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Vacuum Component Literature
Compiled by Terrence Thompson, Contributing Editor
This Vacuum Technology & Coating product showcase covers descriptive literature on some of the many “vacuum components” used in diverse applications. In January 2009, included full-line catalogs descriptions from many key vendors.
Indeed, “components” is a very broad term in the vacuum products industry where quality and precision are expected – and provided – by world-class vendors.
Ubiquitous Applications
Vacuum components are used in thousands of manufacturing operations. Since a component is simply part of something larger, anything from fittings to vacuum pumps and systems that is an integral part of a manufacturing facility’s equipment.
Product Descriptions
When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements. Or, go to the websites listed for each manufacturer. As of press time, some 2009 literature was not available. Please contact the manufacturers for the latest versions.
Vacuum Measurement Literature
A&N Series 900 vacuum transducers encompass a complete suite of microprocessor-based, standalone gauges, offering a wide pressure measurement range from above atmosphere to UHV. Designed for system integration, the transducers offer both analog and digital communication. Digital transducers allow for all adjustments and monitoring to be delivered realtime, via a host computer. The transducers incorporate MEMS-based technologies including Micro-Pirani™ and Piezo sensors, combined with Mini Ion BA technology resulting in a broad product offering for a wide variety of customer applications. The A&N Series 937A combination vacuum gauge system will operate as many as five sensors simultaneously and every controller is configured to the user's specifications. The Series 937A combines the technologies of the cold cathode, standard Pirani, convection Pirani, thermocouple and absolute Piezo sensors to measure from UHV to above atmospheric pressure. Go to and click on “Vacuum Measurement” to download the complete product details. www.ancorp.com
Vacuum Traps & Filters Literature
A&N Corporation manufactures an extensive line of vacuum traps that provide you with a solution to your trapping requirements,  including: protecting your high vacuum pump and/or chamber from pump oil “backstreaming” from the mechanical pump. They also protect mechanical pump from process gasses and vapors as well as protecting a rough vacuum pump from or reduce system pressure by eliminating water and other condensable or solvent vapors produced upstream within the vacuum system. Our trap line includes Rechargeable, Sealed, Molecular Sieve, and Cold (LN2 and dry-ice) traps. A&N also offers a line of exhaust filters to protect your environment and equipment by capturing your pump exhaust (oil mist) and process particulates. Our exhaust filter line includes our Open exhaust filters and, for controlled exhaust needs, we offer Closed and Hermetically Sealed exhaust filters. Go to and click on “Vacuum Traps and Filters” to download the complete product catalog.
A&N Corporation
Williston, FL
www.ancorp.com
Tel: 1-800-352-6431
E-mail: pdonovan@ancorp.com
Accu-Glass Products, Inc. Subminiature-D Instrumentation Feedthrough Catalog
Accu-Glass Products, Inc.’s Subminiature-D Instrumentation Feedthroughs catalog describes available 9, 15, 25 and 50 pin configurations.  Accu-Glass has a large inventory of hermetically -sealed electrical feed-throughs. Overall assembly ratings are adjusted to that of the lowest rated component. Hermetic Subminiature-D feed-throughs are high density multipin instrumentation feedthroughs constructed with pin arrangements designed to meet MIL-C-24308 specifications for applications in instrumentation, power, coaxial and thermocouple power contact combinations. The 9, 15, 25 or 50 gold plated pins are hermetically sealed and electrically insulated in a stainless steel shell using the latest in glass-ceramic bonding technology. Ultrahigh Vacuum cable assemblies with Peek (polyetheretherketone thermoplastic) connectors and Kapton insulated ribbon cables are available to meet the rigorous demands of ultrahigh vacuum environments. Air and vacuum side connectors are fitted with captured stainless steel socket head screws that provide a means of securely locking them to their mating feedthroughs. Vacuum side cable assemblies, stand-alone connectors and other accessories are also available along with connectors, cable assemblies and custom subminiatured multipin assemblies with up to 250 pin configurations.
Accu-Glass Products, Inc.
San Fernando, CA
www.accuglassproducts.com
Tel: 1-818-365-4215
Advanced Energy® Power Systems
The Advanced Energy® Crystal® AC resonantcircuit power supply  is ideally suited for large-area glass coating, such as architectural, automotive, anti-reflective, and mirror applications. The Crystal platform is available in 60, 120, and 180 kW power levels, providing wide-range, mid-frequency sinusoidal process power for dual-magnetron sputtering. Designed specifically for use in a plasma environment, the Crystal power supply produces stable, low-arc energy and compensates for plasma variations – increasing throughput and film quality while maximizing target utilization. www.aei.com
Advanced Energy Cesar® RF Power Supplies Offer Customized Performance for Demanding Plasma Applications
The versatile Advanced Energy Cesar® platform offers  exceptionally consistent RF power-delivery performance, as well as a diverse selection of models, each with a unique set of features and capabilities (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW; with a variety of user interfaces and input options). This enables you to choose a unit suited specifically to your application – without lengthy custom-generator lead times. Standard platform packaging makes it easy and inexpensive to replace one Cesar unit with another when your power requirements change. This also minimizes training costs and simplifies design and setup for systems with multiple RF power supplies.
Advanced Energy Industries, Inc.
