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Article
Gas Handling Systems and Equipment including Components, Control, Metrology and Analyzers
Compiled by Terrence Thompson, Contributing Editor
Vacuum pumps and systems remove the ambient atmospheric so that precise gas mixtures may be introduced to meet a specific application’s requirements. Any hardware needed to transport, store, distribute, mix, regulate and monitor gas flows is a gas-handling product.
The following are representative “gas handling” products:
• Gas safety systems and cabinets/enclosures;
• Process instruments that measure/monitor/control as mixtures and flows including mass flow controllers, RGAs, flow detectors, flowmeters and manifolds;
• Sophisticated analytical systems such as mass spectrometers of all types and gas chromatography; and
• Gas cylinder hardware including leak detectors, dryers, gas filters, gas generators, manifolds, precision mixers, ionization detectors, purifiers, regulators, valves, gas vacuum feeders and vacuum gauges.
Product Descriptions
In the following product descriptions, vendors make distinctions to focus on specific intended applications so direct comparisons may be difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at www.vactechmag.com and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
ASM 310 Helium Leak Detector Is Feather Weight and Packs A Big Punch
The Adixen ASM 310 helium leak detector from Alcatel Vacuum Products is a revolutionary design that combines superior performance, small footprint, user-friendliness, long maintenance intervals, lightweight, and portability without any compromises. Proven performance that will go wherever you need it. Weighing in at 46 pounds with a very small foot print (< 140 sq inches), the ASM 310 is easily moved while in operation thanks to its unique low rotational speed hybrid turbo pump (ATH 31+). With huge compression ratios for nitrogen (10 ) and for helium (2.10 ), the ATH31+ delivers high cross over (15 mbar) as well as fast helium recovery. This is crucial when leak testing large systems and being able to locate both large and small leaks. The extremely low base pressure (< 5E-10 mbar) at the analyzer cell guarantees a very low helium background. The combination of low base pressure and the yttrium coated iridium filament technology results in a very low maintenance requirement (3 years maintenance free analyzer cell). High sensitivity (5E-12 Atm.cc/sec) and high helium stability make the ASM 310 a great maintenance tool that can be used with all different types of pumping systems, dry or wet, for any application. Due to its light weight, and universal voltage of 100 to 240 volts, 50 or 60 Hz, the ASM 310 can be easily transported and/or shipped worldwide (using the optional dedicated shipping container) without concern for shipping damage or voltage supply line issues at the destination. With its oil free and clean dry pumping system, the ASM 310 is the perfect choice for the leak test maintenance of dry systems that cannot tolerate any contamination (semicon- ductor process chambers, solar panel manufacturing process chamber, medical process chambers are just a few of numerous applications). Its bluetooth compatibility for wireless remote control and its recording graph capabilities add to its flexibility and efficiency of use. With the ASM 310, a two-person job can now be done by a single operator, speeding up the leak test process, saving time and money. Technical specifications in vacuum mode are minimum detectable helium leak 5.10-12 mbar.l/s, maximum inlet test pressure 15 mbar, helium pumping speed 1.1 l/s, and a roughing capacity 1.7 m3 /h. In sniffing mode, the minimum detectable helium leak is 1.10-7 mbar.l/s with a response time of < 1 s.
Alcatel Vacuum Products, Inc.
Adixen™ brand name
Hingham, MA
www.adixen-usa.com
Contact: JP De Luca, Director Sales,
Helium Leak Detection
Tel: 1-781-331-4200
E-mail: JP.Deluca@adixen-usa.com
Model 9000 RM Gas Analyzer Can Be Used Alone or Integrated into CEM Systems
The AMETEK Model 9000RM is a rugged single or multi-component gas analyzer housed in a single 19-inch, rack-mountable unit that can be integrated into Continuous Emission Monitor (CEM) systems or used alone for a variety of gas monitoring applications. The 9000RM can be configured to measure most gas species that absorb in the UV (examples NOx, H2S and SO2). The optional low range white cell provides longer path length for measuring lower concentrations. For example, the minimum full scale for SO2 is 25 ppm, with an accuracy of 1% of full scale. Resolution better than 0.02 nm is provided by high intensity, line source lamps. These sources emit at a fixed wavelength, providing great measurement stability, and emit low total power, removing the potential for sample photolysis. The high resolution enables unparalleled linearity over a wide dynamic range (less than 1% deviation over 4 to 5 orders of magnitude) that, in turn, leads to simple, robust data analysis. The simple and robust design of the Model 9000RM is complemented by its powerful data processing capabilities. All parameters accessible, graphing, logging, trending are available by remote and local access. The userfriendly keyboard and built in display enables programming of such variables as timing and frequency of local zero and span checks and calibration gas values. The Model 9000RM supports RS-232, Modbus/RS485 and Web Interface/ Ethernet connectivity. The Model 9000RM draws upon AMETEK’s 30+ years experience in the design and development of sophisticated process analyzers. Its modular design turns trouble-shooting and repair into simple tasks that can be performed on site in minutes by plant personnel. AMETEK Process Instruments is a unit of AMETEK, Inc., a leading global manufacturer of electronic instruments and electric motors.
