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Article

Vacuum Gauges

Compiled by Terrence Thompson, Contributing Editor
 
 This annual Vacuum Technology & Coating product showcase highlights vacuum gauges used in vacuum-based production, R&D and other applications. When you absolutely depend upon vacuum processes, knowing the precise pressure is essential.
 
 Vacuum gauges determine precisely what vacuum pressure exists in specific applications. The many manufacturers and distributors of vacuum gauges, as well as the technical societies and trade associations addressing vacuum technologies, provide very comprehensive reference materials for potential buyers. There are many excellent books on vacuum topics although few are recent since the fundamentals are well understood by the vacuum gauge suppliers and many of their customers. We encourage you to indulge in the detailed technology descriptions that are available, many free direct from the manufacturers.
 
 Many Choices
 
 Why are there so many types and models of vacuum gauges? Because gauge manufacturers comprehensively respond to market demands. The representative models shown here all are commercially viable instruments, each with solid reasons for being used in appropriate applications. Prices vary, of course, since the intended applications impact the ruggedness required and therefore the cost to build it as well as the selling price. Selecting a vacuum gauge is more challenging than some might think.
 
 Visit any vacuum gauge company’s website and you will find either a wealth of information to peruse instantly, download or have sent to you if you prefer hard copy references. And it’s well worth registering at the sites since some of the product and vacuum technology information that is mailed to you will be worth keeping in a prominent place on your bookshelf for years.

 
Product Descriptions

 
In the following product descriptions, vendors make legitimate distinctions to focus on specific intended applications so direct comparisons may be difficult. Visit Vacuum Technology & Coating magazine’s home page at www.vactechmag.com and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
 
APT2004 and APN2004 Pirani Gauge
 
The Adixen by Alcatel Vacuum Products’ new APT2004 Pirani gauge is an active, gas dependent gauge measuring from 5 x 10-4 to 1000 mbar, with an accuracy of ± 15% and repeatability of 2% of reading from 1 × 10-3 to 100 mbar. As a stand-alone gauge, this gauge produces an analog 0 to 10V output signal when 24VDC is applied or can be used with an Adixen digital controller. The APT2004 also provides easy atmospheric and high vacuum adjustment, mounts in any orientation, is maintenance free and allows 10 bar absolute overpressure with threaded connections. Available in a corrosive resistant version, APN2004, designed with a Nickel filament or in a 250°C bakeable version. Flange sizes are DN16, CFF or ISO-KF or 1/8-inch NPT and accessories include filters to protect against pollution.www.alcatelvacuum.com
 

 

 

 

  ACC2009 Combination Pirani, Cold Cathode Gauge
 
 The Adixen by Alcatel Vacuum Products’ ACC2009 combination Pirani, cold cathode gauge is an active, gas dependent full-range gauge measuring from 5 × 10-9 to 1000 mbar, with an accuracy of ± 30% and repeatability of ± 5% of reading from 1 × 10-8 to 100 mbar. This gauge provides two gauges in one, saving space and money. As a stand-alone gauge, this gauge produces an analog 0 to 10V output signal when 24 VDC is applied or can be used with an Adixen digital controller. The ACC2009 also provides easy atmospheric and high vacuum Pirani pressure adjustment, mounts in any orientation and is field maintainable. Available in flange sizes DN25 ISO-KF or DN40, CFF or ISO-KF and accessories include a magnetic shield and filters to protect against pollution.www.alcatelvacuum.com
 

 

 

 

 
 
ACC2209 Cold Cathode Gauge
 
The Adixen by Alcatel Vacuum Products’ ACC2209 cold cathode gauge is an active, gas dependent gauge measuring from 1 × 10-2 to 2 × 10-9 mbar, with an accuracy of ± 30% and repeatability of ± 5% of reading from 1 × 10-8 to 10-3 mbar. As a stand-alone gauge, this gauge produces an analog 0 to 10V output signal when 24VDC is applied or can be used with an Adixen digital controller. The ACC2209 does not require pressure adjustment and is field maintainable. Available in flange sizes DN25 ISO-KF or DN40, CFF or ISO-KF and accessories include a magnetic shield and filters to protect against pollution.www.alcatelvacuum.com
 

 

 

 

 
 
AHC2010 Combination Pirani, Hot Cathode Gauge
 
 The Adixen by Alcatel Vacuum Products’ AHC2010 combination Pirani, hot cathode gauge is an active, gas dependent gauge measuring from 5 × 10-10 to 1000 mbar, with an accuracy of ±15% and repeatability of ±5% of reading from 1 × 10-8 to 1 × 10-2 mbar. As a stand-alone gauge, this gauge produces an analog 0 to 10V output signal when 24 VDC is applied or can be used with an Adixen digital controller. The AHC2010 also provides easy atmospheric pressure adjustment, automatic Pirani high vacuum pressure adjustment, mounts in any orientation and is field maintainable. Available in flange sizes DN25 ISO-KF or DN40, CFF or ISOKF and accessories include a gauge extension and baffle to protect against severely contaminating processes.www.alcatelvacuum.com
 

 

 

 
 
ASD and ARD Series Capacitance Manometer Gauges
 
The Adixen by Alcatel Vacuum Products’ASD capacitance manometer gauges are active, gas independent gauges measuring four pressure decades in a single gauge head; offered from atmosphere to 10-4 mbar, with an accuracy of 0.20% of reading. The ARD series gauges are 45°C regulated, measuring five pressure decades in a single gauge head; offered from atmosphere to 10- 5 mbar, with an accuracy of 0.15% of reading. Designed to include robust, chemically inert ceramic diaphragms providing better measurement repeatability and stability compared to metal diaphragms. As a stand-alone gauge, this gauge produces an analog 0-10V output signal when 24VDC is applied or can be used with an Adixen digital controller. The ASD and ARD series also provide easy zero adjustment, requires no maintenance and has a response time of 30 ms. Available in flange sizes DN16 ISO-KF or Cajon 8 VCR.www.alcatelvacuum.com
 
 

 

 

 

 Gauge Controllers
 
Adixen controllers are universal voltage and frequency with a digital display and user-friendly interface. Controllers are compatible with all Adixen active gauges and automatically recognize the installed gauge. Features include front panel operating menu, control inputs, RS232 with optional RS485 communication protocol, up to six relay functions, gas calibration, pressure unit options and automatic gauge recognition.www.alcatelvacuum.com
 

 

 

 

 Mechanical BD Series Pressure Gauges
 
The Adixen by Alcatel Vacuum Products BD Series mechanical pressure gauges are gas independent, measuring from atmosphere to 1 mbar, with an accuracy of ± 2.5% providing an analog display. The BD gauges are corrosion resistant and offer the option of 2 set points. Available in flange sizes DN16 or DN25 ISO-KF.
 

 

 
 
Alcatel Vacuum Products
Hingham, MA
www.alcatelvacuum.com  
Contact: Barbara Ayotte, Product Sales Manager, Turbomolecular Pumps
Tel: 1-781-331-4200
E-mail:  Barbara.Ayotte@avp.alcatel.com
 

 

  APG100 Series Pirani Vacuum Gauges
 
 The latest addition to the Edwards Inc. range of Pirani vacuum gauges is the APG100 Series, designed for measurement of vacuum down to 10-4 mbar. The new gauge is lead-free, RoHS compliant and carries Canadian Safety Association approval. It is available in standard and corrosion-resistant versions. OEMs and system integrators will particularly like the APG100 for its compact size (41 × 83 × 30mm), linear output (one volt per decade) and replaceable sensor tube, all of which make it a costeffective choice as a system component. Cable connections and the ‘calibrate’ and ‘set point’ push buttons are arranged close together at one end of the unit, so side-access is not required, giving greater flexibility in system design. There are NW16 and NW25 flange options as standard – other flange sizes can be supplied on request. The APG100 sensor tube is replaceable. If it should need to be changed, the tube is simply unclipped and replaced with a new one, with no need for special tools or training. With the electronics module removed, the sensor tube can be baked to a temperature of 150°C where this is needed for systems operating at very low pressures. The APG 100 is available in two versions; the APG100-XM is the standard version for measurement of vacuum to 10-3 mbar. The APG100-XLC measures vacuum down to 10-4 mbar and has a corrosion resistant filament for harsher environments.
 

 

  TIC Instrument Controller, Now with Six-Gauge and Capacitance Manometer Capability
 
 The Edwards Inc. TIC instrument controller is a compact instrument controller with a large clear graphical display, an intuitive user interface and serial communications providing full remote control. It is supplied with a WindowsPC program which provides a comprehensive data logging ability, and enables full setup and control from a PC using the RS232 interfaces as standard. The controller supports and automatically recognizes up to three gauges from the BOC Edwards range, with coverage from 2000 to 6.6 × 10-10 mbar. The TIC is available in threechannel, six-channel and sixchannel capacitance manometer capable versions. When combined with the optional external relay box that allows for control of three 250 VAC 3 amp changeover relays, the TIC instrument controller provides for flexible operation of a wide range of vacuum system measurement and control configurations. Additional features include: direct pressure readout of common gasses (N2, He, Ar, CO2, Kr & Ne) without conversion factors: up to six 0 to 10 V buffered analogue outputs; user-configurable display options including four-character alphanumeric name for each channel; option to display one, three, or six channels simultaneously; and ability to select gauge order when cycling through the display.
 

 

 

 

  ADC—Active Digital Controller
 
 The Edwards Inc. Active Digital Controller (ADC) is a compact, single gauge controller and display. It features a bright LED display and simple push-button controls. The ADC automatically recognizes compatible BOC Edwards gauges, loads the appropriate look-up table and displays the pressure in commonly used vacuum units. When combined with a suitable gauge, such as the BOC Edwards APGX-H Convection Pirani or Wide Range Gauge (WRG), the ADC represents a cost effective means of monitoring and controlling process vacuum in a broad range of applications.
 

 

 

 

 

  WRG—Wide Range Gauge
 
The Edwards Inc. WRG family offers the capability of single port pressure measurement in the range atmosphere to 10-9 mbar with a linear output. It’s a compact solution, halving the space and connectivity hardware re-quirement. The WRG has many features including pushbutton calibration and set point controls and comprehensive diagnostics. The WRG is a cost-effective vacuum management solution when used either with a BOC Edwards controller or directly integrated into the system controls.
 