Fort Collins, CO
www.aei.com
Tel: 1-970.221.0108
E-mail: sales.support@aei.com
AJA International, Inc. A300-XP UHV Sputtering Sources
The A300-XP UHV sputtering sources are next  generation, “expanded performance” versions of AJA International’s A300 SERIES sputtering sources which have dominated the high end, UHV sputter gun market since 1991. The A300-XP SERIES has been designed to meet the most challenging application requirements in today’s thin film deposition markets. New “expanded performance” features/ options include: UHV operation; In-situ or Manual tilt for optimum uniformity; 1 to 10 inch diameter target options; and Modular Magnet Array isolated from cooling water. www.ajaint.com
AJA International, Inc. ATC Series Sputtering Systems
ATC SERIES systems are designed to optimize the unique and extensive features of  AJA International’s A300-XP, Stiletto, A3CV, Nautilus and ST-XL Series magnetron sputtering sources. These metal sealed, UHV compatible, modular systems offer an extensive array of optional components enabling end users to customize to meet their individual requirements. Features and capabilities include: 13 to 34 inch diameter chambers; Configured for up, down or horizontal sputtering; Single substrate or cassette type load lock; and Substrate holders with heating, cooling, RF bias, rotation and indexing.
AJA International, Inc.
N. Scituate, MA
www.ajaint.com
Contact: William Hale, President
Tel: 1-781-545-7365
E-mail: topgun@ajaint.com
Adixen brand ACP Series Clean, Oil-Free Vacuum Pumps
The Adixen brand ACP series clean, dry roughing  vacuum pumps feature a frictionless pumping module, optimized for operation without internal lubricant. The benefits of this oil-free technology are important for applications requiring high levels of cleanliness and reliability. Widely used in Industry, R&D as well as most demanding applications of the Semiconductor industry. Based on Multi-Roots technology, the ACP Series is the clear choice for applications where dry vacuum is a key requirement. www.adixen-usa.com
Adixen Brand ATP Series Turbomolecular Pumps
The Adixen brand ATP turbomolecular vacuum pump line is a  well-established product known for its reliability. The ATP turbomolecular series of pumps incorporate a robust machined rotor and stator, large conductance for faster pumpdown time, grease lubricated bearings – allowing the pumps to be operated in any orientation, low rotational speed – providing increased resistance to air inrush and are field maintainable. Pumps are available in pumping speeds ranging from 80 to 900 liters/second for nitrogen, standard, corrosive and high-pressure corrosive versions.
Alcatel Vacuum Products, Inc.
Hingham, MA
www.adixen-usa.com
Tel: 1-781-331-4200
E-mail: inquiry@adixen-usa.com
AMETEK Process Instruments Model 5100-NCM Analyzer Uses Tunable Diode Laser Absorption Spectroscopy
AMETEK Process Instruments Model 5100-NCM Analyzer is a tunable  diode laser system that directly measures water vapor concentration in natural gas. The Model 5100-NCM offers natural gas producers, pipeline operators and service companies with a highly reliable and cost-effective method for quickly and accurately measuring moisture in natural gas. The 5100-NMC has a limit of detection of 5PPMV and an operating range of 5 to 2500 PPMV. It is accurate to less than 2% of reading or ±4PPMV, whichever is greater. The laserbased analyzer features compact, fully enclosed optics and sample conditioning, on-board moisture verification, and all digital signal processing. The rugged, compact unit is available in an IP-65 and NEMA 4 enclosure with both modbus and Ethernet analog and digital connectivity.AMETEK Process Instruments – is a leader in on-line analytical instrumentation with the industry’s most extensive product line – offers analyzers based upon eleven differentiated technology platforms and used by markets ranging from oil, gas, and power to pharmaceutical manufacture and semiconductor chip manufacturing. AMETEK Process Instruments is a unit of AMETEK, Inc., a manufacturer of electronic instruments and electric motors.
AMETEK Process Instruments
Pittsburgh, PA
www.ametekpi.com
Tel: 1-412-826-2494
E-mail: sales.info@ametek.com
Austin Scientific, an Oxford Instruments Co. CryoPlex™ Cryogenic Vacuum Pump Systems
Austin Scientific, an Oxford Instruments company, offers complete  cryogenic vacuum pump solutions with options for full regeneration management and control. CryoPlex CryogenicVacuum Pumps are available in 8, 10 and 16-inch models with standard flange options. The latest helium scroll technology is available in our M400 & M600 compressors, significantly increasing planned life with only standard preventative maintenance required. Complete regeneration management is available in the rack mounted M2200 Regeneration Controller providing complete cold to cold cryogenic regeneration management, independent or fully inte- grated to your system. In addition to our 2200 Regeneration Controller, temperature monitors with active feedback allow customers the flexibility to manage regeneration manually or integrated into the larger chamber management systems. Oxford Instruments is a global supplier of high technology tools and systems for research, industrial and semiconductor customers. Austin Scientific specializes in Cryogenic Vacuum and Cryogenic Coldheads.
Austin Scientific, an Oxford Instruments Company
www.oxford-instruments.com/austindirect
Tel: 1-512-441-6893
E-mail: Todd.Komanetsky@oxinst.com
VACUUBRAND Catalog
The VACUUBRAND catalog for 2008-2009 introduces the company's  new NT oil-free pump technology, with deeper vacuum, higher flow rates and easier service for all NT-series pumps than predecessor models. The catalog provides pump-selection assistance for lab applications including rotary evaporation, filtration, aspiration, gel drying, concentration, freeze-drying/lyophilization, and others. Also new in this catalog is VACUUBRAND's revolutionary electronicallycooled emissions condenser, which can condense and collect exhaust vapors from vacuum applications with near-100% efficiency. The catalog provides thorough technical specifications on each pump, including performance curves, dimensional data, and connections. These pumps are extremely quiet, with low vibration, with impressive service intervals in continuous duty, and available in 24V DC. The new catalog also highlights vacuum monitoring and control, from self-regulating vacuum pumping systems to a full line of corrosion-resistant electronic vacuum gauges. www.vacuubrand.com
BrandTech Products
BrandTech Scientific, Inc. is the exclusive U.S. and Canadian representative for affiliated German manufacturers of high-performance laboratory products, equipment and supplies, and sells through leading laboratory dealers. The BrandTech line includes BRAND liquid handling instruments and consumables; VACUUBRAND vacuum pumps and gauges; VITLAB lab plasticware; and stainless steel support jacks from BOCHEM.
