| Vacuum Component Literature
Compiled by Terrence Thompson, Contributing Editor
This Vacuum Technology & Coating product showcase covers descriptive literature on some of the many “vacuum components” used in diverse applications. In January 2010, included full-line catalogs descriptions from many key vendors.
Indeed, “components” is a very broad term in the vacuum products industry where quality and precision are expected — and provided — by world-class vendors.
Applications Everywhere
Vacuum components are used in thousands of manufacturing operations. Since a component is simply part of something larger, anything from fittings to vacuum pumps and systems that is an integral part of a manufacturing facility’s equipment is fair game.
Product Descriptions
When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser for additional details or telephone numbers for calling to discuss your specific application requirements. Or, go to the websites listed for each manufacturer. As of press time, some 2010 literature was not available. Please contact the manufacturers for the latest versions.
Vacuum Measurement Literature
A&N Series 900 vacuum transducers encompass a complete suite of microprocessor-based, standalone gauges, offering a wide  pressure measurement range from above atmosphere to UHV. Designed for system integration, the transducers offer both analog and digital communication. Digital transducers allow for all adjustments and monitoring to be delivered real-time, via a host computer. The transducers incorporate MEMSbased technologies including MicroPirani™ and Piezo sensors, combined with Mini Ion BA technology resulting in a broad product offering for a wide variety of customer applications. The A&N Series 937A combination vacuum gauge system will operate as many as five sensors simultaneously and every controller is configured to the user's specifications. The Series 937A combines the technologies of the cold cathode, standard Pirani, convection Pirani, thermocouple and absolute Piezo sensors to measure from UHV to above atmospheric pressure. Go to and click on “Vacuum Measurement” to download the complete product details.
Vacuum Traps & Filters Literature
A&N Corporation manufactures an extensive line of vacuum traps that provide you with a solution to your  trapping requirements, including: protecting your high vacuum pump and/or chamber from pump oil “backstreaming” from the mechanical pump. They also protect mechanical pump from process gasses and vapors as well as protecting a rough vacuum pump from or reduce system pressure by eliminating water and other condensable or solvent vapors produced upstream within the vacuum system. Our trap line includes Rechargeable, Sealed, Molecular Sieve, and Cold (LN2 and dry-ice) traps. A&N also offers a line of exhaust filters to protect your environment and equipment by capturing your pump exhaust (oil mist) and process particulates. Our exhaust filter line includes our Open exhaust filters and, for controlled exhaust needs, we offer Closed and Hermetically Sealed exhaust filters. Go to www.ancorp.com and click on “Vacuum Traps and Filters” to download the complete product catalog.
A&N Corporation
Williston, FL
www.ancorp.com
Tel: 1-800-352-6431
E-mail: pdonovan@ancorp.com
Accu-Glass Products, Inc. Subminiature-D
Instrumentation Feedthrough Catalog
Accu-Glass Products, Inc.’s Subminiature-D Instrumentation Feedthroughs catalog describes available 9, 15, 25 and 50 pin configurations. Accu-Glass has a large inventory of hermeticallysealed electrical feedthroughs. Overall assembly ratings are adjusted to that of the lowest rated component. Hermetic Subminiature-D feedthroughs  are high density multipin instrumentation feedthroughs constructed with pin arrangements designed to meet MIL-C-24308 specifications for applications in instrumentation, power, coaxial and thermocouple power contact combinations. The 9, 15, 25 or 50 gold plated pins are hermetically sealed and electrically insulated in a stainless steel shell using the latest in glass-ceramic bonding technology. Ultrahigh Vacuum cable assemblies with Peek (polyetheretherketone thermoplastic) connectors and Kapton insulated ribbon cables are available to meet the rigorous demands of ultrahigh vacuum environments. Air and vacuum side connectors are fitted with captured stainless steel socket head screws that provide a means of securely locking them to their mating feedthroughs. Vacuum side cable assemblies, stand-alone connectors and other accessories are also available along with connectors, cable assemblies and custom subminiature-d multipin assemblies with up to 250 pin configurations.
Accu-Glass Products, Inc.
San Fernando, CA
www.accuglassproducts.com
Tel: 1-818-365-4215
E-mail: sales@accuglassproducts.com
AJA International, Inc.
A300-XP UHV Sputtering Sources
 The A300-XP UHV sputtering sources are next generation, “expanded performance” versions of AJA International’s A300 SERIES sputtering sources that have dominated the high end, UHV sputter gun market since 1991. The A300-XP SERIES has been designed to meet the most challenging application requirements in today’s thin film deposition markets. New “expanded performance” features/options include: UHV operation; In-situ or Manual tilt for optimum uniformity; 1 to 10 inch diameter target options; and Modular Magnet Array isolated from cooling water.
