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Gas Handling Systems and Equipment Including Components, Control, Metrology and Analyzers
Compiled by Terrence Thompson, Contributing Editor
This product showcase covers some commonly used gas handling systems, equipment, components, control, metrology and analyzers which are used in various production, R&D and other vacuum applications.
Vacuum pumps and systems remove the ambient atmospheric so that precise gas mixtures may be introduced to meet a specific application’s requirements. Any hardware needed to transport, store, distribute, mix, regulate and monitor gas flows is a gas-handling product.
The following are representative “gas handling” products:
• Gas safety systems and cabinets/enclosures;
• Process instruments that measure/monitor/control as mixtures and flows including mass flow controllers, RGAs, flow detectors, flowmeters and manifolds;
• Sophisticated analytical systems such as mass spectrometers of all types and gas chromatography; and
• Gas cylinder hardware including leak detectors, dryers, gas filters, gas generators, manifolds, precision mixers, ionization detectors, purifiers, regulators, valves, gas vacuum.
In the following product descriptions, vendors make distinctions to focus on specific intended applications so direct comparisons may be difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
EXTRIMA® Hydrogen Leak Detector for Hazardous Environments
The Adixen Sensistor from Alcatel Vacuum Products, Inc. is an intrinsically safe leak detector. The equipment meets the ATEX directive for leak testing in explosive environments, such as aircraft fuel systems. The Extrima® is intended for leak detection with diluted hydrogen as trace gas in explosive environments, where the safety requirements are extremely high. The detector is intrinsically safe which means that it under no circumstances can ignite the explosive gas. Extrima has the European EEx ia IIC T4 classification equivalent to US Class 1, Div. 1, groups A, B, C, D which means that it meets the requirements for use in zone 0 according to the ATEX directive (ATmosphere EXplosible) of the European Commission. This detector can therefore be applied in the chemical and petrochemical industry as well as in the aviation and oil processing industries. A typical application is leak detection during maintenance of aircraft fuel systems. Since there is always some fuel left in the system, the equipment must meet specific requirements. Extrima quickly detects and locates the smallest possible fluid fuel leaks thereby ensuring 100% integrity of the test object. The Extrima has a unique Auto-Ranging function, which automatically tunes the in- strument’s sensitivity for precise leak location. After a leak is located and the search for additional leaks continues, the sensitivity automatically readjusts to the highest level. With seven hours of continuous operation from rechargeable batteries and an IP67 waterproof rating, the Extrima meets all the requirements of the aviation, chemical, petrochemical and oil process industries for leak detection. www.adixen-usa.com
Adixen-Sensistor H2000 Plus Leak Detector
The Adixen-Sensistor H2000 Plus Leak Detector from Alcatel Vacuum Products, Inc. uses N2/H2 as trace gases, and can be used to detect leaks smaller than bacteria. Using Non-hazardous 5 percent hydrogen in a 95 percent nitrogen mixture, it measures and pinpoints minute leaks independent of part temperature or volume. This electronic device requires no vacuum pumps or valves and is therefore virtually maintenance free. Dynamic background compensation minimizes any potential problems with background interference assisted by the fact that hydrogen gas dissipates much more quickly than other gases. The instrument features a standard probe with no sample suction. www.adixen-usa.com
Sensistor ILS500 Leak Detection Test System
The Sensistor ILS500 Leak Detection System from Alcatel Vacuum Products, Inc. contains 3modules housed in one compact unit. These modules are configured for optimal testing conditions, short cycle times and operator convenience for specific test environments. The controller module has a central processing unit, a gas- filling unit, and machine and tooling interfaces. The detector module is the Sensistor H2000 Hydrogen leak detector that uses a safe hydrogen mixture as a trace gas. The third module is the operator touch screen interface for set-up as well as production test monitoring and operation. This plug-and- play leak detection system is for demanding industrial leak testing applications. www.adixen-usa.com
Leak Detectors and Mass Spectrometers
Alcatel Vacuum Products manufactures a complete range of Adixen leak detectors with a choice between a N2/H2 Gas-FET( GAS field effect transistor) leak detection that is lightweight, portable with middle range sensitivity and a helium detection technique with high sensitivity. These leak detectors address HVAC, aerospace, and automotive, general engineering to semiconductor applications. Alcatel Adixen leak detectors and systems can be configured to test the overall leak rate of a component or system or to accurately and easily pinpoint a leak using a manual probe. Using helium or N2/H2 trace gas, methods are up to 1000 × more sensitive than pressure decay or mass flow testing. Other advantages of trace gas leak testing are (a) the test is unaffected by temperature changes (b) the test is unaffected by component creep (c) the test is a direct measurement of the actual leakage from the component or system. Helium Mass Spectrometer systems can detect leaks as small as 1×10-10 cc/sec in vacuum while the Gas-FET detectors will detect leaks as small as 1 ×10-6 cc/sec at atmospheric conditions. For automatic testing of components and systems that require high-sensitivity leak testing (<5 × 10-6 cc/sec) or need to be tested under vacuum, then a helium leak detector is the right choice. Adixen Mass Spectrometer Helium leak detectors detect leaks as small as 1×10-10 cc/sec under vacuum. For applications that are not as critical in terms of leak rate sensitivity (>1 × 10-6 cc/sec) or require lightweight, portable equipment, use an Adixen N2/H2 (Gas-FET) leak detection systems. Gas-FET leak detectors will detect leaks as small as 1 × 10-6 cc/sec at atmospheric conditions in a manual portable sniffing mode or as small as 5 × 10-5 cc/sec in an automatic accumulation chamber.
