressure that is well suited to applications such as solvent drying. The CPH chemical dry pump series builds on Edwards’history of innovative dry pumping solutions and experience gained from having over 100,000 pumps installed worldwide.
Edwards Vacuum
Wilmington, MA
www.edwardsvacuum.com
Tel: 1-800-848-9800
E-mail: info@edwardsvacuum.com
Scroll Pumps
The Kurt J. Lesker Company’s Ultimate  Vacuum Series (ULVAC) of Dry Scroll vacuum pumps require no sealing fluid or lubricant thereby providing a completely oil-free pumping environment. The innovative “double wrap” scroll design ensures that the pump occupies minimal space while providing a dynamically stable, low vibration and low noise solution. Overall pump performance, maintenance interval, and particulate and water vapor handling capability are remarkably improved by the use of the ballast device and unique shaft seal system. These features are standard on each pump. The Kurt J. Lesker Company offers single-stage (industrial versions for greater continuous inlet pressures and improved vapor handling) and two-stage (for improved ultimate pressures) models with pumping speeds from 3.8 CFM to 21.2 CFM and ultimate pressures as low as 7.5 milliTorr. www.lesker.com
Diaphragm Pumps
The Kurt J. Lesker Company’s Ultimate Vacuum Series (ULVAC) of Dry Diaphragm vacuum pumps is an extensive line of dry diaphragm pumping solutions. Models range from tiny OEM models designed for integration into a manufactured tool or system, to large industrial models perfect for vacuum chuck, packaging equipment, and other manufacturing and medical solutions. The minimal maintenance, high reliability, excellent ultimate vacuum and impressive pumping speeds make our diaphragm pumps the choice solution for many dry pumping applications. Our anti-corrosive Teflon series are perfect for corrosive or organic solvent applications and are often used to back turbomolecular pumps. With pumping speeds from 0.18 CFM up to 14 CFM and ultimate pressures as low as 2 Torr, we have the dry pump solution for you. www.lesker.com
Rotary Vane Pumps
The Kurt J. Lesker Company’s Ultimate Vacuum Series (ULVAC)  of Rotary Vane vacuum pumps are superior, high performance, low vibration, and low noise oil-sealed rotary vane pumps. These pumps offer premium features such as gas ballast, forced-oil supply, antisuckback device, and low temperature operation at an economical price. Models range from pumping speeds of 1.7 CFM to 12 CFM and an ultimate pressure of 0.5 milliTorr. Equivalent corrosive-resistant designs for applications involving toxic or corrosive gases are available. Pump performance is impressive and these affordable pumps offer an excellent value for the vacuum user. www.lesker.com
LION™ Series Ion Pumps
The Kurt J. Lesker Company LION™ Series Ion Pumps are one of the most extensive ion pump offerings  in the industry. Nineteen standard models range in size from 3 L/s through 800 L/s and include tall and low profile versions able to fit into just about any footprint. The standard Diode and Noble Diode elements are offered by KJLC. Three controllers complete the offering with RS232 as standard and the ability to control up to four pumps simultaneously at no additional cost. The KJLC pumps and controllers can even be configured to be compatible with Varian ion pumps.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Walt See, Product Manager
Tel: 1-412.387.9035 or
1-800-245-1656
E-mail: walts@lesker.com
High Vacuum Diffusion Vacuum Pumps
Oerlikon Leybold Vacuum DIP Diffusion Pumps are the successors to the high-reliability DI Diffusion Pump line. Available in pumping speeds ranging from 3,000 to 50,000 L/sec with possible end vacuum to 0.75 × 10-8 Torr, these diffusion pumps have been successfully installed in applications such as heat treatment / metallurgy, industrial coating and space simulations. When combined with our fore-vacuum pumps, boosters, gauging, hardware, valves and electrical controls, Oerlikon Leybold Vacuum can provide a total high vacuum system solution. www.oerlikon.com
Dry Compressing Screw Vacuum Pump
The Oerlikon Leybold Vacuum ScrewLine® series of oil-free compression screw-type vacuum pumps meet the special needs of industrial applications. ScrewLine SP 250 and SP 630 are an alternative to all oil sealed vacuum systems. Typical areas of application include heat treatments/metallurgy, industrial coating technology, packaging, drying and space simulations. ScrewLine features include an environment friendly vacuum pump that does not produce any contaminated waste oil or water, extended maintenance intervals and a significant cost of ownership savings compared to oil-sealed vacuum pumps. With an ultimate pressure and speed of 3.8 × 10-3 Torr and 195 CFM for SP250 and 7.5 × 10-3 Torr and 371 CFM for SP630, these vacuum pumps may be close coupled with our RUVAC® boosters where increased pumping speed is desired in multiple oilfree compression vacuum stages. www.oerlikon.com