AJA International, Inc. ATC Series Sputtering Systems
ATC SERIES systems are designed to optimize the unique and extensive features of AJA International’s A300-XP, Stiletto, A3CV, Nautilus and ST-XL Series magnetron sputtering sources. These metal sealed, UHV compatible, modular systems offer an extensive array of optional components enabling end users to customize to meet their individual requirements. Features and capabilities include: 13 to 34 inch diameter chambers; Configured for up, down or horizontal sputtering; Single substrate or cassette type load lock; and Substrate holders with heating, cooling, RF bias, rotation and indexing.
AJA International, Inc.
N. Scituate, MA
www.ajaint.com
Contact: William Hale, President
Tel: 1-781-545-7365
E-mail: topgun@ajaint.com
Adixen brand ACP Series Clean, Oil-Free Vacuum Pumps
The Adixen brand ACP series clean, dry roughing vacuum pumps feature a frictionless pumping module, optimized for operation without internal lubricant. The benefits of this oil-free technology are important for applications requiring high levels of cleanliness and reliability.  Widely used in Industry, R&D as well as most demanding applications of the Semiconductor industry. Based on Multi-Roots technology, the ACP Series is the clear choice for applications where dry vacuum is a key requirement.
From the early beginning of its vacuum activity, Alcatel Vacuum Technology has been involved in the design and manufacturing of vacuum Roots Blowers with a focus on reliability, cleanliness and performance.
Adixen Brand ATP Series Turbomolecular Pumps
The Adixen brand ATP turbomolecular vacuum pump line is a well-established product known for its reliability. The ATP turbomolecular series of pumps incorporate a robust machined rotor and stator, large conductance for faster pumpdown time, grease lubricated bearings — allowing the pumps to be operated in any orientation, low rotational speed — providing increased resistance to air inrush and are field maintainable. Pumps are available in pumping speeds ranging from 80 to 900 liters/second for nitrogen, standard, corrosive and high-pressure corrosive versions.
Alcatel Vacuum Products, Inc.
Hingham, MA
www.adixen-usa.com
Tel: 1-781-331-4200
E-mail: inquiry@adixen-usa.com
Alicat Scientific’s Mass Flow Meters, Mass Flow
Controllers and Pressure Controllers
Mass flow meters, mass flow controllers and pressure controllers have been the focus of Alicat Scientific, Inc.’s business since its founding in 1991. Alicat Scientific’s mass flow meters and mass flow controllers are NIST traceable and come with an industry  first lifetime warranty. Alicat Scientific is working to fulfill its goal of helping customers build accurate and repeatable systems by providing cost effective flow and pressure solutions. Alicat’s mass flow meters and mass flow controllers are instrumental in helping customers save time and money by reducing downtime and material loss and increasing measurement precision. There are over 35,000 Alicat mass flow meter, mass flow controller, liquid flow, and pressure instruments in operation around the world. Alicat’s mass flow meters and mass flow controllers, as well as Alicat’s pressure control and pressure measurement devices, are being used in a variety of measurement and control-based processes. Companies performing automotive manufacturing, fuel cell development, environmental testing, leak detection, spray drying, tank blanketing, extra-planetary exploration, atmospheric testing, fiber optics and process gas metering benefit from Alicat’s mass flow meters, mass flow controllers and pressure measurement solutions.
Alicat Scientific, Inc.
Tucson, AZ
www.alicatscientific.com
Tel: 1-520-290-6060
E-mail: info@alicatscientific.com
AMETEK Dycor Dymaxion Residual Gas Analyzer
 The AMETEK Process Instruments Dycor Dymaxion Residual Gas Analyzer (RGA) offers the latest quadrupole technology to provide unsurpassed gas analysis monitoring, characterization, or control for your application. Dymaxion RGA's are available in a choice of ion source (open, closed, enclosed) and AMU range (1-100, 1-200, and 1-300) to accommodate your needs. Dycor System 2000 software is a 32-bit, multi-threaded program developed to take full advantage of the capabilities of Windows XP, Vista, and Windows 7 and is intended for real-time process control.
AMETEK Process Instruments
Pittsburgh, PA
www.ametekpi.com
Tel: 1-412-828-9040
E-mail: sales.info@ametek.com
Austin Scientific, an Oxford Instruments Co.
CryoPlex™ Cryogenic Vacuum Pump Systems
Austin Scientific, an Oxford Instruments company, offers complete cryogenic vacuum pump solutions with options for full regeneration management and control.  CryoPlex Cryogenic Vacuum Pumps are available in 8, 10 and 16-inch models with stan- dard flange options. The latest helium scroll technology is available in our M400 & M600 compressors, significantly increasing planned life with only standard preventative maintenance required. Complete regeneration management is available in the rack mounted M2200 Regeneration Controller providing complete cold to cold cryogenic regeneration management, independent or fully integrated to your system. In addition to our 2200 Regeneration Controller, temperature monitors with active feedback allow customers the flexibility to manage regeneration manually or integrated into the larger chamber management systems. Oxford Instruments is a global supplier of high technology tools and systems for research, industrial and semiconductor customers. Austin Scientific specializes in cryogenic vacuum and cryogenic coldheads with 25 years of experience backed by the world wide expertise of Oxford Instruments’ 60 years of delivering customer focused solutions.