 

 

 

 
 
APGX-H Active Pirani Gauge
 
The Edwards Inc. APGX-H convection gauge has a wide measuring range from 1000 to 2.2 × 10-4 Torr (1333 to 3 × 10-4 mbar). The use of convection technology ensures accuracy and sensitivity are maintained to the top of the range. The APGX-H has many feature & benefits including a wide measuring range, compact and mountable in any orientation with a replaceable tube with calibration data held within the tube. It also has a standard analog output and local status indications.
 

 

 

 

 
 
AIGX - Active Ion Gauge
 
The Edwards Inc. AIGX is a compact gauge with dual yttria coated iridium filaments, a wide measuring range from 5 × 10-2 to 5 × 10-10 Torr (6.6 × 10-2 to 6.6 × 10-10 mbar) and a 1 volt/decade linear output. The new AIGX gauge from BOC Edwards incorporates all the benefits of the industry standard active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments. The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable.
 

 

Edwards Inc.
Wilmington, MA
www.edwardsvacuum.com
Tel: 1-800-848-9800
E-mail:  info@edwardsvacuum.com
 

 

 

  Digital Capacitance Diaphragm Gauges Offer Economical, Highly Accurate Pressure Measurement for Demanding Applications
 
INFICON SKY® CDG Digital Capacitance Diaphragm Gauges, combining economy and accuracy, have now expanded to include operating temperatures up to 200°C, fieldbus interfaces and diagnostic capabilities. The robust design of SKY CDG Digital Vacuum Gauges, which feature a proprietary ultra-pure ceramic sensor, is highly corrosion resistant, withstanding millions of pressure cycles, run after run. SKY CDGs provide a 50% faster warm up time, reduced power consumption, easy operation with digital zero function and a longer working life. The advanced sensor design and digital electronics offer reliable performance in harsh tool environments. SKY CDG capacitance manometers are available for full-scale ranges from 100mTorr to 1000Torr and temperature controlled ambient 45, 100, 160 and 200°C.www.inficon.com
 

 

 

 
PCG400 Vacuum Gauge Combines Cdg and Pirani Technologies
 
The INFICON PCG400 vacuum gauge is the first vacuum gauge to combine ceramic capacitance diaphragm and Pirani technologies in one costsaving vacuum gauge. Coupled with the gas-type-independent capacitance diaphragm gauge, the new PCG400 uses patented sensors and ceramics to provide more accurate and repeatable pressure measurement than available with a convectionenhanced Pirani gauge. Available with up to 2 integrated relays, PCG400 eliminates the need for additional, costly gauges to control system pressure. The compact, space saving PCG400 can be mounted in any orientation, eliminating system design constraints.www.inficon.com
 

 

 

 

 

  Combination Vacuum Gauge Line with Triplegauge® for Semiconductor and Industrial Coating Applications
 
 The INFICON TripleGauge Bayard-Alpert Capacitance Diaphragm Gauge takes the place of three sensors (hot ion, convection-enhanced Pirani, and vacuum switch) and reduces the complexity of installation, set-up, and vacuum measurement on semiconductor and industrial coating tools as well as transfer chambers. The TripleGauge BCG450 combines the advantages of three technologies in a single, economical package to mea- sure process and base pressures from 5 × 10-10 to 1500 mbar. Above 10 mbar, the TripleGauge BCG450 measures gas-type-independent and solves venting problems with different gas types such as argon or helium. The integrated Pirani sensor protects the hot ion filament from burn-out and contamination by automatically switching emission off at high pressures.www.inficon.com
 

 

 

 

 Bayard-Alpert/Pirani Gauge All In One Measures 13 Decades with One Vacuum Connection
 
The INFICON BPG402-S vacuum gauge combines Bayard-Alpert and Pirani technologies for vacuum measurement over 13 decades from 10-10 mbar to atmosphere. The compact, robust BPG402-S offers excellent repeatability of ±5% with ±15% accuracy for process pressures from 10-8 to 10-2 mbar. The BPG402-S offers high uptime and guaranteed long filament life for nonaggressive processes, because of its dual long-life yttria coated iridium cathode and the fast, automatic emission control via the integrated Pirani. Replacement sensors with on-board calibration data guarantee highest reproducibility.
 

 

 

 

 

 

INFICON
East Syracuse, NY
www.inficon.com
E-mail:  reachus@inficon.com
Tel: 1-315-434-1100
 
 

 

 Portable Thermocouple Gauging
 
Kurt J. Lesker Company’s portable thermocouple gauge is used to monitor the (vacuum) pressures of different applications at different locations, for example, banks of heat treat furnaces, a series of crystal growers, or LN2 storage tanks. The large 3.5 digit LCD display switches between 1 to 1000 mTorr (for KJL-6000 and DV-6 gauge tubes) and 1 × 10-2 Torr to 20 Torr (for the DV-4 gauge tube). The controller is powered by a 9V alkaline battery (supplied). Other power options include a lithium cell and an AC adapter. The controller connects to the (premounted) gauge tube by a 5 foot coiled cable. The complete package (part number KJL500TC) includes: display, coiled cable, alkaline battery, and KJL-6000 gauge tube in a rugged plastic case.www.lesker.com
 

 

 

 

 

 
 
Hot Filament Ion Gauge Tubes
 
 Kurt J. Lesker Company stocks a comprehensive selection of replacement ion gauge tubes in tubulated envelope and nude designs that match both our controllers and those sold by competitors. We have tubes: in Pyrex, Nonex, and 7052 glasses; a range of envelope sizes; single tungsten and single or double thoriated iridium filaments; terminated in glass or metal tubes; or with various CF or KF flanges. We can cross reference almost any standard ion gauge tube and can provide custom or modified ion gauge tubes when required.www.lesker.com
 

 

 

 

 TRUE Digital Gauges by Lesker
 
The Kurt J. Lesker line of TRUE Digital Gauges offers a compact and modular alternative to the error-prone world of analog pressure measurement. Just four gauges—Piezo, Piezo/Pirani, Pirani and Pirani/Bayard-Alpert—cover the entire pressure range from 1500 Torr to 7.5 × 10-9 Torr. The True digital nature of the gauges permit data to be read directly into a PLC or PC with no signal conversions being required. With the choice of two serial interfaces, RS 232 or RS 485, the digital data signals guarantee reliable data transmission using industry standard low cost cables. P r o f i b u s , DeviceNet, LON Works and CC converters are also available.www.lesker.com
 

 

 

 

  Wide Range Gauge Tubes & Controls for 1500 Torr to 10-3 Torr
 
 The Kurt J. Lesker “Wide Range” vacuum gauge covers a dynamic range of over 10-6 in the higher end of the vacuum range by integrating two sensors into one housing: a fast response diaphragm manometer, for accurate measurements between 1500 and 2 Torr; and a low temperature (125°C) Pirani gauge, for pressures between 2 Torr and 1 mTorr. The controller automatically selects the appropriate sensor as the pressure crosses the boundary value. This gauge is built to CSA r e q u i r e m e n t s and is ideal for backfill operations such as lamp manufacturing. All controllers and indicators are shipped with a 10- foot sensor cable and a 6-foot line cord.www.lesker.com
 

 

 

 

  Pirani Gauge Tubes & Controls for 20 Torr to 10-3 Torr
 
 The Kurt J. Lesker Pirani gauges have many operational advantages over thermocouple gauges and competitive Piranis. The platinum alloy element operates at approximately 100°C vs. 300°C of a thermocouple gauge’s filament, significantly reducing instabilities induced by carbonized oil vapors. The lower operating temperature increases the thermal stability, allowing the operator to use a unique temperature compensation circuit that reduces thermal drift to a very low level. The compensation circuit and f a c t o r y - m a t c h e d sensors/cables allow any gauge controller to operate any gauge tube without recalibration. Since gold is not used in the sensor, it is unaffected by hydrocarbon or mercury vapors. Response time is 0.3 seconds, or approximately 10 times faster than T/C gauges. Dynamic range approaches 10,000 for pressure measurement (compared to 1,000 for thermocouples). In fact, the pressure range covered by our Piranis is 20 Torr to 1 × 10-5 Torr, which is well beyond the capabilities of any T/C gauge.www.lesker.com
 

 

 

 
 
Hot Filament Ion Gauge Tubes & Controls for ATM to 10-9 Torr
 
 The Kurt J. Lesker model KJL6600 operates two Bayard-Alpert ion gauges and four convection gauges or four thermocouple gauges while providing 8 set-points and RS-232 interface. The unit will display the two ion gauges simultaneously and the four convection or T/C gauges sequentially. Also, if the ion gauges are off, the unit will display convection or T/C gauges in their place. Standard features include two analog recorder outputs, adjustable emission and autocalibration of the convection gauges. The KJL6600 controller is shipped with a 6-foot cord, rack mounting ears and instruction manual. The tubes and cables must be ordered separately.www.lesker.com
 

 

 
 
KJLC™ 902 Series
 
 The Kurt J. Lesker Company 902 series of pressure transducers combine the accuracy and gas independence of a Piezo transducer with TRUE Digital communications. The transducer features a unique temperature compensator allowing high accuracy over a wide measurement from 1 to 1000 Torr. The CE marked unit features RS232 or RS485 and analog outputs. An optional LED on-board display is also available.www.lesker.com
 

 

 

 

 

 
 
KJLC BDG Series
 
 The Kurt J. Lesker Company Bourdon gauges are liquid-filled industrial dial gauges suitable for pressures from atmosphere down to 1 Torr. Available in 3 different pressure models—Torr, mbar, or in Hg—they feature a corrosion and impact resistant, Zytel nylon case with removable bezel for easy calibration. The large dial face measures 2- 1 /2 inches across the dial and the clear glycerin fill provides stable readability in spite of vibration. The internal “breathing diaphragm” virtually eliminates the air bubble in the mid range of the gauge for improved readability, prevents freezing, clogging and corrosion and compensates for temperature fluctuations.www.lesker.com
 

 

 

 
 
KJLC™ Convectron® Equivalent Series
 
The Kurt J. Lesker Company Convectron Equivalent series of pressure transducers and sensors are direct “drop in” replacements for the G r a n v i l l e - P h i l l i p s Convectron gauges. All controllers, cables, and sensors are interchangeable PLUS they feature added benefits such as a more rugged design that is less prone to damage from mechanical shock or vibration and a faster response to pressure changes. RS232 and RS485 are standard ports on these controllers.www.lesker.com
 

 

 

 

 

  KJLC™ DV-6M Equivalent Thermocouple Sensors
 
The Kurt J. Lesker Company KJL-6000 thermocouple tube is a “drop in” pin exact replacement for the Teledyne Hastings DV-6M. However, the KJL-6000 features an all-metal stainless steel body and pins that are weather and corrosion resistant. The superior internal thermocouple supports ensure a longer life. This rugged tube can withstand a drop of 6 feet without damage. The Kurt J. Lesker Company offers a 30-day money-back guarantee on this product, with no questions asked.
 