Alcatel Vacuum Products, Inc. Adixen™ brand name
Contact: JP De Luca, Director Sales, Helium Leak Detection
Model 9000 RM Gas Analyzer Can Be Used Alone or Integrated into CEM Systems
The AMETEK Model 9000 RM is a rugged single or multi-component gas analyzer housed in a single 19-inch, rack-mountable unit that can be integrated into Continuous Emission Monitor (CEM) systems or used alone for a variety of gas monitoring applications. The 9000 RM can be configured to measure most gas species that absorb in the UV (examples NOx, H2S and SO2). The optional low range white cell provides longer path length for measuring lower concentrations. For example, the minimum full scale for SO2 is 25 ppm, with an accuracy of 1% of full scale. Resolution better than 0.02 nm is provided by high intensity, line source lamps. These sources emit at a fixed wavelength, providing great measurement stability, and emit low total power, removing the potential for sample photolysis. The high resolution enables unparalleled linearity over a wide dynamic range (less than 1% deviation over 4 to 5 orders of magnitude) that, in turn, leads to simple, robust data analysis. The simple and robust design of the Model 9000 RM is complemented by its powerful data processing capabilities. All parameters accessible, graphing, logging, trending are available by remote and local access. The user-friendly keyboard and built in display enables programming of such variables as timing and frequency of local zero and span checks and calibration gas values. The Model 9000 RM supports RS-232, Modbus/RS485 and Web Interface/ Ethernet connectivity. The Model 9000 RM draws onAMETEK’s more than 30 years experience in the design and development of sophisticated process analyzers. Its modular design turns trouble-shooting and repair into simple tasks that can be performed on site in minutes by plant personnel. AMETEK Process Instruments is a unit of AMETEK, Inc., a leading global manufacturer of electronic instruments and electric motors.
AMETEK® Process Instruments
Contact: Jim McKinley
B-Series Gas Mass Flow Controller Immune To Pressure and Temperature Variations
Brooks Instrument’ B-Series mass flow controller, a family of mass flow products that are insensitive to fluctuations in pressure and temperature. Built on a standard 1.125-inch wide platform with a powerful user interface and local digital display, the B-Series provides a compact flow measurement and control solution which eliminates the need for costly temperature and pressure control devices and systems. Whether you are flowing gas to a CVD chamber, chemical research reactor, fuel cell test stand, or any other important flow control application, the quality of your results are only as good as the performance of your mass flow controller. The mass flow controller actively measures line pressure and adjusts the control valve to virtually eliminate actual flow and flow signal changes as a result of pressure fluctuations. In addition, the output of every B-Series mass flow controller is characterized over the full operating temperature range of the device allowing superior measurement and control accuracy regardless of process or ambient temperature conditions. The BSeries incorporates sophisticated internal self-diagnostic routines that continuously check the health of the device. In the event of a diagnostic fault, an alarm code flashes on the user interface. An easy to use service port provides additional diagnostic capability, minimizing the need to remove the mass flow controller from process service.
Contact: Jim Hollis
B-RAX 3000 Rack-Mount Vacuum Gauge Controller
InstruTech’s rack-mount vacuum gauge Controller dubbed the B-RAX 3000 is capable of operating one InstruTech Ionization gauge and two Convection gauges providing a measurement range from 1 × 10-9 Torr to at- mosphere. The B-RAX vacuum gauge controller uses a different approach to traditional full range vacuum measurement practices. This results in significant cost savings for the user. The Electrometer for the Ionization gauge is built in to the InstruTech’s IGM-400 Ionization gauge module instead of the controller itself. This allows the B-RAX to be offered as a compact, low heat generating and low cost multi-gauge vacuum gauge controller. The B-RAX is offered with three independent front panel pressure measurement displays as well as three set point relays for process control. The Controller can also accept and display pressures using an alternate analog input from other types of vacuum gauges such as a capacitance diaphragm. The setup and programming is provided via a front panel setup screen and push buttons. The B-RAX is offered as a space saving half rack design, bench top or instrument panel. It can also be mounted as a full rack or dual rack using rack panels. www.instrutechinc.com
IGM-401 “Hornet” Miniature Ionization Vacuum Gauge Module
InstruTech’s miniature hot filament Ionization vacuum gauge module the IGM401, dubbed the “Hornet” is for measuring pressures from 1 × 10-9 to 5 × 10-2 Torr. The IGM401 is a rugged metal Ionization gauge with Dual Filaments. It incorporates numerous design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings do not experience temperature drift. The IGM-401 is offered with a extremely bright, crisp OLED display, one log-linear analog output, one setpoint relay and an RS485 interface. The display menu provides the user the choice to select from 16 common gases without having to apply manual correction factors. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. In addition to high vacuum measurements, a new option now available with the Hornet allows for connection of two convection vacuum gauges to the Hornet. The Hornet will operate and provide measurements from two external convection gauges without the need of another controller. www.instrutechinc.com
CVM211 “Stinger” Convection Vacuum Gauge Module
InstruTech’s CVM-211 series vacuum gauge module with on-board electronics/controller dubbed the “Stinger,” is based on the convection vacuum gauge principle, and measures pressures from 1000 to 10-4 Torr. Requiring minimal installation space this miniature convection vacuum gauge module offers one of the smallest form-fit designs available in a vacuum gauge. The Stinger is powered by 11 to 30VDC and provides a non-linear analog output as well as one process setpoint relay for controlling vacuum system pumpdown and venting. The Stinger module also includes an extremely simple user interface with a built-in 3-digit LED display, for readout of pressure, and for setup, calibration, and operation of the unit.