Austin Scientific,
an Oxford Instruments company
www.oxford-instruments.com/austindirect
Tel: 1-512-441-6893
E-mail: cryo-sales@oxinst.com
VACUUBRAND Catalog
The VACUUBRAND catalog for 2010 includes the company’s NT oil-free pump technology, with deeper vacuum,  higher flow rates and easier service for all NT-series pumps than predecessor models. The catalog provides pump-selection assistance for lab applications including rotary evaporation, filtration, aspiration, gel drying, concentration, freeze-drying/lyophilization, and others. Also new in this catalog is VACUUBRAND’s revolutionary electronically-cooled emissions condenser, which can condense and collect exhaust vapors from vacuum applications with near-100% efficiency. As VACUUBRAND has long been a trusted provider of vacuum pumps for OEM applications, the catalog provides thorough technical specifications on each pump, including performance curves, dimensional data, and connections. These pumps are extremely quiet, with low vibration, with impressive service intervals in continuous duty, and available in 24 V DC. The new catalog also highlights the company’s leadership in vacuum monitoring and control, from self-regulating vacuum pumping systems to a full line of corrosion-resistant electronic vacuum gauges.
BrandTech Scientific, Inc.
Essex, CT
www.vacuubrand.com
Tel: 1- 860-767-2562
E-mail: linfo@vacuubrand.net
CeramTec North America Ceramaseal® Product Line
CeramTec North America’s 252-page Ceramaseal® Product Catalog, with an expanded product line, is a comprehensive catalog of hermetically sealed components. Ceramaseal® products are built to endure extreme conditions, whether it is an ultra-high vacuum (UHV) environment, temperatures ranging from cryogenic (4K) to 450°C, pressures in excess of 25,000 psig, corrosive or caustic environments, while maintaining an unsurpassed level of reliability and performance. All temperature, pressure, current, and voltage ratings are specified for every part in the NEW Ceramaseal® Product Catalog. Request yours today at www2.ceramtec.com. There are more than 200 new parts in the new catalog and are focused on connectivity. New products include a Micro D (MIL-DTL-83513) product line, an expanded Power Plug product family, high voltage feedthroughs with mating air side cable assemblies and standard high pressure (25k psi) feedthrough solutions. CeramTec pioneered the science of ceramic-to-metal sealing more than 56 years ago and today still remains the world leader in ceramic-to-metal sealing technology. With the addition of glass-ceramic sealing, CeramTec has added high-density hermetically sealed components (Micro D, Sub D & Circular Connectors) to the line up. Ceramaseal® products include feedthroughs, multipin connectors, coaxial connectors, thermocouples, isolators, viewports, and vacuum hardware. These components are ideally suited to support optical, gas, liquid, power, instrumentation, and sensing applications. All of CeramTec’s Ceramaseal® Products are guaranteed to a leak rate < 1 ×10-10 atmcc/sec (He). CeramTec's engineers can custom design a solution for your demanding application! Whether it is a CVD cluster tool or a linear accelerator R&D program, let CeramTec provide the higher-level assembly for you. A subsidiary of CeramTec AG, CeramTec NorthAmerica products are specified across a broad spectrum of applications, including electrical, electronic, structural, textile, automotive, metal cutting tools and hermetic systems.
CeramTec North America
Hermetic Products Laurens, SC
www2.ceramtec.com
Tel: 1-864-682-315
E-mail: lsales@ceramtec.com
Denton Discovery® HDG Ion Beam Deposition
and Etch Systems Brochure
Denton’s Discovery® HDG is a complete,  turnkey system that offers all the features and versatility needed for wide ranging development and production applications – a significant value compared to competitive systems. System features and benefits include turnkey process packages for: ion beam deposition & ion beam assisted deposition; high density films; environmental stability; stable deposition rates; stoichiometry control; ion beam etch and reactive ion beam etch with excellent etch uniformity. The HDG has a wide range of options; ion sources; substrate fixturing; end-point control; RGA; and process automation.
Denton Vacuum U.S.A.
Moorestown, NJ
www.dentonvacuum.com
Contact: James P. Colbridge, Sales Manager
Tel: 1-856-439-9100
E-mail: jcolbridge@dentonvacuum.com
Fil-Tech, Inc’s New Catalog
on Quartz Crystals
and Coating and Vacuum Supplies
 Fil-Tech, Inc.’s new catalog on quartz crystals and coating and vacuum supplies is now available. Fil-Tech introduces our exclusive Longer Life Gold TM, Crystals. Laboratory experiments have shown over 200% increase in crystal life with deposited magnesium fluoride on Longer Life Gold crystals. Fil-Tech’s new catalog includes crossreference information on sensor heads and feedthroughs and replacement parts for electron beam guns and ion source systems. Fil-Tech also supplies crucible liners, FT704 and FT705 and DC704 and DC705 silicone fluids, Krytox and other mechanical pump fluids, and ionization and thermocouple gauges.
