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Vacuum Component Literature
Compiled by Terrence Thompson, Contributing Editor
This Vacuum Technology & Coating product showcase covers descriptive literature on some of the many “vacuum components” used in diverse applications. In January 2009, included full-line catalogs descriptions from many key vendors.
Indeed, “components” is a very broad term in the vacuum products industry where quality and precision are expected – and provided – by world-class vendors.
Ubiquitous Applications
Vacuum components are used in thousands of manufacturing operations. Since a component is simply part of something larger, anything from fittings to vacuum pumps and systems that is an integral part of a manufacturing facility’s equipment.
Product Descriptions
When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements. Or, go to the websites listed for each manufacturer. As of press time, some 2009 literature was not available. Please contact the manufacturers for the latest versions.
Advanced Energy Pinnacle® Diamond 8, 10, and 15 kW DC Power Supply
In both process and bias applications, the Advanced Energy Pinnacle® Diamond DC  power supply provides the highest efficiency and power factor commercially available, resulting in the lowest operating and installed cost in the industry. Remarkable Pinnacle process consistency and control deliver the addi- tional benefits of significantly reduced variation and higher yields – all from one compact unit. The fieldproven Pinnacle platform provides high performance and reliability; fast, configurable arc response, resulting in low-arc damage; and numerous display/ control options. www.aei.com
Advanced Energy HFV® Variable-Frequency (~2 MHz) Generators for PVD, CVD, and Etch Applications
Advanced Energy’s HFV® series of generators  offers 2 MHz, digitally synthesized, variable frequency with output power levels of 3 kW, 5 kW, and 8 kW. The HFV, designed for 200 and 300 mm semiconductor applications, provides flexibility though digitally synthesized, variable-frequency output and microprocessor control. The output frequency range is 1.765 MHz to 2.165 MHz. Frequency tuning parameters that reside in firmware may be customized to ensure reliable operation with a wide variety of chamber configurations and process recipes. Its self-diagnostics provide an operating history and test for 14 different types of internal supply failures. www.aei.com
Advanced Energy Navigator® Digital Matching Network
The Navigator® matching network  provides advanced match technology for rapid, accurate, and reliable matching across a wide range of load impedances. Equipped with microprocessor-controlled stepper motor circuitry and digital, user-selectable tuning algorithms, the Navigator matching network minimizes reflected power by automatically tuning the complex impedance of a coupled plasma. An optional, internal Z’Scan® RF sensor provides real-time measurement and analysis of process power and impendence, enabling you to identify and significantly reduce process variability. In addition, with Advanced Energy’s optional Virtual Front Panel (VFP) software, you can monitor and command the matching network through a personal computer. www.aei.com
Advanced Energy Paramount™ RF Power-Delivery System Offers the Most Precise Control in the Industry
The Advanced Energy half-rack, 3 kW Paramount™ RF power  supply features an enhanced power and impedance measurement system that delivers exceptional power accuracy and control at 13.56 MHz fixed or variable frequencies into 50 • and non-50 • loads, beyond 3:1 VSWR. Able to keep pace – in real time – with the most abrupt plasma-impedance changes, the Paramount RF power-delivery system enables faster transitions, shorter process steps, and reduced process times for next-generation technology nodes. Its impedance measurement rivals the accuracy of a network analyzer, while optional frequency tuning tunes virtually instantaneously (i.e. msec), faster than any other product on the market. The result is truly unprecedented accuracy, repeatability, and process control.
Advanced Energy Industries, Inc.