BrandTech Scientific, Inc.
Essex, CT
www.vacuubrand.com
Contact: Corrie Harreys, Product Manager
Tel: 1- 860.767.2562 Ext. 111
E-mail: charreys@brandtech.com
CeramTec North America 252-page Ceramaseal® Product Line
CeramTec North America’s 252-page Ceramaseal® Product Catalog, with an expanded product line, is the most comprehensive catalog of hermetically sealed components in the world. Ceramaseal® products are built to endure extreme conditions, whether it is an ultra-high vacuum (UHV) environment, temperatures ranging from cryogenic (4K) to 450°C, pressures in excess of 25,000 psig, corrosive or caustic environments, while maintaining an unsurpassed level of reliability and performance. All temperature, pressure, current, and voltage ratings are specified for every part in the NEW Ceramaseal® Product Catalog. There are more than 200 new parts in the new catalog and these new products are focused on connectivity, therefore most new products have mating air and/or vacuum side plugs or cable assemblies. New products include a Micro D (MIL-DTL-83513) product line, an expanded Power Plug product family, high voltage feed-throughs with mating air side cable assemblies and standard high pressure (25k psi) feedthrough solutions. CeramTec pioneered the science of ceramic-to-metal sealing more than 56 years ago. CeramTec has added high-density hermetically sealed components (Micro D, Sub D & Circular Connectors) to the line up. Ceramaseal® products include feedthroughs, multipin connectors, coaxial connectors, thermocouples, isolators, viewports, and vacuum hardware. These components are ideally suited to support optical, gas, liquid, power, instrumentation, and sensing applications. All of CeramTec's Ceramaseal® Products are guaranteed to a leak rate < 1 × 10-10 atm-cc/sec (He). CeramTec's engineers can custom design a solution for your demanding application! A subsidiary of CeramTec AG, CeramTec North America is a manufacturer and distributor of custom-engineered, hightech ceramics with headquarters in Laurens, S.C. CeramTec's ISO 9001:2000 processes create tech- nical ceramic and Ceramaseal® products and subassemblies with exceptional precision, thermal stability, performance and service life. Its products are specified across a broad spectrum of applications, including electrical, electronic, structural, textile, automotive, metal cutting tools and hermetic systems. www2.ceramtec.com
CeramTec North America Product Guide for Hermetic Electrical and Optical Components
CeramTec NorthAmerica pioneered the science of ceramic-to-metal  sealing more than 55 years ago and today still remains a leader in ceramic-to-metal sealing technology. With the addition of glass-ceramic sealing, CeramTec has added high-density hermetically sealed components (Sub D Type & Circular Connectors) to the line up. These Hermetic Products include feedthroughs, multipin connectors, coaxial connectors, thermocouples, isolators, viewports, and vacuum hardware, which can all be found in the print Product Guide or within our online catalog (). These components are ideally suited to support optical, gas, liquid, power, instrumentation, and sensing applications. Our Hermetic Product Guide is the most comprehensive catalog of hermetically sealed components in the world. CeramTec’s Hermetic Products are built to endure extreme conditions, whether it be an ultra-high vacuum (UHV) environment, temperatures ranging from cryogenic (4 K) to 450°C, pressures in excess of 25,000 psig, corrosive or caustic environments, while maintaining an unsurpassed level of reliability and performance. CeramTec’s team of engineers can custom design a solution for your demanding application.
CeramTec North America
Hermetic Products
Laurens, SC
www2.ceramtec.com
Tel: 1-864-682-315
E-mail: sales@ceramtec.com
Comdel, Inc. RF and DC Power Supplies Literature
Comdel, Inc. designs and manufactures RF and DC power supplies and  process instruments used in semiconductor vacuum and flat panel process tools, solar cell and photovoltaic systems, wafer processing, industrial heating systems, medical sterilization, optical, drying and other induction and dielectric heating applications. Products include RF generators, automatch impedance monitors, multi-channel synthesizers and electrostatic chuck power supplies that are in use worldwide by the industry’s major equipment and IC fabrication manufacturers. The full line of RF power supplies operates at frequencies from 20 kHz to 80 MHz with selected topographies up to 150 MHz. Our generators include power levels ranging from 100 to 100,000 watts. Comdel’s patented S-Technology, used in high frequency RF plasma generators, optimizes amplifier performance reducing power gain changes due to plasma impedance fluctuations. This increased stability reduces process development time and improves process repeatability. Comdel’s products are compliant with CE, Semi F47, and the ETL product safety mark. Configurations include custom packaging for high frequency, low frequency, dual frequency, DC or dual combinations of RF and DC power in one unique package. With flexible power delivery solutions, the broadest frequency ranges available, rapid prototyping, product certification and safety compliance, this Gloucester-based, ISO 9001:2000 company provides responsive support and product solutions from its offices in the US, UK, Asia, and Japan.
Comdel, Inc.
