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Article
Gas Analytical SystemsCompiled by Terrence Thompson, Contributing Editor
This product showcase addresses gas analytical instrumentation that is applicable in various production, R&D and numerous other vacuum applications.
Vacuum systems often require the use of sophisticated gas analytical systems, and subsystems/components, including mass spectrometers, gas chromatography systems and RGAs to verify process or test integrity. Vacuum pumps and systems remove the ambient atmospheric so that precise gas mixtures may be introduced to meet a specific application’s requirements.
Product Descriptions
In these product descriptions, vendors make pragmatic distinctions to focus on specific intended applications so direct comparisons are difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at www.vactechmag.com and click on the advertiser links for additional details or telephone numbers to call and discuss your specific application requirements.
EXTRIMA® Hydrogen Leak Detector for Hazardous Environments
The Adixen Sensistor from Alcatel Vacuum Products, Inc. is an intrinsically safe leak detector. The equipment meets the ATEX directive for leak testing in explosive environments, such as aircraft fuel systems. The Extrima® is intended for leak detection with diluted hydrogen as trace gas in explosive environments, where the safety requirements are extremely high. The detector is intrinsically safe which means that it under no circumstances can ignite the explosive gas. Extrima has the European EEx ia IIC T4 classification equivalent to US Class 1, Div. 1, groups A, B, C,D which means that it meets the requirements for use in zone 0 according to the ATEX directive (ATmosphere EXplosible) of the European Commission. This detector can therefore be applied in the chemical and petrochemical industry as well as in the aviation and oil processing industries. A typical application is leak detection during maintenance of aircraft fuel systems. Since there is always some fuel left in the system, the equipment must meet specific requirements. Extrima quickly detects and locates the smallest possible fluid fuel leaks thereby ensuring 100% integrity of the test object. The Extrima has a unique Auto-Ranging function, which automatically tunes the instrument’s sensitivity for precise leak location. After a leak is located and the search for additional leaks continues, the sensitivity automatically readjusts to the highest level. With seven hours of continuous operation from rechargeable batteries and an IP67 waterproof rating, the Extrima meets all the requirements of the aviation, chemical, petrochemical and oil process industries for leak detection.www.adixen-usa.com
Adixen-Sensistor H2000 Plus Leak Detector
The Adixen-Sensistor H2000 Plus  Leak Detector from Alcatel Vacuum Products, Inc. uses N2/H2 as trace gases, and can be used to detect leaks smaller than bacteria. Using non-hazardous 5 percent hydrogen in a 95 percent nitrogen mixture, it measures and pinpoints minute leaks independent of part temperature or volume. This electronic device requires no vacuum pumps or valves and is therefore virtually maintenance free. Dynamic background compensation minimizes any potential problems with background interference assisted by the fact that hydrogen gas dissipates much more quickly than other gases. The instrument features a standard probe with no sample suction.www.adixen-usa.com
Sensistor ILS500 Leak Detection Test System
The Sensistor ILS500 Leak Detection System from Alcatel Vacuum Products, Inc. contains 3 modules housed in one compact unit. These modules are configured for optimal testing conditions, short cycle times and operator convenience for specific test environments. The controller module has a central processing unit, a gas-filling unit, and machine and tooling interfaces. The detector module is the Sensistor H2000 Hydrogen leak detector that uses a safe hydrogen mixture as a trace gas. The third module is the operator touch screen interface for set-up as well as production test monitoring and operation. This plug-and- play leak detection system is for demanding industrial leak testing applications.www.adixen-usa.com
Leak Detectors and Mass Spectrometers Alcatel Vacuum Products manufactures a complete range of Adixen leak detectors with a choice between a N2/H2 Gas-FET (GAS field effect transistor) leak detection that is lightweight, portable with middle range sensitivity and a helium detection technique with high sensitivity. These leak detectors address HVAC, aerospace, and automotive, general engineering to semiconductor applications. Alcatel Adixen leak detectors and systems can be configured to test the overall leak rate of a component or system or to accurately and easily pinpoint a leak using a manual probe. Using helium or N2/H2 trace gas, methods are up to 1000 × more sensitive than pressure decay or mass flow testing. Other advantages of trace gas leak testing are (a) the test is unaffected by temperature changes (b) the test is unaffected by component creep (c) the test is a direct measurement of the actual leakage from the component or system. Helium Mass Spectrometer systems can detect leaks as small as 1×10-10 cc/sec in vacuum while the Gas-FET detectors will detect leaks as small as 1 × 10-6 cc/sec at atmospheric conditions. For automatic testing of components and systems that require high-sensitivity leak testing (< 5 × 10-6 cc/sec) or need to be tested under vacuum, then a helium leak detector is the right choice. Adixen Mass Spectrometer Helium leak detectors detect leaks as small as 1 × 10-10 cc/sec under vacuum. For applications that are not as critical in terms of leak rate sensitivity (> 1 × 10-6 cc/sec) or require lightweight, portable equipment, use an Adixen N2/H2 (Gas-FET) leak detection systems. Gas-FET leak detectors will detect leaks as small as 1 × 10-6 cc/sec at atmospheric conditions in a manual portable sniffing mode or as small as 5 × 10-5 cc/sec in an automatic accumulation chamber.www.adixen-usa.com
Adixen 2000 Series Vacuum Gauges
Alcatel Vacuum Products, Inc. has a line of vacuum instrumentation, the Adixen 2000 series of vacuum gauges. These are intelligent sensors that can be used with or without a panel display and controller, to control the vacuum process and display process pressures or provide data to acquisition systems. These gauges are reliable, accurate, and are very easy to install and use. The 2000 gauge series is capable of pressure measurements from atmosphere to 5 × 10-10 mbar. The Adixen gauges and controllers can provide more than just a simple pressure measurement. They are available with 2 setpoints on the gauge, as well as 0 to 10 V or RS 485 outputs. As a result, they can drive a production process or record a pressure trend. These gauges are appropriate for use in food packaging, cathode ray tube manufacturing, DVD production, cutting-edge electron microscopes, particle accelerators, and almost all high vacuum applications. Product ranges are as follows: AP 2004 Pirani for 5 × 10-4 Torr to ATM, ACC 2009 Cold Cathode/Pirani for 5 × 10-9 to ATM, ACH 2010 Hot Cathode/Crystal for 5 × 10-10 to ATM, ASD 2000 Capacitance Diaphragm for 5 ranges from ATM to 0.1 mTorr, ACS 2000 Single Channel Controller, and the ACM 2000 3 Channel Controller.www.adixen-usa.com
ACC 2010 Hot Cathode/Crystal Gauge from Adixen•
Alcatel Vacuum Products, Inc. has developed the ACH 2010 Hot Cathode/Crystal vacuum gauge covering the range of 5 × 10-10 to ATM. Using the combination of hot cathode in conjunction with a crystal gauge the ACH 2010 delivers pressure measurement in a unique package. Spanning the entire range between 5 × 10-1 and ATM pressure using only 2 sensors and automatic range switching.www.adixen-usa.com
ACS 2000 Single Channel Controller
and ACM 2000 3 Channel Controller
A special feature of the Alcatel  Vacuum Products, Inc. Adixen 2000 Series vacuum gauges is the use of embedded electromechanical components, providing stand-alone intelligence. Simply supply the gauges with 15 to 30 VDC and receive a 0 to 10V or RS-485 indication of pressure on a computer or control system. It is also possible to use an Adixen controller, which supplies the power directly to the gauge, displays the pressure in your choice of units, automatically detects the type of gauge being used and configures itself appropriately. Some of them, like the Adixen 3 channel controller can display a graph of the pressure signals, as well as an analogue or digital indication.www.adixen-usa.com
AP 2004 Pirani Gauge
Alcatel Vacuum Products, Inc.’s AP 2004 Pirani vacuum gauge determines pressure by measuring the convection heat loss from a heated filament. When the gas pressure decreases, there are fewer gas molecules, resulting in a less convective heat transfer from the filament, which then gives a very accurate pressure measurement. The Adixen Pirani gauge provides an excellent level of accuracy from 5 × 10-4 Torr to ATM.
Alcatel Vacuum Products, Inc.
Adixen™ brand name
Hingham, MA
www.adixen-usa.com
Contact: : JP De Luca
Tel. 1-781-331-4200
E-mail: JP.Deluca@adixen-usa.com
Mass Flow Controllers for Coating and Sputtering
Alicat Scientific’s Mass Flow Controllers provide a number of advantages in the coating and sputtering fields. Fast  control and response times (10 ms read, 50-100 ms control times) make Alicat Mass Flow Controllers a choice for reactive sputtering and applications that require fast and automated regulation of flow rates and partial pressures in vacuum chambers. In the downstream valve configuration, Alicat Mass Flow Controllers are immune to the effects of even the strongest vacuum pump, ensuring that mass flow into your chamber is accurate. Every unit is capable of switching between 20 pure gasses and 10 gas mixes on the fly, no matter what media the coating process may use. Alicat provides versatile mass flow controllers for all applicable gasses and projects. MFC devices use a communications package and accessories that will make integration into your system seamless and user friendly.
Alicat Scientific Inc.