Fort Collins, CO
www.aei.com
Tel: 1- 970.221.0108
E-mail: sales.support@aei.com
AJA International, Inc. Nautilus Series “Rotating” Magnetron Sputtering Sources
The AJA International Nautilus Series “rotating” magnetron  sputtering sources have been designed to meet the most challenging application requirements in today’s thin film deposition markets. Sleek and compact, the Nautilus Series features a gearless direct-drive design with a minimum of moving parts and almost silent operation. Features and capabilities include: Unique “open architecture” Magnet Array; Tunable uniformity and target utilization; Rugged, compact design/construction; Custom versions available; and Service friendly and virtually maintenance free for long term operation. www.ajaint.com
AJA International, Inc. Stiletto Series Magnetron Sputtering Sources
The AJA International Stiletto Series magnetron sputtering  sources have been designed to meet the most challenging needs of the HV thin film research community. Stiletto Series magnetrons are offered in 1 to 4 inches diameter as well as numerous rectangular target sizes. Features and capabilities include: Rugged HV construction; Unique Modular Magnet Array; In-situ or Manual tilt for optimum uniformity; Magnetic material sputtering/easy removal of large magnetic targets; and 0.5 to 700 mTorr operating pressure. www.ajaint.com
AJA International, Inc.’s ATC Orion Series Sputtering System: Compact, Powerful UHV Tool
AJA International, Inc.’s introduces the highly  versatile, compact, ATC ORION Series Sputtering System which inherits many design features from the popular, highly evolved ATC Series Sputtering tools and offer some unique features designed to optimize deposition uniformity. 3, 4 and 5 gun versions have been delivered with loadlocks, high temperature substrate heaters and computer control. Economical HV versions are also available. www.ajaint.com
AJA International, Inc.’s Hybrid Systems: UHV Sputtering & Evaporation AJA International  Inc. has delivered numerous multi-chamber “HYBRID” deposition systems. This dual chamber UHV system contains (4) A320-XP 2” sputter sources with in-situ tilt in the sputter chamber and (2) K cells plus (1) 4 pocket e-beam source in the evaporation chamber. Each chamber is fitted with an 850°C rotating substrate heater. A single load-lock introduces the substrate and magnetic arms transfer it between chambers.
AJA International, Inc.
N. Scituate, MA
www.ajaint.com
Contact: William Hale, President
Tel: 1-781-545-7365
E-mail: topgun@ajaint.com
Adixen Brand Maglev Hybrid Turbomolecular Pumps
The Adixen brand ATH-M series of Alcatel vacuum pumps are  magnetically levitated. There is no mechanical contact, no friction and no wear resulting in no scheduled bearing maintenance and reduced cost of ownership. The pumps are actively controlled, real time, in five axis through an automatic balancing system. Additionally, the pumps are designed for high throughput at high inlet pressure, are resistant against powder and provide a purge option to prevent deposition build-up inside the pumps. No external batteries are required for these pumps because the rotor acts as a generator in the event of a power failure. Pumps are available in pumping speeds ranging from 500 to 3200 liters/ second in heated or non-heated versions. Controller options include rack or pump mounted versions with discrete I/O, RS232/485, Profibus DP or DeviceNet communication. www.adixen-usa.com
Adixen Brand Maglev Turbomolecular Pump
The new Adixen brand Alcatel ATP2300M  vacuum pump is magnetically levitated. There is no mechanical contact, no friction and no wear resulting in no scheduled bearing maintenance and reduced cost of ownership. The pump is actively controlled, real time, in five axis through an automatic balancing system. Additionally, the pump is designed for optimal light gas efficiency with a pumping speed of 1,850 liters/second for Helium, is resistant against powder and provides a purge option to prevent deposition build-up inside the pumps. An external battery is not required for this pump because the rotor acts as a generator in the event of a power failure. Controller options include rack or pump mounted versions with discrete I/0, RS232/485, Profibus DP or DeviceNet communication. www.adixen-usa.com
Adixen Brand Turbomolecular Pumping Systems
The Adixen brand turbomolecular pumping system offering has been expanded to  provide a flexible design offering a wide range of configurations. Systems are designed for installation on a workbench or below a vacuum chamber and offer optional casters to allow for easy movement. Turbopumps are available in pumping speeds ranging from 80 to 400 liters/second; backing pumps are available wet from 5 to 21 m3/hr or dry from 15 to 40 m3/hr. Plus, numerous vacuum options such as turbopump vent valves, rotary vane pump isolation valves and integrated gauges with single or multi-channel graphing function controllers are available.
Alcatel Vacuum Products, Inc.