AMETEK® Process Instruments
Pittsburgh, PA
www.ametekpi.com
Contact: Jim McKinley
Tel: 1-610-889-5234
E-mail: Jim.McKinley@ametek.com
4800 Series Mass Flow Controllers/Meters with Enhanced Digital Communications Capabilities
Brooks Instrument, a world-leading provider of advanced flow measurement, control, and level solutions, has added new digital communications capabilities on the 4800 Series mass flow meters and mass flow controllers. In addition to the analog and RS232 communications, customers can now choose Profibus or RS485 that is delivered in a small field installable module that mounts directly on top of the 4800 Series device. The 4800 Series with Profibus supports both DPV0 cyclic and DPV1 acyclic data communication. It has a standard 9 pin female D-connector for signal and an M5 connector for power. Baud rates from 9600 up to 12M are supported, which are automatically detected. The 4800 Series with RS485 has a physical layer with proprietary “S-Protocol” based on HART® command set. It has a standard 15 pin male D-connector for signal and power. Baud rates from 1200 to 38.4K are supported with a top accessible rotary switch for baud rate selection
Brooks Instrument
Hatfield, PA
www.BrooksInstrument.com
Contact: Jim Hollis
Tel: 1-215-362-3527
E-mail: Jim.Hollis@BrooksInstrument.com
KJLC MEMS Pirani Gauge
Kurt J. Lesker‘s new MEMS Pirani gauge offers a cost effective, yet rugged and reliable solution to vacuum measurement from  atmosphere down to 1 × 10-4 Torr. The MEMS Pirani gauge uses advanced MEMS technology and lock-in AC signal processing in its integrated electronics that results in reliable and precise measurement. Digital field calibration, any orientation mounting, and optional rear sensor port also add to the flexibility of this gauge. Visit for more information our MEMS Pirani gauge and all the vacuum gauges that we offer. The Kurt J. Lesker Company is a worldwide manufacturer and distributor of vacuum components and services. We feature outstanding customer service and technical support, competitive pricing, and fast delivery. We are a global organization with regional sales, distribution, and service locations worldwide. www.lesker.com
KJLC 354 Series Ion Gauge
Our new KJLC354 series features a dual hot filament Ionization gauge transducer with integrated electronics and a built-in display. This hot filament Bayard-Alpert Ionization gauge module is offered with a spacesaving built-in controller and display. The KJLC354 provides the basic signal conditioning required to turn the gauge into a complete measuring instrument. The built-in Controller is offered with a standard bright OLED display providing a convenient user interface for setup and operation of the vacuum gauge. The emission current can be set to automatically switch between 4 mA and 100 µA. This results in optimal and stable pressure readings over the entire measurement range from 1 × 10-9 Torr to 5 × 10-2 Torr. www.lesker.com
KJLC 392 Series Ion Gauge with Dual Convection Our new KJLC392 series features a dual hot filament Ionization gauge transducer with integrated electronics capable of operating two Convection gauges simultaneously. This hot filament Bayard-Alpert Ionization gauge module is offered with a space-saving built-in controller and display. The KJLC392 Ionization gauge module can combine the vacuum measurement with one of the Convection gauges to provide full range measurements from 1 × 10-9 Torr to atmosphere, or simply operate the Ion gauge and the two Convection gauges as individual gauges. The KJLC392 provides the basic signal conditioning required to turn the gauge into a complete measuring instrument. The builtin Controller is offered with a standard 3-channel bright OLED display providing a convenient user interface for setup and operation of the vacuum gauge. www.lesker.com
KJLC™ 902 Series