Turbomolecular Pumps - MAG
Oerlikon Leybold Vacuum’s line of Turbomolecular pumps with magnetically levitated rotors are known as the MAG line. The line provides superior vacuum performance with models ranging in pumping speed from 830 L/sec to 3200 L/sec. The MAG line has been optimized to meet the vigorous requirements of the semiconductor industry, but is also commonly used in analytical, R&D, industrial coating and any UHV application where pressures from 10-1 to 10- 9 Torr is required. The main features are 5-years of maintenance-free continuous operation, very low vibration, high strength rotors in two versions (classic turbine or compound design), corrosion proof coating on the rotors, automatic balancing, integrated temperature management system, purge gas valves and many more innovative features. The rugged design built into the MAG line with can withstand typical accidents and events that can occur in industrial environments such as shock venting, emergency shut-downs and other external shocks. All MAG pumps are operated from one fully programmable MAG digital controller. www.oerlikon.com
Single Stage Rotary Vane Vacuum Pumps The Oerlikon Leybold Vacuum Sogevac® series rotary vane vacuum pumps meet the requirements of general industrial vacuum applications where pumping speeds of between 11 CFM to 677 CFM and ultimate pressures up to 6 × 10-2 Torr are sufficient. Typical application areas include: central vacuum for industrial plants, industrial coating, heat treatments, leak detection, packaging and other general degassing applications. Sogevac features include continuous duty operation with an automatic oil re-circulation system/integral exhaust separation, multi-voltage dual-frequency motors, air cooling, standard antisuckback protection valve to protect against oil migration, low vibration and simplified maintenance. www.oerlikon.com
Rotary Lobe Vacuum Boosters
RUVAC® vacuum boosters have been manufactured by Oerlikon LeyboldVacuum for decades.  The dry compressor Roots principle has proven itself in many areas of vacuum technology. Combined with oil-sealed vacuum pumps such as the TRIVAC® or SOGEVAC® , RUVAC vacuum boosters are used to increase the pumping speed at low pressures, thus extending the operating speed and pressure range of the vacuum system. Additionally, RUVAC may be combined with our oil-free compression ScrewLine® vacuum pumps where oil-free compression is desired in multiple vacuum stages. RUVAC vacuum boosters are manufactured in two series, both air cooled, but with different motor drives. The RUVAC WA series uses a flange-mounted standard three-phase motor; the RUVAC WS series has a canned (rotor) motor. Each series has of four different boosters covering carefully selected pumping speeds and are available with or without integrated bypass valve. RUVAC is used in almost all areas of vacuum technology and have been developed in such a way that the most diverse spectrum of requirements can be met. www.oerlikon.com
Dual Stage Rotary Vane Vacuum Pump
Oerlikon Leybold Vacuum TRIVAC® series two-stage vacuum pumps consists of six basic models (D4/8/16/25/ 40/65B) which provide pumping speeds from 3 CFM to 53 CFM, with inlet pressures from atmospheric to an ultimate pressure of 0.75 × 10-4 Torr. A forced-feed oil system lubricates and seals the vanes and internal parts. Direct drive motors provide quiet and smooth operation. KF inlet and outlet ports can be quickly changed between vertical and horizontal orientations.All seals are Viton. An internal anti-suckback valve seals the pump inlet when the pump stops, thus protecting the customer process. The TRIVAC line of fore-vacuum pumps is considered the industrial standard providing years of continuous duty operation in many diverse applications. www.oerlikon.com
Cryogenic Vacuum Diffusion Vacuum Pumps
Oerlikon Leybold Vacuum Coolvac® Cryogenic Vacuum Pumps are available in models ranging 800 to 60,000 L/sec pumping speeds and from 0.75 × 10-3 to 0.75 × 10-11 Torr vacuum.  These gas entrapment vacuum pumps offer hydrocarbon-free vacuum pumping for use in R&D applications, Industrial Coating, Space Simulations and other applications where large-volume evacuation into the ultra-high vacuum range is desired. Combined with our forevacuum pumps, boosters, gauging, hardware, valves and electrical controls, Oerlikon Leybold Vacuum can provide a total ultra-high vacuum system solution.
