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Gas Delivery & Diagnostics
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Vacuum Valves, Flanges and Fittings for Processes and Systems
Compiled by Terrence Thompson, Contributing Editor
Vacuum systems have many uses for vacuum chambers, pumps, lines, valves and monitoring instruments for a given vacuum process or experiment. Vacuum valves are precise mechanisms that regulate the flow of gases. They typically are started, stopped and/or regulated by a moving part that permits or obstructs gas flow in a passage. They do, however, usually need flanges and fittings to work.
In vacuum systems, valves are used to provide fine control of gas streams entering the vacuum chamber. The vacuum in a vacuum system is often controlled by means of rel¬atively large butterfly or shutter-type throttling valves that determine the rate at which gas is evacuated from the system by a vacuum pump. For use in vacuum systems, valves should have good out¬gassing characteristics. They may also be required to withstand vacuum bakeout temperatures. When intended for applications with, and/or, within vacuum systems, valves are available that can withstand cryogenic temperatures or, at the other extreme, that can operate at very-high temperatures.
Vacuum pumps are the heart of any vacuum system and numerous components and acces¬sories are required to interconnect the pumps to the equipment needing vacuum. Valves of many types (poppet, gate, butterfly, ball, pendulum, etc.) are combined with either mechan¬ical or electrical gauges, monitors, controllers, filters, traps, flanges and fittings to achieve the desired configu¬rations. However, valves, flanges and fittings are the focus of this product roundup.
Product Descriptions
In these product descriptions, vendors make pragmatic distinctions to focus on specific intended applications so direct comparisons are difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
MC+ 300 mm Transfer Valve
MDC’s MC+ 300 mm Transfer Valve High Vacuum Series of 150°C Viton® O-Ring Sealed  Bonnets feature: 2 million Cycles between maintenance; Bellows sealed actuator; virtually particle and vibrationfree; double acting pneumatic actuator with position indicators; aluminum body and Gate maintain status in the event of power failure; pneumatically locked in the closed position; and LCD counter for tracking cycles. Specifications are: materials—body & gate aluminum; bellows AM-350 ss; bolts 300 Series ss; seals bonnet Viton® ; gate Viton® ; with options Different sealing materials on request. They have an electropneumatic actuator; air pressure 70 to 100 psig; air control valve Humphrey 3 position, 4 way solenoid valve; solenoid voltage 24 VDC, 120 VAC, 240 VAC; power loss valve maintains status; position indicators are Solid state, NPN Sensors; closing and opening time < 1 sec; a Vacuum Range 1× 10-8 Torr and a Leak Test 2 × 10-10 cc/sec of He. www.mdcvacuum.com
1 Million Cycles 1.5 Inch Gate Valve
MDC’s high cycle 1.5 inch gate valve is for HV and UHV  application. Performance reliability and value are the main characteristics of this new and improved valve. It has the same multiple port connections and options as MDC's standard Gate Valve Line for customer convenience. The key features and advantages of this new valve are: 1,000,000+ cycles with minimal maintenance; reduced vibration for quieter operation; mechanically locked in the closed position; direct shaft-gate assembly connection for faster actuation; and low particle generation due to reduced internal parts. www.mdcvacuum.com
Gate Valve Assemblies
MDC Gate Valve assemblies have three key components: an  actuator, a carriage/gate and a valve body. The actuator provides the power to position or transport the valve’s carriage/gate. The actuator is attached to the valve’s body via a rectangular bonnet flange. The gate closes or opens one of the valve’s body ports. The valve body is a vacuum tight chamber that is screwed, flanged or welded into a larger vacuum vessel or system. The stainless steel vacuum gate valves use patented C-Loc™ and Uni-Loc™ gate valve locking mechanisms. No contact is made between a valve’s body and the locking mechanism, which decreases vibration and ensures smooth operation. MDC gate valves require about half the number of moving parts found in comparable competitor valves. Fewer moving components minimize wear and particulate generation, providing superior performance and reliability. Low outgassing characteristics are attributed to a fusion welded 300 series stainless steel body, welded AM-350 stainless steel nesting bellows as well as small cross-section O-rings and the elimination of blind internal cavities. MDC gate valves are offered in various sizes ranging from 0.625-inch to 12-inch port diameters. www.mdcvacuum.com
Stainless Steel Vacuum Gate Valves
MDC’s new line of EZ-Lock Gate Valves is engineered for performance reliability and value. They have the same envelope dimensions, allowing for a direct replacement of the standard MDC Gate Valves. The key features and advantages of this new line of valves are: shock free locking mechanism; low vibration, quiet operation; remains closed in case of loss of power or air; low particle generation; and aluminum or Stainless Steel Gate Assembly option for customer convenience. www.mdcvacuum.com
MDC EZ-lock gate valves