Fil-Tech, Inc.
Boston, MA
www.filtech.com
Contact: Paul or Paula Becker Tel: 1-800-743-1743
E-mail: sales@filtech.com
Gencoa Rotatable Magnatrons
Gencoa TR rotatable magnetron cathodes combines robust industrially proven end-blocks with Gencoa’s low electrical impedance magnet bar designs. The TR cathodes are available in a range of different target diameters and for horizontal, vertical and cantilever mounting styles. For reactive gas systems Gencoa can integrate TR cathodes with the Speedflo gas controller for an integrated package for rate optimization and uniformity tuning.
Gencoa Ltd
Liverpool, United Kingdom
www.gencoa.com
Tel: +44 (0)151 486 4466
Goodfellow Corporation
High-Performance Polymer Materials
The Goodfellow Corporation catalog is available on CDROM. To get your free copy, send marketing@goodfellow.com an e-mail with the words “CD-ROM Catalog” in the subject line. Many high performance materials are available. Polyphenylsulphone (PPSu) has recently been added to our range of polymer materials. Available from stock in a range of rod sizes from 12.7 mm to 40 mm diameter, this material is being used in various sectors, including the manufacture of medical devices. Other sizes and forms, including sheet, are available and will be added to the catalog in time. Polyphenylsulphone (PPSu) is an amorphous, high performance thermoplastic which offers better chemical and impact resistance than either polysulphone or polyetherimide. It offers superior hydrolysis resistance when compared to other amorphous thermoplastics (measured by steam autoclaving cycles to failure). PPSu has virtually unlimited steam sterilizability, outlasting other materials by a factor of 40:1. This factor makes it an excellent choice for medical devices as steam autoclaves are widely used to sterilize these items. PPSu also resists common acids and bases including commercial washing solutions over a broad temperature range. Industrial applications include sterilization trays, dental and surgical instrument handles, hot water fittings & aircraft cabin interior components. Goodfellow supplies metals, alloys, ceramics, polymers and other materials to meet the research, development and specialist production requirements of science and industry worldwide.
Goodfellow Corporation
Oakdale, PA
www.goodfellow.com
Tel: 1-800-821-2870
E-mail: info@goodfellow.com
HORIBA Jobin Yvon LEM:
In-Situ Etch Rate Monitoring and Endpoint Detection
HORIBA Jobin Yvon’s LEM interferometer for in-situ etch rate monitoring and end point detection.  The LEM is the next step from the previous SOFIE DigiLem. With its new compact design and enhanced image quality, the LEM can be mounted on any process chamber with a direct top view of the wafer. It provides a real-time digital CCD image of the sample surface, making its laser beam positioning simple and accurate. Based on interferometry technique, the LEM provide in-situ etch/ growth rate monitoring for endpoint detection of a wide range of dry etch applications. Depending on the configuration selected, the LEM can provide a simple analog signal output for analysis with an external software, or can be delivered with our state-of-the-art APC software -SIGMA-P- for accurate etch rate, trench depth and process statistical calculations. By using simply a TTL trigger and our optional pattern recognition software, the LEM can be easily interfaced to any process chamber for an operator free process monitoring and end point detection.
HORIBA Jobin Yvon Inc.
Edison, NJ
www.horiba.com
Tel: 1-732-494-8660
E-mail: info@jobinyvon.com
L-Series Linear Motion Feedthroughs
 These Huntington feedthroughs incorporate a unique modular design which accommodates six interchangeable actuator options on either of two basic shaft/body configurations. Actuators can be easily retrofitted in the field, often without breaking vacuum. Actuator options include one motorized, one pneumatic and four manually operated versions. Body configurations include 1.33 Vac-UFlat or KF-16, or 2.75 Vac-U-Flat or KF-40 sizes. Each combination of body and actuator configuration is available in four standard stroke lengths or special lengths on request. Optional LL (long life) versions are constructed with million-cycle guaranteed bellows.
Huntington Mechanical Laboratories, Inc.
Mountain View, CA
www.huntvac.com
Tel: 1- 650-964-3323
E-mail: vacman@huntvac.com
Vacuum Measurement and Control Catalog:
 InstruTech’s catalog contains complete product descriptions, specifications, and applications for its vacuum gauging products and accessories. The catalog provides details of InstuTech’s Ionization and Convection Enhanced Pirani vacuum gauges using the latest advances in sensor and controller design. It describes a product portfolio of Convection Enhanced Piranis and Miniature Ionization vacuum gauges with a measurement range of 1 × 10-9 Torr to atmosphere. The catalog covers both stand alone vacuum gauge sensors and complete vacuum gauge modules with built-in or remote controllers with displays.