Hingham, MA
www.adixen-usa.com
Tel: 1-781-331-4200
E-mail: inquiry@adixen-usa.com
AMETEK Process Instruments CG1100-GS Oxygen Analyzer
The Ametek CG1100-GS catalog describes how it is used for air  separation, blanket/purge gases, welding atmospheres, food packaging, glove box applications, inert gas purity, nitrogen purity, oven/furnace and atmosphere applications. It features fast response over a Wide Operating Range over an operating range of 0.1 ppm to 100% oxygen. The easy to Integrate into Tool Controller and Data Acquisition System is equipped with an RS-232 and two RS-485 ports. It comes with configuration software for initial setup of operating parameters and accepts user-provided software for efficient integration with a host controller, or optional Dycor System 2000 software to record and process data. The mechanical Flow Meter automatically controls flow maintaining 150 sccm and a remote Calibration Unit Available. Optional System 2000 Software is available which provides enhanced interface and process monitoring with graphical user interface for Windows 95/98/2000/ NT/XP formats. A Zirconium Oxide Sensor makes certain that the system will not fail to zero oxygen reading. It is always protected, something not possible with other sensor technologies. The compact 8 x 8 x 8 inch cube houses all electronics, RS-232 port, two RS-485 ports, I/O port and analog output (4 to 20 mA) isolated.
AMETEK Process Instruments
Pittsburgh, PA
www.ametekpi.com
Tel: 1-412-826-2494
E-mail: sales.info@ametek.com
New CeramTec Micro D Connector (MIL-DTL-83513)
Micro D Connectors are rugged and lightweight hermetic  connectors designed to meet MIL-DTL-83513 specifications. Contacts are on 0.050 [1.27] centers, which provides a significant space and weight savings over other traditional Mil Spec connectors. Standard configurations include 9, 15, 25 and 51 gold-plated pin/socket contacts, which are available as a weldable unit or in a ConFlat® or ISO flange. CeramTec uses a proprietary glass-ceramic sealing process to individually seal and electrically insulate each pin from the stainless steel housing. This allows for a very high pin/lead density and the extremely robust hermetic seal. These hermetic connectors are built for the most demanding environments and offer a much higher level of durability and reliability than any glass or elastomer sealed connector. Mating air side cable assemblies with standard color coded 6-inch flying leads are offered for ease of installation. Custom PEEK thermoplastic plugs are offered for easy connectivity on the vacuum side of the connector. These PEEK plugs are fitted with gold plated 0.020 female crimp contacts, which mate to the male pins on the vacuum side of the Micro D connector and can be used with #26 through 30 AWG Kapton® wire. www2.ceramtec.com
CeramTec 40 & 50 kV Feedthroughs
The 40 & 50 kV feedthroughs with mating air side cable assemblies  offerings include a 40 kV feedthrough and a 50 kV feedthrough, which each have a 10 amp current carrying capacity. These high voltage feedthroughs offer a much smaller solution to fluted high voltage feedthrough designs and have the added safety of the air side cable assembly, which has a threaded connection. The standard offering includes weldable, ConFlat® and ISO flange mounted installation configurations. The corona resistant high voltage cable assembly, which is required to achieve the 40 or 50 kV rating, utilizes a molded silicone body and silicone insulated cable. The standard length for these cable assemblies is 8 feet but custom lengths are available. The use of silicone insulating grease is recommended for the air side cable assembly to feedthrough interface to help assure air exclusion. High voltage conditioning is also recommended for these feedthroughs. These new high voltage feedthroughs are built for use in extreme conditions. The feedthrough has a temperature capability of -269°C to 450°C and is guaranteed to be leak tight to a leak rate < 1 × 10-10 atm-cc/sec (He).
CeramTec North America
Hermetic Products Laurens, SC
www2.ceramtec.com
Tel: 1-864-682-315
E-mail: sales@ceramtec.com
InstruTech’s IGM401 Rugged Metal Ionization Gauge
InstruTech’s IGM401 is a rugged metal Ionization gauge with Dual Filaments and  measures pressure from to 1 × 10-9 to 5 ×10-2 Torr. It in- corporates numerous design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings are not subject to temperature drift. The IGM-401 is now capable of automatic switching between 4 ma and 100 µA emission current. This results in optimal and stable pressure readings over the entire measurement range from rough to high vacuum. The IGM-401 is offered with a extremely bright, crisp OLED display, one log-linear analog output, one setpoint relay and an RS485 interface. The IGM-401 is also the first direct drop-in plug-compatible replacement for the Granville-Phillips Micro-Ion® gauge. (Micro-Ion® is a registered trademark of BrooksAutomation / Granville Phillips.) www.instrutechinc.com
InstruTech’s IGM402 Is The First Modular Ionization Gauge
InstruTech’s IGM402 is the first modular Ionization  gauge of its kind with an on-board Controller capable of operating two convection gauges at the same time. The IGM-402 can combine the vacuum measurement from the Ionization gauge and one of the convection gauges to provide a full range vacuum measurement from 1 × 10-9 to atmosphere, or simply operate the Ion gauge and two convection gauges as individual gauges. User has the choice to display all three measurements in one screen or auto cycle display from one gauge to the next. The IGM-402 is offered with an extremely bright yellow, crisp OLED display, three log-linear analog outputs, three setpoint relays and an RS485 interface.