Tucson, AZ
www.alicatscientific.com
Tel: 1-520-290-6060
E-mail: info@alicatscientific.com
Model 9000 RM Gas Analyzer Can Be Used Alone or Integrated into CEM Systems
The AMETEK Model 9000 RM is a rugged single or multicomponent gas analyzer housed in a single 19-inch, rack-mountable  unit that can be integrated into Continuous Emission Monitor (CEM) systems or used alone for a variety of gas monitoring applications. The 9000 RM can be configured to measure most gas species that absorb in the UV (examples NOx, H2S and SO2). The optional low range white cell provides longer path length for measuring lower concentrations. For example, the minimum full scale for SO2 is 25 ppm, with an accuracy of 1% of full scale. Resolution better than 0.02 nm is provided by high intensity, line source lamps. These sources emit at a fixed wavelength, providing great measurement stability, and emit low total power, removing the potential for sample photolysis. The high resolution enables unparalleled linearity over a wide dynamic range (less than 1% deviation over 4 to 5 orders of magnitude) that, in turn, leads to simple, robust data analysis. The simple and robust design of the Model 9000 RM is complemented by its powerful data processing capa- bilities. All parameters accessible, graphing, logging, trending are available by remote and local access. The user-friendly keyboard and built in display enables programming of such variables as timing and frequency of local zero and span checks and calibration gas values. The Model 9000 RM supports RS-232, Modbus/RS485 and Web Interface/ Ethernet connectivity. The 9000RM draws onAMETEK’s 30+ years experience in the design and development of sophisticated process analyzers. Its modular design turns trouble-shooting and repair into simple tasks that can be performed on site in minutes by plant personnel. AMETEK Process Instruments is a unit of AMETEK, Inc., a leading global manufacturer of electronic instruments and electric motors.www.ametekpi.com
Model 5100HD Gas Analyzer
AMETEK Process Instruments expanded its line of Model 5100 Series gas analyzers based on tunable diode laser absorption spectroscopy (TDLAS) with the introduction of the Model 5100HD gas analyzer that hosts a dual laser platform. Two separate lasers are installed in the instrument, sharing a common optical path through the sample, allowing the instrument to measure two analytes simultaneously, resulting in significant cost savings for users. Where the required concentrations of the analytes differ considerably such that different path lengths are required, two sample cells are used. The Model 5100HD is capable of dual stream analysis and can measure any two combinations of water vapor, methane, hydrogen sulfide, carbon dioxide, and oxygen in process or flue gas. Another key feature is the use of sealed reference cells that contain known amounts of analyte gases measured for referencing the emission wavelengths of the lasers. This allows users to both line lock the lasers and continuously verify the instrument’s calibration. It is designed to handle sample gases with high dew points. The standard version has its sample cell heated to a maximum of 100°C. A version is also available for 150°C. The instrument is set up to perform all-digital implementation of wavelength modulation spectroscopy (WMS). It employs digital signal-processing methods that allow for the successful implementation of multivariate calibration and help to accurately measure two separate species with completely overlapped spectral responses.www.ametekpi.com
Thermox Remote Calibration Unit Maximizes Accuracy While Minimizing Costs
The AMETEK Thermox® Remote Calibration Unit (RCU) ensures maximum confidence in the accuracy and stability of all Thermox WDG-IV/C/M, HP II, C/M, WDG-Insitu/2000 and WDG-Insitu/IQ oxygen and combustibles analyzers, and it allows for unattended, automatic calibration to minimize labor costs. The unit’s rugged stainless steel enclosure is fully weatherproof and corrosion-resistant for long life and minimal maintenance. Class 1, Div 2 certification for use in hazardous areas is available. The unit easily replaces existing remote calibration units and is compatible with all and existing Thermox WDG oxygen and combustibles analyzers. Oxygen span calibration uses instrument air, while an alternative cal gas input option allows for the use of certified calibration gas. Based on a field-proven design pioneered by AMETEK, Thermox analyzers offer fast response, accuracy and ease of maintenance in a wide range of combustion efficiency applications. In addition, AMETEK offers a comprehensive range of LAND combustion efficiency and environmental monitoring instruments. Along with Thermox and LAND instruments, AMETEK Process Instruments also manufactures non-combustion analyzers, including trace oxygen and moisture analyzers, photometric and laser analyzers, and Dycor quadrupole mass spectrometers. AMETEK instruments are fully supported by a global network of sales representatives and technical support.www.ametekpi.com
TA7000R Reduction Gas AnalyzersProvide Reliable Measurement Of Trace H2 and CO at Extremely Low Concentrations
The ta7000R Series gas  chromatographs from AMETEK Process Instruments are designed to monitor the purity of gas distributed to clean rooms and production tools in the latest semi- conductor fabs. The units provide rapid and reproducible results at extremely low concentrations. The monitor incorporates many advanced features for the reliable detection of H2 and CO in the parts per trillion (ppt) range. The ta7000R platform includes a dedicated sample processing system, a single high sensitivity detector and on-board data analysis electronics. It is equipped with a Reduction Gas Detector for H2 and CO detection. The unit has a detection limit below 500 parts per trillion and is available for use on nitrogen, oxygen, helium and argon sample streams. The ta7000R Series is part of a family of trace analyzers from AMETEK for process instrumentation.
AMETEK Process Instruments
Newark, DE
www.ametekpi.com
Tel: 1-800-222-6789
E-mail: Jim.McKinley@ametek.com
Expanded Digital Communications Capabilitiesin the 4800 Series Mass Flow Controllers/Meters
Brooks Instrument, a provider of advanced flow measurement, control, and level solutions, enhanced digital communications capabilities on the 4800 Series mass flow meters and mass flow controllers. In addition to the analog and RS232 communications, customers can now choose Profibus or RS485 that is delivered in a small field installable module that mounts directly on top of the 4800 Series device. The 4800 Series with Profibus supports both DPV0 cyclic and DPV1 acyclic data communication. It has a standard 9 pin female D-connector for signal and an M5 connector for power. Baud rates from 9600 up to 12M are supported, which are automatically detected. The 4800 Series with RS485 has a physical layer with proprietary “S-Protocol” based on HART® command set. It has a standard 15 pin male D-connector for signal and power. Baud rates from 1200 to 38.4K are supported with a top accessible rotary switch for baud rate selectionwww.brooksinstrument.com
B-Series Gas Mass Flow Controller ImmuneTo Pressure and Temperature
Variations Brooks Instrument’ B-Series mass flow controller family of mass flow products are designed to be insensitive to fluctuations in pressure and temperature. Built on a standard 1.125-inch wide platform with a powerful user interface and local digital display, the B-Series provides a compact flow measurement and control solution which eliminates the need for costly temperature and pressure control devices and systems. Whether flowing gas to a CVD chamber, chemical research reactor, fuel cell test stand, or any other important flow control application, the quality of your results are only as good as the performance of your mass flow controller. The B-Series is a pressure- and temperature-insensitive device. The mass flow controller actively measures line pressure and adjusts the control valve to virtually eliminate actual flow and flow signal changes as a result of pressure fluctuations. In addition, the output of every B-Series mass flow controller is characterized over the full operating temperature range of the device allowing superior measurement and control accuracy regardless of process or ambient temperature conditions. The B-Series incorporates sophisticated internal self-diagnostic routines that continuously check the health of the device. In the event of a diagnostic fault, an alarm code flashes on the user interface. An easy to use service port provides additional diagnostic capability, minimizing the need to remove the mass flow controller from process service.
Brooks Instrument
Hatfield, PA
www.brooksinstrument.com
Contact: Jim Hollis
Tel: 1-215-362-3527
E-mail: jim.hollis@brooksinstrument.com
TIC Instrument Controller
Precise Sensitivity for Contamination Control withTranspector® 2 Gas Analysis System
The INFICON Transpector® 2 Gas Analysis System provides accurate and reliable data for vacuum  process monitoring, process diagnostics, and leak detection. In the Transpector 2, increased hydrogen sensitivity makes contaminants visible at sub-ppm levels. Low minimum detectable partial pressure for all gases means better contamination control, as well as faster and more stable scanning for maximum performance in today’s faster processes. Improved abundance sensitivity, superior peak position and amplitude stability contribute to the superior performance of this RGA. Combined with TWare 32 software, Transpector 2 is the ideal instrument for production process monitoring, data collection, and statistical process control. Firmware capability has been expanded in Transpector 2, and because it’s a smart sensor, you still have the flexibility of using your existing computer or choosing a PC from INFICON to run one or multiple gas analyzers. Transpector 2 is easily multiplexed to make multichamber systems simpler and more economical to operate.www.inficon.com
T-Guard Leak Detection Sensor Offers Cost-Effective,High-Sensitivity Leak Detection
The INFICON T-Guard™ Leak Detection Sensor combines the sensitivity and speed of helium leak detection with the cost of pressure decay systems. Its unique design works with simple chambers at atmospheric pressure, eliminating the need for costly and complex high-vacuum chambers and pumps. T-Guard Leak Detection Sensor is a reliable alternative to pressure decay and water bath leak detection, providing up to 100 times the sensitivity with low cost of ownership and high ease of use T-Guard’s unique design maximizes reliability and uptime. Its sensor uses robust, maintenance-free Wise Technology™ , which has no wearing parts or failing ion source filaments, so scheduled downtime is minimized. Intelligent internal software enables T-Guard to recognize and communicate leak rate signals quickly and reliably.
INFICON
East Syracuse, NY
www.inficon.com
Tel: 1-315-434-1100
E-mail: reachus@inficon.com
B-RAX 3000 Rack-Mount Vacuum Gauge Controller
InstruTech’s rack-mount vacuum gauge Controller dubbed the B-RAX 3000 is capable of operating one InstruTech Ionization gauge and two convection gauges providing a measurement range from 1 ×10-9 Torr to atmosphere. The B-RAX vacuum gauge controller uses a different approach to traditional full range vacuum measurement practices. This results in significant cost savings for the user. The Electrometer for the Ionization gauge is built in to the InstruTech’s IGM-400 Ionizatio
n gauge module instead of the controller itself. This allows the B-RAX to be offered as a compact, low heat generating and low cost multi-gauge vacuum gauge controller. The B-RAX is offered with three independent front panel pressure measurement displays as well as three set point relays for process control. The Controller can also accept and display pressures using alternate analog inputs from other types of vacuum gauges such as a capacitance diaphragm. The setup and programming is provided via a front panel setup screen and push buttons. The B-RAX is offered as a space saving half rack design, bench top or instrument panel. It can also be mounted as a full rack or dual rack using rack panels.www.instrutechinc.com
IGM-401 “Hornet” Miniature Ionization Vacuum Gauge Module
InstruTech’s miniature hot filament Ionization vacuum gauge module the IGM401, dubbed the “Hornet” is for measuring pressures from 1 × 10-9 to 5 × 10-2 Torr. The IGM401 is a rugged metal Ionization gauge with Dual Filaments. It incorporates numerous features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings do not experience temperature drift. The IGM-401 is offered with a extremely bright, crisp OLED display, one log-linear analog output, one setpoint relay and an RS485 interface. The display menu provides the user the choice to select from 16 common gases without having to apply manual correction factors. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. In addition to high vacuum measurements, a option now available with the Hornet allows for connection of two convection vacuum gauges to the Hornet. It will operate and provide measurements from two external convection gauges without the need of another controller.www.instrutechinc.com
CVM211 “Stinger” Convection Vacuum Gauge Module
InstruTech’s CVM-211 series vacuum gauge module with onboard electronics/controller dubbed the “Stinger,” is based on the convection vacuum gauge principle, and measures pressures from 1000 to 10-4 Torr. Requiring minimal installation space this miniature convection vacuum gauge module offers one of the smallest form-fit designs available in a vacuum gauge. The Stinger is powered by 11 to 30 VDC and provides a non-linear analog output as well as one process setpoint relay for controlling vacuum system pumpdown and venting. The Stinger module also includes an extremely simple user interface with a built-in 3-digit LED display, for readout of pressure, and for setup, calibration, and operation of the unit.
