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Article
Vacuum Product Showcase
Addendum
April 2010 This Addendum updates the VT&C April 2010 Electron-Beam, Ion-Beam and Magnetron Deposition and Coating Systems Product Showcase. The listings inadvertently omitted the following KDF product. We apologize for the oversight.
Ci Cluster Tool
After years of development and testing, KDF announces the release of its new Ci, Cluster Intelligence, cluster tool line. The Ci tools are offered in a four sided and eight sided package, both system types feature Brooks Marathon series vacuum handlers. KDF designed and offers these systems for niche market places and is able to handle 100 – 200 mm wafers. For unique sized substrates the tool will also handle wafer carriers as well. Currently KDF offers sputter PVD, etch, degas, and passivation modules in its line up. KDF's sputter module features the latest in Rotational Magnetron Cathode technology coupled with out rotational anode stage which allows for film uniformities better then 1 %. Another KDF exclusive is a PBN/PG backside heater element capable of temperature up to 1000°C. With over 22 years of direct manufacturing and design KDF is a leader in the PVD market place.
KDF Electronic & Vacuum Services, Inc.
Rockleigh, NJ
www.kdf.com
Tel: 1-201-784-5005
E-mail: sales@kdf.com
New Products Catalog Nor-Cal Products’new catalog, containing 240 pages of highvacuum components for the equipment manufacturer or researcher, will be available starting July 13. Flanges fittings, isolation valves, downstream pressure control valves, chambers, feedthroughs, viewports, manipulators, foreline traps and heater jackets are included. You can pick up a free copy by stopping by booth #815 at SemiconWest in San Francisco July 13-15, requesting one on our web site or by calling 800-824-4166.
Nor-Cal Products
www.n-c.com
Vacuum Valves, Flanges and Fittings for Processes and Systems Compiled by Terrence Thompson, Contributing Editor
Vacuum systems have many uses for vacuum chambers, pumps, lines, valves and monitoring instruments for a given vacuum process or experiment. Vacuum valves are precise mechanisms that regulate the flow of gases. They typically are started, stopped and/or regulated by a moving part that permits or obstructs gas flow in a passage. They do, however, usually need flanges and fittings to work.
In vacuum systems, valves are used to provide fine control of gas streams entering the vacuum chamber. The vacuum in a vacuum system is often controlled by means of rel¬atively large butterfly or shutter-type throttling valves that determine the rate at which gas is evacuated from the system by a vacuum pump. For use in vacuum systems, valves should have good out¬gassing characteristics. They may also be required to withstand vacuum bakeout temperatures. When intended for applications with, and/or, within vacuum systems, valves are available that can withstand cryogenic temperatures or, at the other extreme, that can operate at very-high temperatures.
Vacuum pumps are the heart of any vacuum system and numerous components and acces¬sories are required to interconnect the pumps to the equipment needing vacuum. Valves of many types (poppet, gate, butterfly, ball, pendulum, etc.) are combined with either mechan¬ical or electrical gauges, monitors, controllers, filters, traps, flanges and fittings to achieve the desired configu¬rations. However, valves, flanges and fittings are the focus of this product roundup.
Product Descriptions
In these product description, vendors make pragmatic to focus on specific intended applications so direct comparisons are difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at www.vactechmag.com and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
Quick Clamp/Metal Seal Flange System
A&N Corporation’s ULRIC™ Vacuum Flange System combines the temperature and  pressure functionality of a traditional copper seal (CF) vacuum flange with the quick installation feature of an ISO clamp system. The ULRIC™ flange system also provides reusable vacuum seals available in stainless steel, copper, or elastomer. The ULRIC™ flange system is a quick clamp assembled, ultra-high vacuum capable flange system. The vacuum seal can be created in two ways — through the compression of a metallic sealing ring onto a “protected knife-edge” or through the compression of a captured elastomer o-ring. ULRIC™ flanges provide a complete range of fittings to mount with tubing sized ¾ inch up to 4 inches in diameter. The flange system consists of two sexless, infinitely rotatable flanges, a re-usable sealing ring that also provides alignment, and a fastener to compress the seal between the two flanges. The flanges are made of 304L grade stainless steel; metal seals are made of copper or stainless steel; elastomer seals are made of Viton® , Buna or silicone; and clamps are available in stainless steel or aluminum. A&N offers a complete line of flanges, fittings, valves, traps, chambers and accessories with ULRIC™ connections that can be used to create a complete vacuum system or pumping line. www.ancorp.com
Poppet, Gate and Ball Vacuum Shut-Off Valves
A&N Corporation offers three types of vacuum shutoff valves: Poppet Valves, Gate Valves, and Ball Valves. These valves regulate gas flow through a system with simple open or closed commands. Poppet Valves are made of a body, actuator and internal poppet and are available in three body styles: 90< Angle, In-Line and Angle In-Line. The actuator transports the poppet toward the top of the valve opening the internal body cavity to the system a l l ow i n g unimpeded flow. When the poppet is actuated to the bottom of the valve, an elastomer-sealing ring is compressed onto a sealing surface creating a vacuum tight seal and stopping flow. Gate Valves offer unimpeded flow with minimal space required for the valve body. A central carriage, or gate, is raised and lowered by the actuator within the body. In the open position, the gate retracts completely from the tube aperture allowing unimpeded flow. In the closed position, an elastomersealing ring is compressed against a sealing surface inside the body ports. Ball Valves are robust valves offering unimpeded flow, but are less sensitive to particulate contamination than the other valve types. Ball valves are made of a body, stem, ball and end caps. The ball is compressed in the body by end caps creating a vacuum tight cavity. A hole in the ball provides unobstructed flow in the open position. The sweeping action of the ball against the body seals when actuated clean the ball as it is opened and closed providing a consistent seal.
A&N Corporation
Williston, FL
www.ancorp.com
Tel: 1-352-528-4100
E-mail: info@ancorp.com
A Broad Range of Adixen™ Vacuum Valve Components
Alcatel has a broad range of Adixen brand valves for virtually every application. Variations by type: each type of valve (gate, butterfly, angle) is available in different versions, offering different materials, flanges, actuators, etc. to provide the most appropriate solution to any of a wide range of demands. Special valves include a variety of special vacuum valves (vent valves, 3-way valves, leak valves, throttling valves) complements the standard valves. All vacuum valves have the following common specifications: guaranteed tightness, individually tested, standard flanges, high conductance, high reliability, and operation in all positions. www.adixen-usa.com
Adixen™ Flanges & Fittings
To address the vacuum industries requirements, Alcatel offers a large range of Adixen brand accessories based on the three most popular standards used in vacuum technology: ISO-KF Flanges and Fittings; ISO-K Flanges and Fittings; and CF Flanges and Fittings. For each standard, Alcatel offers the normalized nominal diameters generally used. Moreover Alcatel offers other diameters historically used in the vacuum industry. This offer includes a large range of accessories for each standard such as elbows, tees, 4-way crosses, flexible couplings, reducers and also some special adapters from one standard to another. According to the working pressure, the tightness and the conductance required, fittings will be made with one of the appropriate standards.
Adixen™
by Alcatel Vacuum Products, Inc.
Hingham, MA
www.adixen-usa.com
Tel: 1-781-331-4200
E-mail: inquiry@adixen-usa.com
Wide Range of Vacuum Valves
Vacuubrand offers a wide range of vacuum valves including manual ball valves, diaphragm valves, right angle bellows valves and butterfly valves. Also offered are small manual and electronic air admittance and isolation valves for use in fine and rough vacuum applications. Complete specifications are available on request. Typical sizes are ISO KF NW 10, NW 16, NW25 and NW 40. The valves are manufactured in Germany of the highest quality materials, such as brass, stainless steel and aluminum, using state of the art CNC machinery. Complete specifications are available. Please call or e-mail.