 

 

 

Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Bob Wehrle
Tel: 1-800-245-1656 or 1-412-387-9200
E-mail:  pressure@lesker.com
 

 

 

  Ethernet-enabled Pressure Manometer for Real-Time Diagnostics
 
 MKS Instruments, Inc., introduces the 600C eBaratron® Capacitance Manometer, specially designed for networking with Ethernet communications devices for real-time diagnostics. The new all-digital pressure manometer incorporates MKS’s well-known Baratron capacitance technology to deliver highly accurate, reliable, stable pressure measurements to many critical semiconductor and other advanced manufacturing processes. Now equipped with Ethernet communications, the new eBaratron manometer enables diagnostics on a realtime basis during processing, allowing users to quickly and easily perform system analysis and troubleshooting, significantly improving system uptime and process repeatability. The advanced manometer can be either digitally networked or used as a stand-alone vacuum monitor in virtually any process or application. An embedded Internet web browser provides communications with a Windows® -based PC. With a rapid datalogger (100 ms), the 600C eBaratron manometer performs quick, detailed self-diagnostics and simplifies the troubleshooting of other system components. Models can be heated to either 45°C or 100°C for use in harsh semiconductor and display manufacturing, as well as biopharmaceutical processes. Accuracy is better than 0.10% of Reading, while full scale ranges from 1000 to 0.02 Torr give the eBaratron manometer the widest application range of any capacitance manometer on the market. Its standard all-metal, all-welded pressure sensor has exceptional corrosion resistance from aggressive process gases. Additionally, the manometer incorporates an MKS patented particle sump to prevent process by-products from condensing on the diaphragm and causing drift. The 600C eBaratron capacitance manometer is fully TOOLweb® -compatible, so it can easily communicate with MKS gateways and hubs, such as SenseLink and Blue Box. It also has analog communications capability, making it a “drop-in” retrofit into existing process systems.www.mksinst.com
 

 

 
 
Series 901 Plus MicroPirani/Piezo Loadlock Transducer
 
 Designed specifically for the loadlock environment, the HPS Series 901 Plus (901P) loadlock transducer (LLT) combines Piezo and MicroPirani sensor technologies. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. Functionality of three sensors in a single transducer provides space savings and a wide measurement range. Accurate absolute pressure measurement is from 1,000 to 10-5 Torr. Gas independent absolute pressure measurement is from 50 to 1,000 Torr. It has accurate atmospheric pressure reading, independent of gas type and barometric pressure changes. Fast, accurate and repeatable pres- sure measurements reduce process cycle times. Ease of operation is possible with analog output and digital communication. It is mountable in any position for easy installation. The MicroPirani solid state sensor is resistant to damage from air inrush or vibration and has three setpoints with fast response time for reliable process control. The 901P combines both absolute and differential pressure measurement technologies to provide superior performance and functionality. The 901P provides a patented, gas independent absolute pressure measurement from 50 to 1,000 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 901P can read pressures down to 10-5 Torr — two decades below a standard Pirani sensor. The design minimizes the effects of convection, therefore operation is possible in any position without compromising accuracy, for simplified installation.www.mksinst.com
 

 

 
 
Series 902 Absolute Piezo Transducer Compact Pressure Sensor
 
 The MKS HPS® Low-cost sensor alternative Compact system design has integrated electronics and sensor in one unit. Reduced process cycle time due to sensors fast, accurate and repeatable pressure measurements. Sensor is suitable for harsh processes due to clean, robust design and stainless steel construction Ease of operation with both analog output and digital communication Process control from setpoint relay with fast response time CE marked, compliant with EMC Directive 89/336/EEC The Series 902 has a simple modular design, high reliability, and low cost, making it attractive for a number of industries. These sectors and processes include semiconductor manufacturing, thin film coatings, freeze drying, lamps and light bulb production, medical devices, automotive and aerospace. Functions for the Series 902 include atmospheric and vacuum sensing, measuring fore and roughing pressures, warning alarm, monitoring backfill and venting and a system control relay for multi-sensor systems or system remote the control computer. The HPS Series 902 Piezo transducer combines the pressure measurement technology of a Piezo sensor with an integrated electronic control circuit. The 902 Piezo is an absolute direct reading sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range (10-1 to 1,000 Torr.) The robust sensor is constructed from stainless steel and aluminum, with only stainless steel exposed to the process. The construction materials and overpressure capability allow the Series 902 to be used in demanding environments. The digital communication allow for all adjustments and monitoring to be delivered real-time, via a host computer. The 902 includes RS485 communication as a standard feature. Analog output is also standard with a choice of 0 to 10 or 0 to 5 VDC linear output or logarithmic output. The analog output format is selectable via the digital communication lines. Linear output is either 5 mV/Torr or 10 mV/Torr. Logarithmic output is either 1 volt per decade of pressure or 2 volts per decade of pressure. For additional process control, the 902 has a relay set point. Features of the setpoint function can be set, adjusted and monitored through the RS485 port. An LCD readout is available for the Series 902. The display operates through the 0 to 10 linear analog output. The readout is streamlined with the width and depth of the transducer and adds 1.4 inches to the height. The readout attaches to the transducer through the D-sub connector. The display has a through connector to allow the transducer to connect to the rest of the system for integration.www.mksinst.com
 

 

 
 
Series 903 I-MAGCold Cathode Transducer
 
 Using the inverted magnetron design principle, the MKS HPS® Series 903 can operate at pressures much lower than a traditional cold cathode sensor, as low as 10-10 Torr. A unique design feature to the 903 is a second feedthrough for ion collection. The ion current from the cathode contributes to a measurement reading in the 903’s dual feedthrough design, ensuring accurate reading results. Since the 903 has no filament, it is resistant to vibration damage and is unaffected by sudden inrushes of air. Its rugged design and ability to efficiently operate in harsh environments provide fast, dependable, and stable pressure measurement. Features and benefits include: wide pressure measurement range from 3.0 × 10-10 to 5.0 × 10-3 to Torr for high vacuum applications; integrated electronics for space and cost savings; linearized analog output; isolated ion collector increases sensor's resistance to effects of contamination; high voltage can be deactivated at higher pressures to lessen the potential for sensor contamination; one set point with LED status indicator is standard for process control; sensor is interchangeable without calibration; no filament to burn out for low maintenance; gas-type sensitive; and CE marked Applications. With a wide measurement range of 3 × 10-10 to 5 × 10-3 to Torr, the MKS HPS® Series 903 is well-suited for high vacuum applications, including pressure measurement of high vacuum chambers and control or start-up of high vacuum systems with its standard relay set point. It is useful as a complete pressure measurement and control system or as a module in more sophisticated pressure control environments, making it especially attractive to OEM equipment manufacturers. The Series 903 is suitable for industrial, process, and analytical applications such as high energy physics, laser production, ion implantation, mass spectrometry, or PVD. The Standard 903 has one relay set point standard for process control that can be set to trip anywhere within its set point range. Set point activation status is shown with one of three LED indicators. Power and high voltage status are also indicated. The high voltage activation feature is a convenient way for you to shut off power to the 903 locally without shutting down your entire system. Deactivating the high voltage at pressures above 10- 2 Torr reduces the effects of contamination in the sensor. Due to differing ionization potentials for different gases, the 903 is a simple solution for locating medium to fine leaks in vacuum systems. It complements a mass spectrometer leak detector, which is more efficient in finding smaller leaks. Also offered is an alternate pinout version of the 903 (see pinout diagram), that matches the pinout found on hot cathode ion gauge transducers from other manufacturers, allowing retrofitting without software changes to your system. Note that the 903AP has no relays and a different output signal than the standard 903.www.mksinst.com
 

 

 
 
Series 909 & 909A Digital and Analog Hot Cathode Transducer
 
The MKS HPS® Series 909 and 909A are hot cathode sensors with integrated electronics. The 909 features digital communications, and a setpoint for process control, while the 909A features analog controls. Features and benefits include: wide measurement range of 10-10 to 10-2 Torr for high vacuum process monitoring; pressure-controlled EB degas for automated degas without filament shut down, patent pending; low cost transducer alternative; compact design with integrated electronics and sensor in one unit; two filament design for extended life; ease of operation with both analog and RS485 digital communication; simultaneous pressure measurement during degas cycle; sensor portion of transducer can be replaced; process control setpoint relay (Series 909 digital version); UHV-compatible materials used in sensor; reliable and repeatable pressure measurement for process stability; and CE marked, compliant with EMC Directive 89/336/EEC and Low Voltage Directive 73/23/EEC. Applications with this wide measurement range makes the MKS HPS® Series 909 and 909A Mini Ion Transducers ideal measurement tools for high vacuum applications, including pressure measurement of high vacuum chambers and control or start-up of high vacuum systems. They can be used to measure base pressure, and the pressure of back-filled gases. Applications include semiconductor processing and analytical systems. MKS HPS® hot cathode sensors are Bayard-Alpert style, which utilizes a fine wire collector located at the center of a grid. Due to its small area, few x-rays hit the collector; therefore, the gauge can measure very low pressures. Both the 909 and 909A transducers include two yttria-coated iridium filaments for reduced downtime. Yttria-coated iridium is resistant to damage caused by high oxygen partial pressures and exposure to atmosphere. The tube operates at lower temperatures, giving a lower chemical reaction rate and minimizing thermal interference. The sensors include a screen to shield it from large particles.www.mksinst.com
 

 

 
 