Gloucester, MA
www.comdel.com
Contact: MaryBeth Masterson, Marketing Manager
Tel: 1-978-282-0620 Ext. 102
E-mail: marybeth_masterson@comdel.com
Denton Discovery® HDG Ion Beam Deposition and Etch Systems Brochure
Denton’s Discovery® HDG is a  complete, turnkey system that offers all the features and versatility needed for wide ranging development and production applications – a significant value compared to competitive systems. System features and benefits include turnkey process packages for: ion beam deposition & ion beam assisted deposition; high density films; environmental stability; stable deposition rates; stoichiometry control; ion beam etch and reactive ion beam etch with excellent etch uniformity. The HDG has a wide range of options; ion sources; substrate fixturing; end-point control; RGA; and process automation.
Denton Vacuum U.S.A.
Moorestown, NJ
www.dentonvacuum.com
Tel: 1-856-439-9100
E-mail: info@dentonvacuum.com
Duniway Stockroom Corp. Full Line Catalog
Duniway Stockroom Corporation provides high quality  products, both new and used, at reasonable prices to the vacuum equipment market. We take pride in providing comprehensive information about our products and their applications for our customers. Our knowledgeable customer service representatives provide informed assistance to help you meet your requirements. Product Range and Availability: We have a large stock of new vacuum products and supplies, and in most cases, items are shipped the same day as ordered. Our wide access to used vacuum equipment and rebuilding services provides an additional excellent resource for low-cost solutions.
Duniway Stockroom Corp.
Mountain View, CA
Contact: Sherman Rutherford
Tel: 1-650-969-8811
E-mail: sherm.r@duniway.com
Edwards Vacuum Process Vacuum
The Edwards Process Vacuum has a comprehensive, complete range of vacuum processing  products with technical data, product dimensions and market and application information. Request your copy in print or on CD.
Edwards Vacuum
Tewksbury, MA
www.edwardsvacuum.com
Tel: 1-800-848-9800
E-mail: info@edwardsvacuum.com
Fil-Tech, Inc’s New Catalog on Quartz Crystals and Coating and Vacuum Supplies
Fil-Tech, Inc.’s new catalog on quartz crystals and coating and vacuum  supplies is now available. Fil-Tech introduces our exclusive Longer Life GoldTM , Crystals. Laboratory experiments have shown over 200% increase in crystal life with deposited magnesium fluoride on Longer Life Gold crystals. Fil-Tech’s new catalog includes cross-reference information on sensor heads and feed-throughs and replacement parts for electron beam guns and ion source systems. Fil-Tech also supplies crucible liners, FT704 and FT705 and DC704 and DC705 silicone fluids, Krytox and other mechanical pump fluids, and ionization and thermocouple gauges.
Fil-Tech, Inc.
Boston, MA
www.filtech.com
Contact: Paul or Paula Becker
Tel: 1-800-743-1743
E-mail: sales@filtech.com
Gencoa Rotatable Magnatrons
Gencoa TR rotatable magnetron cathodes combines  robust industrially proven end-blocks with Gencoa’s low electrical impedance magnet bar designs. The TR cathodes are available in a range of different target diameters and for horizontal, vertical and cantilever mounting styles. For reactive gas systems Gencoa can integrate TR cathodes with the Speedflo gas controller for an integrated package for rate optimization and uniformity tuning.
Gencoa Ltd
Liverpool, United Kingdom
www.gencoa.com
Tel: +44 (0)151 486 4466
Goodfellow Corporation High-Performance Polymer Materials
The Goodfellow Corporation catalog is available on CD-ROM. To get your free copy, send an e-mail with the words “CD-ROM Catalog” in the subject line. Many high performance materials are available. Polyphenylsulphone (PPSu) has recently been added to our range of polymer materials. Available from stock in a range of rod sizes from 12.7 mm to 40 mm diameter, this material is being used in various sectors, including the manufacture of medical devices. Other sizes and forms, including sheet, are available and will be added to the catalog in time. Polyphenylsulphone (PPSu) is an amorphous, high performance thermoplastic which offers better chemical and impact resistance than either polysulphone or polyetherimide. It offers superior hydrolysis resistance when compared to other amorphous thermoplastics (measured by steam autoclaving cycles to failure). PPSu has virtually unlimited steam sterilizability, outlasting other materials by a factor of 40:1. This factor makes it an excellent choice for medical devices as steam autoclaves are widely used to sterilize these items. PPSu also resists common acids and bases including commercial washing solutions over a broad temperature range. Industrial applications include sterilization trays, dental and surgical instrument handles, hot water fittings & aircraft cabin interior components. Goodfellow supplies metals, alloys, ceramics, polymers and other materials to meet the research, development and specialist production requirements of science and industry worldwide.
Goodfellow Corporation
Oakdale, PA
www.goodfellow.com
Tel: 1-800-821-2870
E-mail: info@goodfellow.com
Huettinger Electronics DC Power Supplies and Generators
Huettinger Electronic is a manufacturer of power supplies and  generators for a variety of plasma process, vacuum coating and induction heating applications. The Company’s products cover the frequency range from DC to 13.56 MHz with output powers up to 500kW. Of particular interest to vacuum coaters is the Company’s line of DC and medium frequency (MF) power supplies for magnetron sputtering. With outputs from 1kW to 150kW, these products are ideally suited for sputtering metals or ceramics on a wide variety of substrates in all sizes and materials. HUETTINGER power supplies are available with advanced arc management systems, ARCtelligent ™ and ARCgenius™, for superior deposition results. In many applications, these sophisticated controls allow HUETTINGER’s standard DC power supplies to be used in place of more expensive pulsed DC power supplies. HUETTINGER is introducing their Series HMP power supplies for (High Power Impulse Magnetron Sputtering (HIPIMS) applications. These products provide very high output pulses, up to 18MW, for creating high density, highly ionized plasmas. Typical applications include hard coating, plasma pre-treatment and high aspect ratio trench filling.