BrandTech Scientific, Inc.
Essex, CT
www.vacuubrand.net
Contact: Christian Petrilli,
Director of Marketing and Distributor Relations
Tel: 1-860.767.2562 Ext. 121
E-mail: charreys@brandtech.com
Huntington Bakeable All-Metal Valves
A reliable bonnet seal even after bakeout and re-torquing, is assured with Huntington’s patented “Tri-Flange” design for All-Metal Bakeable Valves. The Huntington “Tri-Flange” valves use malleable OFHC® copper bonnet and poppet seals that can be easily replaced. A coaxial shaft with a hand knob attached to an outer fast-advance shaft allows the user to rapidly open and close the valve actuator by hand. The hex nut attached to the fine pitch threaded inner shaft accomplishes the final sealing force with the help of a torque wrench. Ball bearings separate the shaft from the poppet bellows assembly to prevent twisting of bellows as sealing contact is achieved. The entire unit is bakeable. The sealing integrity of Huntington’s patented all-metal valves is not affected by bakeout temperatures to 450°C. When baked, the valves must be under vacuum on both sides to prevent scaling particles from dropping into the seat area. Features include: a patented tri-flange design provides high integrity bonnet seal even after bakeout; torque nut; bonnet torque flange bolts (takes all reactive forces when torqued closed); Tri-Flange design (Patented, no bonnet leak after torque down); Acme/Coaxial Shaft (fast close/high integrity seal); welded bellows; thrust-bearing supported poppet (longer cycle life) ; radiused poppet gasket (long gasket life) ; conical sealing seat (no ledges to trap contaminants); poppet seal screw (easy gasket removal); unibody design, no welds (no virtual leaks); bonnet gasket; bonnet seal flange bolts (no reactive force to cause leaks); and hand knob (fast open/close). www.huntvac.com
Right-Angle, In-Line and Straight-Through High Vacuum Isolation Valves For High Conductance
Huntington Mechanical Laboratories,  Inc. manufactures vacuum valves for equipment manufacturers and research facilities. They include right-angle, in-line and straight-through high vacuum isolation valves, which are full opening for high conductance. Manual right-angle metal seal valves provide bakeable UHV isolation. Huntington offers wide size range of butterfly valves. Gate valves provide chamber and pump isolation, and like most of our valves, are available with manual or pneumatic actuators, position indicators, solenoids and other options. A complete range of sizes and flanges are available to suit all vacuum applications. Modified or custom valves are available.
Huntington Mechanical Laboratories, Inc.
Mountain View, CA
www.huntvac.com
Contact: Christian Petrilli,
Tel: 1-800-227-8059
E-mail: vacman@huntvac.com
DN 16 – 40 ISO-KF Angle and Inline Valves
INFICON offers a new line of rugged and compact valves, well suited for all general high vacuum and semiconductor processes. The line includes manual, pneumatic, electropneumatic and electromagnetic actuated valves. All have extremely long-lasting bellows feedthroughs, are equipped with high quality FPM seals, and are factory tested for a leak rate of <10-9 mbar. This line is for high conductance, fast opening/closing time, high differential pressure resistance and long, low-maintenance operation. Manually actuated valves have a convenient knob for opening the valve with one quick turn or with soft continuous variable actuation for controlled venting/pumping. The drive locks securely in the open/ close position protecting against unintended operation. A visual position indicator clearly indicates valve status. The pneumatic and electro-pneumatic actuated valves have an “All-in-One” design. One connector for the integrated pilot valve and position indicator guarantees easy, time saving “plug and play” installation and eliminates extra cables. The intelligent design-concept results in a valve that provides optimum uptime. A wide range of maintenance-free pilot valve coils is available, also. The compact electromagnetic valve operates within a voltage range of 90 to 264 V. The valve is equipped with durable bellows feedthroughs. The operating mode, remote control or local operation, is selectable. Electrical and visual (LED) position indicators are standard.www.inficon.com
ISO-K Angle Valves
INFICON ISO-K valves are available manually actuated from DN 063 up to 100 in aluminium and stainless steel, and pneumatically or electropneumatically actuated up to DN 250. Angle valves up to DN 1000 are available on request. The manually actuated ISO-K valve provides a smooth, effortless means of opening and closing the valve. The visual position indicator is clearly visible. The “All-in-One” design concept of the pneumatic and electropneumatic actuated ISO-K valves, with integrated pilot valve and position indicator, provide fast and easy plug-and-play installation.www.inficon.com
Dosing Valves and Gas Dosing Systems
INFICON offers a full line of Gas Dosing valves and systems. The manually operated fine gas dosing needle valve is equipped with a digital display, has optimal control characteristics and an excellent reproducible gas flow. For added control, the valve can be closed securely without changing the flow setting. INFICON offers two upstream automatic Gas Dosing and pressure control systems. The system controls the absolute pressure of the vacuum system using the 0 to 10 V output of a reference vacuum gauge. The control unit has a wide variety of pre-programmed INFICON pressure gauges and the auto or PID control mode adjusts the output signal to the control valve compensating for deviations from a pre-determined set point. The control valve VDE016-X has integrated motor drive electronics, which transform the control signal into a defined valve position. The valve is controlled via analog voltage, integrated interface or an optional RS232 interface and provides a broad control range, excellent reproducibility and withstands corrosive gases. The control valve VDM005A-X offers fast and reproducible upstream pressure control. The unique solenoid control mechanism provides smooth control and delivers excellent repeatability and reproducibility. An ALL-Metal Dosing valve system for UHV applications is also available.www.inficon.com
Valves, HV-Fittings, Feedthroughs and UHV-Components
For maximum convenience, INFICON offers a wide range of valves, including mini valves, butterfly valves, and all metal valves. Our selection of HV-fittings, feedthroughs and UHV-fittings meet your requirements for reliability and availability. Expert advice for standard and customized installations ensures a dependable solution for every vacuum engineering application in production or research.