InstruTech, Inc.
Longmont, CO
www.instrutechinc.com
Contact: Laura Anderson
Tel: 1-303-651 0551 Ext. 124
E-mail: info@instrutehinc.com
Kimball Physics, Inc. Electron Sources / Ion Sources Product Guide
Kimball Physics’ Electron Guns and Ion Guns with their matching power  supplies and cables are subsystems ready to attach to a user vacuum system. The electron guns find applications in surface physics, vacuum physics, semiconductor primary columns, space physics, accelerators, charge neutralization, x-ray generation, welding, detector calibration, etc. A wide range of beam energies is available, from below 5 eV to above100 keV. Beam currents range from picoamperes to hundreds of milliamperes. Spot sizes vary from small spots to large diameter flood. A variety of cathode types are available for different applications. Ion sources come in two classes: electron impact ionization and alkali metal surface ionization. The ion guns are also used in many fields. Energies match those for electrons, while beam currents go from nanoamperes to microamperes. Highly miniaturized guns for both electrons and ions are available.
Kimball Physics, Inc.
Wilton, NH
Tel: 1-603-878-1616
E-mail: info@kimphys.com
Kurt J. Lesker Company Torus HV Round Magnetron Sputtering Cathodes Brochure
The Kurt J. Lesker Company has been manufacturing magnetron sputtering  sources for nearly three decades under the Torus® Trademark. The Torus family of high vacuum capable round magnetron sputtering sources find application in a vast array of research and production applications. The Torus® HV sources utilize simple, clamped, disk shaped targets, are RF, DC and pulsed DC compatible, and are available in balanced and unbalanced versions. They are used to sputter metallic, magnetic, and insulating targets and can be supplied with numerous options including: direct gas injection, deposition chimneys, tilt, and cluster configurations. State of the art magnet arrays allow Torus HV sources to achieve outstanding deposition rates, film uniformity and material utilization for a wide variety of materials. All Torus® HV sources are compatible with vacuum levels to as low as 3 × 10-9 torr. Torus® HV round sources are available in sizes ranging from 1” to 12” diameter and are available with numerous mounting options. www.lesker.com
Kurt J. Lesker Company Organic Materials Evaporation Sources Brochure
Kurt J. Lesker Company’s three thermal evaporation sources cover a range of  temperatures required for thin-film deposition of materials of differing volatilities. Organic or organic-metallic materials are volatile, highly temperature sensitive, and cannot be sputtered. The LTE Low Temperature Evaporation Source is ideal for depositing organic thin-films requiring precise control of source temperatures from 100EC to 600EC to achieve appropriate deposition rates. This source is available with effusion cell capacities from 1 cc to 50 cc. Sources with operating temperatures up to 1500EC are also available. www.lesker.com
Kurt J. Lesker Company Chambers & Subassemblies Brochure
The Kurt J. Lesker Company proudly offers its Components, Chambers and Sub-Assemblies  catalog for 2007. This full-color resource illustrates the capabilities of the Lesker manufacturing and assembly group. Products featured include: standard and custom chambers, sub-assemblies, hardware and components, frames, and sample handling (HV & UHV). www.lesker.com
Kurt J. Lesker Company UHV Products Brochure
Our Kurt J. Lesker Company UHV Products flyer features our  lines of: Rotary/Linear PowerProbes; SET (Sample Exchange Technique) sample transfer components; SMC Series stepper motor controllers; MagiDrive magnetically-coupled rotary feedthroughs; LSM linear shift mechanisms; MultiBase XY and MultiStage XYZ Stages; and the EpiCentre 100 heating and rotation stage. www.lesker.com
New Line of Ferro Magnetic Fluid Rotary Drives from Kurt J. Lesker Company
Kurt J. Lesker Company introduces a new line of Ferro Magnetic  Fluid Rotary Drives. The drive shaft is housed inside the stationary body and the gap between them filled with a low vapor pressure fluid containing a suspension of magnetic particles. The ferrofluid forms a series of liquid o-rings that form a vacuum-seal under the influence of magnets in the drive’s body. Such drives are used in vacuum applications requiring rotary motion, including: sample stages, barrel coaters, platens, planetaries, and roll/ web coaters. The new line includes both solid- and hollow-shaft drives with an assortment of vacuum chamber mountings: ConFlat® flanges, o-ring seal flanges, baseplate mounts, and threaded mounts. For drawings, details, and pricing visit www.lesker.com.