Huettinger Electronic, Inc.
Farmington, CT
www.huettinger.com
Tel: 1-860-255-6555
E-mail: info-us@huettinger.com
InstruTech’s New B-RAX Vacuum Gauge Controller
InstruTech’s new B-RAX vacuum gauge Controller uses a different approach to  traditional full range vacuum measurement practices. This results in significant cost savings for the user. The Electrometer for the Ionization gauge is built in to the InstruTech’s IGM-400 Ionization gauge module instead of the Controller itself. This allows the B-RAX to be offered as a compact, low heat generating and low cost multi-gauge vacuum gauge Controller. The B-RAX is offered as a space saving half rack design, bench top or instrument panel. It can be also be mounted as a full rack or dual rack using rack panels
InstruTech, Inc.
Longmont, CO
www.instrutechinc.com
Contact: Laura Anderson
Tel: 1-303-651 0551 Ext. 124
E-mail: info@instrutehinc.com
KDF Ci Cluster Tool Literature
After years of development and testing, KDF is proud to announce the  release of its new cluster tool line, called Ci for Cluster Intelligence. The Ci tools will be offered in a four sided and eight sided package, both system types will feature Brooks Marathon series vacuum handlers. Depending on the application system will be populated as dictated by the process. The Ci is designed for a variety of niche market places including compound semiconductor, DWDM components, MEMS, MOEMS, sensors, Nano- technology and advanced packaging production with substrate sizes up to 200 mm. The KDF tool is a cost effective means of entering or sustaining today’s high yield high throughput requirements. With over twenty years of manufacturing and engineering expertise KDF is confident that this tool will out perform others in its class without the high cost of other OEM’s. This tool can be run with custom wafer carriers if required, or can configured from 4 to 8 inch wafers as ordered. The Ci tools offer a host of modules to populate every faucet of the central handler. The Ci S module or Sputter Module features KDF’s unique design rotating circular magnetron cathode assembly, which provides high sputter rates coupled to excellent utilization along with superior uniformity. This sputter module can also be equipped with a stepper driven rotating anode platen to achieve the ultimate in substrate uniformity. If required this platen can also be provided with another KDF exclusive, a PBN/PG back side heater element and capable of attaining temperatures up to 1000°C. www.kdf.com
KDF Electronic & Vacuum Services 900 Series In-Line Sputtering Tool for High Throughput Surface Acoustic Wave Manufacturing Literature
KDF Electronic & Vacuum Services, Inc., produces batch in-line sputtering tools in a wide variety of R&D and production formats for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, flat panel display and radio frequency power devices. The 900 Series exceeds requirements for deposition of thin films in application critical devices and other applications requiring the absolute in uniformity. The 954NT is a four-target batch sputtering tool for front- and backside deposition. The tool, which is optimized for processing GaAs and other compound semiconductor applications, features a low cost of ownership, and enables high utilization and throughput.
KDF Electronic & Vacuum Services Inc.
Rockleigh, NJ
www.kdf.com
Tel: 1-201-784-5005
E-mail: sales@kdf.com
Kurt J. Lesker Company Performance Sputtering Magnetrons Brochure
The Kurt J. Lesker Company continues to offer and has expanded  its offering of Torus® Linear Magnetron Sputtering Sources. These sources are ideally suited for high volume coating applications due to their excellent target utilization (> 40%) and high power densities (> 500 W per square inch for the direct cooled version). The Torus® Linear sources, with clamped or bonded targets, are used in production coating applications that include: flat panel display, functional and wear resistant coatings, automotive coatings, optical films, and decorative coatings. The Torus® Linear sources accept targets ranging from 2” to 12” wide up to 1” thick, and lengths from 12” to three meters.All are RF, DC, or pulsed-DC compatible. Numerous options are offered including internal or external source mounting. New is a high performance, high utilization ITO cathode. www.lesker.com
Kurt J. Lesker Company Chambers & Subassemblies Brochure
The Kurt J. Lesker Company proudly offers its  Components, Chambers and Sub-Assemblies catalog for 2007. This fullcolor resource illustrates the capabilities of the Lesker manufacturing and assembly group. Products featured include: standard and custom chambers, sub-assemblies, hardware and components, frames, and sample handling (HV & UHV).
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Bill Zinn, Marketing Spec.
Tel: 1-412-387-9200
E-mail: sales@lesker.com or international@lesker.com
Leybold Optics HELIOS Innovative Sputtering System
The Leybold Optics HELIOS sputtering tool is a flexible platform for fast, precise and fully automated thin film coatings. Its specialty are high quality optical coatings featuring very low absorption and scattering. Excellent optical performance is ensured by the extremely dense, smooth, stoichiometric, and amorphous layers. Ultimate precision in layer growth control is facilitated by an optical monitoring system (option) for in-situ onsubstrate measurements. HELIOS can be used for a wide range of optical coating applications, including edge, bandpass, color, and UV/IR cut filters as well as beam splitters and laser mirrors. Besides optical coatings, other dielectric coatings (oxides, nitrides) as well as metallic coatings can be easily produced, depending on the source configuration of the HELIOS.Applications include: precision optics; Optoelectronics; Sensors; and Telecom.