The Kurt J. Lesker Company 902 series  of pressure transducers combine the accuracy and gas independence of a Piezo transducer with TRUE Digital communications. The transducer features a unique temperature compensator allowing high accuracy over a wide measurement from 1 to 1000 Torr. The CE marked unit features RS232 or RS485 and analog outputs. An optional LED on-board display is also available. www.lesker.com
KJLC BDG Series
The Kurt J. Lesker Company Bourdon gauges are liquidfilled industrial dial gauges suitable for pressures from atmosphere down to 1 Torr. Available in 3 different pressure models –Torr, mbar, or in Hg – they feature a corrosion and impact resistant, Zytel nylon case with removable bezel for easy calibration. The large dial face measures 2-½ inches across the dial and the clear glycerin fill provides stable readability in spite of vibration. The internal “breathing diaphragm” virtually eliminates the air bubble in the mid range of the gauge for improved readability, prevents freezing, clogging and corrosion and compensates for temperature fluctuations. www.lesker.com
KJLC™ Convectron® Equivalent Series
The Kurt J. Lesker Company Convectron  Equivalent series of pressure transducers and sensors are direct “drop in” replacements for the Granville-Phillips Convectron gauges. All controllers, cables, and sensors are interchangeable PLUS they feature added benefits such as a more rugged design that is less prone to damage from mechanical shock or vibration and a faster response to pressure changes. RS232 and RS485 are standard ports on these controllers. www.lesker.com
KJLC™ DV-6M Equivalent Thermocouple Sensors
The Kurt J. Lesker Company KJL-6000 thermocouple tube is a “drop in” pin exact replacement for the Teledyne Hastings DV-6M. However, the KJL-6000 features an all-metal stainless steel body and pins that are weather and corrosion resistant. The superior internal thermocouple supports ensure a longer life. This rugged tube can withstand a drop of 6 feet without damage. The Kurt J. Lesker Company offers a 30-day money-back guarantee on this product, with no questions asked.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Aaron Bryan, Product Manager
Tel: 1-800-245-1656 or 1-412-387- 9200
E-mail: gauging@lesker.com
Ultra-High Purity Gas Delivery Systems MDC SemiSystems manufacturers complex ultra-high purity gas delivery systems. Core capabilities include UPH orbital welding, hand welding, tube bending, assembly and system integration. Gas cabinet system features and options include 1 to 4  cylinder gas cabinets; multi-gas cylinders with single controller interface; 1 to 14 stick VMB configurations; manual/automatic/ semiautomatic gas cabinets and life safety & SCADA interfaces. Interior wetted surfaces are electropolished to 10 to 15 ra; and have auto switchover; vacuum purging; powder coated 11 gauge steel enclosures; a pressure range 5 to 3000 PSI. Wetted parts are 316L stainless steel with filtration to 0.003 microns, a 4’ exhaust stack with monitoring sensor; seismic restraint standard color touch screen or two line display; quality standards include UL-508 listed controller, leak tested to 1 × 10-9 cc/sec atm, moisture, oxygen, particle, testing to the ppb level and SEMI F-15 tracer gas testing. Gas Panels may include traditional VCR, 1- 1 /8” C-seal and W-seal, and 1-½” Cseal and W-seals. Wetted parts are 316L stainless steel with filtration to 0.001 µm; interior surface is electro-polished to 10 to 15 ra; anodized or powder coated back panels; the pressure range is 5 to 3000 PSI; leak tested to 1x10-9 cc/sec atm. Also, particle, moisture, oxygen, testing to the PPB level with functional testing to customer specifications is available. Calibration for MFCs and transducers and valves are stainless steel high purity diaphragm valves are standard with optional lockout valves, pressure rated 3000 psig with compact valve clusters for purging and optional proximity switches for air operated valves. Facilities Connection Box and Adapter Plates features and options include the use of facilities connection box and adapter plates to reduce the time and cost associated with process equipment installation.