MDC’s vacuum angle and inline valves are devices that regulate the flow of gases, fluids or materials through a structure or aperture by opening, closing or obstructing a port or passageway. MDC stainless steel vacuum angle and inline valves provide maximum conductance and minimum size for easy installation. These valves are ideally suited for systems requiring high reliability and low outgassing. The valves’low outgassing characteristics can be attributed to a fusion welded 304 stainless steel body, welded AM-350 stainless steel nesting bellows as well as small cross-section elastomers and the elimination of blind internal cavities. MDC angle and inline valves are offered in various sizes ranging from 0.25 to 10 inches port diameters. Standard port mounts include: Del-Seal™ CF metal seal flanges, recommended for ultrahigh vacuum service; ISO Kwik-Flange™ and ISO Large-Flange™ fastmake and fast-break elastomer seal flanges, ideal for high vacuum applications requiring frequent assembly and disassembly. www.mdcvacuum.com
All-Metal Angle & Inline Valves
MDC’s bakeable all-metal angle and inline valves are used in ultrahigh  vacuum environments where elevated temperatures preclude the use of elastomers and low temperature gasket metals. These valves provide reliable high temperature seals from atmospheric pressures to below 10-11 Torr. Wherever possible, bonnet gasket seals have been eliminated to minimize potential leak paths. Valves fitted with bonnet seals facilitate gasket replacement. The size and orientation of the valve body ports on bonnet fitted valves precludes gasket removal through its ports. When operated at ambient temperatures, all-metal valves provide hundreds of leak-free cycles between routine poppet gasket replacements. In high temperature applications, life cycles are inversely proportional to the bakeout temperatures. Operated at the maximum bakeout temperature of 450°C, the poppet seal gasket life is approximately 50 open/close cycles. The sealing pressure deforms the copper gasket, which conforms to the conical knife-edge seat. During thermal cycling, the valve’s loading mechanism counteracts component differential expansion to maintain seal integrity. ULV series precision leak valves are shipped in a leak-tight condition. Leak rates are controlled by relieving the pressure applied to the replaceable copper seat. Leak rates are adjustable down to a minimum of 1 × 10-10 Torr l/sec. www.mdcvacuum.com
MDC butterfly valves
MDC’s Butterfly valves require only one-quarter turn rotation of the handle to go from fully open to the fully closed position. In the 1-1/3 inches Mini Del-Seal™ CF flange series, a spring loaded ball bearing becomes seated in an indent providing a positive mechanical stop. All other size valves employ a roll pin stop method. These quick-acting Butterfly Valves have an improved sealing action. The opening in the body of the valve has been machined at a slight angle to the plane of the flapper. The flapper is set to rotate slightly off-center. On closure, the sealing pressure is applied more uniformly all around the O-ring. A reliable, positive seal is made and the tendency of previous designs to roughen the surface of the O-ring and eject it from its groove is eliminated. MDC Butterfly Valves are low outgassing. All internal surfaces are machined from solid stainless steel bar stock. The handle is made of aluminum. The valves are offered with a choice of Del-Seal™ CF ultrahigh vacuum metal-seal flanges or ISO Kwik-Flange™ Oring seal flanges. www.mdcvacuum.com
Stainless Steel Vacuum Angle and Inline Valves
MDC’s stainless steel angle and inline valves are for maximum  conductance and minimum size for easy installation. These valves are ideally suited for systems requiring high reliability and low outgassing. The valves’ low outgassing characteristics can be attributed to a fusion welded 304 stainless steel body, welded AM-350 stainless steel nesting bellows as well as small cross-section elastomers and the elimination of blind internal cavities. The angle and inline valves are offered in various sizes ranging from 0.25 to 10-inch port diameters. Standard port mounts include: Del-Seal™ CF metal seal flanges, recommended for ultrahigh vacuum service; ISO Kwik-Flange™ and ISO Large-Flange™ fast-make and fast-break elastomer seal flanges, ideal for high vacuum applications requiring frequent assembly and disassembly. www.mdcvacuum.com
Bakeable All-Metal Angle and Inline Valves
MDC’s bakeable all-metal angle and inline valves are used in ultrahigh  vacuum environments where elevated temperatures preclude the use of elastomers and low temperature gasket metals. These valves provide reliable high temperature seals from atmospheric pressures to below 10-11 Torr. Wherever possible, bonnet gasket seals have been eliminated in an effort to minimize the number of potential leak paths. Valves fitted with bonnet seals facilitate gasket replacement. The size and orientation of the valve body ports on bonnet fitted valves precludes gasket removal through its ports. When operated at ambient temperatures, all-metal valves provide hundreds of leak free cycles between routine poppet gasket replacements. In high temperature applications, life cycles are inversely proportional to the bakeout temperatures. When operated at the maximum bakeout temperature of 450°C, the poppet seal gasket life is reduced to approximately 50 open/close cycles.