InstruTech, Inc.
Longmont, CO
www.instrutechinc.com
Tel: 1-303-651-0551
E-mail: info@instrutechinc.com
Ultra-High Purity Gas Delivery Systems
MDC SemiSystems manufacturers complex ultra-high purity gas delivery systems. Core capabilities include UPH orbital welding, hand welding, tube bending, assembly and system integration. Gas cabinet systems can include 1 to 4 cylinder gas cabinets; multi-gas cylinders with single controller interface; 1 to 14 stick VMB configurations; manual/automatic/semiautomatic gas cabinets and life safety & SCADA interfaces. Interior wetted surfaces are electropolished to 10 to 15 ra; and have auto switchover; vacuum purging; powder coated 11 gauge steel enclosures; a pressure range 5 to 3000 PSI. Wetted parts are 316L stainless steel with filtration to 0.003 µm. A 4•exhaust stack with monitoring sensor; seismic restraint standard color touch screen or two line display; quality standards include UL-508 listed controller, leak tested to 1 × 10- 9 cc/sec atm, moisture, oxygen, particle, testing to the ppb level and SEMI F-15 tracer gas testing is available. Gas Panels can include traditional VCR, 1- 1 /8• C-seal and W-seal, and 1- 1 /2• C-seal and W-seals. Wetted parts are 316L stainless steel with filtration to 0.001 µm. The interior surface is electro- polished to 10 to 15 ra with anodized or powder coated back panels; a pressure range of 5 to 3000 PSI; leak tested to 1 × 10-9 cc/sec atm. Also, particle, moisture, oxygen, testing to the PPB level with functional testing to customer specifications is available. Calibration is included for MFCs, transducers and valves made of stainless steel. High purity diaphragm valves are standard with optional lockout valves, pressure rated 3000 psig with compact valve clusters for purging and optional proximity switches for air operated valves. Facilities Connection Box and Adapter Plates may include a facilities connection box and adapter plates to reduce the time and cost associated with process equipment installation.
MDC SemiSystems
A division of MDC Vacuum Products LLC
San Jose, CA
www.mdcsemisystems.com
Tel: 1-866-926-3754 or 1-408-350-0244
E-mail: sales@mdcsemisystems.com
DELTA™ Flow Ratio Control for Process Optimization
Optimizing process performance just became easier with the MKS DELTA™ Flow Ratio Controller (FRC). Widely used in a variety of flow splitting applications such as etching, stripping, and PECVD, the DELTA™ Flow Ratio Controller (FRC) provides users with the ability to distribute gas or gas mixtures to two different zones in a process chamber. Send the DELTA™ Flow Ratio Controller (FRC) a gas — or any mixture — and a ratio set point and the DELTA™ Flow Ratio Controller (FRC) will divide the gas into two separate output channels automatically. Integration of the DELTA™ Flow Ratio Controller (FRC) into new and existing process tools is easy. With a variety of flow ranges to choose from, a DELTA™ Flow Ratio Controller (FRC) exists to meet your needs. With copyrighted calculators our applications engineers are ready to help choose the right model for your application. MKS will send you the electronic files of the mechanical and electrical details to get you started on integration. Since the DELTA™ Flow Ratio Controller (FRC) maintains sub-atmospheric line pressure during operations, special containment is not usually needed.
MKS Instruments Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS Applications
Tel: 1-978-284-4000
E-mail: mks@mksinst.com
Intellisys Pressure Control
Nor-Cal Products offers unequalled performance with the Intellisys downstream pressure control system, providing measurable process benefits through higher resolution, speed and reliability. The Intellisys Adaptive Pressure Controller (APC) merges closed loop motor control with adaptive pressure control to provide advanced control system performance. An advanced adaptive algorithm eliminates pressure overshoot or gradual ramps during pressure transition.A Digital Signal Processor (DSP) enables DeviceNet™ communications protocol and programming flexibility for customer or process specific requirements. Intellisys motor control technology eliminates belts, gears and position switches, improving reliability, while increasing speed by at least a factor of twenty. High-torque geared drives are also available as an option. Standard sizes range from one to twelve inches. Substantial cost and space savings can be realized with the IQ-Series butterfly valves. All the control electronics are incorporated on to the valve motor drive, resulting in a compact size that is easy to integrate on any system. Nor-Cal Capacitance Diaphragm Gauges (CDG) feature a ceramic diaphragm designed to help stabilize output noise due to thermally induced variations found in other metal diaphragm designs. Heated, non-heated and DeviceNet compatible gauges are available with several tube fittings and in standard pressure ranges from 0.1 to 1000 Torr. Our Universal Valve Drive (UVD) easily replaces older drive technology found on other manufacturers’pressure control valves. When used with our APC, the universal valve drive can upgrade a competitive valve to approach Intellisys performance levels.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Tel: 1-800-824-4166
E-mail: info@n-c.com
PhoeniXL 300 Helium Leak Detector
The PhoeniXL 300 Helium Leak Detector offered by Oerlikon Leybold Vacuum is a mobile helium leak detector suited for use in quality control labs, series production and service. The PhoeniXL 300 is qualified in industry and research applications where high vacuum engineering leak testing including cleanroom compatibility is required. An optional sniffer probe allows for PhoeniXL 300 to be used as a sniffer leak detector. PhoeniXL 300 is available with oil-sealed or oil-free vacuum pumps. Customer may also use their existing external backing pumps. The PhoeniXL 300 is easy to handle offering reliable measurement results, quick readiness for operation, fast response time and automatic calibration. The available LCD Display shows a trend mode, bar mode, universal display, vacuum diagrams and status information. Primary features include: lowest detectable leak rate for helium is < 5 × 10–12 mbar L/Sec; ready for operation in < 3 minutes after start-up; Helium pumping speed is 2.5 liters/second; counter flow design principle extends the service life for cathodes; normal operation at 15 mbar vacuum inlet pressure; ability to detect hydrogen in addition to helium and our exclusive 36 month warranty for the ion source. The PhoeniXL 300 offers an ergonomic and compact design that is maintenance-friendly.
Oerlikon Leybold Vacuum USA, Inc.