Kurt J. Lesker Company Branded Gate and Angle Valves
The Kurt J. Lesker Company is proud to introduce their own  Leskerbranded line of gate and angle valves. These reliable and economical general purpose valves are excellent choices for HV and UHV applications requiring cleanliness and corrosion resistance. The gate valves are available in 6" and 8" models with either CF or ISO flange mountings. They are suitable for pressure ranges from 1x10-8 to atm. Lesker angle valves are constructed of stainless steel and come in a variety of mountings with manual or pneumatic operation. Request more information at www.lesker.com.
Kurt J. Lesker Company Atomic Layer Deposition (ALD)
Kurt J. Lesker Company offers standaloneALD tools for basic  research, or completely integrated deposition systems for complex R&D applications. All tools feature high-speed ALD valves and integrated pumping, pressure measurement, and gas delivery packages optimized for any specific process.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Bill Zinn, Marketing Spec.
Tel: 1-412-387-9200
E-mail: sales@lesker.com or international@lesker.com
MDC Vacuum Products, LLC e-Vap® and Re-Vap™ E-Beam Thin Film Vacuum Coating Equipment
MDC produces state-of-the-art thin film vacuum coating  equipment, and offers a wide range of choices and options in both, standard off-the-shelf components and customize designs. MDC’s e-Vap® and Re-Vap™ product lines fully support electron beam or thermal evaporation methods. Featured products include the super economical and compact, 4 pocket, 3 kW, e-Vap® Mighty Source™ . Specifically tailored for pilot production, lab/R&D and the university marketplace, the Mighty Source™ provides the ideal deposition solution for your evaporation needs. Contact MDC now and request your free Thin Film Product line brochure.
MDC Vacuum Products, LLC
Hayward, CA
www.mdcvacuum.com
Tel: 1-510-265-3500 or toll-free 1-800-443-8817
E-mail: sales@mdcvacuum.com
HPS Single Stage and Multiple Stage Vacuum Valves and Leak Check and Specialty Valves Literature
The HPS line of single and two-stage valves includes standard, low  profile, and metal-sealed styles in angle and inline configurations. In port sizes ranging from NW 16 to NW 160 for single stage, and NW 25 to NW 100 for multiple stage, these valves reduce particle contamination and damage due to sudden pressure changes. MKS has developed compact vacuum valves for gauge isolation and leak checking. The Cv valve is ideal for isolating sensors or closing off leak check ports. The IDA valve enables in-situ calibration of MKS Baratron® manometers on a vacuum system. MKS also offers specialty safety valves. The patentedVacuum Sentry® valve protects the system in the event of power failure to the pump. The AUTO-SOFT® valve protects the vacuum system from particle contamination and prevents product damage in the event of a sudden change in the system. www.mksinst.com
MKS Stainless Steel Fittings Literature
MKS offers a wide variety of fittings and  components such as tees, crosses, elbows, tubes, flanges, end caps, reducers, and seals in standard sizes and configurations. These fittings are offered in the Series 23 Buttweld, Series 31 ISO-KF, Series 76 ISO Universal, and the Series 88 CF components. For more information, call 1-800-345-1967 or visit www.mksinst.com.