InstruTech, Inc.
Longmont, CO
www.instrutechinc.com
Contact: Laura Anderson Tel: 1-303-651 0551 Ext. 124
E-mail: info@instrutehinc.com
KDF Ci Cluster Tool Literature
After years of development and testing, KDF is proud to announce the release of its new cluster tool line, called Ci for Cluster Intelligence. The Ci tools will be offered in a four sided and eight sided package, both system types will feature Brooks Marathon series vacuum handlers. Depending on the application system will be populated as dictated by the process. The Ci is designed for a variety of niche market places including compound semiconductor, DWDM components, MEMS, MOEMS, sensors, Nanotechnology and advanced packaging production with substrate sizes up to 200 mm.  The KDF tool is a cost effective means of entering or sustaining today’s high yield high throughput requirements. With over twenty years of manufacturing and engineering expertise KDF is confident that this tool will out perform others in its class without the high cost of other OEM’s. This tool can be run with custom wafer carriers if required, or can configured from 4 to 8 inch wafers as ordered. The Ci tools offer a host of modules to populate every faucet of the central handler. The Ci S module or Sputter Module features KDF’s unique design rotating circular magnetron cathode assembly, which provides high sputter rates coupled to excellent utilization along with superior uniformity. This sputter module can also be equipped with a stepper driven rotating anode platen to achieve the ultimate in substrate uniformity. If required this platen can also be provided with another KDF exclusive, a PBN/PG back side heater element and capable of attaining temperatures up to 1000°C.
KDF Electronic & Vacuum Services
900 Series In-Line Sputtering Tool
for High Throughput Surface Acoustic Wave
Manufacturing Literature
KDF Electronic & Vacuum Services, Inc., produces batch in-line sputtering tools in a wide variety of R&D and production formats for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, flat panel display and radio frequency power devices. The 900 Series exceeds requirements for deposition of thin films in application critical devices and other applications requiring the absolute in uniformity. The 954NT is a four-target batch sputtering tool for front- and backside deposition. The tool, which is optimized for processing GaAs and other compound semiconductor applications, features a low cost of ownership, and enables high utilization and throughput.
KDF Electronic & Vacuum Services Inc.
Rockleigh, NJ
www.kdf.com
Tel: 1-201-784-5005
E-mail: sales@kdf.com
Kurt J. Lesker Company Performance
Sputtering Magnetrons Brochure
The Kurt J. Lesker Company continues to offer and has expanded its offering of Torus®  Linear Magnetron Sputtering Sources. These sources are ideally suited for high volume coating applications due to their excellent target utilization (> 40%) and high power densities (> 500 W per square inch for the direct cooled version). The Torus® Linear sources, with clamped or bonded targets, are used in production coating applications that include: flat panel display, functional and wear resistant coatings, automotive coatings, optical films, and decorative coatings. The Torus® Linear sources accept targets ranging from 2" to 12" wide up to 1" thick, and lengths from 12" to three meters. All are RF, DC, or pulsed-DC compatible. Numerous options are offered including internal or external source mounting. New is a high performance, high utilization ITO cathode.
Kurt J. Lesker Company
Organic Materials
Evaporation Sources Brochure
Kurt J. Lesker Company’s three thermal evaporation sources cover a range of temperatures required for thin-film deposition of materials of differing volatilities. Organic or or- ganic-metallic materials are volatile, highly temperature sensitive, and cannot be sputtered. The LTE Low Temperature Evaporation Source is ideal for depositing organic thin-films requiring precise control of source temperatures from 100EC to 600EC to achieve appropriate deposition rates. This source is available with effusion cell capacities from 1 cc to 50 cc. Sources with operating temperatures up to 1500EC are also available.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Bill Zinn, Marketing Spec. Tel: 1-412-387-9200
E-mail: sales@lesker.com or international@lesker.com
Leybold Optics HELIOS
Innovative Sputtering System
The Leybold Optics HELIOS sputtering tool is a flexible platform for fast, precise and fully automated thin film coatings.  Its specialty are high quality optical coatings featuring very low absorption and scattering. Excellent optical performance is ensured by the extremely dense, smooth, stoichiometric, and amorphous layers. Ultimate precision in layer growth control is facilitated by an optical monitoring system (option) for in-situ on-substrate measurements. HELIOS can be used for a wide range of optical coating applications, including edge, bandpass, color, and UV/IR cut filters as well as beam splitters and laser mirrors. Besides optical coatings, other dielectric coatings (oxides, nitrides) as well as metallic coatings can be easily produced, depending on the source configuration of the HELIOS. Applications include: precision optics; Optoelectronics; Sensors; and Telecom.