Oerlikon Leybold Vacuum
Export, PA
www.oerlikon.com
Contact: Mario Vitale,
Regional Market Manager — Process Industry
Tel: 1-724-325-6565
E-mail: mario.vitale@oerlikon.com
HenaLine™ Rotary Vane Pumps
Pfeiffer Vacuum HenaLine™ oil-sealed rotary vane pumps provide pumping speeds between 25 and 1,000 m3 /h and are suitable for industrial and R&D applications. These safe and reliable pumps feature an integrated oil mist separator, oil return system and safety valves, preventing contamination of the ambient air and safeguarding both the pump and the process system.A gas ballast valve assures pump-down of steam and other process vapors. HenaLine has a low operating temperature increasing the service life of the oil and eliminating the need for water cooling. These rotary vane pumps can be employed as either a stand-alone pump or as a backing pump. Used as a backing pump in Pfeiffer Vacuum CombiLine™ Roots pumping stations, HenaLine pumps are built for applications in metallurgy, helium leak detection or vacuum drying and degassing. www.pfeiffer-vacuum.com
HiCube Eco Dry Turbo Pumping Station for $4995
The Pfeiffer Vacuum HiCube Eco is a complete dry turbomolecular vacuum pump station for only $4995. This plug and play  vacuum station includes a HiPace™ 80 turbopump, a 1.1 m3 /hr dry diaphragm pump and are available with a full range gauge and a choice of DN63ISO, KF40 and DN63CF flanges. It delivers a pumping speed of 67 l/s for N2 and an ultimate pressure of <10-8 mbar. The DCU permits control and diagnostics of the HiCube™ Eco and gauge integration. The bench top HiCube Eco is ideal for vacuum applications that require hydrocarbon-free vacuum. Contact: hicube@pfeiffer-vacuum.com www.pfeiffer-vacuum.com
HeptaDry™ Dry Screw Pumps
Pfeiffer Vacuum HeptaDry™ dry vacuum pumps are manufactured for low to medium industrial and coating applications where oil-free vacuum is required. Rugged, dependable and with low operating costs, HeptaDry offers pumping speeds from 100 to 600 m3 /h. Coated, singlepiece, variable-pitch rotors ensure the efficient internal compression of gases to reduce energy cost requirements and enable thermally sensitive gases to be pumped as well. Direct gas flow in the pump prevents deposits, while high-quality axial face seals between the bearing and suction chamber make for increased reliability. These low-noise, cool running pumps are water cooled with a thermostatic valve. HeptaDry pumps are suitable for use as a stand-alone pump for processes up to 10-1 mbar. They can be used in combination with Pfeiffer Vacuum Roots pumps, for an ultimate pressure of up to 5 × 10-3 mbar in metallurgical, freeze-drying, load-locks, E-beam welding, vacuum filling and gas separation applications. www.pfeiffer-vacuum.com
HiPace• 300 Plus Turbopumps for Vibration-Sensitive Applications
The HiPace• 300 Plus turbopump with 260 liter per second of pumping is designed specifically for extreme low vibration applications. Due to the reduced vibration spectrum, this pump is ideal for use in analytical applications such as electron microscopy and high-end mass spectrometry, as well as many other vibrationsensitive processes. HiPace• pumps are inexpensive to operate due to extended service intervals and the improved rotor design gives both, high pumping speeds and high gas throughputs, coupled with very good compression for light gases. www.pfeiffer-vacuum.com
High-Speed HiPace™ Turbopumps for High Performance And Reliability
Pfeiffer Vacuum has expanded its line of fast and powerful HiPace™ turbopumps.  Available in pumping speeds that range from 1000 to 2000 liters/second, HiPace features a new rotor design that reduces run-up time by 50% and provides high gas throughput for light (H2, He) and heavy gases (Ar, CF4). The use of aluminum housing and innovative materials makes this turbopump 40% lighter in weight and doubles the service life to five years between bearing changes. Integrated drive electronics reduces the need for bulky and costly cabling. A variety of communications protocols, including Profibus and DeviceNet are available without any increase in physical size. The advanced rotor design and precise sensor technology of the HiPace turbopumps offer what is said to be the highest level of safety in the market, including IP54 and SEMI S2 protection classes. HiPace is available in both standard and corrosive models, which makes them ideal for use in semiconductor applications where particulate contamination, high gas loads and corrosive gases are common. In addition, HiPace is suitable for photovoltaic coating, industrial applications such as brazing furnaces, general sputter coating, and coating of architectural glass and ophthalmic lenses. www.pfeiffer-vacuum.com