Export, PA
www.oerlikon.com/leybold
Contact: Mike Ridenour
Tel; 1-800-764-5369
E-mail: mike.ridenour@oerlikon.com
KJLC 354 Series Ion Gauge
The Kurt J. Lesker Company’s KJLC354 series features a dual hot filament Ionization gauge transducer with integrated electronics and a built-in display. This hot filament Bayard-Alpert Ionization gauge module is offered with a space-saving built-in controller and display. The KJLC354 provides the basic signal conditioning required to turn the gauge into a complete measuring instrument. The built-in Controller is offered with a standard bright OLED display providing a convenient user interface for setup and operation of the vacuum gauge. The emission current can be set to automatically switch between 4 mA and 100 µA. This results in optimal and stable pressure readings over the entire measurement range from1 × 10-9 Torr to 5 × 10-2 Torr.www.lesker.com
KJLC™ 902 Series
The Kurt J. Lesker Company’s 902 series of pressure transducers combine the accuracy and gas independence of a Piezo transducer with TRUE Digital communications. The transducer features a unique temperature compensator allowing high accuracy over a wide measurement from 1 to 1000 Torr. The CE marked unit features RS232 orRS485 and analog outputs. An optional LED on-board display is also available.www.lesker.com
KJLC 392 Series Ion Gauge with Dual Convection
The Kurt J. Lesker Company’s KJLC392 series features a dual hot filament Ionization gauge transducer with integrated electronics capable of operating two Convection gauges simultaneously. This hot filament Bayard-Alpert Ionization gauge module is offered with a space-saving built-in controller and display. The KJLC392 Ionization gauge module can combine the vacuum measurement with one of the Convection gauges to provide full range measurements from 1 × 10-9 Torr to atmosphere, or simply operate the Ion gauge and the two Convection gauges as individual gauges. TheKJLC392 provides the basic signal conditioning required to turn the gauge into a complete measuring instrument. The built-in Controller is offered with a standard 3-channel bright OLED display providing a convenient user interface for setup and operation of the vacuum gauge.www.lesker.com
KJLC BDG Series
The Kurt J. Lesker Company Bourdon gauges are liquidfilled industrial dial gauges suitable for pressures from atmosphere down to 1 Torr. Available in 3 different pressure models — Torr, mbar, or in Hg — they feature corrosion and impact resistant, Zytel nylon case with removable bezel for easy calibration. The large dial face measures 2- 1 /2 inches across the dial and the clear glycerin fill provides stable readability in spite of vibration. The internal “breathing diaphragm” virtually eliminates the air bubble in the mid range of the gauge for improved readability, prevents freezing, clogging and corrosion and compensates for temperature fluctuations.www.lesker.com
KJLC™ Convectron® Equivalent Series
The Kurt J. Lesker Company Convectron Equivalent series of pressure transducers and sensors are direct “drop in” replacements for the Granville- Phillips Convectron gauges. All controllers, cables, and sensors are interchangeable PLUS they feature added benefits such as a more rugged design that is less prone to damage from mechanical shock or vibration and a faster response to pressure changes. RS232 and RS485 are standard ports on these controllers.www.lesker.com
KJLC™ DV-6M Equivalent Thermocouple Sensors
The Kurt J. Lesker Company KJL-6000 thermocouple tube is a “drop in” pin exact replacement for the Teledyne Hastings DV-6M. However, the KJL-6000 features an all-metal stainless steel body and pins that are weather and corrosion resistant. The superior internal thermocouple supports ensure a longer life. This rugged tube can withstand a drop of 6 feet without damage. The Kurt J. Lesker Company offers a 30-day money-back guarantee on this product, with no questions asked.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Duane Bingaman,Vice President, Sales and Marketing
Tel: 1-800-245-1656 or 1-412-387-9204
E-mail: pressure@lesker.com
New OmniStar™ Gas Analysis System
The Pfeiffer Vacuum OmniStar™ gas analysis system is a high performance, flexible quadrupole mass spectrometer in a compact bench top package. OmniStar is capable of simultaneously monitoring up to 128 gasses from 100% to below 10 ppb with available mass ranges of 1 to 100, 1 to 200 and 1 to 300 amu. Dual filaments are standard with the OmniStar for maximum uptime as well as a secondary electron multiplier detector for fast, low level measurements. Pressure is constantly monitored via a Pfeiffer Vacuum Full Range gauge and the filaments and detector are interlocked based on a user defined trip level. Integral bake-out and inlet heaters are included to reduce backgrounds and prevent condensation. The OmniStar allows for monitoring of gas purity at point-of-use or for accurate quantitative gas mixture measurements. Process control software is standard offering many options for interfacing to the gas handling system. In addition, it is available with protection for corrosive and explosive gas mixtures and can be used over a wide range of gas pressures with many inlet options. Powerful Quadera™ software running on the latest Windows platforms, handles the analysis, operation and data collection. Quadera features matrix- inversion routines for quantitative analysis of gas mixtures even with overlapping masses as well as a Visual Studio™ module for script creation and programming of custom user interfaces. Ethernet LAN communication allows access to multiple units with high data transfer rates over standard networks.www.pfeiffer-vacuum.com
PrismaPlus™ The RGA with Sensitivity,Stability and Intelligent Operation
PrismaPlus™ , the mass spectrometer for qualitative and quantitative gas analysis and leak detection, is based on Pfeiffer Vacuum’s proven track record in the field of mass spectrometry over the last 40 years. The combination of high sensitivity, stability and intelligent operation is the added “Plus” in the PrismaPlus mass spectrometer. The PrismaPlus delivers precise and stable results in three different mass ranges (1 to 100, 1 to 200 and 1 to 300 amu) down to a detection limit of 1× 10–14 mbar. With available Faraday and electron multiplier detectors, even low-level contamination can be quickly identified. In addition to displaying scan data and selectable partial pressures, direct attachment of a pressure gauge enables the PrismaPlus to also accurately monitor total pressure. The Quadera® software is not only easy to operate, it also offers an easy-to-read platform for capturing and visualizing all measured data and parameter records. Together with a wide selection of interfaces such as Ethernet, digital and analog inputs and outputs, integration into any system is easily achieved. A simple click of the mouse activates the preprogrammed functions. Custom application-specific routines may be created via a Visual Studio™ macroprogramming module. With the ability to select mass ranges, detectors, ion sources and interface options, this mass spectrometer can be employed in many areas, such as: industrial and analytical environments, R&D, leak detection and semiconductor production, as well as in coating technology. The PrismaPlus is the optimum solution for applications ranging from quality assurance and residual gas analysis through to complex, quantitative tasks.
Pfeiffer Vacuum, Inc.
Nashua, NH
www.pfeiffer-vacuum.com
Contact: Steve Foster, Product Manager
Tel: 1-603-578-6500
E-mail: prismaplus@pfeiffer-vacuum.com
Low Cost Gas Purification
The R.D. Mathis Company GP100 model gas purifier has been designed to fill the needs of R & D engineers and scientists as well as production staff to provide a lightweight, compact, low cost inert gas purification system. This unit operates off of standard cylinder gas to purify inert gases to ultra high purity levels and avoids the problem of cylinder walls outgassing during storage. This unit can be placed in operation in less than 1 hour, simply by connecting the inlet and outlet fittings and a 110 VAC (or 220 VAC) electrical connection. The GP100 has been shown to purify 99.8% argon gas to 99.9991% purity as part of a worst-case test. Available literature indicates that starting with a high purity gas and using all stainless steel fittings, impurity levels as low as 10 ppm in oxygen can be obtained. While the unit was designed primarily for argon gas, it may be used for helium, xenon and neon. Applications for the unit include purification of gases for sputter- ing modules, crystal growth furnaces and glove boxes. A paper on “The Purification of Inert Gases”, discussing a variety of inert gases is available upon request.
R.D. Mathis Company
Long Beach, CA
www.rdmathis.com
Tel: 1-562-426-7049
E-mail: rlumley@rdmathis.com
Low Cost RGA
The ULVAC Qulee BGM Quadrupole mass spectrometer is cost effective leak detection, RGA and process gas monitoring in vacuum systems. It features integrated measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Torr, mbar, or Pascal of He, H2O, N2, O2, O2/N2 ratio with a mass range of 1 to 100 and 200 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. Qulee BGM features built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software. The minimum detectable partial pressure is 1 × 10-14 Torr. Optional differential pumping is available for applications that require it.www.ulvac.com
Quadrupole Mass Spectrometer
The compact ULVAC Qulee quadrupole mass spectrometer features integrated measurement display and control electronics,  eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Pascal, Torr or mbar of He, H2O, N2, O2, O2/N2 ratio, and a user selectable channel from mass ranges of 1 to 50 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. The built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software enable Qulee to be used for leak detection, RGA and process gas monitoring in PVD systems. A maximum operating pressure of 15 mTorr can eliminate the need for differential pumping, and the minimum detectable partial pressure is 1 × 10-12 Torr.www.ulvac.com
High Sensitivity RGA
Featuring the highest sensitivity and largest mass range of the series, ULVAC has introduced two new members to the Qulee  family of Residual Gas Analyzers. The HGM 202 and HGM 302 units have measurable mass ranges of 1 to 200 and 1 to 300 amu respectively, with a minimum partial pressure measurement detection range of an amazing 10-15 Torr. Outstanding for use in research experiments such as thermal desorption gas analysis, the Qulee units are as easy to use as they are sensitive. One-touch operation of the measurement display and control electronics eliminates the need for a PC to operate the unit. However, the included QCS software package enables a host of additional functionality to this high end RGA, such as auto filament shut-off in the event the analyzer comes in contact with unacceptably high levels of corrosive gasses, such as HF, CL, NF2, HBR, CF3, SiH2Cl2 and others that the user is able to program. Maximum sensor operating temperature is 250°C and the HGM can be baked up to 300°C. Delivery is from stock.
ULVAC Technologies, Inc.
Methuen, MA 01844
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@ulvac.com
Power Supplies for Vacuum Thin-Film Deposition and Coating
This Vacuum Technology & Coating product showcase includes power supplies used in a wide variety of vacuumbased production deposition and coating applications.
Compiled by Terrence Thompson, Contributing Editor
Deposition and coating systems require extremely dependable power supplies. Fortunately, a wide array exists to fit virtually any application. With increasingly demanding deposition and coating system requirements, and the ever-present cost considerations for industrial and scientific applications, the expectations for power supplies increases. Power supplies provide outputs of DC or AC in a wide range of power levels. Power supplies can have primary outputs ranging from very low to hundreds of kilowatts with frequencies from DC to 13.56 MHz or beyond. Depending upon the application, voltage or current regulation may be more important. Current ratings also can range from low to very high. These are but a few considerations when selecting a power supply.
Specific Needs? No Problem!
How crucial is size and are matching networks and cooling systems needed? What kind of output programming and control are needed and what specific computer or network digital interface needs must be met? There are many choices to meet the user needs. With DC supplies, there are steady and pulsed outputs. Typical DC power options include high current, high voltage and voltage regulation. Pulsed DC supplies, for example, can improve surface uniformity in applications such as semiconductor wafer copper plating. For AC supplies, many factors must be considered. High-frequency power sources must deliver reliable power for continuous, demanding use in vacuum applications including vacuum processing such as PVD, RF sputtering, plasma etching or deposition and reactive ion etching.
Very Reliable Power Sources
Analytical instrumentation power supply voltage requirements can range from just a few volts to several hundred thousand volts, often with multiple critical voltages in a particular instrument. Standard and custom high voltage power supplies are used in instruments for spectroscopy and many other analytical imaging and process applications.Voltage ripple (or lack thereof), stability over time, repeatability and accuracy are factors to consideration if reliable scientific data are the goal. For analytical instrumentation used in production process control, reliability is extremely important.