INFICON
East Syracuse, NY
www.inficon.com
Tel: 1-315-434-1234
E-mail: info@inficon.com
Rectangular Gate Valves
As applications for Rectangular Gate Valves keep getting larger, KJLC is meeting the demand for the wider rectangular valve openings commonly used for Semiconductor Processing, Solar, LCD/Flat Panel, and other Vacuum Coating applications. Our bellows-sealed rectangular gate valves feature a patented L-Motion link assembly (U.S. Patent Pending) and dual shafts without springs in the actuator to enable faster, smoother actuation with significantly reduced vibration. This results in less wear, less particulate generation, and faster cycle times. The Dust Seal on the vacuum side of the bonnet flange virtually eliminates process particulate from entering the bellows, leading to long cycle life. Our valves feature mechanical locking, such that at the end of blade travel during valve closure, the valve locks into position, thus any back pressure on the gate will not affect sealing properties. Our sturdy design has the ability to handle backpressure—approximately 15% to 30% greater than the competitors’ product. Rated up to 2 million cycles and available with 200mm through 2,000mm openings, KJLC rectangular valves are ideal for semiconductor, solar, LCD flat-panel and vacuum-coating applications. These KJLC rectangular gate valves are engineered from over 10 years of experience in semiconductor equipment vacuum valve repair. Contact us today!www.lesker.com
New Semiconductor Process Valve
New from Kurt J. Lesker Company is the patented Protection Vacuum Gate Valve’s fast action (<0.3 seconds to close) that reduces downtime by protecting your system in the event of a vacuum pump failure. The Protection Gate Valve is ideally suited for high particulate generating applications. This bellows-sealed, pneumatically-actuated, SS valve system monitors up to four pumps with local or remote control and LCD status display. The valve’s low particle generation design shields the valve body, in open and closed positions, against particulate accumulation leading to long life under adverse process conditions.www.lesker.com
Angle Valves
Kurt J. Lesker Company ’s stainless steel right angle valves are reliable, economical, general-purpose components for HV and UHV applications that require cleanliness and corrosion resistance. These welded stainless steel bellows-sealed valves offer long-life operation (up to 1,000,000 cycles), and are available with QF, ISO, or ConFlat® flanges. Standard tube ends or custom configurations are available for compatibility with existing equipment. These high quality valves are for vacuum pressures to 1 × 10-9 Torr, and can withstand baking to 150°C. Copper bonnet seals are available on the ConFlat flanged valves for applications demanding UHV pressures, and temperatures up to 200°C. Both manual and pneumatic versions are available.www.lesker.com
New Gate Gate Valves The Kurt J. Lesker Company is introducing its own  Leskerbranded line of gate and angle valves. These reliable and economical general-purpose valves are excellent choices for HV and UHV applications requiring cleanliness and corrosion resistance. The gate valves are available in 4” & 6” port sizes with 6”OD and 8” OD (CF or ISO) flange mountings. They are suitable for pressure ranges from 1 × 10-8 to atm.www.lesker.com
CF, KF/ISO, and ASA Flanges, Components and Hardware
Kurt J. Lesker Company’s  comprehensive vacuum component offering includes all of the common flanges and fittings you need. Strategic inventories of CF, KF/ISO, and ASA flanges, components, and hardware are available at competitive prices for same-day ship- ment. Our selection provides a reliable and economical source for high-end components for both HV and UHV applications. Kurt J. Lesker Company is focused on our customers’ supply chain requirements and we’ve created new tools to make doing business easier. VacuCADSM is our free downloadable drawing program with 1000s of 3D and 2D product drawings of Kurt J. Lesker Company manufactured products available. Go to the Downloads section at to register for this invaluable tool.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Ray Pokorny
Tel: 1-412-387-9200 or 1-800-245-1656 toll free
E-mail: raymondp@lesker.com
New Integrated Throttling Butterfly Valve Line
MDC Vacuum Products, LLC’s new Integrated Throttling Butterfly Valve Line combines high performance analog motion control, a proven high quality valve design and a powerful control algorithm into an excellent cost effective alternative for both OEMs and end users alike. They feature small footprint/compact design, unique bellows seal design for ultra clean high temperature applications, fast Response/ High Resolution, and power for 2 CDG’s embedded in the Controller Design. Contact Neli Ulea, MDC Valves Product Manager, directly for more info at or 510-265-3544.www.mdcvacuum.com
Del-Seal™ CF Metal Seal Flanges
MDC established its standing in the vacuum components world after becoming one of the first licensed manufacturers of Varian’s patented Conflat® metal-seal flange, known today to most MDC customers as the Del-Seal™ CF metal-seal flange. Del-Seal™ CF flanges are 100% Conflat® compatible metal-seal flanges suitable for the most demanding UHV applications. Del-Seal™ CF metal seal flanges are available in a wide range of sizes that can accommodate 1/8” to 14” tube diameters. For tube sizes above 14 inches and up to 24 inches in diameter, MDC wire seal flanges are recommended. MDC flanges feature: Del-Seal™ CF Metal-Seal Flange; Conflat compatible; genderless mating; rotatable and non-rotatable; tapped or clearance bolt holes; wire seal flanges used for tubes larger than 14 inches diameter; double sided flanges; reducing flanges; and hybrid adapters interconnect dissimilar flange systems.www.mdcvacuum.com
Male and Female Wire Seal Flange Set
MDC’s Wire Seal Flanges provide a convenient method of metal-sealing relatively large diameter vacuum chambers. These  metal seal flanges pick up where the Del-Seal™ CF flanges leave off. Applications include bell jars, vacuum furnaces, and a variety of other ultrahigh vacuum enclosures. All MDC Wire Seal Flanges are made of 304 ss material. To make the seal, a 0.080" cross-section diameter OFE copper wire gasket is compressed between mating male and female flanges. The geometry of the beveled sealing surface confines the flow of the crushed gasket material, causing it to fill in minor nicks and scratches in the seal area. These flanges can also be used with elastomer gaskets. Wire Seal Flange features include UHV rated to 1 × 10-13 Torr; high temperature rated to 450°C; non-rotatable geometry; dished head blank or flat blank option; OFE copper or optional Viton® elastomer gaskets; and clearance bolt holeswww.mdcvacuum.com
Kwik-Flange™ ISO KF Components
MDC’s Kwik-Flange™ ISO KF components are an economical system of reusable interfacing stainless  steel vacuum fittings for tube sizes ranging from 1 /2” through 2” diameters. These flanges can operate in high vacuum environments to pressures in the 1 × 10-8 Torr range. The Kwik-Flange™ ISO KF flange system is ideally suited for applications requiring rapid and frequent assembly and disassembly. MDC ISO KF flanges comply with all ISO specifications for vacuum mounting hardware and are compatible with most third party ISO KF flanges and components. The Kwik-Flange™ ISO KF component features include: vacuum rated to 1 × 10-8 Torr; bakeable to 150°C; fast connect and disconnect; economical reusable fittings; genderless geometry; rotatable bolt ring adapter; elastomer gasket seal; varied fastening methods; ISO KF and LF compatible; specialty fittings available; and Type 304 stainless steel construction.www.mdcvacuum.com
Large-Flange™ ISO LF Components
MDC’s Large-Flange™ ISO LF components are an economical system of reusable and interfacing stainless steel vacuum fittings for tube sizes ranging from 2-1/2” through 20” diameters. Large-Flange™ ISO LF flanges pick up where the Kwik-Flange™ ISO KF system leaves off. These flanges can operate in high vacuum environments to pressures in the 1 × 10-8 Torr range. The Large-Flange™ ISO LF flange system is ideally suited for applications requiring rapid and frequent assembly and disassembly. MDC ISO LF flanges comply with all ISO specifications for vacuum mounting hardware and are compatible with most third party ISO LF flanges and components. Large-Flange™ ISO LF component features include: bakeable to 150°C; fast connect and disconnect; economical reusable fittings; genderless geometry; rotatable bolt ring adapter; elastomer gasket seal; varied fastening methods; ISO KF and LF compatible; specialty fittings are available; and they have type 304 stainless steel construction.www.mdcvacuum.com
Del-Seal™ CF Fittings
MDC Del-Seal™ CF Tube Fittings are convenient “buildingblock” components. They offer great flexibility in the design and construction of high and ultrahigh vacuum systems. The Del-Seal™ CF fittings such as nipples, half nipples, reducer nipples, flexible nipples, elbows with 45° and 90° configurations, tees, reducer tees, crosses with four-, five- and six-way configurations, six-way cubes and multiport flange assemblies comprise the industry's largest selection of Del-Seal™ CF fitted vacuum components. If we do not have the product you seek, custom versions of most of these components can be quoted upon request. The Del-Seal™ CF Tube Fittings feature: UHV rated to 1 × 10-13 Torr; high temperature rated to 450°C; rotatable and nonrotatable geometrics; OFE copper or optional Viton® elastomer gaskets; clearance bolt holes; ConFlat® compatible design; and a standard matte finish.www.mdcvacuum.com
90º Elbows