KJLC 354 Series Ion Gauge
Our new KJLC354 series features a dual hot filament Ionization gauge transducer with integrated electronics and a built-in display. This hot filament Bayard-Alpert Ionization gauge module is offered with a space-saving built-in controller and display. The KJLC354 provides the basic signal conditioning required to turn the gauge into a complete measuring instrument. The built-in Controller is offered with a standard bright OLED display providing a convenient user interface for setup and operation of the vacuum gauge. The emission current can be set to automatically switch between 4 mA and 100 µA. This results in optimal and stable pressure readings over the entire measurement range from 1 × 10-9 Torr to 5 × 10- 2 Torr. www.lesker.com
KJLC 392 Series Ion Gauge with Dual Convection
Our new KJLC392 series features a dual hot filament Ionization gauge transducer with integrated electronics capable of operating two Convection gauges simultaneously. This hot filament Bayard-Alpert Ionization gauge module is offered with a space-saving built-in controller and display. The KJLC392 Ionization gauge module can combine the vacuum measurement with one of the Convection gauges to provide full range measurements from 1 × 10-9 Torr to atmosphere, or simply operate the Ion gauge and the two Convection gauges as individual gauges. The KJLC392 provides the basic signal conditioning required to turn the gauge into a complete measuring instrument. The built-in Controller is offered with a standard 3-channel bright OLED display providing a convenient user interface for setup and operation of the vacuum gauge. www.lesker.com
KJLC™ 902 Series
The Kurt J. Lesker Company 902 series of pressure transducers combine the accuracy and gas independence of a Piezo transducer with TRUE Digital communications. The transducer features a unique temperature compensator allowing high accuracy over a wide measurement from 1 to 1000 Torr. The CE marked unit features RS232 or RS485 and analog outputs. An optional LED on-board display is also available. www.lesker.com
KJLC BDG Series
The Kurt J. Lesker Company Bourdon gauges are liquid-filled industrial dial gauges suitable for pressures from atmosphere down to 1 Torr. Available in 3 different pressure models — Torr, mbar, or in Hg — they feature a corrosion and impact resistant, Zytel nylon case with removable bezel for easy calibration. The large dial face measures 2-½ inches across the dial and the clear glycerin fill provides stable readability in spite of vibration. The internal “breathing diaphragm” virtually eliminates the air bubble in the mid range of the gauge for improved readability, prevents freezing, clogging and corrosion and compensates for temperature fluctuations. www.lesker.com
KJLC™ Convectron® Equivalent Series
The Kurt J. Lesker Company Convectron Equivalent series of pressure transducers and sensors are direct “drop in” replacements for the Granville-Phillips Convectron gauges.All controllers, cables, and sensors are interchangeable PLUS they feature added benefits such as a more rugged design that is less prone to damage from mechanical shock or vibration and a faster response to pressure changes. RS232 and RS485 are standard ports on these controllers. www.lesker.com
KJLC™ DV-6M Equivalent Thermocouple Sensors
The Kurt J. Lesker Company KJL-6000 thermocouple tube is a “drop in” pin exact replacement for the Teledyne Hastings DV-6M. However, the KJL-6000 features an all-metal stainless steel body and pins that are weather and corrosion resistant. The superior internal thermocouple supports ensure a longer life. This rugged tube can withstand a drop of 6 feet without damage. The Kurt J. Lesker Company offers a 30-day money-back guarantee on this product, with no questions asked.
Kurt J. Lesker Company
Contact: Duane Bingaman, Vice President, Sales and Marketing
Tel: 1-800-245-1656 or 1-412-387-9204
Ultra-High Purity Gas Delivery Systems
MDC SemiSystems manufacturers complex ultra-high purity gas delivery systems. Core capabilities include UPH orbital welding, hand welding, tube bending, assembly and system integration. Gas cabinet systems can include 1 to 4 cylinder gas cabinets; multi-gas cylinders with single controller interface; 1 to 14 stick VMB configurations; manual/automatic/semiautomatic gas cabinets and life safety & SCADA interfaces. Interior wetted surfaces are electropolished to 10 to 15 ra; and have auto switchover; vacuum purging; powder coated 11 ga. steel enclosures; a pressure range 5 to 3000 PSI. Wetted parts are 316L stainless steel with filtration to 0.003 microns. A 4’exhaust stack with monitoring sensor; seismic restraint standard color touch screen or two line display; quality standards include UL-508 listed controller, leak tested to 1 x 10-9 cc/sec atm, moisture, oxygen, particle, testing to the ppb level and SEMI F-15 tracer gas testing is available. Gas Panels can include traditional VCR, 1-1/8” C-seal and W-seal, and 1-1/2” C-seal and W-seals. Wetted parts are 316L stainless steel with filtration to 0.001 µm. The interior surface is electropolished to 10 to 15 ra with anodized or powder coated back panels; a pressure range of 5 to 3000 PSI; leak tested to 1x10-9 cc/sec atm.Also, particle, moisture, oxygen, testing to the PPB level with functional testing to customer specifications is available. Calibration is included for MFCs, transducers and valves made of stainless steel. High purity diaphragm valves are standard with optional lockout valves, pressure rated 3000 psig with compact valve clusters for purging and optional proximity switches for air operated valves. Facilities Connection Box and Adapter Plates may include a facilities connection box and adapter plates to reduce the time and cost associated with process equipment installation.