Product Descriptions
In the following product descriptions, vendors often make subtle distinctions to focus on specific intended applications so direct comparisons may be difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
Paramount® RF Power-Delivery System Offers Precise Control
The Advanced Energy Industries, Inc. half-rack, 3 kW Paramount® RF power supply features an enhanced power and impedance measurement system that delivers exceptional power accuracy and control at 13.56 MHz and fixed non or -50 variable • loads frequencies — , beyond 3: into 1 VSWR — 50 • . Able to keep pace in real time with the most abrupt plasma-impedance changes, the Paramount RF power-delivery system enables faster transitions, shorter process steps, and reduced process times for next-generation technology nodes. Its impedance measurement rivals the accuracy of a network analyzer, while optional frequency tuning tunes virtually instantaneously (i.e., ms), faster than any other product on the market. The result is truly unprecedented accuracy, repeatability, and process control.www.advanced-energy.com
Ovation™ Very-High Frequency (VHF) Power Delivery System
The Advanced Energy Industries, Inc.  Ovation™ fullyintegrated, power delivery system enables faster, higherprecision processes, such as those required for demanding narrow-linewidth, dielectric etch processes through implementation of a unique power delivery scheme. It is the first to accurately deliver power into a non-50-ohm environment without an external sensor, reacting faster than traditional power supplies. The use of 60 MHz reduces voltage potential across the plasma sheath, minimizing ion etch damage, thus improving film quality and yields. Its embedded measurement technology enables previously unavailable insight into chamber plasma parameters and performance.www.advanced-energy.com
Cesar® RF Power Supplies Offer Customized Performance for Demanding Plasma Applications
The Advanced Energy Industries, Inc. versatile Cesar® platform offers exceptionally consistent RF power-delivery performance, as well as a diverse selection of models, each with a unique set of features and capabilities (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW; with a variety of user interfaces and input options). This enables you to choose a unit suited specifically to your application—without lengthy custom-generator lead times. Standard platform packaging makes it easy and inexpensive to replace one Cesar unit with another when your power requirements change. This also minimizes training costs and simplifies design and setup for systems with multiple RF power supplies.www.advanced-energy.com
Pinnacle® Plus+ Pulsed-DC Power Supply for Critical Reactive Processes
The Advanced Energy Industries, Inc. Pinnacle® Plus+ product line enables higher film quality for reactive sputtering, bias, and high-quality metal sputtering applications. Available in single- and dual-output 5 kW and single-output 10 kW models, this product line is ideal for extending the performance of existing processes as well as for expanding the possibilities for developing new, previously unachievable DC processes. The Pinnacle Plus+ line provides individually controllable, dual-output, pulsed-DC power from a single unit; increased process flexibility (up to 350 kHz pulsing, wide tap range, variable duty cycle up of a minimum of 55% on time or a maximum of 45% reverse time), active front panel; and CE compliance.www.advanced-energy.com
Navigator® Digital Matching Networks
The Advanced Energy Industries, Inc. versatile Navigator® matching network's advanced technology provides rapid, accurate, and reliable matching across a wide range of load impedances—15 W to  30 kW. Equipped with microprocessor-controlled stepper motor circuitry and digital, user-selectable tuning algorithms, it provides greater consistency and accuracy than traditional analog-based tuning methods.An optional internal Z’Scan® RF sensor provides realtime measurement and analysis of process power and impedance, enabling you to identify and significantly reduce process variability. In addition, optional Virtual Front Panel (VFP) software enables you to monitor and command the matching network through a personal computer.
Advanced Energy Industries, Inc.
Fort Collins, CO
www.advanced-energy.com
Contact: Richard Roth, Vice President Marketing
Tel: 1-970-407-6280
E-mail: sales.support@aei.com
VF Series Multi Channel Synthesizer Modules
Comdel’s new VF Series Multi-Channel Synthesizer Modules provide phase adjustable output to avoid destructive arcing and cross-talk in multiple cathode plasma processing chambers. The VF Series can accommodate up to sixteen channels and may be programmed to any frequency between 2 and 60 MHz. Frequency changes are simultaneous and phase continuous. The phase of the adjustable channels can be offset from the phase of the fixed channel to within 0.1 degree resolution. The VF Series allows adjustment for cable length dependencies. Higher and lower frequency synthesizer modules are available.www.comdel.com
CV Series Very High Frequency (VHF)RF Power Supplies
Comdel CV series power supplies offer stable VHF power at frequencies from 30 to 80 MHz. Configured within Comdel's standard control and monitoring package, the CV series offers exceptional ease of operation. RS-232 and analog controls are provided as standard; DeviceNet is optional. Synthesizer-driven, frequency agile configurations are also available on all CV series models. These VHF solid-state generators are ideal for use in VHF plasma systems, solar photovoltaics, CW and pulsed laser systems, and small geometry induction heating applications.www.comdel.com
CXH High Frequency, High Power RF Power Sources
The Comdel CXH series hybrid, high frequency power sources provide stable, reliable RF power for plasma applications and  industrial heating. The CXH series is designed to operate at a fixed frequency from 2 to 40 MHz at power levels from 15KW to 100KW. The solid-state driver section features microprocessor control for precise power control and diagnostic monitoring. Broadband phase linear circuitry in the driver section enhances system stability and eliminates driver tuning. The rugged amplifier design is well suited for demanding applications where stability and reliability in the presence of erratic loads is required.www.comdel.com
CLB Series Low Frequency RF Power Supplies
The CLB Series is the latest addition to Comdel’s line of low frequency RF generators. The new CLB Series of generators brings Comdel’s proven superior reliability and small, lightweight packaging of our CB high frequency series to low frequency applications. Delivering 2500 to 12,000 watts of RF power and operating from any fixed frequency from 20 KHz to 2 MHz, the CLB Series is the ideal solution for plasma, flat panel display, and thin film processes. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. Features include frequency agile tuning with phase lock tuning and software algorithm, forward or delivered power mode regulation, and safety compliance. This package design combines both the RF generator and switching DC power supply in one compact 7” H × 19” W × 22” D package.www.comdel.com
CPMX1000 Match Pro Automatic Tuning Network
Comdel announces the CPMX1000,  the newest addition to their extensive line of automatic impedance matching networks. Capable of handling RF currents of 20 Amps and fixed frequencies from 2 to 27.12 MHz, this new match is the ideal solution for matching to a wide range of process loads. Designed with air variable capacitors, this match provides a cost effective alternative for power applications up to 1250 watts. The CPMX1000 features automatic and manual modes and can be used as a stand-alone unit or controlled remotely using the CMPX Remote controller. DeviceNET as well as standard RS-232 and analog control are options in the remote controller.www.comdel.com
CPMX6000 Match Pro Automatic Tuning Network
Comdel’s CPMX6000 system is engineered with Comdel's unique PROTRAK, a high-speed tuning algorithm that gradually slows the  system as it approaches the tuning point, allowing a precise match even in high "Q" loads. This proportional control circuitry illustrates the critical difference between Comdel's Match Pro and other matching networks. The Match Pro adjusts input impedance to 50 Ohms quickly, accurately and dependably--in response to the changes in load characteristics during your process. The CPMX6000 delivers a 75 A load current and features automatic and manual modes with local and remote manual control of tuning capacitors, and the ability to preposition capacitors to the optimal plasma ignition point prior to turn on, resulting in quick and reliable tuning.www.comdel.com
ESC-HV Electrostatic Chuck Power Supply
The ESC-HV, Comdel’s latest electrostatic chuck power supply, can be configured to deliver from 6 to 10 kV of power for reliable handling in large surface processes. Equipped with low stored energy and built-in current limiting, the ESC-HV will safeguard your process from surges and arcs. This user-friendly design contains parameter adjustments through variable controls, and is fully programmable to give the user maximum flexibility. Contained in a compact 3.5” × 9.5” × 12.5" chassis, weighing 2.5 lbs, the ESC-HV can be located in any convenient location and in any orientation. There are no special requirements needed for cooling and shielding.www.comdel.com
ESC Electrostatic Chuck Power Supplies
Comdel’s ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight supplies come complete with NRTL product safety marks, built in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications. Available in 1, 2, 3, & 5kV packages, the ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer. Additional package options include an imbedded OEM model, a 5kV unit with unipolar output (available in positive or negative polarity), and the extra small ESC mini measuring 2.5” × 4.25” × 9.5”.www.comdel.com
CDX Series Dual Frequency RF Power Supplies
Comdel’s CDX dual frequency power supply is now available in dual high frequency sections. With a 1200 or 2000 watt design, the high frequency (HF) section provides 600 or 1000 watts of power, with optional frequencies from 2 to 60 MHz. The former low frequency (LF) section can deliver 600 or 1000 Watts, now with optional fixed or variable frequencies ranging from 20 kHz to 13.56 MHz. Making the CDX series available with dual high frequency sections provides more flexibility for plasma applications. The CDX Series offers ease of control, small physical size, and the ability to withstand large changes of load impedance without failure or premature foldback. Sharing a common cooling system and DC power source, the CDX simplifies facility requirements and reduces spare parts inventory, which reduces OEM costs without sacrificing performance.www.comdel.com
CX Series High Frequency RF Power Supplies with Microprocessor Control
The Comdel CX series RF generators are all solidstate generators with a power range from 600W to 10 kW and frequencies from 2 to  30 MHz fixed with optional frequency agility. The rugged CX series provides unparalleled reliability, utilizing the highest quality parts throughout with components typically run at half its rated tolerances. Each power source produces maximum transfer of power into a 50 ohm resistive load and is designed to withstand large deviations in load impedance without failure. Comdel’s CX series power supplies use patented “S Technology” for process stability. This stabilizing technology reduces process development time and improves process repeatability. Nearly all of the CX series generators carry the ETL Listed Mark of product safety compliance and have passed SEMI F47 voltage sag immunity testing. The CX series generators are also designed to meet CE Mark directives and standards.www.comdel.com
CB Series High Frequency RF Power Supplies
RF generators from the Comdel CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 2 to 60 MHz. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on Comdel's proven RF amplifier technology. Features include forward or delivered power mode regulation, safety compliance, patented “S Technology” for unparalleled stability, and small, lightweight packaging from 15 lbs for the CB600 to 95 lbs for the CB5000. The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications. Note: “Palm Pilot used in photo to give perspective--not included with product purchase” www.comdel.com
CLX Series Low Frequency RF Power Supplies with Microprocessor Control
The Comdel CLX series RF generators are all solid-state generators with a power range from 600W to 10 kW and operate at any  fixed frequency from 20 kHz to 2 MHz or with optional frequency agility ± 10% of center frequency. In addition to offering superior performance in the field, the CLX series gives you both an analog and digital input/output interface. The programmable digital interface is accessible through the front panel or remotely through an RS-232 or optional DeviceNet interface to match your system requirements. All units come complete with a front panel LCD display and microprocessor control. Nearly all of the CLX series generators carry the ETL Listed Mark of product safety compliance and have passed SEMI F47 voltage sag immunity testing. The CLX series generators are also designed to meet CE Mark directives and standards.www.comdel.com
CLF Series Low Frequency RF Power Supplies
The Comdel CLF 5000 Series low frequency power supplies provide stable process power up to 5 KW at any fixed frequency over the range of 20 to 450 KHz. These power sources may be operated in “fixed frequency” or autotuned up to +/- 15% bandwidth. In many applications, the combination of auto-tune and excess power headroom will allow delivery of power to changing reactive loads without the necessity of a mechanically tuned matching network. Pro- tective circuitry prevents over-voltage and over-current failures. The CLF 5000 provides stable, reliable, trouble-free RF power for plasma systems worldwide and is CE Marked for product safety and SEMI F47 compliant.www.comdel.com
CPS Series High Frequency RF Power Supplies
The Comdel CPS series high frequency power supplies are an economical and reliable RF power solution for plasma applications. Designed to operate at a fixed frequency from 2 MHz to 80 MHz, with a power range from 100 W to 1.25 kW. The CPS series has been in the field worldwide since its introduction in 1988 and has achieved some of the highest "Mean Time Between Failure" (MTBF) ratings in the industry. To achieve this distinction, top quality parts are used throughout the CPS design and typically run at half their rated tolerances. Output transistors are sourced adhering to tight specifications, then tested and beta-matched to assure reliability. For maximum performance at an economical cost, the parts count is kept to a minimum in the CPS series generators. This streamlined design gets the results OEM customers want: a high MTBF at a competitive cost.www.comdel.com
XDC 1000 DC Power Supply
The high-quality design of Comdel’s  XDC 1000 assures ultra reliability, while the small size fits easily into your system. What's more, with the XDC’s flexible options and controls, you don't need to purchase a new power supply every time you make a change in your system. Current and voltage control capabilities are standard with each supply. Additional features include self-limiting circuitry that eliminates short-circuit failures, low stored energy that reduces arc damage, and a wide range of input and output voltages. Comdel's XDC is the ideal supply for reactive PVD sputtering, DC Bias and hardcoating applications.www.comdel.com
RF Power with Turbotune Technology
Comdel’s entire RF product line including low frequency, high frequency, very high frequency, and dual frequency generators are offered with optional Turbotune Technology for maximum energy transfer with improved speed and reliability. Comdel’s Turbotune provides fast frequency tuning that can be custom configured for optimum performance. Variations in tune technology are system and process dependant. Turbotune utilizes software solutions through direct digital synthesis, a hardware option with phase detectors or combinations of both technologies to provide frequency tuning in the ideal configuration to match process requirements. Optimizing tuning designs can eliminate frequency overshoot, provide continuous frequency steps to avoid wafer damage, ensure tuning and locking in a fraction of a second, with easily adjustable parameters. Turbotune Technology improves speed and reliability, and reduces system cost by replacing a complex autotuning network with a small, simple fixed network.