MDC Kwik-Flange™ ISO KF and Large-Flange™ ISO LF Tube Fittings are  convenient “building-block” components. They offer great flexibility in the design and construction of high vacuum systems. All fittings are fabricated from type 304 stainless steel drawn and welded vacuum tubing. Flanges do not need to be rotatable since they are completely symmetric. If desired, Rotatable Bolt Ring Assemblies can be retrofitted to existing Claw-Clamp style flanges to add boltholes to ISO LF fittings. Reducers are used for a change in size of flanges within a single method of sealing, such as elastomer sealing of ISO KF and LF flanges. Adapters are used to change from one method of sealing to another, such as elastomer seal ISO to metal seal CF. The 90º Elbows feature: high Vacuum rated to 1 × 10-8 Torr; temperature rated to 200°C; symmetric, non-rotatable geometries; rotatable Bolt Rings available for LF sizes; Viton® or Buna-N® O-Rings; have a standard matte finish; and they are ISO compatible design for full range of KF and LF sizes, NW16 to NW500.www.mdcvacuum.com
MC+ 300 mm Transfer Valve
MDC’s MC+ 300 mm Transfer Valve High Vacuum Series of 150°C Viton® O-Ring Sealed Bonnets feature: 2 million Cycles between maintenance; Bellows sealed actuator; virtually particle and vibration-free; double acting pneumatic actuator with position indicators; aluminum body and Gate maintain status in the event of power failure; pneumatically locked in the closed position; and LCD counter for tracking cy- cles. Specifications are: materials — body & gate aluminum; bellows AM-350 ss; bolts 300 Series ss; seals bonnet Viton® ; gate Viton® ; with options of different sealing materials on request. They have an electropneumatic actuator; air pressure 70 to 100 psig; air control valve Humphrey 3 position, 4 way solenoid valve; solenoid voltage 24 VDC, 120 VAC, 240 VAC; power loss valve maintains status; position indicators are Solid state, NPN Sensors; closing and opening time < 1 sec; a Vacuum Range 1×10-8 Torr and a Leak Test 2 × 10-10 cc/sec of He.www.mdcvacuum.com
1 Million Cycles 1.5 Inch Gate Valve
MDC’s high cycle 1.5 inch gate valve  is for HV and UHV application. Performance reliability and value are the main characteristics of this new and improved valve. It has the same multiple port connections and options as MDC's standard Gate Valve Line for customer convenience. The key features and advantages of this new valve are: 1,000,000+ cycles with minimal maintenance; reduced vibration for quieter operation; mechanically locked in the closed position; direct shaft-gate assembly connection for faster actuation; and low particle generation due to reduced internal parts.www.mdcvacuum.com
Gate Valve Assemblies
MDC Gate Valve assemblies have three key components: an actuator, a carriage/gate and a valve body. The actuator provides the power to position or transport the valve’s carriage/gate. The actuator is attached to the valve’s body via a rectangular bonnet flange. The gate closes or opens one of the valve’s body ports. The valve body is a vacuum tight chamber that is screwed, flanged or welded into a larger vacuum vessel or system. The stainless steel vacuum gate valves use patented CLoc™ and Uni-Loc™ gate valve locking mechanisms. No contact is made between a valve’s body and the locking mechanism, which decreases vibration and ensures smooth operation. MDC gate valves require about half the number of moving parts found in comparable competitor valves. Fewer moving components minimize wear and particulate generation, providing superior performance and reliability. Low outgassing characteristics are attributed to a fusion welded 300 series stainless steel body, welded AM-350 stainless steel nesting bellows as well as small cross-section O-rings and the elimination of blind internal cavities. MDC gate valves are offered in various sizes ranging from 0.625-inch to 12-inch port diameters.www.mdcvacuum.com
Stainless Steel Vacuum Gate Valves
MDC’s new line of EZ-Lock Gate Valves is engineered for performance reliability and value. They have the same envelope dimensions, allowing for a direct replacement of the standard MDC Gate Valves. The key features and advantages of this new line of valves are: shock free locking mechanism; low vibration, quiet operation; remains closed in case of loss of power or air; low particle generation; and aluminum or Stainless Steel Gate Assembly option for customer convenience.www.mdcvacuum.com
MDC EZ-lock Gate Valves
MDC’s vacuum angle and inline valves are devices that regulate the flow of gases, fluids or materials through a structure or aperture by opening, closing or obstructing a port or passageway. MDC stainless steel vacuum angle and inline valves provide maximum conductance and minimum size for easy installation. These valves are ideally suited for systems requiring high reliability and low outgassing. The valves’ low outgassing characteristics can be attributed to a fusion welded 304 stainless steel body, welded AM-350 stainless steel nesting bellows as well as small cross-section elastomers and the elimination of blind internal cavities. MDC angle and inline valves are offered in various sizes ranging from 0.25 to 10 inches port diameters. Standard port mounts include: Del-Seal™ CF metal seal flanges, recommended for ultrahigh vacuum service; ISO Kwik-Flange™ and ISO Large-Flange™ fastmake and fast-break elastomer seal flanges, ideal for high vacuum applications requiring frequent assembly and disassembly.www.mdcvacuum.com
All-Metal Angle & Inline Valves
MDC’s bakeable all-metal angle and inline valves are used in ultrahigh vacuum environments where elevated temperatures preclude the use of elastomers and low temperature gasket metals. These valves provide reliable high temperature seals from atmospheric pressures to below 10-11 Torr. Wherever possible, bonnet gasket seals have been eliminated to minimize potential leak paths. Valves fitted with bonnet seals fa- cilitate gasket replacement. The size and orientation of the valve body ports on bonnet fitted valves precludes gasket removal through its ports. When operated at ambient temperatures, allmetal valves provide hundreds of leak-free cycles between routine poppet gasket replacements. In high temperature applications, life cycles are inversely proportional to the bakeout temperatures. Operated at the maximum bakeout temperature of 450°C, the poppet seal gasket life is approximately 50 open/close cycles. The sealing pressure deforms the copper gasket, which conforms to the conical knife-edge seat. During thermal cycling, the valve’s loading mechanism counteracts component differential expansion to maintain seal integrity. ULV series precision leak valves are shipped in a leak-tight condition. Leak rates are controlled by relieving the pressure applied to the replaceable copper seat. Leak rates are adjustable down to a minimum of 1 × 10-10 Torr l/sec.www.mdcvacuum.com
MDC Butterfly Valves
MDC’s Butterfly valves require only one-quarter turn rotation of the handle to go from fully open to the fully closed position. In the 1- 1 /3 inches Mini Del-Seal™ CF flange series, a spring loaded ball bearing becomes seated in an indent providing a positive mechanical stop. All other size valves employ a roll pin stop method. These quick-acting Butterfly Valves have an improved sealing action. The opening in the body of the valve has been machined at a slight angle to the plane of the flapper. The flapper is set to rotate slightly off-center. On closure, the sealing pressure is applied more uniformly all around the O-ring. A reliable, positive seal is made and the tendency of previous designs to roughen the surface of the O-ring and eject it from its groove is eliminated. MDC Butterfly Valves are low outgassing. All internal surfaces are machined from solid stainless steel bar stock. The handle is made of aluminum. The valves are offered with a choice of Del-Seal™ CF ultrahigh vacuum metal-seal flanges or ISO Kwik-Flange™ Oring seal flanges.www.mdcvacuum.com
Stainless Steel Vacuum Angle and Inline Valves
MDC’s stainless steel angle and inline valves are for maximum conductance and minimum size for easy installation. These valves are ideally suited for systems requiring high reliability and low outgassing. The valves’ low outgassing characteristics can be attributed to a fusion welded 304 stainless steel body, welded AM-350 stainless steel nesting bellows as well as small cross-section elastomers and the elimination of blind internal cavities. The angle and inline valves are offered in various sizes ranging from 0.25 to 10-inch port diameters. Standard port mounts include: Del-Seal™ CF metal seal flanges, recommended for ultrahigh vacuum service; ISO Kwik-Flange™ and ISO Large-Flange™ fast-make and fast-break elastomer seal flanges, ideal for high vacuum applications requiring frequent assembly and disassembly.www.mdcvacuum.com
Bakeable All-Metal Angle and Inline Valves
MDC‘s bakeable all-metal angle  and inline valves are used in ultrahigh vacuum environments where elevated temperatures preclude the use of elastomers and low temperature gasket metals. These valves provide reliable high temperature seals from atmospheric pressures to below 10-11 Torr. Wherever possible, bonnet gasket seals have been eliminated in an effort to minimize the number of potential leak paths. Valves fitted with bonnet seals facilitate gasket replacement. The size and orientation of the valve body ports on bonnet fitted valves precludes gasket removal through its ports. When operated at ambient temperatures, all-metal valves provide hundreds of leak free cycles between routine poppet gasket replacements. In high temperature applications, life cycles are inversely proportional to the bakeout temperatures. When operated at the maximum bakeout temperature of 450°C, the poppet seal gasket life is reduced to approximately 50 open/close cycles.