Oerlikon Leybold Vacuum USA
Export, PA
www.oerlikon.com/leybold
Contact; Mario Vitale
Tel: 1-800-764-5369
E-mail: mario.vitale@oerlikon.com
MDC Vacuum Products, LLC e-Vap®
and Re-Vap™ Evaporators
MDC produces state-of-the-art thin film vacuum coating equipment, and offers a wide range  of choices and options in both, standard off-theshelf components and customize designs. MDC’s e-Vap® and Re-Vap™ product lines fully support electron beam or thermal evaporation methods. Featured products include the super economical and compact, 4 pocket, 3 kW, e-Vap® Mighty Source™ . Specifically tailored for pilot production, lab/R&D and the university marketplace, the Mighty Source™ provides the ideal deposition solution for your evaporation needs. Contact MDC now and request your free, Thin Film Product line brochure.
Insulator Seal Catalog — Ceramic-To-Metal Vacuum
Components for Vacuum Science & Technology Literature
ISI’s latest catalog consists of 275 pages detailing an expanded line of Ceramic-to-Metal vacuum components.  Featuring UHVgrade electrical feedthroughs and optical viewports for Ceramicto-Metal seal applications, ISI provides dependable and reliable solutions for vacuum science and technology. Expanded product lines featured in this edition include Multipin, Low/high current power, Coaxial, Liquid, Thermocouple & RF Feedthroughs, Optical viewports and Vacuum breaks & envelopes. ISI is ISO 9001:2000 registered. Call 1-800-443-8817 or log on at www.insulatorseal.com to request your free literature.
MDC Vacuum Products, LLC
Hayward, CA
www.mdcvacuum.com
Contact: Jinny Royer, Marketing/Publications Manager
Tel: 1-510.265.3529 or toll-free 1-800-443-8817
E-mail: sales@mdcvacuum.com
CombiLine™ Roots Pumping Stations
Pfeiffer Vacuum CombiLine™ pumping stations are the perfect solution for applications in the  low and medium vacuum as well as in the high vacuum with a pressure range of up to 5 · 10-4 mbar. Applications include: coatings, photovoltaic, vacuum drying and degassing, metallurgy, die casting, e-beam welding, loadlocks and R&D. Depending on application, they include: Roots, rotary vane, turbopumps, dry pumps, liquid ring, cryo and diffusion pumps, measurement and analysis equipment, pumping station control systems (including PLC-based) and bus interfaces. All components are mounted on the same basic frame and connected by internal piping. Including operating fluids. Pfeiffer Vacuum has over 40 years of experience in building standard and customer-specific pumping stations and providing design, support, training and worldwide on-site service. The competitively priced CombiLine stations come with a 12-month warranty. combiline@pfeiffer-vacuum.com
OmniStar™ Bench-Top Gas Analysis
 The Pfeiffer Vacuum OmniStar™ gas analysis system offers precise monitoring of up to 128 gases with models up to 300 amu. The bench-top mass spec measures only 12" × 22", saving valuable lab space and is ten times faster than previous models allowing rapid tracking of transient events. OmniStar features Quadera® , a new and more intuitive software tool and fast Ethernet connectivity for easy network integration. With the capability of measuring from ppb to % concentrations, it’s ideally suited for many industrial and scientific applications including chemical, semiconductor, metallurgy, laser, catalysis, fuel cell and R&D. OmniStar is a turnkey integrated gas analysis system using durable, fieldproven Pfeiffer Vacuum components, assembled in the U.S. and backed by world-class service and support. E-mail: OmniStar@pfeiffer-vacuum.com
Pfeiffer Vacuum
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-603-578-6500
E-mail: contact@pfeiffer-vacuum.com
SEMICORE Equipment Inc. Sputtering,
Evaporation and Etching Systems
Semicore Equipment Inc. specializes in new and remanufactured sputtering, evaporation and etching systems for the high technology industries. Semicore just completed full production acceptance of our third SC 1500 ISO, In-line Cluster Tool. This system is designed to provide cluster tool performance with the flexibility of a pallet carrier system.  The bulkheadmounted configuration minimizes use of expensive clean room floor space. These systems typically come with four isolated processing chambers for simultaneous processing in all stations. The SC 1500 ISO In-line deposition tool is based on our standard SC 1500 modular system. Each chamber is isolated as a stand-alone process event with multiple gases, motion control and film depositions of your layered recipe selection. PVD, CVD, evaporation, heat or etching configuration options are available for each isolated chamber. Semicore can supply a custom-built system tailored to your process specifications.
SEMICORE Equipment, Inc.
Livermore, CA
www.semicore.com
Tel: 1-925-373-8201
E-mail: sales@semicore.com
Sierra Applied Sciences, Inc.