Comdel, Inc.
Gloucester, MA
www.comdel.com
Contact: MaryBeth Masterson, Marketing Manager
Tel: 1-978-282-0620 Ext. 102
E-mail: marybeth_masterson@comdel.com
TruPlasma DC Series 3000 NEW Compact,Water-Cooled Continuous DC Power Supplies
The TruPlasma DC Series 3000 NEW is a new generation of compact, water-cooled continuous DC power supplies. Available with outputs of 20 to 160 kilowatts, these generators deliver reliable, accurate power over a broad impedance range. For this power supply, HÜTTINGER considerably improved the arc management system CompensateLine. In an arc event, the new CompensateLine better compensates the energy stored in the output circuits of the power supply and cables connecting power supply and cathode. Consequently, the TruPlasma DC Series 3000 NEW has very fast response times and minimal residual arc energy. With CombineLine, the power supplies ensure excellent layer quality, even in highly arcing sputtering processes. Thus they are best suited for coating processes in solar cell manufacturing or for architectural glass coating, where stability and continuous throughput are essential. Where only pulsed generators could be used in the past, the TruPlasma DC Series 3000 NEW now provides a cost-efficient alternative with optimum results. Another advantage of the TruPlasma DC Series 3000 NEW is its complete water-cooling, which makes for a very compact generator that can be easily integrated into existing coating lines. The power supply’s broad range of communication interfaces is another helpful feature. Moreover the water-cooling enhances the generator’s ruggedness.
HÜTTINGER Elektronik GmbH + Co. KG
A TRUMPF Group company
Freiburg Germany
www.huettinger.com
Tel: +49 761 8971-2158
E-mail: kerstin.schwaer@de.huettinger.com
R-Series RF power generators
The Kurt J. Lesker Company R-Series RF power generators are used for magnetron sputtering and plasma etching with available output ranges from 300 W to 5 kW at a 13.56 MHz fixed frequency. All units are air cooled to exceed the most stringent vacuum processing demands. Available features include: master and slave modes, automatic and matching networks, programmable high-speed pulsing, and CE marking for all R-Series units. Various control modes allow you to regulate DC and RF voltage as well as forward and load power leveling. Complete packages are available that include the power supply, automatic matching network, matching network controller, and all connecting cables that make ordering simple and quick.www.lesker.com
Ion Source Power Supply
The Kurt J. Lesker Company Ion Source Power Supply system is specifically designed to power the KJLC filamentless ion sources. The compact, rack mountable unit is 5¼ inches high and less than 18 inches deep, including all connections. The unit is capable of supplying an ion energy voltage up to 1200 eV and an output current up to 67 mA. All internal connections are k e y e d header/ s o c k e t connect i o n s . C o n t r o l voltages are derived from a high efficiency 300 watt supply. The overall efficiency of the supply is over 80%. The power supply is designed to allow complete manual control of all ion source functions. Individual digital meters are used to constantly display operating parameters. Standard ten-turn trimpots adjust each of the three power supply levels. Individual supplies and displays include Anode, Emitter and Accelerator. Momentary “On” and “Standby” buttons control the output to the gun and LEDs indicate whether or not the source interlocks are satisfied and whether or not the source has started.www.lesker.com
M.A.P.S. Family of Power Supplies
The Kurt J. Lesker Company M.A.P.S. power supply is a versatile unit typically used for applications involving heating and evaporation in a vacuum environment. Its modular design allows the unit to be configured with a variety of options. Standard features include a phase angle fired SCR to control power delivery. The M.A.P.S. power supplies are available in the models below and are appropriate with the applications described:
High Temperature Heater power supply—Model HTR is for process heater applications including substrate heating with quartz lamps; substrate heating with custom elements (graphite, etc); and bakeout heaters. Available power output from 2 kW to 8 kW.
Resistive Thermal Evaporation power supply—Model EVP is for basic thermal evaporation applications including boats; crucibles; and filaments. Optional transformers from 2 kW to 6 kW allow deposition from a wide range of materials. Manual or computer controlled switching is available to allow the deposition of multiple sources sequentially.
High-Temperature Metal Evaporation power supply— Model HTE is for high temperature evaporation (typically used with a furnace style source for higher melting temperature materials). When coupled with our HTE source high precision evaporation of up to 1500ºC is possible.
Organic Source power supply—Model LTE is for low temperature evaporation up to 15 amps for the evaporation of organic materials. Coupled with our Organic sources, precise control (± 3 ºC) of source temperatures from 100ºC to 600ºC is possible. Custom configurations are readily available with output power up to 4 kW.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Justin Poziviak, Deposition Product Manager,
Process Equipment Division
Tel: 1-800-245-1656 Ext. 7433
E-mail: justinp@lesker.com
R*evolution® Remote Plasma Source
MKS Instruments’ R*evolution® Remote toroidal plasma source delivers up to 6 kW of plasma power and up to 5 slm flow of clean radicals to the process, making ashing rates twice as fast as more conventional technologies. The high performance capabilities of the R*evolution extend far beyond strip and etch. This all-in-one remote plasma source is also ideal for ad- vanced applications that include wafer pre-cleaning, thin film deposition, and material/surface modifications. The R*evolution’s simple, compact and self-contained design allows for installation directly on the process chamber. Because of its efficiency and lower cost, the R*evolution remote plasma source significantly reduces overall investment and tool operating costs.www.mksinst.com
Mid-Frequency NOVA® Series RF Generators
MKS Instruments’ NOVA® RF plasma generators are compact, high-reliability, mid-frequency RF sources for PECVD and etch applications. DSP-Based power control provides excellent control, and stability for reliable, repeatable processing. Advanced features such as automatic frequency tuning enable fast and reliable methods of impedance matching to a plasma load. Models include the NOVA-25 generator with rated power of 2.5 kW and the NOVA-50 generator with 5 kW rated power, both at key frequency of 2 MHz.Mid-frequency models operate between 1 and 4 MHz with key frequency at 2 MHz.www.mksinst.com
Mid-Frequency Spectrum® RF Plasma Generators
MKS Instruments’Spectrum® 11002 mid-frequency RF generators are available in 11 kW of power at 2 MHz. Spectrum generators feature high power density, excellent stability, generous power margins and high reliability for lower cost of ownership and improved yield, wafer to wafer and run to run. These generators contain sophisticated control systems that enable such features as automatic frequency tuning. Mid-frequency models operate between 1 and 4 MHz with key frequency at 2 MHz.www.mksinst.com
High-Frequency SurePower® RF Plasma Generators
The MKS SurePower® platform of RF plasma generators is the most advanced class of 13.56 MHz generators commercially available. The SurePower® architecture incorporates  state-of-theart RF topologies, patented intrinsic power amplifier protection, improved design margins, and embedded V-I Probe® sensors to achieve the highest reliability, reproducibility, and accuracy of any generator in the marketplace today. The platform offers the highest power (15 kW) at 13.56 MHz in a 3U height package. Optional auto frequency tuning allows the use of fixed matching networks for faster tuning, greater overall system reliability, and lower cost. Sure-Power™ is available in power levels from 3.5 kW to 15.0 kW and provides exceptional performance, higher power levels than competitive offerings, greatest delivered power to the plasma, and excellent reliability. SurePower RF power generators are designed for all 13.56 MHz applications including: PECVD, HDPCVD, PVD, ALD, etch, and strip for the manufacture of integrated circuits, flat panel displays, and data storage devices.