Series 910 DUALTRANSMicropirani/Absolute Piezo Transducer
 
 The MKS HPS® Series 910 is a dual sensor transducer, combining the pressure measurement technology of Pirani and Piezo with an integrated electronic control circuit. The transducer measurement range is 10-5 to 1,500 Torr. The Piezo is a directreading absolute pressure sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range. The Piezo will measure from 10-1 to 1,500 Torr. The MicroPirani performs an autozero function to the Piezo when pressure is below 10-2 Torr. Unlike traditional Pirani gauges, the element in the MicroPiraniis made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. A traditional Pirani sensor has a measuring range from 10-3 to about 100 Torr, rapidly losing sensitivity above 10 Torr. Because the size of the sensing portion of the MicroPiraniis so small, it has a range down to 10-5 Torr. The design minimizes the effects of convection, so operation is possible in any position without compromising accuracy, for simplified installation. The transducer includes a push button zero control than can be used when pressure is below 10-5 Torr. The digital communication allows for all adjustments and monitoring to be delivered real-time, via a host computer. The 910 includes RS485 or RS232 communication as a standard feature. The Series 910 provides a 1 to 9 volt DC analog output signal at the male 15 pin high density D-sub connector. The transducer output is smoothed between the two sensors and reads from both sensors in the 5 to 15 Torr range. For process control, the 910 has three independent relay setpoints. Features of the setpoints can be set, adjusted and monitored through the digital port. Leak detection for all thermal conductivity sensors, the MicroPiraniis gas-type sensitive. The Piezo measures independent of gas type. The 910 provides a digital leak detection output that measures differential reading between the Piezo and MicroPirani. This makes it a simple solution for locating medium to fine leaks in vacuum systems. Benefits and features include: integrated electronics and two sensors in one unit for space savings; single continuous reading of 10-5 to 1,500 Torr; low cost gauging alternative; reduced process cycle time due to sensor’s fast, accurate and repeatable pressure measurements; ease of operation with both analog output and digital communication; mountable in any position for ease of installation; clean design and construction compatible with semiconductor loadlock application; solid state sensor is resistant to damage from air inrush or vibration; accurate atmospheric reading from absolute Piezo, independent of gas type; three setpoints with fast response time for reliable process control; and they are CE marked, compliantwww.mksinst.com
 

 

 
 
New Series 925 & 925C MicroPiraniTransducers
 
The MKS HPS® Series 925 and 925 Compact (925C) MicroPiranitransducers are thermal conductivity gauges based on a unique, MEMS-based sensor. The 925 and 925C are commonly used for vacuum pressure measurement applications in semiconductor and analytical environments, as well as general vacuum applications. Features and benefits include: increased pressure measurement range from 10-5 Torr to atmosphere, two decades beyond a standard Pirani; set point relays have a fast response time for reliable process control—the 925C has one set point relay and the 925 has three set point relays; compact dimensional design; high accuracy and reduced process cycle time; ease of operation via analog output and digital communication; MicroPiranisolid state sensor is resistant to damage from air inrush or vibration; mountable in any orientation for ease of installation; no loss of measurement accuracy; and they are CE marked, compliant with EMC Directive 89/336/EEC. The Series 925 and 925C sensors offer a wide measurement range from 1 x 10-5 Torr to atmosphere and are based on measurement of thermal conductivity in a small cavity where gas enters by diffusion only, instead of flow. While traditional Pirani gauges often have problems with temperature drift, low accuracy, calibration and sensitivity to mounting position, these issues are significantly reduced with the Series 925 and 925C MicroPiranisensors. The sensor element in the 925/925C is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. Due to the small size and repeatable geometry of the sensing portion of the MicroPirani, it has a range from ATM down to 10-5 Torr. The design minimizes the effects of convection, so operation is possible in any position without compromising accuracy, simplifying installation. The sensor’s solid state design is highly resistant to vibrations and mechanical force, resulting in less system downtime due to broken filaments. Digital communication allows for all adjustments and monitoring to be delivered real-time, via a host computer. The 925/925C includes RS485 or RS232 communication as a standard feature. The 925 has a 15 pin connector, while the 925C has a 9 pin connector. The 925 and 925C are also equipped with 1 to 9 VDC analog output. For process control, the 925 has three setpoints, and the 925C has one setpoint relay, which can be set, adjusted and monitored through the digital port. Like all thermal conductivity sensors, the 925 and 925C are sensitive to gas type. To compensate for gas dependency, the MicroPirani has a number of common gas calibrations that can be selected via digital interface. This makes it a simple solution for locating medium to fine leaks in vacuum systems.www.mksinst.com
 

 

 
 
Series 979 Atmosphere To Vacuum Transducer
 
The MKS HPS® Series 979 Atmosphere To Vacuum Transducer features and benefits include: Mini Ion Gauge combined with the MicroPirani sensor; MEMS-based digital technology for real-time data access; wide measurement range of atmosphere to 10-10 Torr for high vacuum processes (13 decades); RS485 communications and control; three sensor independent setpoint relays; low power - 24 volts VDC, 10 watts; multi-sensor alternative with smoothed analog output (0.5 to 7 VDC); reduced process cycle time due to sensor’s fast, accurate and repeatable pressure measurement; two Yttria-coated Iridium filaments, designed for extended life, controlled via RS485; self regulating, patented filament control for auto filament on from MicroPirani sensor; and a unique sensor assembly design that is easily serviceable. Specifically designed for UHV processes, the MKS HPS® Series 979 Atmosphere to Vacuum Transducer (ATV) is ideal for measuring the wide cyclic pressures of PVD and Ion Implantation systems. High-vacuum coating applications requiring long term stability and accuracy will benefit from the dual sensor design and digital interface. The compact package makes the 979 ideal for system integrators and equipment manufacturers in both the semiconductor and analytical markets. The Series 979 utilizes the wide range MicroPirani (10- 4 to ATM) in combination with the low powered Mini Ion Gauge (10-10 to 10-2 ), providing an overall single gauge range of 13 decades of measurement. Three setpoint relays, which are sensor independent, simplify the system controls such as slow pumping, turbopump control and valve actuation. RS485 communications facilitates the digital interface between the host computer and the Series 979 Transducer. The Mini Ion Gauge portion of the 979 ATV contains two yttria coated iridium filaments which can be controlled, switched and degassed via the RS485 interface. LED indicators for power on, and filament on are standard features. Calibration for the MicroPirani portion of the 979 is also accomplished via the RS485.www.mksinst.com
 

 

 
 
Series 999 Quattro Multi-Sensor Transducer
 
The MKS HPS® Series 999 Quattrois the ultimate transducer solution, providing pressure measurement from 10-10 to 1,000 Torr, combined with atmospheric switching capabilities. The Quattro combines three of HPS' key technologies into an integrated gauge solution, and has the functionality of four sensors in one compact package. The Quattro includes the miniaturized hot cathode ionization sensor, the MEMS-based MicroPiranisensor and a unique piezo sensor, offering both differential and absolute sensor functions. It features a wide measurement range of 10-10 to 1,000 Torr for high vacuum processes; accurate atmospheric pressure reading independent of gas type and barometric pressure changes; gas independent absolute measurement from 50 to 1,000 Torr (1% of reading above 50 Torr; 4-in-1 sensor eliminates complex manifold, wiring and control requirements; educed process cycle time due to sensor’s fast, accurate and repeatable pressure measurement; both analog and digital operation and communication; Piezo and MicroPirani are automatically calibrated during operation; MicroPirani technology allows for hot cathode filament control at lower pressures; improved hot cathode filament life; two yttria-coated iridium filaments, designed for extended life; includes a patented degas function; mountable in any position for easy installation; smoothed analog output (0.5 volts per decade); three user-configurable set point relays and a microprocessor-based digital technology for real-time data access. The Series 999 Quattro is ideal for measuring a wide vacuum range from atmosphere to UHV, with atmospheric switching capabilities. Typical applications include semiconductor, thin film coating, analytical instrumentation and high energy physics. These applications require long term stability and accuracy and will benefit from the multi-sensor design and digital interface. The compact package makes the Quattro ideal for system integrators and equipment manufacturers in these markets.www.mksinst.com
 

 

 
 
Series 900 Ethernet Gateway
 
The MKS HPS® Series 900 Ethernet Gateway is designed exclusively for operation with the entire range of HPS Series 900 vacuum transducers. Converting the digital output to Ethernet, the Gateway enables any of the Series 900 transducers to operate via Ethernet communications. By connecting multiple RS485 transducers to one Gateway, the Ethernet Gateway offers a cost effective solution to system integrators looking to use multiple vacuum transducers on a single system. Features include: it can be used with any HPS Series 900 microprocessor-based transducers, including Series 901P, 902, 909, 910, 925, 925C, 979 and 999; multiple RS485 equipped Series 900 transducers can be connected to the Gateway; a single RS232 transducer may be connected at one time; easy integration into the MKS TOOLweb® platform allows for real-time data capture and analysis; data logging capabilities facilitates real time trouble shooting; userdefined data logging allows for long term event-based data collection; LED indication of communication and performance; gateway can be powered via an auxiliary power supply or share the same power supply harness as the transducer; fully webenabled, no additional software needed; and it interfaces with any TCP/IP equipped device. The Series 900 Ethernet Gateway daisy chains multiple RS485 Series 900 transducers or, alternatively, connects to a single RS232 transducer. The Gateway provides power to the transducer, and has a single Ethernet communication port with pass through channels for both analog and digital communications. Using the Gateway’s web interface, the user has access to data logging and graphing capabilities. Configured by the user, the web interface enables long term event-based data collection. In addition, it saves time by allowing for rapid failure analysis and system diagnostics. Alternatively, the Series 900 Ethernet Gateway can be connected to the MKS Blue Boxdata collection system. Once connected to the Blue Box, the customer has access to all the features and benefits of the TOOLweb framework, including connectivity to a host of other MKS devices that support TOOLweb. These include residual gas analyzers, Baratrons, and mass flow controllers.www.mksinst.com
 

 

 
 
Series 937A Digital Combination Vacuum Gauge System
 
The MKS HPS® Series 937A combination vacuum gauge system is part of the MKS HPS® family of vacuum gauges. It will operate as many as five sensors simultaneously, and every controller is configured to the user's specifications regarding sensors, line voltage and frequency, units of measure and communication choice. The Series 937A combines the technologies of the cold cathode, standard Pirani, convection Pirani, thermocouple, capacitance manometer and absolute Piezo sensors to measure from ultra-high vacuum to above atmospheric pressure. Features include: a simultaneous readout for a combination of up to five vacuum gauges; wide measurement range of 10-11 to 10+4 Torr; computer interface is RS232 or RS485; field upgradeable, modular design; repeat- able measurements and five independent relay set points for improved process control; gas-type sensitivity allows sensors to be used for rough leak detection; rapid response to pump down; leak test function with bar graph display and audio alarm; cold cathode and standard Pirani sensors may be mounted in any position, increasing flexibility during installation; series 937A is fully CE compliant with EMC directive 89/336/EEC and Low Voltage directive 72/23/EEC; and models available that indicate pressure in Torr, millibar, Pascal, or microns.www.mksinst.com
 