MDC Vacuum Products Corporation
Hayward, CA
www.mdcvacuum.com
Contact: Jinny Royer, Marketing/Publications Manager
Tel: 1-510-265-3544
E-mail: JRoyer@mdcvacuum.com
Electromagnetic Cv™ Valve
The MKS HPS® Electromagnetic Cv™ valve  can be used in place of any existing MKS HPS Cv valve where electric actuation is preferred over pneumatic or manual actuation. The ECv valve is actuated by a direct current electric power supply, and consequently, does not require the use of a pneumatic system. The ECv valve’s actuation system is retrofitable in any current HPS Cv valve. The valve has a low profile, linear solenoid mounted to the top of the valve that serves as the valve actuator. When power is applied to the solenoid, the solenoid is energized, causing the valve to open or close, depending on the configuration. Each valve has a coil saver circuit integrated with the input power cable. This limits power usage of the coil when the valve is actuated. This allows the valve to operate without excessive heat generation, remaining safe to the touch. Options are available in either 12 or 24 VDC. It is available in the angle and inline configurations with multiple fitting options. The body is high grade, corrosion resistant, nonmagnetic 304 stainless steel. The formed bellows assembly is 321 corrosion resistant stainless steel. Metal bonnet seals of either nickel or copper are available as standard options. Kalrez, Silicone, Viton and Chemraz are also options for both the bonnet seal and nose piece. For remote indication of valve position, a limit switch option can be specified within the part number ordering system. www.mksinst.com
Integrated LoPro™ (ILP) Two Stage Poppet Valve
Some vacuum systems require a slow initial evacuation of the roughing or  loadlock area of the system, called soft start or soft pumpdown. This process reduces turbulent flow during initial system evacuation, diminishing product contamination and damage. If a bypass line is used to soft start a system, it uses space and can clog, requiring frequent cleaning and maintenance. The MKS HPS® Integrated LoPro™ Two-Stage (ILP) replaces the bypass line. The ILP accommodates the space constraints found on vacuum applications like loadlock and transfer chambers specifically in semiconductor or optical processing for which a cleaner environment is necessary. A heater jacket is available for processes with condensable materials. The ILP is a pneumatically-actuated poppet valve with a bypass valve combined into a single unit. The main valve is a normally closed bellows sealed valve. The bypass valve is a spring to close, o-ring sealed valve located within the main stage. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure. In the second stage, the main valve opens, allowing use of full pumping speed. www.mksinst.com
Multiple Stage Valves
Some vacuum systems require a slow initial evacuation  of the roughing or loadlock area of the system, called soft start or soft pumpdown. This process reduces turbulent flow during initial system evacuation, diminishing product contamination and damage. If a bypass line is used to soft start a system, it uses space and can clog, requiring frequent cleaning and maintenance. The MKS HPS® Multiple Stage Valves replace the bypass line. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure. In the second stage, the main valve opens, allowing use of full pumping speed. The main valve is a normally closed bellows sealed valve. Formed bellows within the main valve make it resistant to particle damage. The angle and inline configurations are available in 1 to 4 inches sizes. Valves are available with options in flanges, seals, solenoids, bypass configurations and a limit switch. Heated models are available for processes with condensable materials. The available models are the Two-Stage Valve; LoPro® Two-Stage Valve; Integrated LoPro Two-Stage Valves; and Jalapeno Two-Stage Valves. www.mksinst.com
Heated Valves
MKS Instruments’knows many processes create by-products that can solidify   within a vacuum system on the walls of components. These by-products clog the system and can flake off and backstream, damaging product. The systems are subject to frequent downtime for maintenance. By heating critical components, like valves, the by-products stay in a gaseous state and can move through the system for trapping or other disposal. MKS HPS® heated valves are uses in such systems. The heater jackets are molded to match the shape of the valve they are intended to heat. Each valve heater provides optimal temperature distribution and uniformity. MKS HPS angle and inline heated valves are available with single or multiple stages and standard or low profile bodies. They range in size from NW 25 to NW 100 (1 to 4 inches). The valves include choices of seals, solenoids, bypass configurations (for the two-stage models) and limit switches. The available models are Jalapeno Valves, Jalapeno Two-Stage Valves, Jalapeno LoPro Valves, and Series 170/180 Valves. www.mksinst.com
Sensor Isolation and Leak Test Port Valves MKS HPS® has developed two compact  vacuum valves for gauge isolation and leak check ports.  The Cv Valve is an extremely compact single stage poppet valve. It is ideal for isolating sensors on a system or closing off leak check ports. It is available in angle or inline models, ¾ or 1 inches port sizes, pneumatic, toggle manual or knob manual actuation. There is a choice of seals, flanges, solenoids and a limit switch option. The IDA Valve is a three port, dual body valve used in vacuum gauge isolation. The IDA Valve consists of a pneumatic primary valve and a manual secondary valve. It isolates Baratrons and other sensors from the vacuum system while providing good conductance to the sensor. The third port allows for in-situ calibration of sensors, increasing system production though increased uptime. By installing an IDA valve, calibration time can be reduced from 8 hours to under an hour. Available HPS models are the Cv Valves and IDA Valves. www.mksinst.com
High Conductance Vacuum (HCV) Valves
The MKS HPS HCV Valves are lightweight, bellows-sealed poppet valves for high performance in loadlock or system isolation applications such as semiconductor manufacturing, process industries, solar, and thin film deposition. The HCV Valve has a smaller profile, is lighter, lower in cost, and easier to maintain than similar valves in the market. Produced using the latest manufacturing techniques and highest quality materials, the HCV Valve is extremely durable and dependable and valve lifetime can extend to 1,000,000 cycles under clean conditions.An edge-welded stainless steel bellows prevents outgassing and virtual leaks. The bellows’ stroke length is optimized to assure a longer cycle life while maintaining a high conductance. The HCV Valve allows complete disassembly for lower cost of replacement parts. HCV valve has a vacuum range from atmosphere to below 10-9 Torr and is available in port diameters of 8, 10 and 12 inches. MKS offers the largest selection of bellows sealed poppet valves for vacuum systems.