A division of MDC Vacuum Products LLC
San Jose, CA
Tel: 1-866-926-3754 or 1-408-350-0244
OmniStar™ Gas Analysis System
The Pfeiffer Vacuum OmniStar™ gas analysis system is a high performance, flexible quadrupole mass spectrometer in a compact benchtop package. OmniStar is capable of simultaneously monitoring up to 64 gasses from 100% to below 10 ppb with available mass ranges of 1 to 100, 1 to 200 and 1 to 300 amu. Dual filaments are standard with the OmniStar for maximum uptime as well as a secondary electron multiplier detector for fast, low level measurements. Pressure is constantly monitored via a Pfeiffer Vacuum Full Range gauge and the filaments and detector are interlocked based on a user defined trip level. Integral bakeout and inlet heaters are included to reduce backgrounds and prevent condensation. The OmniStar allows for monitoring of gas purity at point-of-use or for accurate quantitative gas mixture measurements. Process control software is standard offering many options for interfacing to the gas handling system. In addition, it is available with protection for corrosive and explosive gas mixtures and can be used over a wide range of gas pressures with many inlet options. Powerful Quadstar™ software running on Windows XP™ , handles the analysis operation and data collection. Quadstar features matrix-inversion routines for quantitative analysis of gas mixtures even with overlapping masses as well as a macro programming module for automatic operation and programming of custom user interfaces. Serial and fiber optic LAN communication ports are included allowing operation of multiple units over long distances with immunity to electrical interference. www.pfeiffer-vacuum.com
PrismaPlus™ The RGA with the added Plus! = Sensitivity + Stability + Intelligent Operation.
PrismaPlus™ , a new mass spectrometer for qualitative and quantitative gas analysis and leak detection, is based on Pfeiffer Vacuum’s proven track record in the field of mass spectrometry. The combination of high sensitivity, stability and intelligent operation is the added “Plus” in the PrismaPlus mass spectrometer. The PrismaPlus delivers precise and stable results in three different mass ranges (1 to 100, 1 to 200 and 1 to 300 amu) down to a detection limit of 1×10-14 mbar. With available Faraday and electron multiplier detectors, even low-level contamination can be quickly identified. In addition to displaying scan data and selectable partial pressures, direct attachment of a pressure gauge enables the PrismaPlus to also accurately monitor total pressure. The Quadera® software is easy to operate, and offers an easy-to-read platform for capturing and visualizing all measured data and parameter records. Together with a wide selection of interfaces such as Ethernet, digital and analog inputs and outputs, integration into any system is easily achieved.A simple click of the mouse activates the preprogrammed functions. With the ability to select mass ranges, detectors, ion sources and interface options, this mass spectrometer can be employed in many areas, such as: industrial and analytical environments, R & D, leak detection and semiconductor production, as well as in coating technology. The PrismaPlus is the solution for applications ranging from quality assurance and residual gas analysis through to complex, quantitative tasks.
Pfeiffer Vacuum, Inc.
Contact: Steve Foster, Product Manager
Low Cost Gas Purification
R.D. Mathis Company GP100 model gas purifier has been designed to fill the needs of R & D engineers and scientists as well as production staff to provide a lightweight, compact, low cost inert gas purification system. This unit operates off of standard cylinder gas to purify inert gases to ultra high purity levels and avoids the problem of cylinder walls outgassing during storage. This unit can be placed in operation in less than 1 hour, simply by connecting the inlet and outlet fittings and 110 VAC (or 220 VAC) electrical connection. The GP100 has been shown to purify 99.8% argon gas to 99.9991% purity as part of a worst case test. Available literature indicates that starting with a high purity gas and using all stainless steel fittings, impurity levels as low as 10 p.p.m. in oxygen can be obtained. While the unit was designed primarily for argon gas, it may be used for helium, xenon and neon. Applications for the unit include purification of gases for sputtering modules, crystal growth furnaces and glove boxes. A paper on "The Purification of Inert Gases", discussing a variety of inert gases is available upon request.
R.D. Mathis Company
Long Beach, CA
Low Cost RGA
The ULVAC Technologies, Inc. Qulee BGM quadrupole mass spectrometer is a cost effective leak detection, RGA and process gas monitoring in vacuum systems. It features integrated measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Torr, mbar, or Pascal of He, H2O, N2, O2, O2/N2 ratio with a mass range of 1 to100 and 200 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. Qulee BGM features built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software. The minimum detectable partial pressure is 1 × 10-14 Torr. Optional differential pumping is available for applications that require it. www.ulvac.com
Quadrupole Mass Spectrometer
The compact ULVAC Technologies, Inc. Qulee quadrupole mass spectrometer features integrated measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Pascal, Torr or mbar of He, H2O, N2, O2, O2/N2 ratio, and a user selectable channel from mass ranges of 1 to 50 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. The built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software enable Qulee to be used for leak detection, RGA and process gas monitoring in PVD systems.A maximum operating pressure of 15 mTorr can eliminate the need for differential pumping, and the minimum detectable partial pressure is 1 × 10-12 Torr.