 

 
 
Series 947 Digital Convection-Enhanced Pirani Vacuum Sensor System
 
 The MKS HPS® Series 947 Convection-Enhanced Pirani Controller offers many standard features at a low price, yet is easy to use. An analog output signal proportional to pressure is standard and is accessible from the rear of the controller. Processes are controlled with two independent relay set points that are standard on this single-channel controller. The relays can be set to trip anywhere within the controller’s set point range. All of the operating controls are conveniently accessible from the front panel of the controller, including the power onoff switch. Adjust set points from the front panel while viewing the large, easy-to-read display. Set point activation is shown with red LED indicators. Set points can be checked at any time with no break in process control. Atmosphere and zero adjustment potentiometers are also located on the front panel for quick controller calibration when interchanging Sensors. Features include: 1.0 x 10-3 to 1.0 x 10+3 Torr measurement range for rough to medium vacuum applications; fewer controls for simplified operation and lower cost; LED digital display for wider angle viewing and visibly clearer, unmistakable readings; rapid responsiveness for applications in which speed is important; two independent relay set points are standard for process control; LED set point status indicators; available in models that measure in Torr, millibar, Pascal, or microns; fully CE Compliant with EMC Directive 89/336/EEC and Low Voltage Directive 72/23/EEC when used with a shielded sensor; sensor gives highly reliable and repeatable pressure measurements; and a gas-type sensitivity useful for leak detection. Since the only materials exposed to vacuum are stainless steel, nickel, glass, and platinum, the sensor is compatible with a wide array of process gases and is especially suitable for UHV applications. The platinum filament effectively eliminates any reading variance throughout a convection sensor’s higher measuring range. More accurate than a thermocouple sensor, the 317 Sensor measures over a wider pressure range and responds more rapidly to your process pressure changes. The upper measuring limit of a convection-enhanced Pirani sensor is increased over that of a traditional Pirani sensor from 100 Torr to 1,000 Torr. This higher limit is useful when monitoring the pumpdown of a vacuum system from atmosphere to a base pressure. The sensor compensates for any changes in room temperature ranging from 10°C to 50°C. With a wide measurement range of 10-3 to 10+3 Torr, the MKS HPS® Series 947 Convection-Enhanced Pirani Controller is ideal for rough to medium vacuum applications. This includes measurement of roughing and foreline pressures, activation of high vacuum sensors, or start-up of a system process with the standard relay set points. The Series 947 Controller is not only suitable for all vacuum industrial applications such as semiconductor or food processing, but also analytical applications and research. It is useful as either a small system controller or as a module in more sophisticated pressure control environments.www.mksinst.com
 

 

 
 
Series 959 Hot Cathode Combination Sensor System
 
 The MKS HPS® Series 959 Controller is one of the smallest, full-featured Hot Cathode controllers on the market today. Complemented by the Mini Ion Gauge, the 959 is a perfect replacement for older ionization gauge controller systems, or as the cornerstone of a new vacuum system. An optional Pirani board can be added to control a standard or convectionenhanced Pirani sensor. The Series 959 Controller and sensors can be used in many applications such as semiconductor manufacturing, thin film deposition, high energy physics, ion implantation, or space simulation. Features include: wide pressure measurement range of 10-10 to 1,000 Torr; automatic switchover between rough-vacuum and ionization gauges; leak test function with digital display and audio alarm; two standard set points provide fast system control; RS232 computer interface; highly reliable and repeatable pressure measurements; controller uses electron beam degas; remote filament and degas control allows easy automation; pressure indication during degas; userfriendly LCD display and interface; UHV-compatible materials used in sensors; choice of two hot cathode ionization sensors: MKS HPS® Mini Ion Gauge and MKS HPS® Nude Tube; choice of two Pirani sensors: Series 317 Convection Pirani sensor and Series 345 Pirani sensor; and the controller automatically distinguishes between Pirani and convectionenhanced Pirani. The MKS HPS® Series 959 Hot Cathode Controller is a compact, economical, single-channel controller that is user-friendly and provides fast, reliable pressure measurement. All of the operating controls are conveniently accessible from the front panel of the controller, including the power on-off switch. The Series 959 is available as a hot cathode controller only, or as a hot cathode/Pirani controller when the Pirani option is added. If the Pirani option is chosen, the Series 959 automatically detects whether an MKS HPS® standard Pirani or convection-enhanced Pirani is used. The Pirani can control the hot cathode filament, protecting it from operating at pressures near atmosphere. Where the Pirani and hot cathode outputs overlap, a combination output and display can be selected. Two independently adjustable set points are standard on the Series 959. This allows for the automation of process related functions. The set point values are nonvolatile and remain unchanged after power down or power failure. They are easily viewed with the function select switch and adjusted with color coordinated push buttons, with no break in process control. The 959 also includes an adjustable control that turns the hot cathode filament off at high pressures, prolonging the sensor’s life.www.mksinst.com
 

 

 
 
Series 943 Digital Cold Cathode Vacuum Gauge System
 
 The MKS HPS® Series 943 Cold Cathode vacuum gauge system includes the Series 943 digital controller and two cold cathode sensors: the Series 421 sensor for UHV use, or a lower cost Series 423 I-Mag® sensor for OEM or industrial use. The Series 943 Cold Cathode vacuum gauge system is designed to be user-friendly and to provide fast, reliable pressure measurement from 10-10 to 10-2 Torr. Features include: wide pressure measurement range 10-10 to 10-2 Torr; digital LED display with set point status indicators; choice of two cold cathode sensors; Series 421or Series 423 I-Mag® , fast system control with two setpoints; sensor tubes may be mounted in any position without affecting reading; no filaments to burn out; no need to degas the gauge; no adjustment in emission current or filament voltage required; cleaning of sensor is easy with a demountable tube; and a sensor tube less susceptible to contamination due to isolated collector. The 943 Cold Cathode vacuum gauge system is well-suited for industrial, process and analytical applications including pressure measurement of high vacuum chambers and control of high vacuum systems. Areas of applications may include high energy physics, analytical instruments, laser production, ion implantation, mass spectrometry, or PVD. The 943 digital controller features two standard independent relay set points, which allows you to confidently control your process. Adjust the set points from the front panel while viewing the display. Red LEDs indicate set point activation status. Check the set point at any time with no break in process control. The Series 943 displays pressure from 10-10 to 10-2 Torr using a high visibility LED display. Two types of analog output are standard, for remote monitoring of pressure. An internal converter provides output that allows a simple log conversion from voltage to pressure over the entire operating range. A fast responding, buffered analog output is also provided through the 15 pin accessory connector on the rear panel. Front panel functions allow the user to disable the high voltage, as well as set a pressure at which the cold cathode will automatically turn off. This prevents the controller from displaying incorrect readings when the pressure goes above the operating range of the sensor. The Series 943 has passed the requirements of the European Directives and is CE marked.
 
MKS Instruments, Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS Vacuum Gauge Applications Engineering
Tel: 1-978-284-4000
E-mail:  mks@mksinst.com
 

 

 

  CMR/CCR Vacuum Gauges
 
Pfeiffer Vacuum’s ActiveLine CMR/CCR capacitive transmitters offer compact and rugged vacuum measurement to cover applications from 10-5 to 1100 mbar. The CMR/CCR vacuum gauges feature a new ceramic technology sensor, which prevents memory effect, provides greater resistance to corrosive gases, excellent temperature compensation and better wear properties. These transmitters operate independently of the type of gas that is being employed. The output signal, which ranges from 0 to 10 volts, features an integral error signal, which guarantees secure and reliable measurement. The robust ceramic diaphragm design is less sensitive to process induced effects and can withstand millions of atmosphere cycles and bursts. Innovative signal processing produces an optimized measurement limit down to the smallest possible measured value of 10-5 mbar with high stability of the measured values. The CMR/CCR gauges can be operated with any Pfeiffer Vacuum ActiveLine controller and can be used as dropin replacement for older gauges.www.pfeiffer-vacuum.com
 

 

 
 
Radioactive and Electromagnetic Compatible Vacuum Gauges
 
 Pfeiffer Vacuum’s ModulLine vacuum gauges are tolerant of electromagnetic fields and radioactivity making them ideal for use in accelerators, UHV, high temperature and areas with radiation. They feature a rugged, proven design with automatic switchover from Pirani to cold cathode sensor. ModulLine is available with metal-sealed sensors for UHV applications. Designed for exceptional interface and control flexibility, ModulLinepermits operation with remote electronics from the gauge head and has four different interface options including RS232, RS485, and Profibus.www.pfeiffer-vacuum.com
 

 

 

 
 
DigiLineDigital Vacuum Gauges
 
 Pfeiffer Vacuum, Inc. offers a complete line of digital vacuum gauges to meet the most demanding pressure measurement and process control requirements. The DigiLine digital gauge line features the most inclusive connectivity capabilities including RS 232, RS 485, Profibus, and Device Net compatibility. By combining rough and high vacuum gauge technologies into single, compact packages, Pfeiffer Vacuum offers the unique ability to easily measure a wide range of pressures from atmosphere to 1.0E-9 Torr. DigiLine gauges contain integrated electronics, presenting the ability to monitor vacuum pressure without the use of a controller. For additional control flexibility, Pfeiffer also offers a line of DigiLine controllers, providing control relays, simple calibration, and a digital readout of the vacuum level. DigiLine is available in Piezo, Pirani, Piezo/Pirani, or Bayard-Alpert/Pirani digital gauges.www.pfeiffer-vacuum.com
 

 

 

 

 
 