MKS Instrument
Wilmington, MA
www.mksinst.com
Contact: MKS HPS Applications Engineering
Tel: 1-978-284-4000
E-mail: mks@mksinst.com
T3Bi Digital Exhaust Throttle Valve for DeviceNet™ Networks
The MKS Type T3Bi Intelligent Exhaust Throttle Valve is for computer  integrated applications where a simple pressure control system is desired. The T3Bi integrates all control, communication, and driver circuits via a compact “add-on” electronics module onto a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The selftuning control algorithm drives the system to set point rapidly and with minimum overshoot, and ensures repeatable process recipes without operator involvement. The valve operates in two modes: flapper positioning or pressure control, either of which can be user-activated through the DeviceNet™ communications interface. All of the adjustable setup parameters, run time operation, and diagnostics information are available through this interface. The “intelligent instrument” concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions. System design, installation, maintenance, and labor costs are reduced as compared to the traditional analog I/O. The valve driver provides high-resolution pressure control. The robust, high torque motor provides extended uptime and reduces preventative maintenance cycles – a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The valve is constructed of corrosion-resistant 316 stainless steel for the toughest process gases and is available in a variety of standard flange styles and seals. www.mksinst.com
T3P Integrated High Speed Pendulum Valve and Controller
MKS T3P Pendulum Valves are for demanding semiconductor and thin film  applications. T3P valves feature a wide control range and high valve speed to enable fast, precise and reliable pressure control for all etch, deposition and chamber clean process steps – including those with reduced flows or at high pressures. The ability to precisely control conductance over the entire valve stroke, including near-closed positions, enables recipe pressures to be reached quickly and with minimal overshoot. With its advanced self-tuning control, the T3P valve provides superior process stability and maximizes throughput. Combining wide dynamic range pressure control and isolation capabilities into a single unit, the T3P valve reduces cost and system complexity. An on-board digital controller supports multiple communication protocols—including DeviceNet™ and RS232, adding the T3P to MKS’ portfolio of digitally controlled products. By combining the T3P with industry standard MKS Baratron® capacitance manometers, MKS provides the optimal solution for pressure measurement and process control. The mechanical design features of the T3P include MKS’ patented CAM mechanism providing a symmetrical and linear control and a space-saving low profile design. A simple operating mechanism featuring a minimal number of moving parts and fewer wetted stainless steel components, provides virtually particle-free operation.