MDC SemiSystems
A division of MDC Vacuum Products LLC
San Jose, CA
www.mdcsemisystems.com
Tel: 1-866-926-3754 or 1-408-350-0244
E-mail: JRoyer@mdcvacuum.com
Alicat MCV Mass Flow Controller
The Alicat model MCV mass flow controller is designed for applications that require tight shut-off such as vacuum coating and sputtering processes. An integrated pneumatic shut-off valve is normally closed and provides positive shut-off of 1 × 10-9 atm sccm/sec Helium max. The MCV uses the same patented laminar flow differential pressure (DP) technology as all Alicat Scientific flow instruments. The result is unparalleled accuracy and response time in applications where speed and accuracy really count. The Alicat MCV will accurately control gas flow rates as low as 0.5 sccm or as high as 20 slpm with response times of 50 to 100 milliseconds. Response times that can greatly improve your end product and help eliminate target poisoning. www.alicatscientific.com
Alicat Scientific Mass Flow Controllers
Alicat Scientific Mass Flow Controllers provide a number of advantages in the Coating and Sputtering fields. Industry leading control and response times (10 ms read, 50-100 ms control times) make Alicat Mass Flow Controllers the optimal choice for reactive sputtering and applications that require fast and automated regulation of flow rates and partial pressures in vacuum chambers. In the downstream valve configuration, Alicat Mass Flow Controllers are immune to the effects of even the strongest vacuum pump, ensuring that mass flow into your chamber is accurate. Every unit is capable of switching between 20 pure gasses and 10 gas mixes on the fly, no matter what media your coating process may use; Alicat provides one of the most versatile mass flow controllers for all of your applicable gasses and projects. Alicat devices use a communications package and accessories that will make integration into your system seamless and user friendly. www.alicatscientific.com
Alicat Scientific Inc. FlowVisionSC
Users of Alicat Scientific Inc. Flow meters, Mass Flow Controllers, and Pressure equipment, have already found Alicat’s multidrop RS232 communication interface to be an easy to use and convenient method of digitally performing control, data acquisition, and graphing of flow and pressure data, with up to 26 different Alicat devices on a single serial port. Now, Alicat device users can get even more functionality out of their equipment with FlowVision SC the newest addition to Alicat’s growing line of supporting accessories that make automating and monitoring your flow and pressure applications easier and more effective. In addition to the standard functionality of the previous version of FlowVision, FlowVisionSC provides new features and improves existing features. Some features are:
• Connect to and communicate with multiple Alicat units simultaneously.
• Change Engineering Units on any measured parameters.
• Graph multiple parameters on as many devices desired.
• Automate and simplify Polling Alicat devices.
• Lock the front display to prevent user error.
• Change the selected gas calibration, control loop, and flow averaging on the fly
• Easily Tare connected Alicat devices
Alicat Scientific
Tucson, AZ
www.alicatscientific.com
Contact: Jesse Arenstein, Inside Sales Engineer
Tel: 520-290-6060
E-mail: info@alicatscientific.com
Tru-Flo® Mass Flow Verifier for In Situ Verification
The MKS Tru-Flo® Mass Flow  Verifier (MFV) is a fully integrated diagnostic instrument that provides in situ verification of mass flow controller (MFC) performance on semiconductor process tools. The Tru-Flo® MFV mass flow verifier measures a pressure rate-of-rise into a known volume at a known temperature to determine mass flow to within ±1% of reading. It consists of a small gas volume, an MKS Baratron® pressure sensor, shut off valves, and control electronics combined into a single compact package. Tru-Flo® mass flow verifier can be easily incorporated into a process tool gas panel and communicates with a tool host computer via an RS-232 interface.