MKS Instruments, Inc.
www.mksinst.com
Contact: Applications Engineering
Tel: 1-978-284-4000
E-mail: mks@mksinst.com
Low Voltage, High Current Power Supplies
The R. D. Mathis “LV Series” power supplies are low voltage, high current AC and uniquely designed for thermal evaporation.  The power supply’s primary use in the thin film industry is supplying power to resistive evaporation sources. The low voltage, high current AC power supplies were designed to meet a growing need for versatility and reliability in the industry. Both units incorporate a hand held remote control that displays amperage and voltage outputs while allowing an operator more freedom to move closer to the viewing port or the monitoring instrumentation. The low voltage, high current tap switch enables voltage range changes with ease and without having to relocate bulky cables. The units are SCR controlled and can receive up to 4 different type input signals to operate in a semi-automatic mode. The current limiting, soft start and interlock switches make these units extremely user friendly and easy to operate. Available in either 4 kW (800 amps at 5 volts) or 7.5 kW (1,500 amps at 5 volts), the conservative power ratings allow the units to run cool, while rugged construction and quality components make them reliable. Also available are 250 amp and 500 amp welding cables, cut to size, with a variety of terminal lugs (installed) to complete your power set-up.
R.D. Mathis Company
Long Beach, CA
www.rdmathis.com
Tel: 1-562-426-7049
E-mail: info@rdmathis.com
Thin-Film Deposition Rate Monitoring and Controller
This Vacuum Technology & Coating product showcase describes the thin-film deposition rate monitoring and controlling equipment used in a wide variety of production, R&D and other thin-film deposition applications. Also, see the related "Power Supplies for Vacuum Thin-Film Deposition and Coating Product Showcase” in this issue.
Compiled by Terrence Thompson, Contributing Editor
Depositing precise thin film layers requires knowing both the rate of deposition and how to control it to obtain the desired layer thickness. Deposition monitors/controllers determine film thickness during the coating/deposition process itself by acquiring continuous rate and thickness data. Depending upon the item being coated, in-process monitoring and control may be desirable. In other applications, checking the finished film is certainly sufficient.
Getting and Maintaining Control
There are several ways to monitor and control thin-film deposition parameters as well as ways to characterize the deposited films and coatings. Knowing exactly what materials are being deposited, the deposition rates, film thicknesses and uniformity can make a significant difference in process costs as well as suitability for the task at hand.
Quartz crystal monitors are mass monitors. QCM deposition monitors only provide continuous rate and thickness data. There are differences in the frequency with which measurements are made which makes a difference. Monitors do not control deposition rates.
Deposition controllers automatically control the deposition rate, typically by adjusting the deposition power as required to maintain the desired rate. Their main advantage of controllers is that they provide very accurate rate control that results in more-consistent coatings. Controllers provide mass programming that is typically described in terms of density, Z-ratio or tooling factor.
Optical transmission monitoring works for transparent substrates (optical density) and is widely used with many variations on the theme. Sensors are specified by frequency range in wavelength (nm). Also, the number of inputs and type can be used to index the substrate and thickness of film while monitoring the wavelength and coating rate. Associated controller outputs can help model the transmission curve or signal the process to terminate each layer when desired thicknesses are achieved.
With non-transparent substrate optical reflection sensors, the frequency (wavelength) range and sensor polarization is checked. Controllers monitor the index of substrate, index and thickness of film, monitoring wavelength and coating rate. Controller outputs can model a transmission curve and signal to terminate each layer.
Product Descriptions
In the following product descriptions, vendors make distinctions to focus on specific intended applications so direct comparisons may be difficult. When in doubt, go to Vacuum Technology &
Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
Note:A related, but separate, “Product Showcase—Film Thickness and Flatness Testers, Metrology” will follow in the Vacuum Technology & Coating August 2010 issue.
SQM-180 Rate/Thickness Monitor
Fil-Tech, Inc.’s SQM-180 Rate/Thickness Monitor is a precision mass and film thickness measurement instrument for use in thin film deposition processes and other quartz crystal microbalance applications. The SQM-180 has proven very tough and reliable. Thousands of durable units are providing stable monitoring of depositions. Easy to set up and use, the SQM-180 has a history that makes it the one to have for deposition monitoring Fil-Tech also supplies Quality Crystals® for thin film monitoring.
Fil-Tech, Inc.
Boston, MA
www.filtech.com
Contact: G. Paul Becker
Tel: 1-617-227-1133
E-mail: paul@filtech.com
Feature-Rich IC6 Provides
the Best Measurement Precision Possible
The INFICON IC6 Thin Film Deposition Controller combines the proven performance of INFICON thin film controllers with several  enhanced features for maximizing throughput in OLED and optical applications. Continuing the tradition of earlier INFICON models, the IC6 provides exceptional quality and performance, along with unique features to easily maximize deposition processes. The IC6, with the ModeLock measurement system, provides stable, high-resolution r a t e / t h i c k n e s s measurement and control at extremely low rates for optimum results in the production of flat panel displays. Optical processes, such as ophthalmic coatings, band-pass filter, reflective coatings, etc., benefit from high resolution and reliability along with the flexibility to accommodate 50 processes of 200 layers each. The IC6 has the ability to control up to six sources simultaneously for rate and thickness control. Twelve analog outputs are assignable for source control or for rate or thickness recording. Additionally, the color TFT LCD display and menu-driven navigation make operating the IC6 easy and intuitive. Logic and process control capabilities include 100 programmable logic statements, 20 counters and 20 timers. I/O capabilities provide up to 24 relay outputs, 28 TTL inputs, and 14 TTL outputs. Logic statements can be used in cooperation with external inputs or outputs; allowing the IC6 to perform functions that otherwise would require a PLC or other extra equipment. Each logic statement can include up to five functions and can be linked using Boolean logic.www.inficon.com
XTC/3 Thin Film Deposition Controller for Advanced, Affordable Rate Control for Single or Multiple Layers
The INFICON XTC/3 thin film deposition controller provides highly accurate control of deposition rate and thickness in an affordable, easy to install package. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. This unique oscillator technology measures films with greater precision than conventional techniques. The flexible XTC/3 is available in two models with the capacity for up to 99 processes and 999 layers, easy installation, high reliability to ensure productivity and a choice of freestanding or PC control. The XTC/3 works with the INFICON Crystal 12TM, Crystal Six®, and dual sensors for automatic replacement of crystals for continuous deposition rate monitoring. The compact, ½ rack XTC/3 has an easy-to-read TFT LCD display. For maximum uptime, expert support is available through the INFICON global service network.www.inficon.com
Guardian Co-Deposition Controller
INFICON’s Guardian™ Co-Deposition Controller is powered by electron impact emission spectroscopy (EIES) to significantly  improve the reproducibility of film quality during fabrication of CIGS films. For solar photovoltaic cell manufacturing, Guardian provides precise control of deposition rates from 0.1 to 10,000 Å/s. The system operates one or two sensors, up to 8 optical inputs and controls up to 8 deposition sources, enabling co-deposition of up to 8 materials. The unique Guardian EIES sensor (patent pending) measures deposition rates more accurately without interference from residual gases while monitoring CIGS processes. Its Windows®-based software provides easy setup and operation of multi-material thin film deposition processes. It is fully compatible with INFICON Sentinel sensors, providing easy integration into existing systems. The Guardian Co-Deposition Controller is ideal for controlling simultaneous co-deposition of multiple materials in applications such as CIGS for photovoltaics, MBE, OLEDs, and superconducting thin films.www.inficon.com
SQM160 Multi-Film Rate/Thickness Monitor
The SQM160 uses proven INFICON quartz crystal sensor technology to measure rate and thickness in thin film deposition processes. Two sensor inputs are standard and four additional sensor inputs are optional. Two recorder outputs provide analog rate and thickness signals. Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor. The rate-sampling mode allows a shuttered sensor to extend sensor life in high rate processes. Rate displays of 0.1Å/s or 0.01Å/s are user selectable. In addition, the display can be selected to show Frequency or Mass. Four relay outputs allow the SQM160 to control source or sensor shutters, signal time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop and zero readings.www.inficon.com
SQC310 Series Thin Film Deposition Controllers
With advanced electronics, an easy-to-read color LCD display the INFICON SQC310 Series gives you features not found on other thin  film controllers at a very affordable price. For maximum flexibility, the SQC310 has options for monitoring the source material with a single sensor or with multiple sensors, providing accurate source distribution monitoring. Additionally the controller is available in two models: sequential deposition (SQC310) or co-deposition (SQC310C). The SQC310 provides easy setup and operation with a “Quick Setup” menu, 6 context-sensitive push buttons, and a convenient parametersetting knob. The unit provides accurate process control, especially for low deposition rates. Additionally, the SQC310 has storage capacity for up to 100 processes, 1,000 layers and 50 films.www.inficon.com
SQM242 Thin Film Co-Deposition Controller Card
The INFICON SQM242 card turns your PC into a thin film co-deposition controller. It is the ideal choice for system OEMs, or anyone wishing to incorporate a thin film deposition controller into their existing computer control system. The SQM242 has four sensor inputs, two control outputs, and four optional analog inputs. Multiple cards can be used if more sensors/outputs are needed.www.inficon.com
Q-pod Quartz Crystal Monitor
The INFICON pocket-sized Q-pod™ transducer is the least expensive way to accurately measure thin film  deposition rate and thickness. Setup and operation is easy with no external oscillator or power source required. Load the free Q-pod software on your PC and you're ready to go. Q-pod software displays rate, thickness, frequency, crystal life, and a graph of rate versus time, for up to 8 Q-pods simultaneously. Q-pod readings can be logged to disk in a spreadsheet-friendly comma-delimited format.