MKS Instruments, Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS Pressure Control Applications Engineering
Tel: 1-978-284-4000
E-mail: mks@mksinst.com
Intellisys Pressure Control
Nor-Cal Products offers unequalled performance with the Intellisys downstream pressure  control system, providing measurable process benefits through higher resolution, speed and reliability. The Intellisys Adaptive Pressure Controller (APC) merges closed loop motor control with adaptive pressure control to provide advanced control system performance. An advanced adaptive algorithm eliminates pressure overshoot or gradual ramps during pressure transition. A Digital Signal Processor (DSP) enables DeviceNet™ communications protocol and programming flexibility for customer or process specific requirements. Intellisys motor control technology eliminates belts, gears and position switches, improving reliability, while increasing speed by at least a factor of twenty. High-torque geared drives are also available as an option. Standard sizes range from one to twelve inches. Substantial cost and space savings can be realized with the IQ-Series butterfly valves. All the control electronics are incorporated on to the valve motor drive, resulting in a compact size that is easy to integrate on any system. Heated, non-heated and DeviceNet™ compatible gauges are available with several tube fittings and in standard pressure ranges from 0.1 to 1000 Torr. Our Universal Valve Drive (UVD) easily replaces older drive technology found on other manufacturers' pressure control valves. When used with our APC, the universal valve drive can upgrade a competitive valve to approach Intellisys performance levels. www.n-c.com
New JV Series Vacuum Valves in KF 16-50 sizes
Nor-Cal Products, Inc.’s JV series valves meet the demanding high-cycle  requirements of semiconductor equipment manufacturers, yet offer the researcher a cost- effective solution for UHV system roughing. In addition to pneumatic actuation, these valves offer a unique manual actuator for course throttling, which allows partial opening by specified and repeatable intervals. Electromagnetic actuators are available for portable or table-top systems that do not have compressed air available. Right-angle and in-line bodies are available in low-cost aluminum or stainless steel with KF 16, 25, 40 and 50 flanges. Features include five million cycle rated, small footprint and a wide range of options. Actuation may be electromagnetic or pneumatic with manual course throttling. Body styles are right angle and in-line with either aluminum or stainless steel construction. Other options include position indicators, “Snap-on” coils on the electromagnetic actuator. Special oring materials are available. www.n-c.com
EVAC Flange
Nor-Cal Products stocks a complete line of EVAC chain clamps and  aluminum metal seals for converting elastomer seal NW (KF) and ISO flanges to UHV metal seals. They provide a number of benefits over elastomer seals: reduced outgassing, no permeation, no hydrocarbons, resistance to radiation and short half-life. EVAC seals are used in high-energy physics, other UHV applications and, in some circumstances, cryogenic applications. EVAC seals are reliable in high vibration or temperature cycling environments. EVAC chain clamps and tapered flanges are the standard vacuum flange for many Japanese semiconductor equipment manufacturers. The advantages over using the standard ISO flange are the time and space savings during assembly and the flexibility to form high vacuum or UHV seals. Nor-Cal Products stocks blank and bored NW-63 flanges that are compatible with other manufacturers’KF-63 flanges made to the ISO 2861 specification. They can be used with EVAC chain clamps to form elastomer or aluminum metal seals. Elastomer seals are formed with ISO-63 centering ring/O-ring assemblies and elastomer EVAC chain clamps. Metal seals are formed with EVAC aluminum seals and metal seal chain clamps. NW-63 flanges are made from 304 stainless steel for 2.5 inch OD tube size. Nor-Cal Products is the only authorized U.S. manufacturer of EVAC tapered flanges. These flanges are specifically for use with EVAC chain clamps for elastomer or aluminum metal seals. High vacuum seals are formed with a standard ISO centering ring/O-ring assembly and an elastomer seal EVAC chain clamp. UHV seals are formed with a metal seal chain clamp and an aluminum seal. Both blank and bored 304 stainless steel versions are available from stock in 80 and 100 mm sizes for 3 and 4 inch OD tube sizes, respectively. Flanges for tube sizes up to 28 inches OD or metric tube sizes can be supplied upon request. www.n-c.com
NW Flange
Nor-Cal Products NW flanges meet ISO 2681 specifications for standard USA tube  sizes from 3/8 to 2 inches OD. They are compatible with other manufacturers’ISO-KF style flanges. NW flanges utilize an aluminum clamp with a single wing nut fastener or a lock-over-center clamp allowing frequent disassembly without tools. The vacuum seal is effected by the application of uniform pressure from the clamp on the 15º surface of the 304 stainless steel flanges. The mating flange surfaces compress a Viton O-ring held in place by a centering ring. The resultant seal can be used in vacuum applications of up to 10-8 Torr and baked to 204ºC, however sustained baking above 150ºC may result in deterioration of O-rings. Additionally, NW flanges allow components to be rotated before assembly for ease of component alignment. NW flanges are available on virtually all Nor-Cal components and fittings. Nor-Cal manufactures a full line of NW adapters so you can add to or build an entire system with NW components. NW flanges can also be used with EVAC chain clamps and aluminum seals to obtain a UHV seal bakeable to 150ºC. www.n-c.com