MKS Instruments Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS Applications
Tel: 1-978-284-4000
E-mail: mks@mksinst.com
B-RAX 3000 Rack-Mount Vacuum Gauge Controller
InstruTech’s rack-mount vacuum gauge Controller dubbed the B-RAX 3000 is capable of operating one InstruTech Ionization gauge and two Convection gauges providing a measurement range from 1 × 10-9 Torr to atmosphere. The B-RAX vacuum gauge controller uses a different approach to traditional full range vacuum measurement practices. This results in significant cost savings for the user. The Electrometer for the Ionization gauge is built in to the InstruTech’s IGM-400 Ionization gauge module instead of the controller itself. This allows the B-RAX to be offered as a compact, low heat generating and low cost multi-gauge vacuum gauge controller. The B-RAX is offered with three independent front panel pressure measurement displays as well as three set point relays for process control. The Controller can also accept and display pressures using an alternate analog input from other types of vacuum gauges such as a capacitance diaphragm. The setup and programming is provided via a front panel setup screen and push buttons. The B-RAX is offered as a space saving half rack design, bench top or instrument panel. It can also be mounted as a full rack or dual rack using rack panels. www.instrutechinc.com
IGM-401 “Hornet” Miniature Ionization Vacuum Gauge Module
InstruTech’s miniature hot filament Ionization vacuum gauge module the IGM401, dubbed the “Hornet” is for measuring pressures from 1 × 10-9 to 5 × 10-2 Torr. The IGM401 is a rugged metal Ionization gauge with Dual Filaments. It incorporates numerous design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings do not experience temperature drift. The IGM-401 is offered with a extremely bright, crisp OLED display, one log-linear analog output, one setpoint relay and an RS485 interface. The display menu provides the user the choice to select from 16 common gases without having to apply manual correction factors. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. In addition to high vacuum measurements, a new option now available with the Hornet allows for connection of two convection vacuum gauges to the Hornet. The Hornet will operate and provide measurements from two external convection gauges without the need of another controller. www.instrutechinc.com
IGM-402 “Hornet” Miniature Ionization Vacuum Gauge with Dual Convection
InstruTech’s miniature Ionization vacuum gauge module, the IGM402 is capable of operating two convection gauges simultaneously. Dubbed the “Hornet”, the IGM-402 is the first modular Ionization gauge of its kind with an on-board Controller capable of operating two convection gauges at the same time. The IGM-402 can combine the vacuum measurement from the Ionization gauge and one of the convection gauges to provide a full range vacuum measurement from 1 × 10-9 to atmosphere, or simply operate the Ion gauge and two convection gauges as individual gauges. User has the choice to display all three measurements in one screen or auto cycle display from one gauge to the next. The IGM402 is a rugged metal Ionization gauge with Dual Filaments. It incorporates numerous design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings are not subject to temperature drift. The IGM-402 is offered with an extremely bright yellow, crisp OLED display, three log-linear analog outputs, three setpoint relays and an RS485 interface. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. The user can turn on/off the filaments, Degas and change emission current using three different modes of operation, including front panel push buttons, Digital inputs or RS-485 commands. www.instrutechinc.com
CVM211 “Stinger” Convection Vacuum Gauge Module
InstruTech’s CVM-211 series vacuum gauge module with onboard electronics/controller dubbed the “Stinger,” is based on the convection vacuum gauge principle, and measures pressures from 1000 to 10- 4 Torr. Requiring minimal installation space this miniature convection vacuum gauge module offers one of the smallest form-fit designs available in a vacuum gauge. The Stinger is powered by 11 to 30 VDC and provides a non-linear analog output as well as one process setpoint relay for controlling vacuum system pumpdown and venting. The Stinger module also includes an extremely simple user interface with a built-in 3-digit LED display, for readout of pressure, and for setup, calibration, and operation of the unit. www.instrutechinc.com
CVM-201 “Super Bee” Convection Vacuum Gauge Module
InstruTech’s CVM-201 series vacuum  gauge module with onboard electronics/controller dubbed the “Super Bee”, is based on the convection vacuum gauge principle, and measures pressures from 1000 to 10- 4 Torr. The Super Bee is powered by 11 to 30 VDC and provides standard linear, non-linear or log-linear analog outputs, as well as RS232 and RS485 interfaces. Two process setpoint relays are included for controlling vacuum system pumpdown and venting. The Super Bee module also includes a very easy and intuitive user friendly interface with a built-in 4-digit LCD display, for readout of pressure, and for setup, calibration, and operation of the unit. www.instrutechinc.com
“VGC-301” Convection Vacuum Gauge Controller
The VGC-301 vacuum gauge controller is a convenient and inexpensive readout and power supply instrument for use with InstruTech’s “Worker Bee” convection vacuum gauge. This space saving 1/8-DIN housing can be used as a bench top or mounted in a cutout in an instrument panel. The VGC-301 measures pressure pressures from 1000 to 10-4 Torr. It is powered by 12 to 30 VDC, or by its self-contained universal 100-240VAC supply. It provides a non-linear S-curve, user-scalable linear, or log-linear analog output, as well as RS232 and RS485 interfaces. Two process setpoint relays are included for controlling vacuum system pumpdown and venting. The VGC-301 module also includes a very easy and intuitive user-friendly interface with built-in 4-digit LCD display, for readout of pressure, and for setup, calibration, and operation of the unit. www.instrutechinc.com
CVG-101 “Worker Bee” Convection Vacuum Gauge
InstruTech’s CVG-101 series Convection Enhanced Pirani vacuum gauge– dubbed the “Worker Bee” is designed for measuring pressures from 1000 to 10-4 Torr. The Worker Bee gauge is also the first direct drop-in plug-compatible replacement for the Granville-Phillips Convectron® gauge. Convectron® is a registered trademark of Brooks Automation/ Granville Phillips Company. InstruTech has completely redesigned its new gauge for significantly lower cost, without sacrificing quality or performance. The internal surface area has been decreased by almost 75%, improving the response time of the gauge to lower pressures. Temperature compensation has been moved to the external environment to improve response time to temperature changes. Designed for reliability, the “Worker Bee” provides significant cost savings in total cost of ownership.