MDC Vacuum Products Corporation
Hayward, CA
www.mdcvacuum.com
Contact: Jinny Royer, Marketing/Publications Manager
Tel: 1-510-265-3544
E-mail: JRoyer@mdcvacuum.com
Electromagnetic Cv™ Valve RERUN & ADD
The MKS HPS® Electromagnetic Cv™ valve can be used in place of any  existing MKS HPS Cv valve where electric actuation is preferred over pneumatic or manual actuation. The ECv valve is actuated by a direct current electric power supply, and consequently, does not require the use of a pneumatic system. The ECv valve’s actuation system is retrofitable in any current HPS Cv valve. The valve has a low profile, linear solenoid mounted to the top of the valve that serves as the valve actuator. When power is applied to the solenoid, the solenoid is energized, causing the valve to open or close, depend- ing on the configuration. Each valve has a coil saver circuit integrated with the input power cable. This limits power usage of the coil when the valve is actuated. This allows the valve to operate without excessive heat generation, remaining safe to the touch. Options are available in either 12 or 24 VDC. It is available in the angle and inline configurations with multiple fitting options. The body is high grade, corrosion resistant, non-magnetic 304 stainless steel. The formed bellows assembly is 321 corrosion resistant stainless steel. Metal bonnet seals of either nickel or copper are available as standard options. Kalrez, Silicone, Viton and Chemraz are also options for both the bonnet seal and nose piece. For remote indication of valve position, a limit switch option can be specified within the part number ordering system.www.mksinst.com
Integrated LoPro™ (ILP) Two Stage Poppet Valve
Some vacuum systems require a slow initial evacuation of the roughing or loadlock area of the system, called soft start or soft pumpdown. This process reduces turbulent flow during initial system evacuation, diminishing product contamination and damage. If a bypass line is used to soft start a system, it uses space and can clog, requiring frequent cleaning and maintenance. The MKS HPS® Integrated LoPro™ Two-Stage (ILP) replaces the bypass line. The ILP accommodates the space constraints found on vacuum applications like loadlock and transfer chambers specifically in semiconductor or optical processing for which a cleaner environment is necessary. A heater jacket is available for processes with condensable materials. The ILP is a pneumaticallyactuated poppet valve with a bypass valve combined into a single unit. The main valve is a normally closed bellows sealed valve. The bypass valve is a spring to close, o-ring sealed valve located within the main stage. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure. In the second stage, the main valve opens, allowing use of full pumping speed.www.mksinst.com
Heated Valves
MKS Instruments knows many processes create by-products that can solidify within a vacuum system on the walls of components.  These by-products clog the system and can flake off and backstream, damaging product. The systems are subject to frequent downtime for maintenance. By heating critical components, like valves, the by-products stay in a gaseous state and can move through the system for trapping or other disposal. MKS HPS® heated valves are uses in such systems. The heater jackets are molded to match the shape of the valve they are intended to heat. Each valve heater provides optimal temperature distribution and uniformity. MKS HPS angle and inline heated valves are available with single or multiple stages and standard or low profile bodies. They range in size from NW 25 to NW 100 (1 to 4 inches). The valves include choices of seals, solenoids, bypass configurations (for the two-stage models) and limit switches. The available models are Jalapeno Valves, Jalapeno Two-Stage Valves, Jalapeno LoPro Valves, and Series 170/180 Valves.www.mksinst.com
High Conductance Vacuum (HCV) Valves
The MKS HPS HCV Valves are lightweight, bellows-sealed poppet valves for high performance in loadlock or system isolation applications such as semiconductor manufacturing, process industries, solar, and thin film deposition. The HCV Valve has a smaller profile, is lighter, lower in cost, and easier to maintain than similar valves in the market. Produced using the latest manufacturing techniques and highest quality materials, the HCV Valve is extremely durable and dependable and valve lifetime can extend to 1,000,000 cycles under clean conditions. An edgewelded stainless steel bellows prevents outgassing and virtual leaks. The bellows’ stroke length is optimized to assure a longer cycle life while maintaining a high conductance. The HCV Valve allows complete disassembly for lower cost of replacement parts. HCV valve has a vacuum range from atmosphere to below 10-9 Torr and is available in port diameters of 8, 10 and 12 inches. MKS offers the largest selection of bellows sealed poppet valves for vacuum systems.
MKS Instruments
Andover, MA
www.mksinst.com
Contact: MKS HPS Applications Engineering
Tel: 1-978-284-4000
E-mail: mks@mksinst.com
T3Bi Digital Exhaust Throttle Valve for DeviceNet™ Networks
The MKS Type T3Bi Intelligent Exhaust Throttle Valve is for computer integrated applications where a simple pressure  control system is desired. The T3Bi integrates all control, communication, and driver circuits via a compact “add-on” electronics module onto a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The self-tuning control algorithm drives the system to set point rapidly and with minimum overshoot, and ensures repeatable process recipes without operator involvement. The valve operates in two modes: flapper positioning or pressure control, either of which can be user-activated through the DeviceNet™ communications interface. All of the adjustable setup parameters, run time operation, and diagnostics information are available through this interface. The “intelligent instrument” concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions. System design, installation, maintenance, and labor costs are reduced as compared to the traditional analog I/O. The valve driver provides high-resolution pressure control. The robust, high torque motor provides extended uptime and reduces preventative maintenance cycles – a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The valve is constructed of corrosion-resistant 316 stainless steel for the toughest process gases and is available in a variety of standard flange styles and seals.www.mksinst.com
T3P Integrated High Speed Pendulum Valve and Controller
MKS T3P Pendulum Valves are for demanding semiconductor and thin film applications. T3P valves feature a wide control range and high valve speed to enable fast, precise and reliable pressure control for all etch, deposition and chamber clean process steps—including those with reduced flows or at high pressures. The ability to precisely control conductance over the entire valve stroke, including near-closed positions, enables recipe pressures to be reached quickly and with minimal overshoot. With its advanced self-tuning control, the T3P valve provides superior process stability and maximizes throughput. Combining wide dynamic range pressure control and isolation capabilities into a single unit, the T3P valve reduces cost and system complexity. An on-board digital controller supports multiple communication protocols—including DeviceNet™ and RS232, adding the T3P to MKS’ portfolio of digitally controlled products. By combining the T3P with industry standard MKS Baratron® capacitance manometers, MKS provides the optimal solution for pressure measurement and process control. The mechanical design features of the T3P include MKS’ patented CAM mechanism providing a symmetrical and linear control and a space-saving low profile design. A simple operating mechanism featuring a minimal number of moving parts and fewer wetted stainless steel components, provides virtually particle-free operation.