MKS Series 900 Vacuum Transducers Literature
The MKS Series 900 vacuum transducers are a complete suite of  microprocessor-based, standalone gauges, offering a wide pressure measurement range from above atmosphere to ultra high vacuum. Designed for system integration, the transducers offer both analog and digital communication (RS485 and RS232). Digital transducers allow for all adjustments and monitoring to be delivered real-time, via a host computer. The transducers incorporate MEMS (Micro Electro-Mechanical Systems) based technologies, including MicroPirani™ and piezo sensors, combined with Mini Ion BA technology resulting in a broad product offering for a wide variety of customer applications
MKS Instruments, Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS HPS Applications Engineering
Tel: 1-800-227-8766 (USA) or 1-978-284-4000 worldwide
E-mail: mks@mksinst.com
Pfeiffer Vacuum Solutions for Coating Applications
Pfeiffer Vacuum offers a comprehensive product  portfolio of components that generate, control and measure vacuum. We supply individual components as well as pumping stations that are custom-tailored to produce the optimum vacuum solution for reflection and wear protection, ophthalmics, storage media, flat panel displays, photovoltaic and glass coatings. PfeifferVacuum rotary vane, roots and turbopumps offer minimal operating costs through better performance, longer service operation and simple and reduced maintenance. The roots and rotary vane pumps are available in low maintenance, magnetically couple versions, while the turbopumps feature proven bearing design with the longest Mean Time to Failure. For more information, email: www.pfeiffer-vacuum.com
Pfeiffer SmartTest Helium Leak Detector
The Pfeiffer Vacuum SmartTest™ portable helium leak detector is  simple to operate, rugged, and offers the lowest cost of ownership in the industry. SmartTest™ utilizes a user selected backing pump to match any application and comes with vacuum and sniffer standard operating modes. SmartTest™ provides the smallest detectable leak rate for helium: 5 to 10-12 mbar l/s and the highest possible inlet pressure of 25 mbar. Combined, these enable a user to begin testing sooner after startup and to find the smallest leaks. It is designed with an integrated test leak for self-calibration, a convenient work surface and an optional industrial proof hand-held remote control. For more specific SmartTest™ information, e-mail: www.pfeiffer-vacuum.com
Pfeiffer Vacuum Solutions for Industrial Applications Brochure
Pfeiffer Vacuum offers a comprehensive product portfolio of components that  generate, control and measure vacuum. Cost-effective and reliable, these pumping packages are tailored to meet the needs of industrial applications such as: metallurgy, leak detection, electron beam welding, freeze drying, vacuum drying and general vacuum applications. Pfeiffer Vacuum rotary vane, roots and turbopumps offer minimal operating costs through better performance, longer service operation and simple and reduced maintenance. The Roots and rotary vane pumps are available in low maintenance, magnetically couple versions. For more specific industrial applications information, e-mail: www.pfeiffer-vacuum.com
Pfeiffer Vacuum Solutions for Coating Applications
Pfeiffer Vacuum offers a comprehensive product portfolio of components that  generate, control and measure vacuum. The company supplies individual components as well as pumping stations that are custom-tailored to produce the optimum vacuum solution for reflection and wear protection, ophthalmics, storage media, flat panel displays, photovoltaic and glass coatings. Pfeiffer Vacuum rotary vane, roots and turbopumps offer minimal operating costs through better performance, longer service operation and simple and reduced maintenance. The Roots and rotary vane pumps are available in low maintenance, magnetically couple versions, while the turbopumps feature proven bearing design with the longest Mean Time to Failure. For more specific coating application information, e-mail:
Pfeiffer Vacuum
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-603-578-6500
E-mail: contact@pfeiffer-vacuum.com
SEMICORE Equipment Inc. Sputtering, Evaporation and Etching Systems
Semicore Equipment Inc. specializes in new and remanufactured sputtering,  evaporation and etching systems for the high technology industries. Semicore just completed full production acceptance of our third SC 1500 ISO, In-line Cluster Tool. This system is designed to provide cluster tool performance with the flexibility of a pallet carrier system. The bulkhead mounted configuration minimizes use of expensive clean room floor space. These systems typically come with four isolated processing chambers for simultaneous processing in all stations. The SC 1500 ISO In-line deposition tool is based on our standard SC 1500 modular system. Each chamber is isolated as a stand-alone process event with multiple gases, motion control and film depositions of your layered recipe selection. PVD, CVD, evaporation, heat or etching configuration options are available for each isolated chamber. Semicore can supply a custom-built system tailored to your process specifications.