InstruTech, Inc.
Longmont, CO
www.instrutechinc.com
Tel: 1-303-651-0551
E-mail: info@instrutechinc.com
Intellisys Pressure Control
Nor-Cal Products offers unequalled performance with the Intellisys downstream pressure control system, providing measurable process benefits through higher resolution, speed and reliability. The Intellisys Adaptive Pressure Controller (APC) merges closed loop motor control with adaptive pressure control to provide advanced control system performance. An advanced adaptive algorithm eliminates pressure overshoot or gradual ramps during pressure transition. A Digital Signal Processor (DSP) enables DeviceNet™ communications protocol and programming flexibility for customer or process specific requirements. Intellisys motor control technology eliminates belts, gears and position switches, improving reliability, while increasing speed by at least a factor of twenty. High-torque geared drives are also available as an option. Standard sizes range from one to twelve inches. Substantial cost and space savings can be realized with the IQ-Series butterfly valves. All the control electronics are incorporated on to the valve motor drive, resulting in a compact size that is easy to integrate on any system. Nor-Cal Capacitance Diaphragm Gauges (CDG) feature a ceramic diaphragm designed to help stabilize output noise due to thermally induced variations found in other metal diaphragm designs. Heated, non-heated and DeviceNet compatible gauges are available with several tube fittings and in standard pressure ranges from 0.1 to 1000 Torr. Our Universal Valve Drive (UVD) easily replaces older drive technology found on other manufacturers’ pressure control valves. When used with our APC, the universal valve drive can upgrade a competitive valve to approach Intellisys performance levels.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Tel: 1-800-824-4166
E-mail: info@n-c.com
PhoeniXL 300 Helium Leak Detector
The PhoeniXL 300 Helium Leak Detector offered by Oerlikon Leybold Vacuum is a mobile helium leak detector suited for use in quality control labs, series production and service. The PhoeniXL 300 is qualified in industry and research applications where high vacuum engineering leak testing including clean-room compatibility is required. An optional sniffer probe allows for PhoeniXL 300 to be used as a sniffer leak detector. PhoeniXL 300 is available with oil-sealed or oil-free vacuum pumps. Customer may also use their existing external backing pumps. The PhoeniXL 300 is easy to handle offering reliable measurement results, quick readiness for operation, fast response time and automatic calibration. The available LCD Display shows a trend mode, bar mode, universal display, vacuum diagrams and status information. Primary features include: lowest detectable leak rate for helium is < 5 × 10–12 mbar L/Sec; ready for operation in < 3 minutes after start-up; Helium pumping speed is 2.5 liters/second; counter flow design principle extends the service life for cathodes; normal operation at 15 mbar vacuum inlet pressure; ability to detect hydrogen in addition to helium and our exclusive 36 month warranty for the ion source. The PhoeniXL 300 offers an ergonomic and compact design that is maintenance-friendly.
Oerlikon Leybold Vacuum USA, Inc.