ISO Flange
Nor-Cal Products ISO flanges and hardware are manufactured to the International Standards  Organization specification so they can be mated to other manufacturers’ ISO flanges. ISO flanges are made from Argon Oxygen Decarburization (AOD) 304 stainless steel. This material is certified to meet ASTM-240 and has less than 0.01% sulfur in order to prevent sulfur stringers. Grain size is 3 to 6 per ASTM E-112. Maximum inclusion size is 2.5 per ASTM E-45. Normally our standard material is in the low carbon range for 304 stainless steel. For increased corrosion resistance, some sizes are available from stock in 316L stainless steel. Optional fastener and nonrotatable ISO flanges are available from stock for 2-1/2 to 20 inch tube sizes. Both use a Viton O-ring, held in place by a centering ring, to effect a seal with a vacuum range of 10-8 Torr. ISO components can be baked to 204ºC. ISO flanges can also be used with standard clamps and aluminum seals to obtain a UHV seal bakeable to 150ºC. www.n-c.com
ASA Flange
Nor-Cal Products’ ASA flanges are manufactured from specially-treated 304 stainless steel. These flanges mate with  standard 150 lb. ASA flanges or 150 ANSI flanges. They are available from stock for standard tube sizes from 2 to 12 inches. Larger sizes are available upon request. Nuts and bolts are used to apply pressure between the mating flanges and a seal is effected when a Viton O-ring is compressed. ASA flanges can be baked to 204BC and have a vacuum range of up to 10-8 Torr. Besides being sold separately, they are available as standards on nipples, adapters, tees, crosses, elbows and valves. When components of several systems are used interchangeably, use of rotatable flanges is recommended. Assembly is facilitated by rotation of mating flanges, to align bolt holes. Nonrotatable ASA flanges, unlike rotatable, contain both sealing surface and bolt holes in one unit rather than two. This makes the nonrotatable flange less expensive, and therefore the preferred choice when mating component orientation is not a concern. www.n-c.com
CF Flange
Nor-Cal Products CF flanges are compatible with other Conflat style flanges and are  available in sizes from 11/3 to 161/2 inch OD for 1/4 to 14 inch tube diameters. Flanges 4-1/2 inch OD and smaller are made from 304 electroslag remelt (ESR) bar stock. ESR is a refining process that produces stainless steel with higher purity, fewer inclusions and more uniform grain structure to eliminate microscopic leak paths. Larger CF flanges are made from Argon Oxygen Decarburization (AOD) 304 stainless steel. This material is certified to meet ASTM-240 and has less than 0.01% sulfur to prevent sulfur stringers. Grain size is 3 to 6 per ASTM E-112. Maximum inclusion size is 2.5 per ASTM E-45. Normally our standard CF material is in the low carbon range for 304 stainless steel. As specials 304L and 316L material can be supplied in AOD or roll-forged rings. Machining is consistent with good UHV practice. Machine coolant is sulfur free to reduce outgassing. State-of-the-art CNC machine centers are used to produce flanges with consistent high quality. Flanges are machine washed in approved aqueous detergent after machining. Chem-cleaning and clean room packaging are available. CF flanges utilize an OFHC copper gasket to produce a vacuum tight seal up to 10-13 Torr, even when baked repeatedly to 450ºC. When the copper gasket is compressed between the knife edges of CF flanges, its material flows laterally to fill surface imperfections. Nor-Cal offers CF flanges in rotatable as well as nonrotatable versions. Nonrotatable CF flanges, unlike rotatable, contain both sealing surface and bolt holes in one unit. This makes the nonrotatable flange less expensive, and therefore the preferred choice when mating component orientation is not a concern.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Contact: Jacquie Daniel
Tel: 1-800-824-4166 toll free or 1-530-841-9153
E-mail: jacquiedaniel@n-c.com
Vacuum Valves
Oerlikon Leybold Vacuum has extensive experience in vacuum  technology and this is reflected in the design of our vacuum valves and fittings used in a wide variety of applications. The Oerlikon Leybold Vacuum family of valves and fittings are engineered for high reliability and extended life with select valves exceeding 10 million actuations. The latest manufacturing techniques and modular design allow for the highest quality product at a price equal to lesser designs. The valve and fittings product family includes: Right-angle and straight-through valves in the flange range of 16 to 40 mm (ISO-KF16 to ISOKF40); Right-angle valves in the flange range of 63 to 1000 mm (ISO-K63 clamp flanged to ISO-F1000 bolt flanged); Gate valves in the flange size 16 to 250 mm available with various flanges; Electro-magnetic, electro-pneumatic or manual operation; Visual and remote position indicators; Corrosive gas series; Specialty valves – precision leak valves, safety venting valves and vacuum locks also are available; Array of connection fittings and flange types ISO-KF, ISO-K, ISO-F and CF type; and Low leak rates.