SEMICORE Equipment, Inc.
Livermore, CA
www.semicore.com
Tel: 1-925-373-8201
E-mail: sales@semicore.com
Sierra Applied Sciences Magnetron Cathode Maximizes Target Utilization
Choosing a magnetron cathode that maximizes target utilization and life can dramatically affect the  quality, performance and longevity of your products. Unlike others, Sierra Applied Sciences patented magnet design traps electrons in inner, center and outer erosion zones with magnetic field shapes that are carefully balanced for even erosion. So although competitors may claim similar performance, you can see our cathodes’ superior performance in longer target life. In addition, we use two calculations to express target utilization – one measuring target weight loss and the other measuring the percentage of weight loss versus thickness when a backing plate is present. In each case, our cathodes turn in extremely consistent performance you can rely on. Sierra cathodes optimize target utilization for a wide range of target sizes, geometries and materials.
Sierra Applied Sciences
Boulder, CO
www.sierraapplied.com
Tel: 1-303-440-0861
E-mail: info@sierraapplied.com
Telemark E-Beam Power Supplies
Telemark produces a wide range of general purpose and  production power supplies for electron beam systems. Power ranges are 3kW, 5.5kW, 8kW, 10kW 15kW and 20kW in the rugged and reliable Tetrode Tube style for maximum flexibility and field serviceability. Dual and triple source options available on the 10kW and 15kW models. Switching supplies available in 6kW and 8kW models. All supplies come with standard XY Sweep controllers with several built-in and adjustable patterns or can be upgraded to fully programmable XY sweep controllers. www.telemark.com
Telemark E-Beam Sources
Telemark has a very broad range of multi-pocket rotatable,  single pocket UHV, and linear UHV electron beam sources. Options for arc-suppression sources, reduced beam curl magnetics sources, selfsealing cover plates, large inventory sources and crucibleless sources are available on specific models. Rugged, reliable construction; designed for ease of use and maintainability; side or bottom crucible rotation drive; plug-in emitter assembly for easy filament replacement; all components are maintained in stock. www.telemark.com
Telemark Water Vapor Cryotraps
Telemark Cryogenics supplies improved water vapor cryotraps in  capacities from 1000 to 3500 watts of heat load and 50,000 to 220,000 liters per second of vapor trapping. Fully digitized for easy integration into a broad range of system masters/controllers. A wide array of user adjustable controls are standard. The cryotraps are available in single- and dual-circuit models and CE mark options. CFC-free blends comply with all international environmental standards.A small footprint and improved access/usability are standard. www.telemark.com
Telemark Moretec Magnetic Fluid Feedthroughs
Telemark offers a broad range of high quality  magnetic fluid feedthroughs from Moretec. Standard varieties include: solid or hollow shaft; flange, nut, or through hollow mounting; inert or reactive gas environment; air cooled, water cooled, clamp or clamp with water cooled; normal, cantilever, or heavy duty seal structures all with a wide variety of shaft diameters and load/torques. Modified/semi-custom and full custom feedthroughs are available as well as repair and re-work service available. The feed- throughs have competitive pricing with aggressive delivery lead times.