LEYBOLD OPTICS GmbH
Alzenau, Germany
www.leyboldoptics.com
Tel.: +49 (0) 60 23-50 0-467
E-mail: info@leyboldoptics.com
MV Multi-Trap
The new MV Multi-Trap used to protect liquid ring vacuum pump  on Davis-Standard® extruder. Positive results have been obtained by installing the MV Multi-Trap on a Davis-Standard® extruder. Prior to the trap installation the Kinney liquid ring vacuum pump failed once a month due to the solvent from the ABS extruder vent. Since the Multi-Trap installation the liquid ring vacuum pump has run trouble free and been in operation for over a year. The trap can be customized to remove liquid, particulate, and heavy condensables on plastic and rubber extrusion lines. (® Davis-Standard is a registered trademark of Davis-Standard LLC.)
Mass-Vac, Inc.
North Billerica, MA
www.massvac.com
Contact: David Rolph
Tel: 1-978-667-2393
E-mail: sales@massvac.com
MDC Vacuum Products, LLC e-Vap® and Re-Vap™ Evaporators
MDC produces state-of-the-art thin film vacuum coating  equipment, and offers a wide range of choices and options in both, standard off-the-shelf components and customize designs. MDC’s e-Vap® and Re-Vap™ product lines fully support electron beam or thermal evaporation methods. Featured products include the super economical and compact, 4 pocket, 3 kW, e-Vap® Mighty Source™ . Specifically tailored for pilot production, lab/R&D and the university marketplace, the Mighty Source™ provides the ideal deposition solution for your evaporation needs. Contact MDC now and request your free, Thin Film Product line brochure. www.mdcvacuum.com
Insulator Seal Catalog-Ceramic-To-Metal Vacuum Components for Vacuum Science & Technology Literature
ISI’s latest catalog consists of 275 pages detailing an expanded line of  Ceramic-to-Metal vacuum components. Featuring UHV-grade electrical feed-throughs and optical viewports for Ceramic-to-Metal seal applications, ISI provides dependable and reliable solutions for vacuum science and technology. Expanded product lines featured in this edition include Multi-pin, Low/high current power, Coaxial, Liquid, Thermocouple & RF Feedthroughs, Optical viewports and Vacuum breaks & envelopes. ISI is ISO 9001:2000 registered. Call 1-800-443-8817 or log on at to request your FREE literature.
MDC Vacuum Products, LLC
Hayward, CA
www.mdcvacuum.com
Tel: 1-510-265-3500 or toll-free 1-800-443-8817
E-mail: sales@mdcvacuum.com
MKS Instruments, Inc. - HPS Products ISO-Universal Component Line Literature
The Vacuum Products Group of MKS Instruments has  expanded its HPS™ Series 76 line of ISO-Universal vacuum components. Drawings of all components are available for downloading from the MKS website. The HPS™ Series 76 line of ISO-Universal vacuum components range in size from 2½ to 25 inches in diameter. The flanges are sealed with symmetrical centering ring, then held together with clamps or bolts. The selection of over 275 parts are manufactured to international standard for rapid assembly, disassembly, and interchangeability. In addition to the flanges, crosses, elbows, tees, tubing and bellows are additional sizes and styles of reducers and adapters as well as flange protectors. The full line of HPS™ Series 76 components is available in *.DWG and *.DXF format on the MKS website. The drawings can speed system design using HPS™ Series 31 components.
MKS Instruments, Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS HPS Applications Engineering
Tel: 1-800-227-8766 (USA) or 1-978-284-4000 worldwide
E-mail: mks@mksinst.com
Pfeiffer Vacuum’s “The Vacuum Technology Book”
Pfeiffer Vacuum’s “TheVacuum Technology Book” is an 800-page, four-color, hardcover reference book and catalog that covers  the complete range of vacuum technology, including equipment for generating, controlling and measuring vacuum, as well as vacuum accessories and components. In addition, there is a 150-page vacuum technology reference section. For each product, the catalog contains information on the field of application, features, technical data and part numbers. The products covered include turbomolecular, rotary vane, roots and dry pumps, vacuum gauges and controllers, mass spectrometers, helium leak detectors, flanges, feedthroughs and valves. New to the catalog are a complete line of HiPace™ turbopumps, PentaLine™ rotary vane pumps, OktaLine™ roots pumps, HeptaLine™ dry screw pumps, PrismaPlus mass spectrometers, HiQuad™ high-end mass spectrometers and electromagnetically, electropneumatically and manually actuated valves. An online version of the catalog is available at www.pfeiffer-vacuum.com.
Pfeiffer Dry Turbo Pumping Station for $4950
The Pfeiffer E-Station is a complete dry vacuum pump  station. The plug-and-play vacuum station includes a turbomolecular and dry diaphragm pump and is available with 63 CF or 63 ISO flange sizes. The EStation is ideal for R&D and vacuum applications that require hydrocarbon-free vacuum. Pfeiffer Vacuum’s bench-top EStation has a high pumping speed of 60 l/s and an ultimate pressure of < 10-8 mbar. This dry vacuum unit is easy to service with a DCU that allows control and diagnostics of the pumping station. E-Station is always in stock and can be purchased usingVisa or MasterCard. For more information, e-mail:
Pfeiffer Vacuum
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-603-578-6500
E-mail: contact@pfeiffer-vacuum.com
SEMICORE Equipment SC 1500 In-line Sputtering System
Thin film coating for solar cells, hybrid circuits or any other PVD  process moves forward with our latest generation of Semicore Equipment, Inc.’s sputtering systems for 2007. Our newest software feature is pumping performance tracking. PPT allows every process run to be monitored for baseline pumping performance.Adding this new feature to the existing Excel format recipe control allows tracking of critical vacuum performance events for optimizing your scheduled maintenance. We offer everything from OEM configurations to Remanufactured PC/ PLC control systems with all of the latest technologies including On-line service and support.