MKS Instruments, Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS Pressure Control Applications Engineering
Tel: 1-978-284-4000
E-mail: mks@mksinst.com
Intellisys Pressure Control
Nor-Cal Products offers unequalled performance with the Intellisys downstream pressure control system, providing measurable process benefits through higher resolution, speed and reliability. The Intellisys Adaptive Pressure Controller (APC) merges closed loop motor control with adaptive pressure control to provide advanced control system performance. An advanced adaptive algorithm eliminates pressure overshoot or gradual ramps during pressure transition. A Digital Signal Processor (DSP) enables DeviceNet™ communications protocol and programming flexibility for customer or process specific requirements. Intellisys motor control technology eliminates belts, gears and position switches, improving reliability, while increasing speed by at least a factor of twenty. High-torque geared drives are also available as an option. Standard sizes range from one to twelve inches. Substantial cost and space savings can be realized with the IQ-Series butterfly valves. All the control electronics are incorporated on to the valve motor drive, resulting in a compact size that is easy to integrate on any system. Heated, non-heated and DeviceNetTM compatible gauges are available with several tube fittings and in standard pressure ranges from 0.1 to 1000 Torr. Our Universal Valve Drive (UVD) easily replaces older drive technology found on other manufacturers' pressure control valves. When used with our APC, the universal valve drive can upgrade a competitive valve to approach Intellisys performance levels.www.n-c.com
New JV Series Vacuum Valves in KF 16-50 Sizes
Nor-Cal Products, Inc.’s JV series valves meet the demanding high-cycle requirements of semiconductor equipment manufacturers, yet offer the researcher a costeffective solution for UHV system roughing. In addition  to pneumatic actuation, these valves offer a unique manual actuator for course throttling, which allows partial opening by specified and repeatable intervals. Electromagnetic actuators are available for portable or table-top systems that do not have compressed air available. Right-angle and in-line bodies are available in lowcost aluminum or stainless steel with KF 16, 25, 40 and 50 flanges. Features include five million cycle rated, small footprint and a wide range of options. Actuation may be electromagnetic or pneumatic with manual course throttling. Body styles are right angle and in-line with either aluminum or stainless steel construction. Other options include position indicators, ”Snap-on” coils on the electromagnetic actuator. Special o-ring materials are available.www.n-c.com
EVAC Flange General Information OK Online Nor-Cal Products stocks a complete line of EVAC chain clamps and aluminum metal seals for converting elastomer seal NW  (KF) and ISO flanges to UHV metal seals. They provide a number of benefits over elastomer seals: reduced outgassing, no permeation, no hydrocarbons, resistance to radiation and short half-life. EVAC seals are used in high-energy physics, other UHV applications and, in some circumstances, cryogenic applications. EVAC seals are reliable in high vibration or temperature cycling environments. EVAC chain clamps and tapered flanges are the standard vacuum flange for many Japanese semiconductor equipment manufacturers. The advantages over using the standard ISO flange are the time and space savings during assembly and the flexibility to form high vacuum or UHV seals. Nor-Cal Products stocks blank and bored NW-63 flanges that are compatible with other manufacturers’KF-63 flanges made to the ISO 2861 specification. They can be used with EVAC chain clamps to form elastomer or aluminum metal seals. Elastomer seals are formed with ISO-63 centering ring/O-ring assemblies and elastomer EVAC chain clamps. Metal seals are formed with EVAC aluminum seals and metal seal chain clamps. NW-63 flanges are made from 304 stainless steel for 2.5 inch OD tube size. Nor-Cal Products is the only authorized U.S. manufacturer of EVAC tapered flanges. These flanges are specifically for use with EVAC chain clamps for elastomer or aluminum metal seals. High vacuum seals are formed with a standard ISO centering ring/O- ring assembly and an elastomer seal EVAC chain clamp. UHV seals are formed with a metal seal chain clamp and an aluminum seal. Both blank and bored 304 stainless steel versions are available from stock in 80 and 100 mm sizes for 3 and 4 inch OD tube sizes, respectively. Flanges for tube sizes up to 28 inches OD or metric tube sizes can be supplied upon request.www.n-c.com
NW Flange General Information OK online
Nor-Cal Products NW flanges meet ISO 2681 specifications for standard USA tube sizes from 3/8 to 2 inches OD. They are compatible with other manufacturers’ISO-KF style flanges. NW flanges utilize an aluminum clamp with a single wing nut fastener or a lock-over-center clamp allowing frequent disassembly without tools. The vacuum seal is effected by the application of uniform pressure from the clamp on the 15º surface of the 304 stainless steel flanges. The mating flange surfaces compress a Viton O-ring held in place by a centering ring. The resultant seal can be used in vacuum applications of up to 10-8 Torr and baked to 204ºC, however sustained baking above 150ºC may result in deterioration of O-rings. Additionally, NW flanges allow components to be rotated before assembly for ease of component alignment. NW flanges are available on virtually all Nor-Cal components and fittings. Nor-Cal manufactures a full line of NW adapters so you can add to or build an entire system with NW components. NW flanges can also be used with EVAC chain clamps and aluminum seals to obtain a UHV seal bakeable to 150ºC.www.n-c.com
ISO Flange General Information OK Online
Nor-Cal Products ISO flanges and hardware are manufactured to the International Standards Organization specification so they can be mated to other manufacturers’ ISO flanges. ISO flanges are made from Argon Oxygen Decarburization (AOD) 304 stainless steel. This material is certified to meet ASTM-240 and has less than 0.01% sulfur in order to prevent sulfur stringers. Grain size is 3 to 6 per ASTM E-112. Maximum inclusion size is 2.5 per ASTM E-45. Normally our standard material is in the low carbon range for 304 stainless steel. For increased corrosion resistance, some sizes are available from stock in 316L stainless steel. Optional fastener and nonrotatable ISO flanges are available from stock for 2-1/2 to 20 inch tube sizes. Both use a Viton O-ring, held in place by a centering ring, to effect a seal with a vacuum range of 10-8 Torr. ISO components can be baked to 204ºC. ISO flanges can also be used with standard clamps and aluminum seals to obtain a UHV seal bakeable to 150ºC.www.n-c.com
ASA Flange General Information OK Online