ULVAC Technologies, Inc.
Series 16.8 Large Pendulum Valve
VAT’s recently released Series 16.8 Large Pendulum Valve used for high vacuum isolation is available in sizes DN400 and DN500. This competitively priced valve has a small footprint, low shock actuation and is ideally suited for high vacuum pump isolation in many industries including, but not limited to: Semiconductor, FPD and Coating. Features and benefits include: compact design, low shock actuation, light weight, high cycle life, outstanding leak tightness performance, quick/easy cleaning, and three-position actuator option. Aluminum casting technology allows VAT to offer this valve at a low price and the split body design to assure short down times after cleaning. www.vatvalve.com
Series 95 Isolation/Control System
VAT now offers a combined Series 61.2 butterfly control valve and Series 12.1 isolation gate valve in a single piece valve body. The single-body design provides for excellent pressure control, vacuum isolation and serviceability. The design saves valuable system space, reduces vacuum connections and improves installation time. The series 12.1 isolation valve is slaved to the Series 61.2 butterfly valve making for easy OEM interfacing. Visit us online to download information, including technical information, CAD drawings, etc., on this and other product offerings. www.vatvalve.com
Series 29 Angle Valve with Soft-Pump Function
VAT introduces the Series 29 softpump angle valves based on a patented design concept that offers many advantages to the end user. The valves provide a very wide range of soft-pump flow adjustment meaning that a wide range of chamber volumes and pump speeds can be accommodated with a single valve design. Additionally, the soft-pump conductance can be easily adjusted by simply rotating a recessed screw at the top of the actuator. The adjustment is made in small, precise and repeatable steps and a scale is provided for visual confirmation of position. A ball detent system is used whereby each step is felt and heard as a positive click making vacuum system setup very easy. By using only a very small number of parts moving inside the vacuum envelope, the particle performance of the valve is excellent. The small part count also means that servicing is very straight forward; reliability is high and, the cost of the product and ownership are competitive.
Contact: Joyce Mackiewicz, Sales & Marketing Department
This Addendum updates the VT&C May 2009 Electron-Beam, Ion-Beam and Magnetron Depositionand Coating Systems Product Showcase. The image for the KDF 974i Sputtering System was incorrect. We apologize for the ovesight.
KDF 974i Sputtering System
The all-new KDF 974i tool, is another KDF innovation which now provides a larger 20” by 20” sputter area. The 974i is an excellent choice for pilot production solar applications, or scaling up production rates from smaller KDF/MRC systems. The 974i is a horizontal configured tool that allows complete end user flexibility to handle unique substrate sizes, and shapes. This type of sputter down application increases and simplifies the uses for the tool since special substrate fixturing is generally not required. Uniformity and utilization are not compromised as KDF maintains the proper pallet to cathode ratio as in all our systems. The base tool is configured with a high vacuum cryo pumped load lock along with heat, allowing for pre heating and faster cycle times. This load lock arrangement coupled along with the four 24” cathodes allows for an array of diversified processes and higher throughput offered in a single tool. The 974i is also available with a host of options to make it even more production specific, available options include but not limited to an integrated process RGA, back side gas cooling in RF etch mode, ERPP™ KDF’s planetary pallet operation, upstream and down stream gas control, as well as pulsed DC bias.All KDF systems utilize the latest in communications control and protocol this along with. KDF’s software Recipe Manager allows for the user to have complete access and control of all the hardware features associated with the tool. The 974i is compatible with and utilizes KDF’s full compliment of 744 specialty cathodes, including the Inset Cathode™ , Magterial Cathode™ , Mark II Cathode™ along with standard planar cathodes.
KDF Electronic & Vacuum Services, Inc.
Vacuum Valves, Flanges and Fittings for Processes and Systems
Compiled by Terrence Thompson, Contributing Editor
Vacuum systems have many uses for vacuum chambers, pumps, lines, valves and monitoring instruments for a given vacuum process or experiment. Vacuum valves are precise mechanisms that regulate the flow of gases. They typically are started, stopped and/or regulated by a moving part that permits or obstructs gas flow in a passage. They do, however, usually need flanges and fittings to work.
In vacuum systems, valves are used to provide fine control of gas streams entering the vacuum chamber. The vacuum in a vacuum system is often controlled by means of rel¬atively large butterfly or shutter-type throttling valves that determine the rate at which gas is evacuated from the system by a vacuum pump. For use in vacuum systems, valves should have good out¬gassing characteristics. They may also be required to withstand vacuum bakeout temperatures. When intended for applications with, and/or, within vacuum systems, valves are available that can withstand cryogenic temperatures or, at the other extreme, that can operate at very-high temperatures.
Vacuum pumps are the heart of any vacuum system and numerous components and acces¬sories are required to interconnect the pumps to the equipment needing vacuum. Valves of many types (poppet, gate, butterfly, ball, pendulum, etc.) are combined with either mechan¬ical or electrical gauges, monitors, controllers, filters, traps, flanges and fittings to achieve the desired configu¬rations. However, valves, flanges and fittings are the focus of this product roundup.