SEMICORE Equipment, Inc.
Livermore, CA
www.semicore.com
Tel: 1-925-373-8201
E-mail: sales@semicore.com
Sierra Applied Sciences High-Performance Planar Magnetron Cathodes
SierraApplied Sciences leads the market in building and delivering  high-performance planar magnetron cathodes for the thin-film industry. With our cathodes and engineering support, we help customers design, develop and produce products ranging from CDs, optics, and magnetic heads to magnetic media, coatings and more - quickly and cost-effectively. You can rely on us for the most advanced solutions. Honest answers. Exceptional quality. Consistently repeatable performance and knowledgeable engineers who respond to your needs fast. www.sierraapplied.com
Sierra Applied Sciences Long-Life High-Performance Cathodes
Cathode performance is largely dictated by plasma impedance as a function of power, which is  in turn affected by size, chamber geometry and pressure. Most cathodes with magnetic field strengths similar to ours have virtually identical plasma impedance curves. Sierra Applied Science’s unique design delivers a huge advantage in process stability over the life of the target. In fact, while other cathodes may experience operating voltage drops of up to 40% as targets erode, our cathodes typically drop by just 15% to 20% – cutting losses by half or more. No other cathodes deliver performance like this. With Sierra’s magnet designs, your current film characteristics will essentially remain the same but your process will measurably improve. The simple design and inherent reliability of Sierra cathodes improve the performance and stability of deposition processes.
Sierra Applied Sciences
Boulder, CO
www.sierraapplied.com
Tel: 1-303-440-0861
E-mail: info@sierraapplied.com
Telemark 820 Optical Spectrum Monitor
Telemark’s Model 820 In-Situ Spectroscopic Optical Monitor provides full  spectrum, real-time analysis and control of reflectance and transmittance during thin-film deposition. It provides: full spectrum analysis with spectrometer monitors from 340-900 nm to analyze the true reflectance or transmittance of the test chips being monitored; and multiple endpoint techniques that can be configured to endpoint each layer with pre-quarter wave, postquarter wave or ‘Simulation Template Match’. The Essential Macleod thin film design and optimization software is integrated into the software to enable template matching; real-time chamber characterization because the 820 monitors the full spectrum during the deposition process so the system can identify shifts in spectrum due to various changes in material composition and chamber parameters. The spectrum data can then be used to calculate new N&K values that can update the design of the product being produced. The 820 can also characterize the optical constants of the films related to process steps, such as venting, spectral shifts due to temperature, and/or gas flow rates. Offline Stage (optional) is used for measurement of transmittance, reflectance or Color for QC of filters, prisms, or beam splitters. Plasma diagnostics/endpoint software also has the capability for control and analysis of plasma processes
Telemark
Hayward, CA
www.telemark.com
Contact: Russ Schroy
Tel: 1-415-883-1004
E-mail: russ@telemark.com
Torr International Combination System with Multiple Deposition Sources
Torr International’s Combination System with Multiple Deposition Sources allows  users to start with one source and add on later! We build to your specifications with many available options. Our systems are used in many universities and research labs across the globe. And our vacuum chambers and systems are state of the art. When you place your order, you have many options to choose from. First decide what type of system(s) you need: thermal evaporation, electron beam evaporation or magnetron sputtering. Choose any combination of these systems. Then complete our on-line Cus- tomer Quote Survey for a price quote. Give us as many details as you can so your quote will satisfy your needs. We sell all accessories for these systems like sputtering targets, evaporation materials, gas delivery systems, vacuum pumps and hardware, power supplies, load locks, etc. We render services of materials by sputtering or EB/Thermal for evaluation, prototyping etc. We also evaluate other types of Etchers based on ECR and combination Sputtering/Etching, CVD, PECVD systems.
Torr International, Inc.
New Windsor, NY
www.torr.com
Tel: 1-888-622-TORR or 1-845-565-4027
E-mail: torr@torr.com
ULVAC Quadrupole Mass Spectrometer
The compact ULVAC Qulee quadrupole mass spectrometer features integrated measurement  display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Pascal, Torr or mbar of He, H2O, N2, O2, O2/Nv ratio, and a user selectable channel from mass ranges of 1 to 50 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. The built-in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software enable Qulee to be used for leak detection, RGA and process gas monitoring in PVD systems. A maximum operating pressure of 15 mTorr can eliminate the need for differential pumping, and the minimum detectable partial pressure is 1 × 10-12 Torr. At prices starting at $4000 the Ulvac Qulee BGM quadrupole mass spectrometer is your answer to cost effective leak detection, RGA and process gas monitoring in vacuum systems.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@ulvac.com
Varian Turbo-V 2K-G Pump
Varian’s Turbo-V 2K-G is more than a pump. It is a dedicated pumping system,  designed specifically for the plasma process industry. It’s the first application-specific vacuum pumping solution for thin-film deposition equipment. Its pumping stages and the entire pump structure are optimized to work with very high flows of argon gas and very high temperatures. Additionally, it features built-in control electronics, an integrated vent and purge valve, and maintenance-free bearings.All of these assets make the Varian Turbo-V 2K-G the optimum pumping solution for the coating industry.
Varian Inc.