Export, PA
www.oerlikon.com/leybold
Contact: Mike Ridenour
Tel; 1-800-764-5369
E-mail: mike.ridenour@oerlikon.com
New OmniStar™ Gas Analysis System
The Pfeiffer Vacuum OmniStar™ gas analysis system is a high performance, flexible quadrupole mass spectrometer in a compact bench top package. OmniStar is capable of simultaneously monitoring up to 128 gasses from 100% to below 10 ppb with available mass ranges of 1 to 100, 1 to 200 and 1 to 300 amu. Dual filaments are standard with the OmniStar for maximum uptime as well as a secondary electron multiplier detector for fast, low level measurements. Pressure is constantly monitored via a Pfeiffer Vacuum Full Range gauge and the filaments and detector are interlocked based on a user defined trip level. Integral bake-out and inlet heaters are included to reduce backgrounds and prevent condensation. The OmniStar allows for monitoring of gas purity at point-of-use or for accurate quantitative gas mixture measurements. Process control software is standard offering many options for interfacing to the gas handling system. In addition, it is available with protection for corrosive and explosive gas mixtures and can be used over a wide range of gas pressures with many inlet options. Powerful Quadera™ software running on the latest Windows platforms, handles the analysis, operation and data collection. Quadera features matrix-inversion routines for quantitative analysis of gas mixtures even with overlapping masses as well as a Visual Studio™ module for script creation and programming of custom user interfaces. Ethernet LAN communication allows access to multiple units with high data transfer rates over standard networks. www.pfeiffer-vacuum.com
PrismaPlus™ The RGA with Sensitivity, Stability and Intelligent Operation
PrismaPlus™ , the mass spectrometer for qualitative and quantitative gas analysis and leak detection, is based on Pfeiffer Vacuum’s proven track record in the field of mass spectrometry over the last 40 years. The combination of high sensitivity, stability and intelligent operation is the added “Plus” in the PrismaPlus mass spectrometer. The PrismaPlus delivers precise and stable results in three different mass ranges (1 to 100, 1 to 200 and 1 to 300 amu) down to a detection limit of 1×10-14 mbar. With available Faraday and electron multiplier detectors, even lowlevel contamination can be quickly identified. In addition to displaying scan data and selectable partial pressures, direct attachment of a pressure gauge enables the PrismaPlus to also accurately monitor total pressure. The Quadera® software is not only easy to operate, it also offers an easy-to-read platform for capturing and visualizing all measured data and parameter records. Together with a wide selection of interfaces such as Ethernet, digital and analog inputs and outputs, integration into any system is easily achieved. A simple click of the mouse activates the preprogrammed functions. Custom application-specific routines may be created via a Visual StudioTM macro-programming module. With the ability to select mass ranges, detectors, ion sources and interface options, this mass spectrometer can be employed in many areas, such as: industrial and analytical environments, R&D, leak detection and semi- conductor production, as well as in coating technology. The PrismaPlus is the optimum solution for applications ranging from quality assurance and residual gas analysis through to complex, quantitative tasks.
Pfeiffer Vacuum
Nashua, NH
www.pfeiffer-vacuum.com
Contact: Steve Foster, Product Manager
Tel: 1-603-578-6500
E-mail: prismaplus@pfeiffer-vacuum.com
GP100 Model Gas Purifier
The R.D. Mathis Company GP100 Inert Gas Purifier is been designed to fill the needs of research and development engineers and scientists, as well as production staff to provide a Lightweight, compact, low-cost inert gas purification system. This unit operates off of standard cylinder gas to purify inert gases to ultra-high purity and avoids the problem of cylinder walls outgassing during storage. It can be placed in operation in less than 1 hour, simply by connecting the inlet, outlet fittings and 110v AC electrical connection. The GP-100 has been shown to purify 99.8% argon gas to 99.9991% purity as part of a worst case test. The principle impurity levels at flow rates of 1/4 liter/min. (0.53 cu. ft./hr.) were measured to be H20-2 p.p.m., N2/C0-3 p.p.m., 02-2 p.p.m., Ethane-1 p.p.m., other Hydrocarbons - no detection, and CO2-1 p.p.m., with the limits of detectability set at 1 p.p.m.,* Available literature indicates that starting from a high purity gas and an all stainless steel system impurity levels as low as 10-8 p.p.m. in oxygen can be obtained. While the unit was designed primarily for argon gas, it may be used for helium, xenon, and neon. Applications for the unit include purification of gases for sputtering modules, crystal growth furnaces, and glove boxes. A paper on “The Purification of Inert Gases” by R. T. Payne, Ph.D., discussing a variety of inert gas purification techniques is available upon request.