In these product descriptions, vendors make pragmatic distinctions to focus on specific intended applications so direct comparisons are difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
Quick Clamp/Metal Seal Flange System
A&N Corporation’s ULRIC™ Vacuum Flange System combines the temperature and pressure functionality of a traditional copper seal (CF) vacuum flange with the quick installation feature of an ISO clamp system. The ULRIC™ flange system also provides reusable vacuum seals available in stainless steel, copper, or elastomer. The ULRIC™ flange system is a quick clamp assembled, ultrahigh vacuum capable flange system. The vacuum seal can be created in two ways—through the compression of a metallic sealing ring onto a “protected knife-edge” or through the compression of a captured elastomer o-ring. ULRIC™ flanges provide a complete range of fittings to mount with tubing sized ¾ inch up to 4 inches in diameter. The flange system consists of two sexless, infinitely rotatable flanges, a re-usable sealing ring that also provides alignment, and a fastener to compress the seal between the two flanges. The flanges are made of 304L grade stainless steel; metal seals are made of copper or stainless steel; elastomer seals are made of Viton® , Buna or silicone; and clamps are available in stainless steel or aluminum. A&N offers a complete line of flanges, fittings, valves, traps, chambers and accessories with ULRIC™ connections that can be used to create a complete vacuum system or pumping line. www.ancorp.com
Poppet, Gate and Ball Vacuum Shut-Off Valves
A&N Corporation offers three types of vacuum shut-off valves: Poppet Valves, Gate Valves, and Ball Valves. These valves regulate gas flow through a system with simple open or closed commands. Poppet Valves are made of a body, actuator and internal poppet and are available in three body styles: 90? Angle, In-Line and Angle In-Line. The actuator transports the poppet toward the top of the valve opening the internal body cavity to the system allowing unimpeded flow. When the poppet is actuated to the bottom of the valve, an elastomer-sealing ring is compressed onto a sealing surface creating a vacuum tight seal and stopping flow. Gate Valves offer unimpeded flow with minimal space required for the valve body.A central carriage, or gate, is raised and lowered by the actuator within the body. In the open position, the gate retracts completely from the tube aperture allowing unimpeded flow. In the closed position, an elastomer-sealing ring is compressed against a sealing surface inside the body ports. BallValves are robust valves offering unimpeded flow, but are less sensitive to particulate contamination than the other valve types. Ball valves are made of a body, stem, ball and end caps. The ball is compressed in the body by end caps creating a vacuum tight cavity. A hole in the ball provides unobstructed flow in the open position. The sweeping action of the ball against the body seals when actuated clean the ball as it is opened and closed providing a consistent seal.
A Broad Range of Adixen™ Vacuum Valve Components
Alcatel has a broad range ofAdixen brand valves for virtually every application. Variations by type: each type of valve (gate, butterfly, angle) is available in different versions, offering different materials, flanges, actuators, etc. to provide the most appropriate solution to any of a wide range of demands. Special valves include a variety of special vacuum valves (vent valves, 3-way valves, leak valves, throttling valves) complements the standard valves.All vacuum valves have the following common specifications: guaranteed tightness, individually tested, standard flanges, high conductance, high reliability, and operation in all positions. www.adixen-usa.com
Adixen™ Flanges & Fittings
To address the vacuum industries requirements, Alcatel offers a large range of Adixen brand accessories based on the three most popular standards used in vacuum technology: ISO-KF Flanges and Fittings; ISO-K Flanges and Fittings; and CF Flanges and Fittings. For each standard, Alcatel offers the normalized nominal diameters generally used. Moreover Alcatel offers other diameters historically used in the vacuum industry. This offer includes a large range of accessories for each standard such as elbows, tees, 4-way crosses, flexible couplings, reducers and also some special adapters from one standard to another. According to the working pressure, the tightness and the conductance required, fittings will be made with one of the appropriate standards.
Adixen™ by Alcatel Vacuum Products, Inc.
Wide Range of Vacuum Valves
Vacuubrand offers a wide range of vacuum valves including manual ball valves, diaphragm valves, right angle bellows valves and butterfly valves. Also offered are small manual and electronic air admittance and isolation valves for use in fine and rough vacuum applications. Complete specifications are available on request. Typical sizes are ISO KF NW 10, NW 16, NW25 and NW 40. The valves are manufactured in Germany of the highest quality materials, such as brass, stainless steel and aluminum, using state of the art CNC machinery. Complete specifications are available. Please call or e-mail.
BrandTech Scientific, Inc.