Nor-Cal Products’ASA flanges are manufactured from specially-treated 304 stainless steel. These flanges mate with standard 150 lb.  ASA flanges or 150 ANSI flanges. They are available from stock for standard tube sizes from 2 to 12 inches. Larger sizes are available upon request. Nuts and bolts are used to apply pressure between the mating flanges and a seal is effected when a Viton Oring is compressed. ASA flanges can be baked to 204BC and have a vacuum range of up to 10-8 Torr. Besides being sold separately, they are available as standards on nipples, adapters, tees, crosses, elbows and valves. When components of several systems are used interchangeably, use of rotatable flanges is recommended. Assembly is facilitated by rotation of mating flanges, to align bolt holes. Nonrotatable ASA flanges, unlike rotatable, contain both sealing surface and bolt holes in one unit rather than two. This makes the nonrotatable flange less expensive, and therefore the preferred choice when mating component orientation is not a concern.www.n-c.com
CF Flange General Information OK Online
Nor-Cal Products CF flanges are compatible with other Conflat style flanges and are available in sizes from 11/3 to 161/2 inch OD for 1/4 to 14 inch tube diameters. Flanges 4-1/2 inch OD and smaller are made from 304 electroslag remelt (ESR) bar stock. ESR is a refining process that produces stainless steel with higher purity, fewer inclusions and more uniform grain structure to eliminate microscopic leak paths. Larger CF flanges are made from Argon Oxygen Decarburization (AOD) 304 stainless steel. This material is certified to meet ASTM-240 and has less than 0.01% sulfur to prevent sulfur stringers. Grain size is 3 to 6 per ASTM E-112. Maximum inclusion size is 2.5 per ASTM E-45. Normally our standard CF material is in the low carbon range for type 304 stainless steel. As specials 304L and 316L material can be supplied in AOD or roll-forged rings. Machining is consistent with good UHV practice. Machine coolant is sulfur free to reduce outgassing. State-of-the-art CNC machine centers are used to produce flanges with consistent high quality. Flanges are machine washed in approved aqueous detergent after machining. Chemcleaning and clean room packaging are available. CF flanges utilize an OFHC copper gasket to produce a vacuum tight seal up to 10- 13 Torr, even when baked repeatedly to 450ºC. When the copper gasket is compressed between the knife edges of CF flanges, its material flows laterally to fill surface imperfections. Nor-Cal offers CF flanges in rotatable as well as non-rotatable versions. Non-rotatable CF flanges, unlike rotatable, contain both sealing surface and bolt holes in one unit. This makes the non-rotatable flange less expensive, and therefore the preferred choice when mating component orientation is not a concern.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Contact: Jacquie Daniel
Tel: 1-800-824-4166 toll free or 1-530-841-9153
E-mail: jacquiedaniel@n-c.com
Vacuum Valves and Fittings Family
Oerlikon Leybold Vacuum offers extensive experience in vacuum technology and offers a broad portfolio of products including vacuum valves and fittings used in a wide variety of applications. The Oerlikon Leybold Vacuum family of valves and fittings are engineered for high reliability and extended life with select valves exceeding 10 million actuations. The latest manufacturing techniques and modular design allow for the highest quality products. The valve and fittings product family includes: right-angle and straight-through valves in the flange range of 16 to 40mm (ISO-KF16 to ISO-KF40); right-angle valves in the flange range of 63 to 1000 mm (ISO-K63 clamp flanged to ISO-F1000 bolt flanged); gate valves in the flange size 16 to 250 mm available with various flanges; electro-magnetic, electro-pneumatic or manual operation; visual and remote position indicators; corrosive gas series; specialty valves including precision leak valves, safety venting valves and vacuum locks are available; an array of connection fittings and flange types ASA, ISO-KF, ISO-K, ISO-F and CF type; and low leak rates.
Oerlikon Leybold Vacuum USA
www.oerlikon.com/leybold
Contact: Mario Vitale
Tel: 1-800-764-5369
E-mail: inquiry@adixen-usa.com
Vacuum Components
Pfeiffer Vacuum has acquired Trinos  Vacuum Systems Inc. Trinos brings a wide range of vacuum components of various materials, configurations and sizes to compliment the Pfeiffer Vacuum existing product offering. The combined product offering of vacuum components and hardware is one of the most extensive in the industry. This includes vacuum chambers and components: ISO and CF construction components, hoses and flex connections, viewports and glass elements, valves, feed-throughs and manipulators for R&D and industrial HV and UHV applications.www.pfeiffer-vacuum.com
www.trinos.com
Angle and Inline Valves
Pfeiffer Vacuum offers a wide range of angle and inline valves that are suitable for applications in the high vacuum range. The valves feature a robust design that is resistant to contamination, increases service life significantly, and makes them ideally suited for industrial applications. Pfeiffer Vacuum’s valves are available in DN 16, 25 and 40 ISO-KF sizes. This new series of manually, electropneumatically and electromagnetically operated angle and inline valves feature improved conductivity, resistance to differential pressure and short response times. The electropneumatic and electromagnetic valve models are equipped with an integrated position indicator. The electromagnetic valve has the pressure pilot integrated into the housing.www.pfeiffer-vacuum.com
www.trinos.com
CF UHV Components
Pfeiffer Vacuum CF UHV components are convenient and offer great flexibility in the design and construction of high and ultrahigh vacuum systems. Fittings such flanges, elbows, crosses, tees, reducers, bellows and adapters are common components available, as well as viewports, shutters and manipulators. We also stock many standard UHV items in 316LN. CF flange components for UHV applications comply with standard ISO 3699 (Pneurop 6606). Standard stainless steel components are made of steel 1.4306 (304L). CF flanges are available in steel 1.4429 (316LN). Flange components made of steel 1.4429 (316LN) have a very low magnetic permeability and have harder knife edges. The starting material is specially annealed in a low-hydrogen atmosphere. There is a large inventory of components and orders are shipped the same day they are received. ISO-K Clamping Flange Connections Pfeiffer Vacuum’s ISO-K Clamping Flange  Connections are an economical solution of reusable and interfacing stainless steel vacuum fittings. These flanges can operate in high vacuum environments and are ideally suited for applications requiring rapid and frequent assembly and disassembly. The clamping flange components range from claw clamp and claw grip, centering and o-ring seals, blanking and welding flanges to standard hardware components including a 45?/90? elbows, Tees, adapters and bellows. ISO-K/F Clamping flange components comply with DIN 28404 or Pneurop 6606. Most items are in stock and available for immediate delivery. www.pfeiffer-vacuum.com
www.trinos.com
ISO-KF Small Flange Connections
Pfeiffer Vacuum’s ISO-KF Small  Flange Connections are an economical solution of reusable interfacing stainless steel vacuum fittings that can operate in high vacuum environments. The small flange components are ideally suited for applications requiring rapid and frequent assembly and disassembly. The small flange components include reducing centering, mesh centering, O-ring, aluminum and indium seals as well as blanking flanges, eblows, crosses, Tees, reducers, adapters and bellows. Most items are in stock and available for immediate delivery. ISO-KF small flange components comply with DIN 28403 or Pneurop 6606.