Telemark
Hayward, CA
www.telemark.com
Contact: Russ Schroy
Tel: 1-415-883-1004
E-mail: russ@telemark.com
ULVAC Leak Detection Made EASY
Building upon the reputation of the ULVAC’s popular  Heliot 700 series, the Heliot 710 series leak detectors have new features that make it even easier to use. With the same familiar large color touch screen interface and improved easy-to-use ATMlike menus, the Heliot 710 offers six different onboard language selections with audible voice prompts. Both Helium and Hydrogen leak detection capabilities and 5 different programmable leak test configurations help simplify leak test operations. Internal monitoring of error and alarm conditions detects problems before they can damage the instrument. Eco-friendly design is RoHS compliant, and construction makes use of recycled plastic materials. An intelligent power management function switches the forepump on and off as required during idle periods for maximum energy savings. The Heliot 710 series features a multiple valve design for the highest sensitivity – 10-12 Torr-l/s. This new leak detector is ideal for applications in the automotive, air conditioning/refrigeration, electronics, semiconductor and pharmaceutical industries. Pricing starts at under $20,000. www.ulvac.com
ULVAC Dry Vacuum Pump LR/HR Series Brochure
The ULVAC LR/HR Series of dry vacuum pumps is  designed to reduce maintenance and noise in semiconductor and flat panel display manufacturing processes. The LR series has uniformity in low temperature distribution making it ideal for the evacuation of load locks and PVD processes where reduction of exhaust time is important to throughput. The HR series has uniformity in high temperature distribution so that condensation is reduced in the pump. This permits particulates and other materials to exhaust in CVD and etching processes. These pumps are available in pumping speeds from 47 to 2048 cfm.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@ulvac.com
Vacuum Research Rotary Vane Vacuum Pumps – Components
Vacuum Research has a new catalog describing our reliable, low cost oil-sealed Rotary Vane Vacuum Pumps. These rugged two-stage pumps include all the features needed – long life with minimal maintenance. A built-in anti-suckback valve isolates the pump from the process during power interruptions, and keeps oil out of your system. Gas ballast valves are incorporated for pumping water and other vapors that normally compress to saturation during the pumping process and contaminate the oil. These well ventilated, cool running pumps minimize oil backstreaming and thermal degradation, resulting in a lower cost of operation. The positive oil feed system affords optimal pump lubrication, allowing greater tolerance for oil level changes and the use of a variety of fluids to satisfy diverse applications. The design of the pump is well known, and the pumps can be maintained by pump repair organizations around the world. The following models are featured: 3.5 cfm, 100 liters/minute, 6 m3/hour; 7 cfm, 200 liters/ minute, 12 m3/hour; 14 cfm, 400 liters/minute, 24 m3/hour; 21 cfm, 600 liters/minute, 36 m3/hour; and 28 cfm, 800 liters/minute, 48 m3/hour.
Vacuum Research Corporation
Pittsburgh, PA
www.vacuumresearch.com
Tel: 1-800-426-9340 or 1-412-261-7630
E-mail: VRC@vacuumresearch.com
XL-VAT Transfer Valve For FPD Production Systems
Series 06 XL-VAT Transfer Valve is a new product series designed  by VAT for large substrate production systems for flat panel display, solar, glass coating and other applications. The Series 06 XL-VAT Transfer Valve features modular design technology offering customers easy maintenance and a low cost of ownership. The valve features an o-ring sealed gate that can be accessed for service through a removable top cover in the body. Additional features include adjustable gate sealing force (high/low pressure); a pneumatic control unit for communication via logic interface; an o-ring sealed shaft-feedthrough actuator (optional bellows) with a pneumatic locking device. These valves can be operated up to 1 bar differential pressure on the gate in either direction and up to 1 million cycles until first service under unheated and clean conditions. The Series 06 XL-VAT Transfer Valve is available in aluminum in sizes ranging from 4” × 54” to 12” × 100”.
VAT, Inc.
Woburn, MA
www.vatvalve.com
Contact: Joyce Mackiewicz, Marketing
Tel: 1-800-935-1446
E-mail: joycem@vatvalve.com
3cm DC Ion Source
The Veeco 3cm DC (ITI) ion source is a  radiant cooled, compact, economical ion source that is ideal for smaller vacuum systems. With a high current density, a broad selection of grid sets and a purpose built power supply, this source is well suited for cleaning, etching, texturing, sputtering, or assisted deposition processes. www.Veeco.com
15cm DC Ion Source
Coupled with Veeco’s automated and integrated ion beam source  controllers, the 15cm DC ion beam source provides a wide range of stable operating conditions for medium sized substrate applications. In low voltage operation, the 15cm source is well suited for substrate pre-cleaning and assisted deposition processes. In high voltage operation, the 15cm source provides a high-energy collimated beam suitable for etching or sputter deposition.
Veeco Instruments Inc.
Woodbury, NY
Veeco.com
Contact: Fran Brennen, Senior Director of Marketing Communications
Tel: 1-516-677-0200 Ext. 1222
E-mail: fbrennen@veeco.com
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Vacuum Technology & Coating