HiPace™ Turbopumps Delivering Vacuum Faster From 10 to 700 l/s
Pfeiffer Vacuum HiPace• turbopumps feature a new rotor design, providing reduced run-up time,  higher gas throughput and exceptional compression for light gases. A variety of drive versions, including Profibus and DeviceNet, are available without an increase in package size. The compact HiPace has integrated drive electronics, which reduces bulky and costly cabling. Innovative materials have doubled drive service life, while a proven Pfeiffer Vacuum bearing design ensures reliability, even in harsh applications.Available in pumping speeds from 10 to 700 l/s, HiPace can be installed in any orientation. Contact: hipace@pfeiffer-vacuum.com www.pfeiffer-vacuum.com
PentaLine•— The New Shape In Rotary Vane Pumps
PentaLine• rotary vane pumps from Pfeiffer Vacuum, with a new optimized drive system, provides cost effective, environmentally friendly vacuum, for a wide range of applications in the low and medium vacuum range down to 10-3 mbar. Available in pumping speeds up to 35 m3 /h, PentaLine is hermetically sealed for leakfree vacuum, and provides compatible voltage for worldwide use. It’s standby operating mode provides a power savings that can reduce operating costs up to 50% and assures a longer service life. PentaLine rotary vane pumps run noiselessly with minimum vibration assuring a cooler, quieter work environment. Contact: pentaline@pfeiffer-vacuum.com www.pfeiffer-vacuum.com
CombiLine• Roots Pumping Stations
CombiLine• pumping stations are a combination of a Roots pump or pumps and the following major components: rotary vane, turbo, dry, liq- uid ring, cryo and/or diffusion pumps. They can also include gauges, analytical equipment and control systems, depending on application. Pfeiffer Vacuum has over 40 years of experience in building standard and customer-specific pumping stations. The standard CombiLine pumping stations include a CombiLine Roots pumping stations with the single-stage or twostage rotary vane pumps are designed for applications that require ultimate pressure of up to 3 × 10-4 mbar such as metallurgy, helium leak detection and electron beam welding. CombiLine Roots pumping station with the dry vacuum pumping are ideal for applications that require ultimate pressure of up to 5 × 10-3 mbar including coating, metallurgy, degassing plastics and vacuum drying. This series of pumping stations are dry and oil-free for contamination-sensitive processes. Pfeiffer Vacuum builds customer-specific pumping stations for applications that necessitate high pumping speeds and/or ultimate pressures of < 10-3 mbar. Contact: combiline@pfeiffer-vacuum.com
Pfeiffer Vacuum, Inc.
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-800-248-8254
E-mail: contact@pfeiffer-vacuum.com
Marathon® CP Cryopumps
The Sumitomo (SHI) Cryogenics Marathon® CP Cryopumps are an expanding product line available in multiple flange styles, sizes and configurations. With a powerful refrigerator, Marathon CP typically outperforms other cryopumps of the same physical size. Its innovative design assures that users achieve the highest performance possible, while keeping it competitively priced. The CP-20 can be driven by the new, high-efficiency F-70 compressor. Like all Freedom® series compressors, the F-70 provides refined oil and gas management to the cryopump and offers a unique 30,000-hour service interval. Additionally, the optional Marathon Cryopump Controller (MCC) enables fully automatic operation of the cryopump using commands from a host computer using standard cryopump protocol. The result is greatly reduced downtime between production cycles, improved process times and better overall efficiency of the user’s process. The CP-20’s compact and robust design fits easily onto new and existing systems. It can be readily maintained without breaking vacuum or removing the cryopump from the chamber for return or replacement. It is supported by SHI Cryogenics Group worldwide sales and support network. Its easy serviceability maximizes production uptime and lowers the total cost of ownership.