Contact: Corrie Harreys, Product Manager
Tel: 1- 860.767.2562 Ext. 111
Huntington Bakeable All-Metal Valves
A reliable bonnet seal even after bakeout and re-torquing, is assured with Huntington’s patented “Tri-Flange” design forAll-Metal Bakeable Valves. The Huntington “Tri-Flange” valves use malleable OFHC® copper bonnet and poppet seals that can be easily replaced. A coaxial shaft with a hand knob attached to an outer fast-advance shaft allows the user to rapidly open and close the valve actuator by hand. The hex nut attached to the fine pitch threaded inner shaft accomplishes the final sealing force with the help of a torque wrench. Ball bearings separate the shaft from the poppet bellows assembly to prevent twisting of bellows as sealing contact is achieved. The entire unit is bakeable. The sealing integrity of Huntington’s patented all-metal valves is not affected by bakeout temperatures to 450°C. When baked, the valves must be under vacuum on both sides to prevent scaling particles from dropping into the seat area. Features include: a patented tri-flange design provides high integrity bonnet seal even after bakeout; torque nut; bonnet torque flange bolts (takes all reactive forces when torqued closed); Tri-Flange design (Patented, no bonnet leak after torque down); Acme/Coaxial Shaft (fast close/high integrity seal); welded bellows; thrust-bearing supported poppet (longer cycle life) ; radiused poppet gasket (long gasket life) ; conical sealing seat (no ledges to trap contaminants); poppet seal screw (easy gasket removal); unibody design, no welds (no virtual leaks); bonnet gasket; bonnet seal flange bolts (no reactive force to cause leaks); and hand knob (fast open/close).
Right-Angle, In-Line and Straight-Through High Vacuum Isolation Valves For High Conductance
Huntington Mechanical Laboratories, Inc. manufactures vacuum valves for equipment manufacturers and research facilities. They include right-angle, in-line and straight- through high vacuum isolation valves, which are full-opening for high conduc- tance. Manual right-angle metal seal valves provide bakeable UHV isolation. Huntington offers wide size range of butterfly valves. Gate valves provide chamber and pump isolation, and like most of our valves, are available with manual or pneumatic actuators, position indicators, solenoids and other options. A complete range of sizes and flanges are available to suit all vacuum applications. Modified or custom valves are available.
Huntington Mechanical Laboratories, Inc.
Mountain View, CA
New Semiconductor Process Valve
New from Kurt J. Lesker Company is the patented Protection Vacuum Gate Valve’s fast action (<0.3 seconds to close) which reduces downtime by protecting your system in the event of a vacuum pump failure. The Protection Gate Valve is ideally suited for high particulate generating applications. This bellowssealed, pneumatically-actuated, SS valve system monitors up to four pumps with local or remote control and LCD status display. The valve’s low particle generation design shields the valve body, in open and closed positions, against particulate accumulation leading to long life under adverse process conditions. www.lesker.com
Kurt J. Lesker Company’s stainless steel right angle valves are reliable, economical, general-purpose components for HV and UHV applications that require cleanliness and corrosion resistance. These welded stainless steel bellows-sealed valves offer long-life operation (up to 1,000,000 cycles), and are available with QF, ISO, or Conflat® flanges. Standard tube ends or custom configurations are available for compati- bility with existing equipment. These high quality valves are for vacuum pressures to 1 × 10-9 Torr, and can withstand baking to 150°C. Copper bonnet seals are available on the Conflat® flanged valves for applications demanding UHV pressures, and temperatures up to 200°C. Both manual and pneumatic versions are available. www.lesker.com
Kurt J. Lesker Company’s stainless steel in-line valves are reliable, economical, general-purpose components for HV and UHV applications that require cleanliness and corrosion resistance. These welded stainless steel bellows-sealed valves offer long-life operation (up to 1,000,000 cycles), and are available with QF, ISO or Conflat® flanges. Standard tube ends or custom configurations are available for compatibility with existing equipment. These high quality valves are for vacuum pressures to 1 × 10-9 Torr, and can withstand baking to 150°C. Copper bonnet seals are available on the Conflat® flanged valves for applications demanding UHV pressures, and temperatures up to 200°C. Both manual and pneumatic versions are available. www.lesker.com
New Gate and Angle Valves
The Kurt J. Lesker Company is introducing its own Lesker-branded line of gate and angle valves. These reliable and economical general purpose valves are excellent choices for HV and UHV applications requiring cleanliness and corrosion resistance. The gate valves are available in 4” & 6” port sizes (a.k.a. 6” OD and 8” OD CF or ISO flange) mountings. They are suitable for pressure ranges from 1 × 10-8 to atm. Lesker angle valves are constructed of stainless steel and come in a variety of mountings with manual or pneumatic operation. www.lesker.com
CF, KF/ISO, and ASA Flanges, Components and Hardware
Kurt J. Lesker Company’s comprehensive vacuum component offering includes all of the common flanges and fittings you need. Strategic inventories of CF, KF/ISO, and ASA flanges, components, and hardware are available at competitive prices for same-day shipment. Our selection provides a reliable and economical source for high-end components for both HV and UHV applications. Kurt J. Lesker Company is focused on our customers’ supply chain requirements and we’ve created new tools to make doing business easier. VacuCADSM is our free downloadable drawing program with 1000s of 3D and 2D product drawings of Kurt J. Lesker Company manufactured products available. Go to the Downloads section at to register for this invaluable tool.