ActiveLineAnalog Vacuum Gauges
 
 Pfeiffer Vacuum, Inc. offers an extensive line of analog vacuum gauges to meet the most demanding pressure measurement and process control requirements. The ActiveLinegauges feature an easy to use interface that allows for operation with or without a controller. The ActiveLinegauge transducers are also designed so that they can be controlled directly through other Pfeiffer Vacuum products such as leak detectors and turbo pump controllers. By combining rough and high vacuum gauge technologies into single, compact packages, Pfeiffer Vacuum offers the unique ability to easily measure a wide range of pressures from atmosphere to 1.0E-9 Torr with a single transducer. ActiveLine™ gauges contain integrated electronics, presenting the ability to monitor vacuum pressure without the use of a controller. For additional control flexibility, Pfeiffer Vacuum also offers a line of controllers, providing an analog output voltage representing pressure, control relays, simple calibration, and a digital readout of the vacuum level. ActiveLine is available in Piezo, Capacitance Diaphragm, Pirani, Cold Cathode, Process Ion, Full Range and Full Range BA gauges.www.pfeiffer-vacuum.com
 

 

 
 
Compact Capacitance Diaphragm Gauge
 
Pfeiffer Vacuum’s Compact Capacitance Diaphragm Gauge incorporates an innovative aluminum oxide technology, which makes it extremely resistant to temperature changes, virtually corrosion-proof, increases thermal and mechanical stability and reduces zero drift for a more consistent process. This corrosion resistant alumina diaphragm outperforms less stable metal diaphragm gauges with long-term stability and accuracy and provides absolute pressure measurement, independent of gas type. In addition, the corrosion resistant diaphragm greatly reduces downtime due to readjustment and gauge replacement.www.pfeiffer-vacuum.com
 

 

 
 
The Compact Pirani Gauge
 
 Pfeiffer Vacuum’s Compact Pirani Gauge features a rugged sensor design with easy push button calibration and fast reaction time in a compact and corrosion resistant housing. Compact, robust and potential-free, the Pirani gauge provides optimum temperature compensation, with stable and fast measuring. In addition, it offers absolute pressure measurement with excellent long-term stability and the smallest zero drift. The Compact Pirani Gauge measures a pressures from atmosphere to 1.0E-4 Torr.
 

 

 

 
 
Pfeiffer Vacuum Inc.
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-603-578-6500
E-mail:  gauges@pfeiffer-vacuum.com
 

 

 

  PG105U All-Metal, Convection-Enhanced Pirani Gauge
 
The Stanford Research Systems PG105U is an allmetal, convection-enhanced Pirani gauge, featuring a knife-edge copper gasket seal. The gauge has a bakeout range from 110°C to 250°C allowing complete compatibility with UHV environments. Its measurement range is 1.0 × 10-4 to 1000 Torr. The materials exposed to vacuum are stainless steel, nickel “52” alloy, glass-alumina ceramic, gold and copper. The sensor is gold-plated tungsten with sensor temperature (nominal) of 120°C. Reproducibility is 5 % at constant temperature and bakeout temperature is 250°C (non-operating). Operating temperature is 0°C to 50°C with temperature compensation in the 10°C to 40°C range. The gauge tube axis must be horizontal for pressure measurements above 1 Torr. Connection standard is 0.5 inch diameter side tube terminated in 1 /8” NPT thread. Options include NW16F, NW25KF, 1.33” CF, and 2.75” CF, and 1 /4” VCR. It is not intended for use in explosive atmospheres, do not use in the presence of fluorine and mercury containing vapors. The calibration gases are N2/air with an internal volume of 28 cm3 .
 
Stanford Research Systems, Inc.
Sunnyvale, CA
www.thinkSRP.com
Tel: 1-408-744-9040
E-mail:  info@thinkSRP.com
 

 

 

  New DV-6S Gauge Tube
 
 Teledyne Hastings Instruments, a business unit of Teledyne Instruments, recently introduced the DV-6S thermocouple gauge tube. This new gauge tube is specifically designed for outdoor use on cryogenic tanks including railcar and tanker truck applications. The gauge tube is compatible with the handheld HPM-4/6, the analog VT-6, as well as the new Digital VT-6. Extensive testing of mechanical shock: MIL-STD-202 Method 213 (> 2000 g, 6 ms duration), random vibration: MIL-STD-202 Method 214 (23.9 grams), and sinusoidal vibration: MIL-STD-202 Method 204 (30 g at 3000 Hz) have shown this gauge tube to be well suited for the severe environments encountered in many applications. The DV-6S is supplied with a protective cap. The o-ringsealed cap protects the gauge tube pins from moisture thus significantly reducing corrosion. A metal lanyard prevents cap loss. The tube is provided with a standard 1/8-inch NPT fitting, however special fitting requests can often be met.
 

 

 

 

 
 
The IGE-3000 Ionization Gauge
 
 Teledyne Hastings Instruments, a business unit of Teledyne Instruments, has recently introduced the IGE-3000 Ionization Gauge Electronics and Sensor. This instrument provides the user with accurate, repeatable pressure measurement for applications such as thin film coating, sputtering, lighting manufacturing, vacuum furnaces and calibration systems. The Hastings Ion Gauge features a range from 10-10 Torr to 10-2Torr. The miniature Bayard-Alpert style package is driven by a 24 VDC input. The IGE-3000 features an easy to read LED, RS 232/485 communication, two TTL setpoints, selectable emission currents and dual filaments. This complete measurement system consists of a dual-filament small internal volume Bayard-Alpert ionization gauge tube and electronics package. The gauge tube includes several innovations over conventional Bayard-Alpert tubes. For example, the filaments are precisely tensioned to give repeatable performance and long life. In addition, all tube materials are selected and processed to yield consistent structural integrity. The electronics package consists of four boards including a precision electrometer, power supply, processor/control adapter and options board. All combine to make this an intuitively easy instrument to operate.
 
Teledyne Hastings Instruments, a business unit of Teledyne Instruments
Hampton, VA
www.teledyne-hi.com
Contact: Doug Baker, Director of Sales and New Business
Tel: 1-757-723-6531 or 1-800-950-2468
E-mail:  hastings_instruments@teledyne-hi.com
 

 

 
 
Self-Contained, Compact Gauge and Controller Designed to Replace Multiple Conventional Vacuum Gauges
 
 Televac’s compact, self-contained CC-10 incorporates the latest dual sensor technology and a controller in a sleek package that allows seamless measurement from atmospheric pressure to UHV on a single vacuum port. Rough vacuum from atmospheric pressure to 10-2 Torr is measured using a crystal sensor, while pressure from 10-2 Torr to 1 × 10-9 Torr is measured with a double inverted magnetron cold cathode sensor. CC-10 product features include a 0 to 10 VDC analog output, RS485 digital communications, three adjustable set points, and a digital display that can be read in Torr or PA. All operating parameters are easily addressed and checked from the membrane panel on the front of the electronics module. A blue-green segmented LED provides pressure indication, and discrete LEDs indicate status for the three set point relays. Typical product applications include physical vapor deposition, optical and functional thin films, molecular beam epitaxy, accelerators and UHV research, electron and optoelectronic device manufacture.www.televac.com
 

 

 

 

 

 
 
Mini All Metal Enclosed B/A Type Ionization Gauge with Supported Dual Filament for Highly Accurate Vacuum Measurement with Long Filament Life
 
 The Televac All Metal Enclosed Mini B/A Type Ionization Gauges with Supported Dual Filaments are designed and engineered to provide highly accurate vacuum measurement, greater stability, and less calibration errors. The gauges offer significant design improvements over other conventional B/A (Bayard-Alpert) gauges and feature a supported dual filament for greater stability and extended filament life. It has a special Dual Filament Design–greatly extends gauge life by allowing the user to switch to the remaining filament when the other one burns out. It has supported Dual Filament and delivers more uniform output over variations in temperature and age with less calibration errors. The all metal enclosure with Pin Ground–provides constant potential while protecting the delicate filament and anode assemblies from unintended shock and physical damage. It has a 0.004-inch Diameter Ion Collector that decreases X-ray limit. Available Televac MC 300 Controller and Cable–provides a single source solution (or system) for critical vacuum measurements. The measurement range is 1 × 10-10 to 1 × 10-2 Torr.www.televac.com
 

 

 
All Metal Enclosed B/A-S Ionization Gauge with Spring Supported Filament and Cable Support
 
 • This is Televac’s popular ETI Nude B/A Gauge packaged for external use. Is used for highly accurate semiconductor and a variety of other vacuum measurement applications. The All Metal Enclosed B/A-S Ionization Gauge with Spring Supported Filament is designed and engineered to provide highly accurate vacuum measurement with less calibration errors. The gauge offers a combination of features that are superior to conventional B/A (Bayard-Alpert) gauge designs including a spring supported filament for greater stability. Universal Design–allows gauge to be easily used with other manufacturers B/A controllers Spring Supported Filament–delivers a more uniform output over variations in temperature and age with less calibration errors Grounded Metal Enclosure Wall and Conducting Shields–provide constant potential and protect the delicate filament and anode assemblies from unintended shock and physical damage Thoria Coated Iridium Filament–minimizes burnout for longer filament life Available Televac MM 200 Hot Filament Controller and Cable–provides a single source solution (or system) for critical vacuum measurementwww.televac.com
 

 

 
 
7FC Cleanable Cold Cathode Sensor Offers Patented Double Inverted Magnetron Technology for Wide Dynamic Vacuum Range
 
Televac’s 7FC Cleanable Cold Cathode Sensor. Compact in size for easy replacement of older obsolete sensors, the 7FC features robust construction and can withstand frequent pressure bursts – no hot filaments to sag and break. All wetted materials are 304 stainless and the metal/field cleanable anode assembly can be maintained without breaking the primary vacuum interface. The sensor also employs patented double inverted magnetron technology for a wide dynamic vacuum range of from 1 x 10-2 to 1 x10-11 Torr. Ten decades of useful range are possible when used with a mating Televac controller. Bakeable to 200°C, the versatile sensor can be used in any physical orientation. Knife edge metal seals ensure reliable ultra high vacuum (UHV) capability.
 