Sumitomo (SHI) Cryogenics of America, Inc.
Allentown, PA
www.shicryogenics.com
Tel: 1-610-791-6700
E-mail: sales@shicryogenics.com
Large Cryo Pumps
Specialized for high reliability and high refrigeration power, ULVAC cryogenic pump packages deliver maximum pumping speed and  capacity for gasses used in demanding applications such as sputtering, evaporation and ion implantation. Since pump production began in 1981 ULVAC, has focused on producing the most reliable cryo pumping systems with the highest power. With a range of cryo pumping sets at 20”, 22”, 30” and 36”, ULVAC can offer the premier high-powered solution to your demanding cryogenic pumping application. In addition, ULVAC has developed numerous specialty cryo pumps; including UHV, low vibration, “flat type”, “corrosion proof,” as well as a “Super Trap” (high speed water vapor pump) version. Supported worldwide by the extensive network of ULVAC service locations through¬out NorthAmerica, Europe andAsia, ULVAC provides the cryo pumping technology you need, at the quality levels you demand, and at competitive prices. ULVAC Cryogenics, a smart alternative for the North American Cryo Market. www.ulvac.com
VD Series Dual Stage Rotary Vane Pumps ULVAC’sVD Series of dual stage oil  rotary vacuum pump with directdrive motors are made for use in a broad range of applications including leak detection, helium recovery, fluid fill, as well as, vacuum coating. These light- weight compact pumps feature low noise with minimal vi- bration levels. Special design of the pump allows pump head replacement without disconnecting the fore line. The VD series is available in pumping speeds from 600 l/min [36 m3 /hr] to 800 l/min [48 m3 /hr] with an ultimate pressure of 0.67 Pa. www.ulvac.com
Single Stage Rotary Vane Pumps
ULVAC’s VS Series of single stage oil rotary vacuum pump with direct-drive motors are built for use in a broad range of applications including leak detection, furnace, as well as solar cell production. These lightweight compact pumps feature low noise with minimal vibration levels. The VS series is available in pumping speeds from 3000 l/min [180 m3 /hr] to 4800 l/min [288 m3 /hr] with an ultimate pressure of 5.3 Pa. www.ulvac.com
Large Rotary Piston Vacuum Pumps
ULVAC’s PKS Series of large oil rotary piston vacuum pumps are extremely durable with very stable pumping evacuation  characteristics. They currently are used in applications ranging from metal and automotive to chemical, pharmaceutical and food industries. These single stage pumps are designed with highgrade cast metal, which provides excellent corrosion and abrasion resistance. The PKS Series is available in pumping speeds from 96 to 420 m3 /h and a final pressure of 2.7 Pa. Disassembly and reassembly for maintenance and exhaust valve inspection is extremely easy. www.ulvac.com
GLD Rotary Vane Pumps
ULVAC’s GLD Series of compact oil  rotary vacuum pump with direct-drive wide range motors are designed for use in a broad range of applications including production processes, laboratory experiments and R&D. These pumps have a forced oil circulation system that provides stable evacuation speeds over a wide range with low noise and vibration levels for sensitive work environments. The GLD series is available in pumping speeds from 40 to 335 l/min with an ultimate pressure of 0.67 Pa. www.ulvac.com
EC Series Dual Stage Rotary Vane Pumps ULVAC’s EC Series of dual stage oil rotary vacuum pump with directdrive motors are designed for use in a broad range of applications including CVD, etching, solar cells, as well as vacuum coating. These lightweight compact pumps feature low noise with minimal vibration levels. This ULVAC pump has excellent corrosion resistance. The EC series is available in pumping speeds from 800 l/min [48 m3 /hr] to 1600 l/min [96 m3 /hr] with an ultimate pressure of 0.67 Pa. www.ulvac.com
Turbo Molecular Pumps
ULVAC’s Magnetic Levitation and Digital Control Turbo Pump Series are built for a broad  range of applications including solar cell, PVD, OLED, as well as R&D and laboratory environments. These turbo molecular pump series features high function, high reliability, energy saving performance and improvement of compression ratio for hydrogen, etc. The UTM-FW series are pumps targeted for middle to hard processes with high gas loads. The UTM-FH series pumps are for light to middle processes. The UTM-FW/FH Series is available in pumping speeds from 350 l/sec to 6300 l/sec.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@us.ulvac.com