Magnetron Sputtering Technology
Sierra Applied Sciences, Inc. was founded in 1989 by our current President and CTO, Barry Manley. Today the company is the world leader for magnetron sputtering technology for all deposition applications. With our superior, and advanced designs, Inhouse customer process modeling, customization and diverse product lines, we can support and address any complex deposition applications ranging from decorative to magnetic media. We have specialized designed for the latest application for; solar photo voltaic, plastic film, ITO deposition, flat screens and touch panels, architectural glass and many more. We also offer rotatable and moving magnet configurations for applications that need the highest target utilization, film properties, and subsequent process up time. Sierra Applied’s cathodes offer the guaranteed highest target utilization available in the industry today, as well as the largest variety of cathode sizes, configuration and mounting options. We have achieved greater than 48 % target utilization by employing our patented design, US pat # 5,262,028. All these at- tributes, along with the Sierra Applied’s pre-purchase performance and best price guarantee, makes buying from us easy and risk free. Simply put, Sierra Applied Sciences is the only name for magnetron cathodes and sputtering technology!
Sierra Applied Sciences
Boulder, CO
www.sierraapplied.com
Tel: 1-303-440-0861
E-mail: info@sierraapplied.com
Marathon® CP Series Cryopumps
from SHI Cryogenics Group
 Marathon® CP Series Cryopumps from SHI Cryogenics Group are specifically designed to meet the needs of high vacuum processes, with applications ranging from custom laboratory equipment to industrial-scale tools. A variety of standard and low profile enclosures, ANSI, ISO and CF flanges, as well as manual and fully automatic features, ensure that users have modularity and flexibility when designing their systems. Models range from 8 in. (200 mm) to 20 in. (500 mm) in diameter. The optional Marathon Cryopump Controller enables fully automatic operation of the cryopump, resulting in greatly reduced downtime between production cycles, improved process times and better overall efficiency of the user’s process. They can be readily maintained without breaking vacuum or removing the cryopump from the chamber for return or replacement. As a result, serviceability maximizes production uptime and lowers the total cost of ownership. Visit us at , click on the Products tab, then Cryopumps, to download the full line of datasheets.
Sumitomo (SHI) Cryogenics of America, Inc.
Allentown, PA
www.shicryogenics.com
Tel: +1 610-791-6700
E-mail: sales@shicryogenics.com
Telemark 820 Optical Spectrum Monitor
Telemark offers the Model 820 In-Situ Spectroscopic Optical Monitor that provides full spectrum, realtime analysis and control of reflectance and transmittance during thin-film deposition. It provides Full Spectrum Analysis - Spectrometer monitors from 340-900nm to analyze the true reflectance or transmittance of the test chips being monitored; Multiple Endpoint Techniques - the Model 820 can be configured to endpoint each layer with pre-quarter wave, post-quarter wave or ‘Simulation Template Match’. The Essential Macleod thin film design and optimization software is integrated into the Model 820 software to enable template matching; Real-time Chamber Characterization - Because the Model 820 monitors the full spectrum during the deposition process, the system can identify shifts in spectrum due to various changes in material composition and chamber parameters. The spectrum data can then be used to calculate new N&K values which can update the design of the product being produced. The Model 820 can also characterize the optical constants of the films related to process steps, such as venting, spectral shifts due to temperature, and/or gas flow rates. Offline Stage (optional) - measurement of transmittance, reflectance or Color for QC of filters, prisms, or beam splitters. The 820 Plasma Diagnostics/Endpoint software also includes the capability for control and analysis of plasma processes
Telemark E-Beam Power Supplies
 Telemark produces a wide range of general purpose and production power supplies for electron beam systems. Power ranges are 3 kW, 5.5 kW, 8 kW, 10 kW 15 kW and 20 kW in the rugged and reliable Tetrode Tube style for maximum flexibility and field serviceability. Dual and triple source options available on the 10 kW and 15 kW models. Switching supplies available in 6 kW and 8 kW models. All supplies come with standard XY Sweep controllers with several builtin and adjustable patterns or can be upgraded to fully programmable XY sweep controllers.
Series III ST55 Ion Source System
for PVD Processes
 The Telemark SainTech ST55 Ion System has been specially developed to provide a cost effective solution for ionbased vacuum processes for medium to large sized deposition systems. The ST55 provides an extremely reliable and maintenance-free facility for many applications in PVD processes. The compact design and rugged construction allows easy installation to both new and existing vacuum deposition systems.
Telemark
Hayward, CA
www.telemark.com
Contact: Russ Schroy
Tel: 1-415-883-1004
E-mail: russ@telemark.com
Torr International Combination System
With Multiple Deposition Sources
Torr International’s Combination System With Multiple Deposition Sources allows users to start with one source and add on later! We will build your Thin Film Deposition System to your specifications. Many options are available. We specialize in Thin Film Deposition.  Our world class custom built systems are used in many universities and research labs across the globe. And our vacuum chambers and systems are state of the art. When you place your order, you have many options to choose from. First decide what type of system(s) you need: thermal evaporation, electron beam evaporation or magnetron sputtering. You can choose any combination of these systems. Then complete our on-line Customer Quote Survey for a price quote. Give us as many details as you can so your quote will satisfy your needs. We also sell all accessories for these systems like sputtering targets, evaporation materials, gas delivery systems, vacuum pumps and hardware, power supplies, load locks, etc. We also render services for depositing different types of materials by sputtering or EB/Thermal for evaluation, prototyping etc. We are evaluating other types of Etchers based on ECR and combination Sputtering/Etching, CVD, PECVD systems as well.