 

 

Televac (A Division of Fredericks Company)
Huntingdon Valley, PA
www.televac.com
Tel: 1-215-938-4444
E-mail:  vacuum@televac.com
 

 

 

  8-Decade Vacuum Gauge
 
 The ULVAC OCTIE wide-range vacuum gauge is a highly accurate and corrosion resistant single gauge that measures eight decades of pressure, from atmosphere to 10-3 Pa (10- 5 mbar). This wide range of pressure measurement and corrosion resistance makes the OCTIE an excellent low cost single gauge for monitoring process vacuum levels in etching systems, sputtering systems, and high vacuum evaporators. The gauge head is compatible with conventional capacitance manometers and connectors, making drop-in substitution quick and easy. ULVAC’s OCTIE uses a thermocouple-based measurement principal, which yields high accuracy and precision over broad pressure ranges, even when cycling repeatedly from atmosphere to vacuum. Insensitive to thermal fluctuations, the sensor head can be baked and operated normally at temperatures up to 150°C. OCTIE is available with a choice of flange styles, transmitter electronics, and display units.www.ulvac.com
 

 

 

 

 

 

  Extremely High Vacuum Gauge
 
The ULVAC AxTRAN is an extremely high vacuum gauge (XHV) that uses an energy analyzer to completely separate the ion source and ion collector. This structure permits AxTRAN to separate and measure noise current generated inside/outside the gauge, and gas ion current dependent on the pressure generated in the ion source. It enables highly quantifiable pressure measurements in a wide pressure range (10-2 to 10-11 Pa). The AxTRAN can be used for pressure measurements for high-energy accelerators, ultra-high and extremely high vacuum systems. Features include two independent set points, an easy-to-read LED with 3-digit mantissa display and a wide pressure range.
 
 
 
ULVAC Technologies, Inc.
Methuen, MA
01844 978-686-7550
www.ulvac.com
E-mail:  sales@ulvac.com
 

 

 

  DVR 2 Electronic Vacuum Gauge for Measuring Gas Independent Absolute Pressures
 
The Vacuubrand DVR 2 is a very compact fully electronic vacuum gauge for measuring gas independent absolute pressures from atmosphere to 1 Torr/mbar/hPa (user selectable). It’s integrated ceramic capacitance transducer offers outstanding corrosion resistance and superior long-term stability. It is battery powered, using a standard 9 VDC Li battery, with an adjustable sleep timer for long battery life. The large and highly visible analog/ digital display facilitates easy reading, quick trend indication and includes a battery lifetime monitor. Other features include 100% mercury/cadmium free, ±1 digit accuracy, free from electromagnetic interference, standard integrated KF/NW 16 flange plus a tubing adapter, easy two point calibration adjustment and a 115 × 115 × 66 mm size.www.vacuubrand.net
 

 

 

 
 
DVR 5 Absolute Vacuum Gauge Covering a Wide Range Of Pressures
 
 The Vacuubrand DVR 5 is a fully electronic absolute vacuum gauge covering the wide range of pressures from atmosphere to 0.1 Torr/mbar/hPa (user selectable). Unlike Pirani type gauges it is gas independent utilizing a highly sensitive and corrosion resistant ceramic capacitive transducer. The transducer is on a 2 meter cable for convenient remote mounting. This rugged gauge contains no mercury and no fragile mechanical components. The digital/analog display is very easy to read and gives fast trend indication. The DVR 5 readily fulfills the demand for accuracy, safety and versatility. Other features include a 100% mercury and cadmium free, 100 to 120V and 230V models, KF/NW 16 or tubing connection, easy two point calibration readjustment, standard RS 232C interface for data collection (PC software available), a rod mount is included and it is a 197 × 132 × 87 mm size.www.vacuubrand.net
 

 

 

 

 

 

 VAP 5 Pirani Type Thermocouple Fine Vacuum Gauge
 
 The Vacuubrand VAP 5 is a fully electronic Pirani type thermocouple fine vacuum gauge that measures to 10-3 Torr/mbar/hPa (user selectable). It readily replaces fragile and toxic mercury filled McLeod gauges in many applications. The large LCD combination digital/analog display is precise, very easy to read and gives rapid trend indications. The 2 meter cable for the gauge head provides flexible mounting options. Other features include a 100% mercury free, ±10% accuracy from 10-2 to 100 mbar, 100 to 120 V and 230 V versions, shielded for electromagnetic noise and interference, NW 10 flange mount and a 197 × 87 × 132 mm size.
 

 

 

 
Vacuubrand, Inc.
Essex, CT
www.vacuubrand.net
Contact: Bob Freeman
Tel: 1-888-882-6730 or 1-860-767-5341
E-mail:  rfreeman@vacuubrand.net
 

 

 

 Pirani, Thermocouple and Diaphragm Indicators and Dual Set Point Control Instruments
 
 VRL's Pirani, thermocouple, and diaphragm indicators and dual set point control instruments for pressures from 10-5 to 1500 Torr. Gauges can be provided with displays and analog outputs reading directly in Pascal or mBar. Inexpensive vacuum switch instruments are also available with Diaphragm or Pirani sensors with any style and size of flange. The Wide Range Diaphragm Manometer has a fast response sensor provides high accuracy measurements that are unaffected by gas composition. The Diaphragm Manometers for 0.5 to 1200 Torr and 1 to 1500 Torr measurements have stainless steel or pure silicon diaphragms. Response time is less than 400 milliseconds full scale. The High Vacuum Pirani Gauges in ranges from 105 to 20 Torr. Easy to read backlit displays. Linear 0 to 2.0 VDC output, 4 to 20 mA output optional. The Convection Gauges have digital and analog display models for 1 mTorr to atmosphere. Single sensor covers entire range. The Thermocouple Gauges are Varian 531 and Hastings DV-6 replacements. No Plastic is used. Stainless steel is standard. Indicators and controllers for 1 to 2000 mTorr and 1 to 1000 mTorr.
 
 
 
Vacuum Research Ltd.
Pittsburgh, PA
www.vacuumresearch.com
Contact: John Hartnett
Tel: 1-800-426-9340 or 1-412-261-7630
E-mail:  VRL@vacuumresearch.com
 

 

 

  CT-100 Active Vacuum Gauge
 
 Varian‘s CT-100 Active Vacuum Gauge is a self-contained rough-vacuum gauge that needs no separate gauge control. It delivers Pirani gauge performance, at lower cost, in a simple, durable design. Pirani-like rapid response time of 0.2 seconds makes the CT-100 ideal for high productivity applications where process steps are critically time-dependent. Rapid response time enables fast-acting valves to protect turbo pumps from sudden inrush of gas. Two user-defined set points per gauge allow triggering of multiple process steps, alarms, or other pressure-related conditions. A selectable pressure range offers accurate and repeatable readings precisely where it is most critical to the user. The CT-100 operates over the full rough pressure spectrum, (1 × 10-4 Torr up to 100 Torr or 20 mTorr to atmosphere. On-board LEDs give quick, visual indication of vacuum status. The long-life sensing element is designed three times thicker than typical gauges, which minimizes sensitivity to process vibration, shock, and all condensables found in vacuum. The robust sensing element results in longer life and higher repeatability, making the CT-100 a more economical choice than traditional Pirani gauges. A single point calibration feature maintains gauge accuracy over time, unlike other gauges where more frequent replacement is required. Applications include analytical instrumentation where the CT-100 is ideal for mass spectrometers and surface analysis equipment. For load locks, the CT-100’s rapid 0.2 second response time and excellent repeatability make it the ideal choice. Other general-purpose applications, requiring pressure control or pressure sequencing in the rough vacuum range. Vacuum connection is a 1/8-inch NPT threaded pipe (KF adapter may be ordered separately) or a welded-on NW16 KF Flange. Input power: 13 to 30V DC @ 0.125 amps. Output pressure signal is log-linear, 1 to 9V DC nominal, 1 volt per decade. Power, signal, and set point connection use a 9-pin D-subminiature connector. A power supply/signal breakout box may be ordered separatelywww.varianinc.com
 

 

 

 
Eyesys ConvecTorrActive Vacuum Gauge
 
 The Varian Eyesys ConvecTorrActive Vacuum Gauge is a self-contained rough-vacuum gauge that needs no separate controller. It integrates a Varian ConvecTorr transducer with controller electronics into one compact housing. This stand-alone package is ideal for applications requiring minimum use of space or direct integration with PLCs. The ConvecTorr technology produces a wider range of pressure measurement, 1 x 10-3 Torr to atmospheric pressure, with faster response than thermocouple gauges. A digital display of pressure and digital serial communications are options. The compact design results in sav- ings on cost and space and it has remote calibration. The set point for process control is digitally adjusted. The pressure range: 1 × 10-3 Torr to atmospheric pressure and analog pressure output is 1 volt per decade, loglinear. Power input range is 20V DC to 27V DC. Electrical connection is through a 9-pin D-subminiature connector. The vacuum connection is either a NW16 or NW25 KF flange. On-board digital pressure readout is available as is RS-232/RS-485 digital communications. The power supply/signal breakout box is available separatelywww.varianinc.com
 

 

 

 
 
Eyesys Mini-B/A Active Vacuum Gauge
 
The Varian Eyesys Mini-B/A Active Vacuum Gauge is a self-contained Bayard-Alpert transducer that does not need a separate controller. This standalone package is ideal for applications requiring minimum use of space or direct integration with PLCs and digital communications. The measurement range of the Eyesys Mini-B/A is 10 mTorr to 2 × 10-9 Torr, and the transducer can be operated remotely via analog or digital logic. The pressure reading is available from the optional onboard LED display, a one-voltper-decade analog signal, or digitally through the optional RS-2 3 2 / R S - 4 8 5 interface. In addition, two SPST set points may be used for process control and easy integration with a PLC. E-beam degas is a standard feature. The small footprint results in savings on cost and space. The LED display, with digital numeric display, is available, eliminates the need for panel-mounted electronics. Remote calibration through the digital interface is fast and operator-independent. Remotely operated degassing maintains sensor performance. Power input is 24V DC nominal @ 0.5 amps with a filament choice of tungsten or thoria-coated iridium. Vacuum connection is either NW16 or NW25 KF flange. Electrical connection uses a 15-pin D-subminiature connector. The power supply/signal breakout box may be ordered separately.www.varianinc.com
 

 

 

 
 