Oil Free Diaphragm Vacuum Pumps
VACUUBRAND offers a wide range of modern oil free diaphragm pumps. These are often the best overall vacuum technology in the atmosphere to 0.3 Torr range and are outstanding as backing pumps for modern wide-range turbo pumps. The illustrated MD pumps are very compact 1.1 Torr, three stage, totally oil free mechanical pumps. The precision guided planar diaphragms and valves provide outstanding performance at low pressure with long term ultimate vacuum stability. Low vibration, low noise and exceptional diaphragm life, typically greater than 10,000 hours, characterize this new generation of pumps. Features include continuous (24/7) oil free pumping, minimal and simple maintenance, flexible mounting in any position, available with 100 to 240V, 50/60 Hz or electronically controlled 24V motors. www.vacuubrand.net
Rotary Vane Pumps and Pumping Units, Chemistry-HYBRID™ Pumps
Rotary vane pumps are used wherever it is necessary to have a process vacuum up to 10-3 mbar. VACUUBRAND rotary vane pumps are highperformance, yet compact, and can be equipped with an extensive line of VACUUBRAND accessories. They have an innovative lubrication system with a built-in oil pump, and a large oil volume. This extends oil change and service intervals, and protects the pump at start-up. The effective gas ballast feature, with its high-flow gas ballast, supplies high vapor compatibility for water and solvents.VACUUBRAND rotary vane pump’s volume flow rate is specified at atmospheric pressure, as is customary with PNEUROP® . For process efficiency, however, the high volume flow rate pumps under process conditions, as well as a consistently high-volume flow rate over a wide pressure range, is key to real-world applications. After switch-off the aggregate is vacuum-sealed to protect your application from undesired venting and oil back flow. A constriction-free vapor pathway allows high volume flow rates, even when close to the ultimate vacuum. Pumps have a high tolerance for water and solvent vapors, because of the high-volume gas ballast and are quiet running with excellent ultimate vacuum, even with gas ballast active corrosion protection. Oil cycle closes vacuum-tight against the intake of corrosive gases and oil impurities into the reservoir when shut down and a newly designed lubrication circuit, and large usable oil volume extends oil change and service intervals. The compact design, low weight and easy service with telescopic design is convenient.
Vacuubrand, Inc.
Essex, CT
www.vacuubrand.net
Contacts: Peter G. Coffey, Vice President – Sales & Marketing
Tel: 1-860-767-5341 or Toll Free: 1-888-882-6730
E-mail: info@vacuubrand.net or pcoffey@vacuubrand.net
IDP-3 Dry Scroll Vacuum Pump
The Varian IDP-3 is a compact, high performance dry pump that provides affordable oil-free vacuum and easy system integration,  and is suitable for a wide variety of applications. The IDP-3 employs an innovative hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. Delivering a robust pumping speed of 60 l/m and a very low base pressure of less than 250 milliTorr, the IDP-3 provides all the advantages of Varian’s patented scroll pump technology in a compact, lightweight, cost-effective package. www.varianinc.net
SH-110 Dry Scroll Roughing Pumps
Varian’s SH-110 Hermetic Single Scroll Pumps are designed  to provide reliable, dry vacuum in a small, economical package. The pump is ideally suited for many applications including Analytical Instruments and Research and Development. This simple, reliable design utilizes proven TriScroll™ seal technology for longer demonstrated maintenance intervals. The SH-110 conforms to CE, UL/CUL, and SEMI S2-0200 requirements.
Varian, Inc.
Lexington, MA
www.varianinc.net
Contact: Steve Palmer, Manager,
Marketing and Merchandising,
Vacuum Technologies, North America
Tel: 1-781-860-5426
E-mail: steve.palmer@varianinc.com
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Vacuum Technology & Coating