Pfeiffer Vacuum
Nashua, NH
www.pfeiffer-vacuum.com
www.trinos.com
Tel: 1-603-578-6500
E-mail: inquiry@adixen-usa.com
Roughing Angle Valves
Vacuum Research’s angle valves  for roughing in sizes from NW to 16 to NW to 50 are available with aluminum or stainless steel bodies. Both manual and electro pneumatic actuators are available and the shaft seal can be either welded bellows or O-rings. Optional features include electronic position indicators and gauge ports with VCR-4 or 1 /8 inch NPT threads. www.vacuumresearch.com
Large Vacuum Valves
Vacuum Research’s Gate and angle style  valves with port sizes up to ISO-600 or 24 inch ANSI. Valves are available in aluminum or stainless steel with flanges to fit any cryo, turbo or diffusion pump. Pneumatic, electric motor and manual actuators are available. Optional features include gauge ports with NW flanges from 16 to 50 mm and roughing ports up to ISO-250 or ANSI 10 inch. www.vacuumresearch.com
Throttle Valve with Leak Tight Shut Off
The Vacuum Research Throttlemaster ™ Valves with leak tight shut off eliminates the need for separate  throttle and isolation valves. They are suitable for 3 position or full PID applications. The digital valve positioner is included and provides easy control to 0.1% from the front panel or from your PLC or computer. 4 to 20 mA or 0 to 10 VDC signals accepted. Also included are contact closures on rear panel for open and closed position indication. Valves are available in aluminum or stainless steel with ANSI flanges from 2 to 16 inches and ISO flanges from 63 to 400 mm. www.vacuumresearch.com
Vacuum Valves for Dirty and Dusty Applications
Vacuum Research Valves are for dirty and dusty applications such as investment casting or tire reclamation. They are also  well suited for plasma systems. A protective ring keeps particles and plasma away from O-rings and seal surfaces for long life in the most demanding applications. Pneumatic, manual and electric motor actuators. Port diameters up to ISO-600 or 24 inch ANSI. Shaft seal pump out ports and oilers available. Other options include position indicators, water cooling and ports for blow down and clean out.
Vacuum Research Corp.
Pittsburgh, PA
www.vacuumresearch.com
Tel: 1-800-426-9340 or toll free or 1-412-261-7630
E-mail: vrc@vacuumresearch.com
All Metal UHV Valves
Varian’s all-metal bakeable valves are used in ultra-high vacuum systems where bake-out temperatures up to 450°C preclude  the use of elastomers and low melting temperature metals. The simplicity of the all-metal design, which employs the Varian ConFlat ® flange sealing principle, assures a low maintenance unit giving maximum reliability and vacuum sealing from atmospheric pressure to below 10 -11 Torr (mbar). www.varianinc.com
Block Valves
Varian’s Block Valves are versatile, reliable, costeffective vacuum shut-off devices that can be the workhorses of any vacuum system. Suitable for performance from rough to high vacuum,  they are available in aluminum or stainless steel, and with KF, ISO or ConFlat flanges. They employ a high cycle life bellows that provides a rating of over three hundred thousand cycles, and have optimized conductance for maximum pumping efficiency. All pneumatically operated valves have visual position indication, and remote position indicators are available as options. In the standard configuration, the valves close rapidly (< 300 milliseconds) on loss of air or electrical power, thereby protecting your vacuum system. The high cycle life and rapid closure make the valves perfectly suited to high cycle applications such as semiconductor and disk processing, industrial coating, and many others. Varian Block Valves require little maintenance, but can be maintained easily and quickly when necessary. www.varianinc.com
GateKeeper Aluminum Gate Valves
Varian’s GateKeeper Series  Aluminum Gate Valves are economical, high cycle life, reliable vacuum shut-off devices. The valves provide a low-cost, low-particle, low profile means of isolating a high vacuum pump. The GateKeeper Series valve design employs a cast aluminum body, a counter plate sealing mechanism, and an elastomer shaft seal. The result is a clean, economical, smoothly actuated valve. The body is cast using the VaPore ® process which tightly controls each material input and process to deliver a casting that is free of porosity. A reliable high vacuum shaft seal eliminates the need for a bellows. The linear drive and counter-plate sealing mechanism minimizes actuation shock and particle generation. The assembly is an elegant mechanism that uses a small number of precision-machined components. The required sealing forces are generated with a minimum of moving parts, and without adjustment screws. As a result, very few particles are generated within the valve. The GateKeeper valves have a small face-to-face profile. ISO/F flange details are machined into the cast body to provide the convenience of standard ISO claw clamp connections.
Varian, Inc.
Vacuum Technologies
Lexington, MA
www.varianinc.com
Tel: 1-781-861-7200
E-mail: vtl.customer.service@varianinc.com
Butterfly Control System VAT Series 61.2
VAT’s Butterfly pressure control system, Series 61.2 is designed for reliable downstream pressure control in vacuum  chambers. VAT’s adaptive control algorithm combined with the high-speed plate response of Series 61.2 ensures very short and accurate pressure control cycles. The Series 61.2 Butterfly pressure control system uses full range position encoding and high torque. This technology achieves constant pressure control performance even in contaminating process environments like CVD. An integrated control unit communicates with the system host via: Logic, DeviceNet, RS-232C, RS-485, Ethernet, Profibus, EtherCAT. An extra service port makes it possible to connect a commercial laptop computer. www.vatvalve.com
HV Angle or Inline Valve with Electromagnetic Actuator
VAT has released a technical product brochure featuring a new line of High Vacuum Angle or Inline Valves with an electromagnetic actuator in the Angle (VAT Series 26.4) and Inline (VAT Series 26.5) product line.  VAT’s new electromagnetic [EM] actuated high vacuum valves are used in a variety of vacuum applications such as pump systems, portable vacuum stands, leak detectors and other applications where electric actuation is preferred over pneumatic or manual actuation. VAT's new EM valve offers outstanding technical features in combination with a wide variety of configurations. Various body materials, body shapes, flange types and sealing materials allow this robust valve to be correctly configured for the application. www.vatvalve.com
New MonoVAT Roll Coater Transfer Valve for “Endless” Metal/Plastic Foil Applications
VAT provides a transfer valve solution for vacuum based thin film roll coater systems (CIGS, a-Si, CdTe, Organic cells, etc.)  with its proven 3D MonoVAT sealing technology. The VAT Series 024 MonoVAT ® Transfer Valve is placed between the front chamber, in which the feed coil is placed, and the process chamber(s). A second valve is used in the rear chamber where the takeup roll is placed. Once the web is coated the valves are closed onto the foil, the front and rear chambers are vented to atmosphere, the web cut, the coils replaced and connected with the ends of the web while maintaining vacuum and temperature in the center process chamber(s). The result is a significant improvement in system availability thereby increasing the throughput. The linear motion 3D sealing technology makes it possible to clamp and seal the web (metal or plastic) without any deformation or damages. www.vatvalve.com
New Design High Vacuum Gate Valve for Vacuum Applications Such As Pump Isolation
VAT, Incorporated is introducing a new series of stainless steel high vacuum gate valves – VAT Series 11.0 HV Gate Valve.  These low cost valves are designed for high vacuum pump isolation, substrate transfer and various other vacuum applications. Features include a sleek yet rugged stainless steel body with minimized flange to flange thickness allowing for maximum conductance and easy system integration, including retrofit applications. The well proven VATLOCK ® gate mechanism minimizes operating shock and is mechanically locked in the closed position. These valves are designed for 200,000 cycles before first service which is quick, easy and requires no a d j u s t m e n t after re-assembly. The new design Series 11.0 HV Gate Valve is offered in both manual and pneumatic actuation and comes standard with position indicator. Valves are available in sizes ranging from DN63 to 320 mm (2.5” to 12” ID) with the choice of ISO, ASA, CF, JIS or customer specific flanges. The Series 11.0 HV Gate Valve is an excellent choice for a customer who wants a high quality, bellows sealed gate valve with o-ring sealed bonnet flange at a competitive price.
VAT, Inc.
Woburn, MA
www.vatvalve.com
Tel: 1-800-935-1446
E-mail: US@vatvalve.com
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Vacuum Technology & Coating