Torr International, Inc.
New Windsor, NY
www.torr.com
Tel: 1-888-622-TORR or 1-845-565-4027
E-mail: torr@torr.com
TorrLube® Specifically Formulated Lubricants
For Reducing Friction
TorrLube® is the specifically formulated lubricant for reducing friction to substantially increase the life of moving components in high vacuum applications. When applied sparingly to O-Rings and feedthroughs, TorrLube’s excellent lubricating qualities dramatically extend the integrity of vacuum to atmosphere seals, thereby improving vacuum system performance over a long period. Under high loading pressures, such as those in robots, bearings, and shafts, TorrLube’s viscosity remains higher than other lubricants, affecting superior performance over a wide range of pressures and temperatures. TorrLube shows remarkable chemical inertness. This is important because lubricants for vacuum systems used in the semiconductor industry can be exposed to a variety of chemicals. TorrLube does not interact to contaminate semiconductor devices being processed in the system with free radicals such as NA++.
The TorrLube Company, LLC
Santa Barbara, CA
www.torrlube.com
Tel: 1-805- 682-5166
E-mail: sales@torrlube.com
Vacuum Research Rotary Vane
VacuumPumps – Components
Vacuum Research has a new catalog describing our reliable, low cost oil-sealed Rotary Vane Vacuum Pumps. These rugged two-stage pumps include all the features needed – long life with minimal maintenance. A built-in anti-suckback valve isolates the pump from the process during power interruptions, and keeps oil out of your system. Gas ballast valves are incorporated for pumping water and other vapors that normally compress to saturation during the pumping process and contaminate the oil. These well- ventilated, cool running pumps minimize oil backstreaming and thermal degradation, resulting in a lower cost of operation. The positive oil feed system affords optimal pump lubrication, allowing greater tolerance for oil level changes and the use of a variety of fluids to satisfy diverse applications. The design of the pump is well known, and the pumps can be maintained by pump repair organizations around the world. The following models are featured: 3.5 cfm, 100 liters/minute, 6 m3 /hour; 7 cfm, 200 liters/ minute, 12 m3 /hour; 14 cfm, 400 liters/minute, 24 m3 /hour; 21 cfm, 600 liters/minute, 36 m3 /hour; and 28 cfm, 800 liters/minute, 48 m3 /hour.
Vacuum Research Corporation
Pittsburgh, PA
www.vacuumresearch.com
Tel: 1-800-426-9340 or 1-412-261-7630
E-mail: VRC@vacuumresearch.com
MonoVAT Roll Coater Transfer Valve
VAT provides a transfer valve solution for vacuum based thin film roll coater systems (CIGS, a-Si, CdTe, Organic cells,…) with its proven  3D MonoVAT sealing technology. The valve is placed between the front chamber, in which the feed coil is placed, and the process chamber(s). A second valve is used in the rear chamber where the take-up roll is placed. Once the web is coated the valves are closed onto the foil, the front and rear chambers are vented to atmosphere, the web cut, the coils replaced and connected with the ends of the web while maintaining vacuum and temperature in the center process chamber(s). The result is a significant improvement in system availability thereby increasing the throughput. The linear motion 3D sealing technology makes it possible to clamp and seal the web (metal or plastic) without any deformation or damages.
VAT, Inc.
Woburn, MA
www.vatvalve.com
Contact: Joyce Mackiewicz, Marketing
Tel: 1-800-935-1446
E-mail: joycem@vatvalve.com
Thin Film Products and Services
Yeagle Technology, Inc. (YTI) Thin Film Products and Services has an exceptional staff of fully trained service engineers to provide comprehensive field service.  A complete array of test equipment in each service vehicle allows us to diagnose any vacuum system or electronics problem from Air leaks to Zener failure (and everything in-between). The staff is factory trained on most vacuum equipment and support instrumentation. YTI also offers 24 /7 Emergency Service and, in most cases, can provide 24 Hr response time. YTI provides installation, preventive maintenance, or customized service contracts to meet equipment, facility, or application needs. The company builds and rebuilds new and used vacuum systems for PVD, CVD and PECVD in configurations customized to specific applications. In addition, YTI offers a variety of vacuum components including a complete line of electrical, fluid, and rotary feedthroughs. An extensive inventory of new, used and rebuilt mechanical, rotary vane and diffusion vacuum pumps are available and in stock. Also offered are power supplies, controllers, process integration components, and Intellitrol® automatic valve controllers. The company also stocks many commodity items.
YTI Thin Film Products and Services
Ashford, CT
www.ytionline.com
Tel: 1-860-429-1908
E-mail: info@ytionline.com
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Vacuum Technology & Coating