Oerlikon Leybold Vacuum
Export, PA
www.oerlikon.com
Tel: 1-724-327-5700
E-mail: info.vacuum.ex@oerlikon.com
Angle and Inline Valves
Pfeiffer Vacuum introduces a new series of angle and inline valves that are suitable for applications in the high  vacuum range. The valves feature a robust design that is resistant to contamination, increases service life significantly, and makes them ideally suited for industrial applications. Pfeiffer Vacuum’s new valves are available in DN 16, 25 and 40 ISO-KF sizes. This new series of manually, electropneumatically and electromagnetically operated angle and inline valves feature improved conductivity, resistance to differential pressure and short response times. The electropneumatic and electromagnetic valve models are equipped with an integrated position indicator. The electromagnetic valve has the pressure pilot integrated into the case. www.pfeiffer-vacuum.com
CF UHV Components
Pfeiffer-Vacuum’s CF UHV components are convenient and offer great  flexibility in the design and construction of high and ultrahigh vacuum systems. Fittings such as connecting bolts and screws, copper and Viton seals, blanking and welding flanges, pipe components and bellows and adjusting components are some of the components offered. Most common parts are in stock and available for immediate delivery. CF flange components for UHV applications comply with standard ISO 3699 (Pneurop 6606). Standard Stainless steel components are made of steel 1.4306 (304L). CF flanges are available in steel 1.4429 (316LN). Flange components made of steel 1.4429 (316LN) have a very low magnetic permeability and have harder knife edges. The starting material is specially annealed in a low-hydrogen atmosphere. www.pfeiffer-vacuum.com
ISO-K Clamping Flange Connections
Pfeiffer-Vacuum’s ISO-K Clamping Flange Connections are an economical system of reusable and  interfacing stainless steel vacuum fittings. These flanges can operate in high vacuum environments and are ideally suited for applications requiring rapid and frequent assembly and disassembly. The Clamping flange components range from claw clamp and claw grip, centering and o-ring seals, blanking and welding flanges to pipe components including a 90? elbow, a T-piece and a cross-piece. Most common parts are in stock and available for immediate delivery. ISO-K/F Clamping flange components comply with DIN 28404 or Pneurop 6606. www.pfeiffer-vacuum.com
ISO-KF Small Flange Connections
Pfeiffer-Vacuum’s ISO-KF Small Flange Connections are an economical system of reusable interfacing stainless steel  vacuum fittings that can operate in high vacuum environments. The small flange components are ideally suited for applications requiring rapid and frequent assembly and disassembly. The Small Flange components include reducing centering, mesh centering, O-ring, aluminum and indium seals as well as blanking flanges, short and long pipe socket flanges and a large assortment of pipe components including 45? and 90? configurations. Most common parts are in stock and available for immediate delivery. ISO-KF Small Flange components comply with DIN 28403 or Pneurop 6606.
Pfeiffer Vacuum Inc.
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-603-578-6500
E-Mail: valves@pfeiffer-vacuum.com
Roughing Angle Valves
Vacuum Research’s angle valves for roughing in sizes from NW to 16  to NW to 50 are available with aluminum or stainless steel bodies Both manual and electro pneumatic actuators are available and the shaft seal can be either welded bellows or O-rings. Optional features include electronic position indicators and gauge ports with VCR-4 or 1/8 inch NPT threads. www.vacuumresearch.com
Large Vacuum Valves
Vacuum Research’s Gate and angle style valves with port sizes  up to ISO-600 or 24 inch ANSI. Available in aluminum or stainless steel with flanges to fit any cryo, turbo or diffusion pump. Pneumatic, electric motor and manual actuators are available. Optional features include gauge ports with NW flanges from 16 to 50 mm and roughing ports up to ISO-250 or ANSI 10 inch. www.vacuumresearch.com
Throttle Valve with Leak Tight Shut Off
The Vacuum Research Throttlemaster™ Valves with leak tight shut off  eliminates the need for separate throttle and isolation valves. Suitable for 3 position or full PID applications. The digital valve positioner is included and provides easy control to 0.1% from the front panel or from your PLC or computer. 4 to 20 mA or 0 to 10 VDC signals accepted.Also included are contact closures on rear panel for open and closed position indication. Valves are available in aluminum or stainless steel with ANSI flanges from 2 to 16 inches and ISO flanges from 63 to 400 mm. www.vacuumresearch.com
Vacuum Valves for Dirty and Dusty Applications
Vacuum Research Valves are for dirty and dusty applications such as investment casting or tire  reclamation. They are also well suited for plasma systems. A protective ring keeps particles and plasma away from O-rings and seal surfaces for long life in the most demanding applications. Pneumatic, manual and electric motor actuators. Port diameters up to ISO-600 or 24 inch ANSI. Shaft seal pump out ports and oilers available. Other options include position indicators, water cooling and ports for blow down and clean out.
Vacuum Research Corp.