INFICON
East Syracuse, NY
www.inficon.com
Tel: 1-315-434-1100
E-mail: reachus@inficon.com
Deposition Monitors
Nor-Cal Products’ deposition monitors measure film thickness or rate using crystals as the sensor device. Independent channels monitor different films or average different sensors together to provide a more uniform deposition measurement. The CM-2 model will monitor one or two sensor inputs, while the CM-6 will monitor up to six sensor inputs. These monitors are Class 1 Equipment CE approved. Included are a RS-232 cable and Windows software. This software will allow you to change the monitor’s parameters, save process readings in Excel formatted files, and operate the monitor remotely. Mounting brackets are included and rack-mount extenders are available on request. Nor-Cal also provides crystal sensors, feedthroughs, cables, oscillators and replacement crystals to round out the product offering. Our complete product line includes vacuum chambers, isolation and pressure control valves and other components for the thin film deposition market.www.n-c.com
Crystal Sensors and Feedthroughs
Nor-Cal Products offers the thin film coating market crystal sensors and feedthroughs, along  with vacuum chambers, isolation and pressure control valves and other components. Sensors are either single, with or without water cooling, or dual with a pneumatically actuated shutter and water cooling. Single sensors are also available with an integrated 2.75 CF feedthrough flange or separate feedthroughs are available with 1 inch bolt, 1.33 CF or 2.75 CF flanges sizes. Nor-Cal also provides deposition monitors for up to six sensors to round out the product offering.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Contact: Jacquie Daniel
Tel: 1-530-841-9153
E-mail: jacquiedaniel@n-c.com
STC-2002 Expandable Thin Film Deposition Controller
The STC-2002 Thin Film Controllers from Sycon Instruments are versatile and expandable to meet thin film deposition control requirements from the simple to the most complex. Whether depositing a single layer or a complex multi-layer film with simultaneous control of two materials, the STC-2002 meets your needs. It has the highest accuracy and best control achievable from a quartz crystal deposition monitor. The STC-2002 employs an advanced measurement technique, which allows high accuracy reading to be made 10 times a second. The high-resolution measurements, at a fast update, allow precise control of the deposition source to achieve the quality of films desired. It has a High Resolution/High Speed measurement Engine for precise deposition control. It provides 10 measurements per second with a 0.01Å/s rate resolution. Its RS232/RS485 interface provides serial communications. A large format numeric and graphic display includes a touch panel user interface. The controller is expandable up to 8 source/sensors. The multiprocessor design maintains performance. It is an expandable I/O with up to 32 inputs or outputs for use with programmable logic. Weighted averaging of up to 8 sensors is used for precise large area deposition. Four user-defined front panel buttons and user definable indicators are provided for use with I/O programs. Resolution is 0.03 Hz @ 10 measurements/s. The Crystal Sensor is industry standard 6 MHz. Thickness display is 0.000 to 999.9 kÅ and rate display is 0.00 to 999 Å/s. Inputs are 8 each 5 to 30 VAC-DC or contact closure, opto isolated. Outputs are 8 Form C relays 24 volts, 1 A with source outputs of ± 2.5, 5, 10 volts@10 mA.www.sycon.com
STC-2000A Deposition Rate Controller
The STC-2000A from Sycon Instruments has advanced electronics, LCD display, storage for 50 film programs, 9 process recipes and programmable input/output structure give the user versatility and performance. The  STC-2000A uses the timeproven 6 MHz oscillating quartz crystal as the sensor device. The STC-2000A microprocessor technology enables the direct solution of the complex mathematical equation associated with the frequency shift versus mass loading characteristics of the quartz crystal sensor. Its computational power allows the measurement of the material accumulated on the sensor crystal to be accurately converted to film thickness using the exact equation; inaccuracies due to approximations and limited ranges of material constants do not contribute to thickness and rate errors. An innovative frequency measurement system allows the STC-2000A to acquire and display 10 measurements per second with 0.0088 Å/measurement rate resolution on each of the sensor input channels. The standard STC-2000A is equipped with 8 relays, 8 optocoupled inputs, a RS-232 computer interface, and high-resolution analog control and recorder outputs. A rack mount for half-rack mounting is also standard. Features include: multi sequence multi-film process control; a high resolution/ high speed measurement engine; 10 measurements per second at 0.0088 Å/s rate resolution; RS232 (optional RS485) interface for serial communications; easy to read LCD display with touch panel interface; versatile I/O programming; and industry standard 6 MHz crystals. The high thickness resolution is 0.013 Angstrom per measurement (for aluminum). The High Rate Resolution is 0.0088 Angstrom per measurement rate. The high accuracy is ± 0.5% thickness + 1 count.www.sycon.com
STM-100/MF Thin Film Deposition Thickness/Rate Monitor
The Model STM-100/MF Thickness/Rate Monitor from Sycon Instruments, Inc. is a precision mass and film thickness measurement instrument for thin film deposition processes and other quartz crystal microbalance applications. The STM-100/MF has proven very tough and reliable. Easy to setup and use, the STM-100/MF has a history that makes it the one to have for deposition monitoring. Features include Multi-Film Program Storage and with a high resolution and high speed measurement engine. It has 1 Å thickness resolution with 0.1 Å/s rate resolution. It can make 4 measurements per second and has a multiple function high readability back-lit LCD. Analog output of rate or thickness is ±0 to 10V with 12 bit resolution. It has a low maintenance sensor design and an industry standard 6 MHz sensing crystal. The unit has a RS-232 Interface and a LabVIEW™ front panel interface. In Multi Mode Operation includes Thickness/Rate Monitor, Negative Thickness Monitor and Sensor Frequency Monitor. Its high speed makes four measurements per second. Resolution is 0.1Å per second. HighAccuracy is ±0.5% thickness ±1 count and the measurement range is 500 kÅ aluminum equivalent. Relay Outputs are four 1.5 amp SPST N.O. contacts with Shutter Control, Thickness Set point, Timer Set point and Crystal Failure. Remote inputs include four TTL compatible inputs with Open Shutter, Close Shutter, Zero Thickness and Zero Time functions. Setpoints monitor End Thickness of 0.000 to 9999 kÅ and setpoint thickness of 0.000 to 9999 kÅ. A timer covers 00:00 to 99:59 minutes/seconds.www.sycon.com
STM-1 Single Board Thin Film Thickness/Rate Deposition Monitor
Sycon’s compact single board Thin Film Thickness/Rate Deposition Monitor is suitable for many exacting thin film deposition applications from the laboratory to the production floor. In the lab, it can provide  precise results and control for thickness or mass deposition experiments. Using the RS232 communications, the LabVIEW™ software provided and lab PC, it allows quick and simple results to be obtained for film or mass measurement experiments. For the small or table top deposition system manufacturer, it can be integrated into an existing system controller or by using its internal expansion bus it can support a custom OEM display/user interface to add accurate low cost thickness/rate monitoring to a small system. For larger systems, the RS485 interface provides multi-drop capability for up to 15 STM-1 monitors for large area monitoring or multi point averaging. The on board oscillator further reduces system cost when sensing head can be located 30 inches or less from the STM-1. If longer cable lengths are required the STM-1X can be used with Sycon’s remote or In-Vacuum oscillator/sensor. It provides high performance with 10 measurements per second / 0.01Å/s rate display. It has a single +5 VDC supply required and an optional wall power supply module is available. The RS232/RS485 interface is used for single or multi drop communications.
Sycon Instruments, Inc.
East Syracuse, NY
www.sycon.com
Tel: 1-315-463-5297
E-mail: info@sycon.com
Model 866 Deposition Controller
Telemark’s new Model 866 Deposition Controller has an IBM-compatible dual core processor operating at 2 GHz with 2 gigabytes of RAM and a 50 gigabyte hard drive, The controller is capable of storing an almost infinite number of recipes and layers. It features 3 large LED displays that continuously display Power, Rate & Thickness. The displays are updated every 300 ms. The system also supports an external full color monitor, keyboard and mouse. The primary real-time operating parameters are graphically displayed on a 5” LCD display which also supports a full alphanumerical keyboard for realtime process and recipe modifications. Display capabilities include: real-time process modification, process and layer keyboard based editor, maintenance I/O status and control, power v/s time, rate v/s time, thickness v/s time and rate deviation v/s time. The 866 supports USB, RS232 and RJ45 communication hardware with appropriate protocols. It has two crystal sensor inputs, two isolated power supply analog output drivers, eight relay isolated outputs and eight optically isolated inputs (with option to upgrade to 16 each). There are 3 user-programmable front panel buttons for easy system control. All system files may be reviewed, modified and tested on an off-line computer and downloaded tot the instrument for use. Power requirements are 115/230VAC at 50/60 Hz.
Telemark
Hayward, CA
www.telemark.com
Tel: 1-510-887-2225
E-mail: sales@tfi-telemark.com
MESEC Non-Contact, Accurate, Cost-Effective Measurements of Metal Film Thickness
ULVAC Technologies, Inc.’s MESEC, a metal film metrology instrument for copper seed and electroplated copper layers on 200- or 300-mm silicon wafers. Designed for use in PVD, CVD, plating, and CMP equipment applications, the MESEC unit directly evaluates device wafers using the non-contact, non-destructive eddy current detection method. Copper films with thickness in the range of 0.03 µm to 5 µm can be measured with the higher speed, better accuracy, and at significantly lower cost than other methods. ULVAC’s proprietary amplifier circuit design in the MESEC unit enhances the Eddy current signal to noise ratio resulting in improved measurement accuracy. Additionally, ULVAC uses a small sensor, which strikes a good balance between spatial resolution requirements and background noise elimination. ULVAC has developed two types of the MESEC units: Built-in Type (MESEC BIT) and Stand-alone Type (MESEC SAT). The MESEC BIT is used for in-situ measurements in thin film deposition systems and surface preparation equipment. The MESEC SAT is a freestanding metrology instrument that measures any thin conductive metals or alloy films (Al, Cu, AlCu, etc.) on silicon wafers. This unit features an open cassette, SMIF or FOUP load port design and is used for in-line or off-line measurements.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@ulvac.com
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