R.D. Mathis Company
Long Beach, CA
www.rdmathis.com
Tel: 1-562-426-7049
E-mail: rlumley@rdmathis.com
Low Cost RGA
The ULVAC Qulee BGM Quadrupole mass spectrometer is your answer to cost effective leak detection, RGA and process gas monitoring in vacuum systems. It features integrated measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Torr, mbar, or Pascal of He, H2O, N2, O2, O2/N2 ratio with a mass range of 1 to 100 and 200 amu. A removable frontend electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. Qulee BGM features built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software. The minimum detectable partial pres- sure is 1 × 10-14 Torr. Optional differential pumping is available for applications that require it. www.ulvac.com
Quadrupole Mass Spectrometer
The compact ULVAC Qulee quadrupole mass  spectrometer features integrated measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Pascal, Torr or mbar of He, H2O, N2, O2, O2/N2 ratio, and a user selectable channel from mass ranges of 1 to 50 amu. A removable frontend electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. The built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software enable Qulee to be used for leak detection, RGA and process gas monitoring in PVD systems. A maximum operating pressure of 15 mTorr can eliminate the need for differential pumping, and the minimum detectable partial pressure is 1 × 10-12 Torr. www.ulvac.com
High Sensitivity RGA
Featuring the highest sensitivity and largest mass range of the series, ULVAC has introduced two new members to the Qulee family of Residual Gas Analyzers. The HGM 202 and HGM 302 units have measurable mass ranges of 1 to 200 and 1 to 300 amu respectively, with a minimum partial pressure measurement detection range of an amazing 10-15 Torr. Outstanding for use in research experiments such as thermal desorption gas analysis, the Qulee units are as easy to use as they are sensitive. One-touch operation of the measurement display and control electronics eliminates the need for a PC to operate the unit. However, the included QCS software package enables a host of additional functionality to this high end RGA, such as auto filament shut-off in the event the analyzer comes in contact with unacceptably high levels of corrosive gasses, such as HF, CL, NF2, HBR, CF3, SiH2Cl2, and others that the user is able to program. Maximum sensor operating temperature is 250°C and the HGM can be baked up to 300°C. Delivery is from stock.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@us.ulvac.com
Series 16.8 Large Pendulum Valve
VAT’s recently released Series 16.8  Large Pendulum Valve used for high vacuum isolation is available in sizes DN400 and DN500. This competitively priced valve has a small footprint, low shock actuation and is ideally suited for high vacuum pump isolation in many industries including, but not limited to: Semiconductor, FPD and Coating. Features and benefits include: compact design, low shock actuation, light weight, high cycle life, outstanding leak tightness performance, quick/easy cleaning, and three-position actuator option. Aluminum casting technology allows VAT to offer this valve at a low price and the split body design to assure short down times after cleaning. Visit VAT’s new website and find more information on this and other VAT products. www.vatvalve.com
Series 95 Isolation/Control System
VAT now offers a combined Series 61.2  butterfly control valve and Series 12.1 isolation gate valve in a single piece valve body. The singlebody design provides for excellent pressure control, vacuum isolation and serviceability. The design saves valuable system space, reduces vacuum connections and improves installation time. The series 12.1 isolation valve is slaved to the Series 61.2 butterfly valve making for easy OEM interfacing. Visit where you can download information, including technical information, CAD drawings, etc., on this and other product offerings. www.vatvalve.com
Series 29 Angle Valve with Soft-Pump Function
VAT introduces the Series 29 soft-pump angle valves based on a patented design concept that offers many advantages to the end user. The valves provide a very wide range of soft-pump flow adjustment meaning that a wide range of chamber volumes and pump speeds can be accommodated with a single valve design. Additionally, the soft-pump conductance can be very easily adjusted by simply rotating a recessed screw at the top of the actuator. The adjustment is made in small, precise and repeatable steps and a scale is provided for visual confirmation of position. A ball detent system is used whereby each step is felt and heard as a positive click making vacuum system setup very easy. By using only a very small number of parts moving inside the vacuum envelope, the particle performance of the valve is excellent. The small part count also means that servicing is very straight forward; reliability is very high and, very importantly, the cost of the product and the cost of ownership are extremely competitive.
VAT, Inc.
Woburn, MA
www.vatvalve.com
Contact: Joyce Mackiewicz, Sales & Marketing Department
Tel: 1-781-537-5410
E-mail: joycem@vatvalve.com
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Vacuum Technology & Coating