Vacuum Technologies Lexington, MA
www.varianinc.com
Tel: 1-781-861-7200 or 1-800-882-7426
E-mail: jackie.bull@varianinc.com
Vacuum Research Vacuum Gauges – Components
Vacuum Research has a new component catalog describing Diaphragm, Pirani, Thermocouple, and ConvectionVacuum Gauges. These gauges measure vacuum and pressure from 10-5 Torr to 1500 Torr or 30 inches Hg to 100 PSIG. Calibrations in other units such as mbar and Pascal are also available. The gauges include as standard such features as large digital displays, linear analog outputs, sensors of all stainless steel, and bench or panel mounting. Optional features include adjustable set points with relays for control and sensor cables up to 500 feet in length. The following products are featured: Wide Range Diaphragm Manometer: designed for CVD and other pump-out and backfill applications; 1 milliTorr to 1500 Torr with a single transducer; mbar and Pascal calibrations available; Pirani, Thermocouple And Diaphragm Gauges: 10-5 to 1500 Torr. Easy to read digital displays and linear analog output standard. High/low set points optional; Convection Gauges: 10-3 Torr to atmosphere. Linear analog outputs; and Vacuum Switches with ±2 mTorr from 1 to 2000 mTorr and ±1 Torr from 2 to 1500 Torr. www.vacuumresearch.com
Vacuum Research Vacuum Valves – Components
Vacuum Research has a new catalog describing our vacuum valves available in aluminum or  stainless steel. Gate and angle styles with port sizes from KF-16 to 900 mm; 1 inch to 36 inch.ANSI, ISO, JIS, or Conflat® flanges. Valves may be supplied with manual, pneumatic and motorized actuators. 250,000 cycles are standard, and million cycle valves are available. The following products are featured: GateValves, Stainless Steel And Aluminum From 2 to 36 inch (63 to 900 mm): ANSI, ISO, and JIS Flange. Bellows or O-Rings stem seal. Metal gasket or elastomer bonnet seal. Million cycle life; Electrically Actuated Gate Valves: No air needed. 115 or 220V, 50/60 Hz. Port sizes from 50 mm to 400 mm, 2 to 16 inch. ANSI, ISO, NW, or JIS Flanges; Angle Valves, Stainless Steel And Aluminum: NW-16 to 24 inch ANSI, ISO and JIS Flanges; Throttlemaster™ Valves: isolation and throttling in a single valve from 2 to 16 inch ANSI and 63 to 400 mm ISO; and Rectangular Port Aluminum Valves: for wafers to 300 mm and flat panel displays. Port sizes up to 6 × 24 inch (150 × 600 mm).
Vacuum Research Corporation
Pittsburgh, PA
www.vacuumresearch.com
Tel: 1-800-426-9340 or 1-412-261-7630
E-mail: VRC@vacuumresearch.com
VAT Aluminum Vacuum Valves Brochure
VAT offers its customers the most extensive line of vacuum valves manufactured  today. This brochure covers an array of aluminum vacuum valves for pump-isolation and other vacuum shut-off applications. Products include gate valves and pendulum valves found in large coating systems, etch and CVD and vacuum systems requiring extremely low particle count and low shock. VAT continues to achieve success through innovation in design engineering, sealing technology, state-of- theart manufacturing and quality process management with strict focus on valve manufacturing. This commitment and focus yields the most reliable vacuum valves in the industry today. VAT remains dedicated to bringing its customers the highest quality vacuum valves on the market today and works closely with customers to offer solutions to their valve application requirements. www.vatvalve.com
VAT Angle and Inline Valves Brochure
VAT offers the most comprehensive line of Angle and Inline Valves available  on the market today to accommodate all vacuum ranges and applications. This product line features modular design concepts for standard or integrated solutions while making customized solutions easy. VAT Angle and Inline valves are high quality, reliable and low in cost. Short delivery times and competitive pricing make VAT Angle and Inline valves a great value. VAT Angle and Inline valves are offered in sizes ranging from DN 16 to DN 160.
VAT, Inc.
Woburn, MA
www.vatvalve.com
Contact: Joyce Mackiewicz, Marketing
Tel: 1-800-935-1446
E-mail: joycem@vatvalve.com
Veeco Mark II+ Ion Source Controller
Veeco’s Mark II+ Ion Source Controller is designed  specifically to match the plasma characteristics of end hall ion sources. It's a plug and play replacement for existing power supplies and the only controller that is field proven from a leader in ion beam technology.
Veeco Instruments Inc.
Woodbury, NY
Veeco.com
Contact: Fran Brennen, Senior Director of Marketing Communications
Tel: 1-516-677-0200 Ext. 1222
E-mail: fbrennen@veeco.com
Williams Advanced Materials Inc.’s Thin Film Solar Materials
Continuing our position at the forefront of technology, Williams and its subsidiary CERAC have combined processing capabilities to offer a wide variety of custom thin film solar materials. These materials can support CIG(S), CdTe or Si based technology. Applications include coating materials for antireflective (AR) layers, transparent conductive oxides (TCO) and junction layer (p & n) layers. This wide variety includes TCO materials such as ZnO, ZnO/Al, ZnO/SnO2, Cd2SnO4, etc. Our already well known AR coating materials are suitable for thin film solar applications. That product line includes TiO2 and a high purity Ti metal for reactive deposition processes. With a long history of inorganic chemical synthesis and alloy manufacturing, rounding out the thin film solar product portfolio comes natural to a company founded to support custom material needs. Our corporate product offerings for the p/n junction include CdS, CdTe and a variety of CIG(S) alloys and intermetallic compositions.
Williams Advanced Materials, Cerac, Inc.
Milwaukee, WI
www.williams-adv.com
Tel: 1- 414-289-9800
E-mail: ceracinfo@beminc.com
Williams Advanced Materials
Buffalo NY
www.williams-adv.com
Tel: 1-716-446-2272
E-mail: ceracinfo@beminc.com
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Vacuum Technology & Coating