Eyesys Mini-IMG Active Vacuum Gauge
 
The Varian Eyesys Mini-IMG Active Vacuum Gauge is based on the proven inverted magnetron gauge, providing reliable measurement of pressures from 1 x 10-3 Torr down to 1 x 10-9 Torr, even in corrosive or dirty environments. It is selfcontained, needing no separate controller. The gauge tube may be easily cleaned or replaced if necessary. Like traditional cold-cathode gauges, the Eyesys Mini-IMG Gauge has no hot filaments, which burn out over time. Unlike traditional cold-cathode gauge designs, the Varian, Inc. Eyesys Mini-IMG Gauge features fast starting, even under high-vacuum conditions. The gauge can also be turned on or off remotely via a DC voltage signal. It has onboard LEDs to indicate the status of the gauge. On-board control electronics do not need an external controller. It has rugged, all stainless-steel construction. No elastomers or O-rings are used in the gauge housing which resists corrosion and dirt, The compact size saves on space and cost. Output signal is 0.5 to +8.5V DC log-linear, 1 volt per decade. Electrical connection uses a 15-pin D-subminiature connector. Vacuum connection is either a NW16 or NW25 KF flange.www.varianinc.com
 

 

 

 

 

 
 
Multi-GaugeController
 
 The Varian Multi-GaugeController is the leader in modular vacuum gauge controllers. Contained within its compact, half-rack case is the capability to operate simultaneously up to thirteen vacuum transducers, conserving expensive and scarce electronic rack space. The Multi-Gauge Controller can operate standard or UHV Bayard-Alpert gauges, cold-cathode gauges, inverted magnetron gauges, therm o c o u p l e g a u g e s , ConvecTorrgauges, and capacitance manometers. With the widest selection of transducer technology available in any vacuum gauge controller, a Multi-Gauge Controller can be configured exactly to your requirements. Case size is 9.5 in. wide, 14.63 in. deep and 3.5 in. high. It operates and reads 7 different kinds of gauges. It continuously keeps power on all connected transducers, up to 13, preventing temperature instability. Individual analog outputs are sued for each transducer for interfacing with other electronics. Process-control set points and RS-232 and RS-485/422 digital communications are available.www.varianinc.com
 

 

 

 

 senTorr™ Gauge Controller
 
 The Varian senTorrGauge Controller is a complete, halfrack vacuum gauge controller designed to increase system productivity with reliable, fast-response pressure measurements, from rough to ultra-high vacuum. The senTorr Gauge Controller is shipped ready-to-operate in one of three basic configurations: one high-vacuum or ultra-high vacuum transducer: a senTorr model BA (Bayard-Alpert ion gauge tube); senTorr model UHV (nude ultra-high vacuum ion gauge tube); or a senTorr model CC (Varian, Inc. model 525 cold-cathode ion gauge tube). One high-vacuum or ultra-high vacuum transducer plus two thermocouple gauges: either a senTorr model BA2 or senTorr model CC2. One high-vacuum or ultra-high vacuum transducer plus two ConvecTorr™ gauges: senTorr model BA2c; senTorr model UHV2c; or senTorr model CC2c. The controller can be programmed from the front panel for many functions. The c o m m a n d structure provides the user with the ability, among other things, to operate non-Varian glass gauge tubes, measure desired gas load partial pressures, and automatically turn ion gauges on or off. Additionally, users can select measurement units of Torr or mbar, baud rate, sensitivity, and emission current. The senTorr Gauge Controller has a standby mode that shuts off power to all components except the main processor, which conserves energy but permits faster start-up times. Other system settings, such as calibration, display update rate, and fault protection are adjusted via front-panel access codes. To improve the accuracy of the pressure measurement, the sensitivity can be adjusted to match the specifications of the gauge tube. Emission-current adjustments allow the user to either extend the measurement range or prolong gauge tube life. The panel keypad may be locked to protect the controller's settings. The ion gauge tube may be remotely operated via an applied DC voltage. Analog pressure signals for all transducers are available on the back panel. Options include RS-232 or RS-485 serial interfaces, gauge tube degas, and set points. Resistive degas is used with standard Bayard-Alpert ion gauges and electron-bombardment degas is used with ultra-high vacuum nude gauges. The set point option provides one set point per transducer plus one additional set point that can be assigned to any transducer. Set point hysteresis is adjustable.www.varianinc.com
 

 

 

 
 
531 Thermocouple Gauge Tube
 
 The Varian Model 531 Thermocouple Gauge Tube provides continuous and accurate indication of total pressure from 1 × 103 Torr to 2.0 Torr (1 × 10-3 mbar to 2.7 mbar) absolute. Developed to combine rugged dependability and outstanding performance, the model 531 gauge tube offers high resistance to vibration and excellent tolerance against contamination. The gauge is constructed of nickelplated mild steel. The thermocouple and heater are made of noble metal to minimize the effects of contaminants on gauge tube performance. The small thermal mass of the junction results in rapid response to pressure change. Its operation is unaffected by mounting orientation. Response time is approximately 3 seconds. Maximum bake out temperature is 150°C. Materials are nickel-plated mild steel, glass and platinel. Output is 0 to 11 mV, with 165 mA heater current and 15 ohm load.www.varianinc.com
 

 

 

 

 

 

 536 Thermocouple Gauge Tube
 
 The Varian, Inc. model 536 Thermocouple Gauge Tube is a fully welded stainless steel version of the model 531 gauge tube, with the addition of a baffle. The baffle extends the life of the sensor when the gauge tube is exposed to condensable gases, and it also improves the performance of the gauge tube at higher pressures. It provides continuous and accurate indication of total pressure from 1 × 10-3 Torr to 2.0 Torr (1 × 10-3 mbar to 2.7 mbar) absolute. Developed to combine rugged dependability and outstanding performance, the model 536 gauge tube offers fast response times and low power drain. The thermocouple and heater are made of noble metal to minimize the effects of contaminants on gauge tube performance. The small thermal mass of the junction results in rapid response to pressure change. Its operation is unaffected by mounting orientation. Response time is approximately 3 seconds. Maximum bake out temperature is150 C. Materials are type 304L stainless steel, glass, platinel. Output is 0 to 11 mV, with 165 mA heater current and 15 ohm load.www.varianinc.com
 

 

 

 

 

 

 

  ConvecTorrGauge Tube
 
 The fast-response Varian ConvecTorrGauge Tube is ideally suited for a wide range of vacuum system applications where accurate pressure monitoring and rapid, repeated pump downs from atmospheric pressure are required. The ConvecTorr Gauge Tube, unlike common convection-type gauge tubes, is not affected by system vibration. Its dependable design offers continuous and repeatable pressure indications at temperatures between 0 °C and 50 °C. It has been optimized for convection cooling, resulting in superior readings at higher pressures. The electrical connector is a locking bayonet type. Response time is less than 0.60 second for a step change in pressure. Pressure range is 1 × 10-3 Torr to atmosphere. Maximum baking temperature is 80°C. Materials are type 304L stainless steel with an ABS housing and platinel filament.www.varianinc.com
 

 

 

 

 

 

 

 

 

 563 Bayard-Alpert Standard Range Ionization Gauge Tube
 
The Varian model 563 Bayard-Alpert type standard range ionization gauge tube is a rugged sensor with a substantial pressure range. It provides a linear re-sponse to pressures from 2 × 10-10 Torr to 1 × 10-3 Torr. The platinum coating inside the bulb shields the gauge elements from electrostatic charges at low pressures and drains off the static charges that can build up at high pressures. The model 563 gauge tube is available with a variety of vacuum connections. X-ray limit is 2 × 10-10 Torr and sensitivity is 10 Torr1 (typical). The filament is thoriacoated iridium for resistance to burnout.www.varianinc.com
 
 

 

 

 

 

 

 

 

 572 Dual Tungsten-Filament Bayard-Alpert Type Standard Range Ionization Gauge
 
The Varian model 572 dual tungsten-filament Bayard-Alpert type standard range ionization gauge tube is a high-performance sensor with a wide pressure range. It has two filaments, so that, if one burns out, power can be switched to the other one, externally, without disturbing the vacuum system. It is designed to withstand long periods of degassing. The model 572 gauge tube is compatible with virtually all modern hot-filament ionization gauge controllers, and it is available with a variety of vacuum connections. Operating pressure is 2 × 10-10 Torr to 1 × 10-3 Torr with a x -ray limit of 2 × 10-10 Torr and a sensitivity of 10 Torr-1 . The filament is tungsten.www.varianinc.com
 

 

 

 

 

 

 IMG-100 Inverted Magnetron High-Vacuum Gauge
 
 The Varian IMG-100 Inverted Magnetron High-Vacuum Gauge is an accurate, repeatable gauge intended for use in dirty or corrosive environments. It has accuracy, repeatability, and starting-time capabilities similar to those of Bayard-Alpert gauges. Like common cold-cathode gauges, however, the IMG-100 gauge is easily cleaned and repaired, making it perfect for use in vacuum furnaces and other industrial applications. You no longer need to deal with the limitations of the common cold-cathode gauge in order to have a rugged high-vacuum measurement solution. The gauge has an inverted magnetron design, which features a broader measurement range, faster starting time, better accuracy, and superior repeatability when compared with common Penning-type gauge tubes. Its compact size allows for flexibility in installation, and its locking SHV high-voltage connector ensures safety and positive electrical contact. Pressure range is 1 × 10-3 Torr to 5 × 10-9 Torr. Maximum bake out temperature is 150°C (with cable disconnected). Starting time is < 5 seconds at pressures > 1 × 10-6 Torr. Materials exposed to vacuum are stainless steel, nickel, nickel alloy 52 and glass.www.varianinc.com
 

 

 

 

 

 

 

 
 
UHV-24 Nude Bayard-Alpert Ionization Gauge
 
 The Varian UHV-24 Nude Bayard-Alpert Ionization Gauge is a rugged, open gauge with broad-range operating pressure abilities. The lower limit of its pressure range is 2 × 10-11 Torr for the standard UHV-24 gauge and 5 × 10-12 Torr for the UHV-24p gauge. The gauge has an extended pressure range due to its small diameter and closed structure. Its ionization rate is at least twice that of other ionization gauges. The small diameter of its collector limits the X-ray current to a pressure equivalent of approximately 5 × 10-12 Torr. Sensitivity is 25 Torr-1 (UHV-24) / 20 torr-1 (UHV-24p). Operating pressure is 2 × 10-11 Torr to 1 × 103 Torr (UHV-24) or 5 × 10-12 Torr to 1 × 10-3 Torr (UHV-24p). Maximum bake out temperatures are 450°C.
 
 
Varian, Inc., Vacuum Technologies
Lexington, MA
www.varianinc.com
Contact: Walter Stevenson Palmer (Steve), Manager, Marketing and Merchandising, North America Vacuum Technologies
Tel: 11-781-860-5426
E-mail:  steve.palmer@varianinc.com
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