Pittsburgh, PA
www.vacuumresearch.com
Tel: 1-800-426-9340 or toll free or 1-412-261-7630
E-mail: vrc@vacuumresearch.com
All Metal Valves
Varian’s all-metal bakeable valves are used in ultrahigh  vacuum systems where bake-out temperatures up to 450°C preclude the use of elastomers and low melting temperature metals. The simplicity of the all-metal design, which employs the Varian ConFlat® flange sealing principle, assures a low maintenance unit giving maximum reliability and vacuum sealing from atmospheric pressure to below 10-11 Torr (mbar). www.varianinc.com
Block Valves
Varian’s Block Valves are versatile, reliable, cost–effective  vacuum shut-off devices that can be the workhorses of any vacuum system. Suitable for performance from rough to high vacuum, they are available in aluminum or stainless steel, and with KF, ISO or ConFlat flanges. They employ a high cycle life bellows that provides a rating of over three hundred thousand cycles, and have optimized conductance for maximum pumping efficiency. All pneumatically operated valves have visual position indication, and remote position indicators are available as options. In the standard configuration, the valves close rapidly (< 300 milliseconds) on loss of air or electrical power, thereby protecting your vacuum system. The high cycle life and rapid closure make the valves perfectly suited to high cycle applications such as semiconductor and disk processing, industrial coating, and many others. Varian Block Valves require little maintenance, but can be maintained easily and quickly when necessary. www.varianinc.com
GateKeeper Aluminum Gate Valves
Varian’s GateKeeper SeriesAluminum Gate Valves are economical, high cycle life,  reliable vacuum shut-off devices. The valves provide a low-cost, low-particle, low profile means of isolating a high vacuum pump. The GateKeeper Series valve design employs a cast aluminum body, a counter plate sealing mechanism, and an elastomer shaft seal. The result is a clean, economical, smoothly actuated valve. The body is cast using the VaPore® process which tightly controls each material input and process to deliver a casting that is free of porosity. A reliable high vacuum shaft seal eliminates the need for a bellows. The linear drive and counter-plate sealing mechanism minimizes actuation shock and particle generation. The assembly is an elegant mechanism that uses a small number of precision-machined components. The required sealing forces are generated with a minimum of moving parts, and without adjustment screws. As a result, very few particles are generated within the valve. The GateKeeper valves have a small face-to-face profile. ISO/F flange details are machined into the cast body to provide the convenience of standard ISO claw clamp connections.
Varian, Inc.
Vacuum Technologies Lexington, MA
www.varianinc.com
Contact: Walter Stevenson (Steve) Palmer, Manager, Marketing and Merchandising, VVT Lexington
Tel: 1-781-860-5426
E-mail: steve.palmer@varianinc.com
“SolVAT” – A New Transfer Valve Tailored To The Solar Cell Industry
VAT introduces SolVAT, a new transfer valve product specifically developed to meet the  requirements of thin film solar cell manufacturing. The three major thin film technologies, aSi, CdTe and CIGS are recognized to have high potential due to scalability, low raw material cost, efficiency, etc. Thin film solar cell processes employ various coating methods under vacuum conditions. The robust SolVAT withstands aggressive gases, contamination and high temperatures found in many thin film solar processes is resistant to differential pressure in both directions. Transfer valves are a key component on every PV thin film production tool for loading, connecting and isolating vacuum process chambers. SolVAT enhances system performance with its modular design and can be scaled up to an opening size of 200 mm x 3000 mm. SolVAT’s minimized valve width (A-dimension) of 130 mm allows aconsiderable cost reduction for our customers. Additional cost and space savings may be realized by integrating the SolVAT insert version into the process chamber. SolVAT is available in aluminum or stainless steel with shaft-sealed or bellows-sealed actuators. The SolVAT offers outstanding performance, competitive pricing and can be tailored to meet customer applications. www.vatvalve.com
Series 19 Large Gate Valves (16” – 50”)
VAT Series 19 Large Gate Valves are used for large pump isolation with shaft or bellows feedthrough  for HV or UHV applications. These valves are competitively priced and feature a very low locking shock. The high-vacuum version in sizes 40” and 50” offer a split body design for a very short dismounting height for servicing. Overall sizes offered for the Series 19 range from 16” to 50” I.D. with all standard flanges available. Contact VAT for a technical brochure www.vatvalve.com
Vacuum Valves 2012 Catalog
VAT’s new catalog, ‘Vacuum Valves 2012’, is a full color, hardbound book that details a complete line of vacuum valves, pressure control systems and accessories for applications ranging from rough vacuum to extreme UHV. “VAT Vacuum Valves 2012” catalog is conveniently organized by valve type and provides our customers with an excellent reference source for technical information and drawings for 1,000+ standard valves. The VAT ‘Vacuum Valves 2012’ is complemented by our website, where customers can find up to the minute information about VAT and products in addition to placing orders and downloading drawings and operating manuals. You may request a catalog by visiting , e-mailing or contacting us at 1-800-935-1446.
VAT, Inc.
Woburn, MA
www.vatvalve.com
Contact: Joyce Mackiewicz, Sales and Marketing Department
Tel: 1-781-537-5410 or toll free 1-800-935-1446
E-mail: joycem@vatvalve.com
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Vacuum Technology & Coating