Kurt J. Lesker Company
Contact: Ray Pokorny
Del-Seal™ CF Metal Seal Flanges
MDC established its standing in the vacuum components world after becoming one of the first licensed manufacturers of Varian’s patented Conflat® metal-seal flange, known today to most MDC customers as the Del-Seal™ CF metal-seal flange. Del-Seal™ CF flanges are 100% Conflat® compatible metal-seal flanges suitable for the most demanding UHV applications. Del-Seal™ CF metal seal flanges are available in a wide range of sizes that can accommodate 1/8” to 14” tube diameters. For tube sizes above 14 inches and up to 24 inches in diameter, MDC wire seal flanges are recommended. MDC flanges feature: Del-Seal™ CF Metal-Seal Flange; Conflat compatible; genderless mating; rotatable and non-rotatable; tapped or clearance bolt holes; wire seal flanges used for tubes larger than 14 inches diameter; double sided flanges; reducing flanges; and hybrid adapters interconnect dissimilar flange systems. www.mdcvacuum.com
Male and Female Wire Seal Flange Set
MDC’s Wire Seal Flanges provide a convenient method of metal-sealing relatively large diameter vacuum chambers. These metal seal flanges pick up where the Del-Seal™ CF flanges leave off.
Applications include bell jars, vacuum furnaces, and a variety of other ultrahigh vacuum enclosures. All MDC Wire Seal Flanges are made of 304 ss material. To make the seal, a 0.080” cross-section diameter OFE copper wire gasket is compressed between mating male and female flanges. The geometry of the beveled sealing surface confines the flow of the crushed gasket material, causing it to fill in minor nicks and scratches in the seal area. These flanges can also be used with elastomer gaskets. Wire Seal Flange features include UHV rated to 1 × 10-13 Torr; high temperature rated to 450°C; non-rotatable geometry; dished head blank or flat blank option; OFE copper or optional Viton® elastomer gaskets; and clearance bolt holes. www.mdcvacuum.com
Kwik-Flange™ ISO KF components
MDC’s Kwik-Flange™ ISO KF components are an economical system of reusable interfacing stainless steel vacuum fittings for tube sizes ranging from 1/2” through 2” diameters. These flanges can operate in high vacuum environments to pressures in the 1 × 10-8 Torr range. The Kwik-Flange™ ISO KF flange system is ideally suited for applications requiring rapid and frequent assembly and disassembly. MDC ISO KF flanges comply with all ISO specifications for vacuum mounting hardware and are compatible with most third party ISO KF flanges and components. The Kwik-Flange™ ISO KF component features include: vacuum rated to 1 × 10- 8 Torr; bakeable to 150°C; fast connect and disconnect; economical reusable fittings; genderless geometry; rotatable bolt ring adapter; elastomer gasket seal; varied fastening methods; ISO KF and LF compatible; specialty fittings available; and Type 304 stainless steel construction. www.mdcvacuum.com
Large-Flange™ ISO LF Components
MDC’s Large-Flange™ ISO LF components are an economical system of reusable and interfacing stainless steel vacuum fittings for tube sizes ranging from 2-1/2” through 20” diameters. Large-Flange™ ISO LF flanges pick up where the Kwik-Flange™ ISO KF system leaves off. These flanges can operate in high vacuum environments to pressures in the 1 × 10-8 Torr range. The Large-Flange™ ISO LF flange system is ideally suited for applications requiring rapid and frequent assembly and disassembly. MDC ISO LF flanges comply with all ISO specifications for vacuum mounting hardware and are compatible with most third party ISO LF flanges and components. Large-Flange™ ISO LF component features include: bakeable to 150°C; fast connect and disconnect; economical reusable fittings; genderless geometry; rotatable bolt ring adapter; elastomer gasket seal; varied fastening methods; ISO KF and LF compatible; specialty fittings are available; and they have type 304 stainless steel construction. www.mdcvacuum.com
Del-Seal™ CF Fittings
MDC Del-Seal™ CF Tube Fittings are convenient “building-block” components. They offer great flexibility in the design and construction of high and ultrahigh vacuum systems. The Del-Seal™ CF fittings such as nipples, half nipples, reducer nipples, flexible nipples, elbows with 45° and 90° configurations, tees, reducer tees, crosses with four-, five- and sixway configurations, six-way cubes and multiport flange assemblies comprise the industry's largest selection of Del-Seal™ CF fitted vacuum components. If we do not have the product you seek, custom versions of most of these components can be quoted upon request. The Del-Seal™ CF Tube Fittings feature: UHV rated to 1 × 10-13 Torr; high temperature rated to 450°C; rotatable and nonrotatable geometrics; OFE copper or optional Viton® elastomer gaskets; clearance bolt holes; Conflat® compatible design; and a standard matte finish. www.mdcvacuum.com
MDC Kwik-Flange™ ISO KF and Large-Flange™ ISO LF Tube Fittings are convenient “building-block” components. They offer great flexibility in the design and construction of high vacuum systems.All fittings are fabricated from type 304 stainless steel drawn and welded vacuum tubing. Flanges do not need to be rotatable since they are completely symmetric. If desired, Rotatable Bolt RingAssemblies can be retrofitted to existing Claw-Clamp style flanges to add boltholes to ISO LF fittings.
Reducers are used for a change in size of flanges within a single method of sealing, such as elastomer sealing of ISO KF and LF flanges. Adapters are used to change from one method of sealing to another, such as elastomer seal ISO to metal seal CF. The 90º Elbows feature: high Vacuum rated to 1× 10-8 Torr; temperature rated to 200°C; symmetric, non-rotatable geometries; rotatable Bolt Rings available for LF sizes; Viton® or Buna-N® O-Rings; have a standard matte finish; and they are ISO compatible design for full range of KF and LF sizes, NW16 to NW500.
MDC Vacuum Products Corporation
Contact: Jinny Royer, Marketing/Publications Manager